JP2006261596A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2006261596A5 JP2006261596A5 JP2005080345A JP2005080345A JP2006261596A5 JP 2006261596 A5 JP2006261596 A5 JP 2006261596A5 JP 2005080345 A JP2005080345 A JP 2005080345A JP 2005080345 A JP2005080345 A JP 2005080345A JP 2006261596 A5 JP2006261596 A5 JP 2006261596A5
- Authority
- JP
- Japan
- Prior art keywords
- forming
- solid
- imaging device
- photoelectric conversion
- state imaging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006243 chemical reaction Methods 0.000 claims 6
- 238000003384 imaging method Methods 0.000 claims 6
- 238000004519 manufacturing process Methods 0.000 claims 6
- 238000000034 method Methods 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005080345A JP4695902B2 (ja) | 2005-03-18 | 2005-03-18 | 固体撮像装置の製造方法 |
| US11/368,511 US7259361B2 (en) | 2005-03-18 | 2006-03-07 | Producing method for solid-state image pickup device including formation of a carrier accumulating region |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005080345A JP4695902B2 (ja) | 2005-03-18 | 2005-03-18 | 固体撮像装置の製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011002866A Division JP5247829B2 (ja) | 2011-01-11 | 2011-01-11 | 固体撮像装置及びその製造方法、並びに、カメラ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006261596A JP2006261596A (ja) | 2006-09-28 |
| JP2006261596A5 true JP2006261596A5 (https=) | 2008-05-01 |
| JP4695902B2 JP4695902B2 (ja) | 2011-06-08 |
Family
ID=37009342
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005080345A Expired - Fee Related JP4695902B2 (ja) | 2005-03-18 | 2005-03-18 | 固体撮像装置の製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US7259361B2 (https=) |
| JP (1) | JP4695902B2 (https=) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006261597A (ja) * | 2005-03-18 | 2006-09-28 | Canon Inc | 固体撮像装置、その製造方法及びカメラ |
| JP5110820B2 (ja) | 2006-08-02 | 2012-12-26 | キヤノン株式会社 | 光電変換装置、光電変換装置の製造方法及び撮像システム |
| JP5305622B2 (ja) * | 2006-08-31 | 2013-10-02 | キヤノン株式会社 | 光電変換装置の製造方法 |
| JP5110831B2 (ja) | 2006-08-31 | 2012-12-26 | キヤノン株式会社 | 光電変換装置及び撮像システム |
| JP5305623B2 (ja) * | 2007-07-20 | 2013-10-02 | キヤノン株式会社 | 光電変換装置及び光電変換装置を用いた撮像システム |
| WO2010122657A1 (ja) | 2009-04-24 | 2010-10-28 | ルネサスエレクトロニクス株式会社 | 固体撮像装置およびその製造方法 |
| US8686338B2 (en) * | 2011-08-03 | 2014-04-01 | Symbol Technologies, Inc. | Method and apparatus for controlling output of the solid-state imager in a barcode reader |
| TWI649862B (zh) * | 2014-11-17 | 2019-02-01 | 國立大學法人東北大學 | Light sensor and signal reading method thereof, solid-state imaging device and signal reading method thereof |
| WO2020261817A1 (ja) * | 2019-06-25 | 2020-12-30 | ソニーセミコンダクタソリューションズ株式会社 | 固体撮像素子、固体撮像素子の製造方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2720478B2 (ja) * | 1988-10-18 | 1998-03-04 | 株式会社ニコン | 縦型オーバーフロードレインを備える固体撮像素子を用いた測光装置 |
| KR100477788B1 (ko) * | 1999-12-28 | 2005-03-22 | 매그나칩 반도체 유한회사 | 커패시터가 접속된 포토다이오드를 갖는 씨모스이미지센서 및 그 제조방법 |
| JP4502278B2 (ja) * | 2004-02-27 | 2010-07-14 | 国立大学法人東北大学 | 固体撮像装置、ラインセンサ、光センサおよび固体撮像装置の動作方法 |
| JP4497366B2 (ja) * | 2005-02-04 | 2010-07-07 | 国立大学法人東北大学 | 光センサおよび固体撮像装置 |
-
2005
- 2005-03-18 JP JP2005080345A patent/JP4695902B2/ja not_active Expired - Fee Related
-
2006
- 2006-03-07 US US11/368,511 patent/US7259361B2/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7154137B2 (en) | Image sensor and pixel having a non-convex photodiode | |
| JP2005286168A5 (https=) | ||
| JP2006197382A5 (https=) | ||
| US9496311B2 (en) | Solid-state imaging device, method of manufacturing the same, and electronic apparatus | |
| JP2008306160A5 (https=) | ||
| JP2012124462A5 (https=) | ||
| KR20150071768A (ko) | 이미지 센서 및 그 제조방법 | |
| US20060118781A1 (en) | Image sensor and pixel having a polysilicon layer over the photodiode | |
| TW201445717A (zh) | 固體攝像元件、電子機器、及製造方法 | |
| WO2014049901A1 (ja) | 固体撮像装置 | |
| CN104969353B (zh) | 固态图像传感器、制造方法和电子设备 | |
| JP2009182223A5 (https=) | ||
| US9570496B2 (en) | Solid-state imaging element and electronic device | |
| CN104377215A (zh) | 摄像元件和摄像装置 | |
| JP5557795B2 (ja) | 固体撮像素子及び撮像装置 | |
| JP2006261596A5 (https=) | ||
| US9538104B2 (en) | Imaging apparatus, imaging method, manufacturing apparatus, manufacturing method, and electronic apparatus | |
| JP4490407B2 (ja) | Cmosイメージセンサとその製造方法 | |
| JP2007088450A5 (https=) | ||
| TWI571914B (zh) | 半導體元件及其製作方法 | |
| CN1992214A (zh) | 用于制造cmos图像传感器的方法 | |
| CN102709303A (zh) | Cmos图像传感器及其制作方法 | |
| JP2007165864A5 (https=) | ||
| CN1619827A (zh) | 光电转换器件和图像传感器ic | |
| CN100423278C (zh) | Cmos图像传感器及其制造方法 |