JP2006250587A5 - - Google Patents

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Publication number
JP2006250587A5
JP2006250587A5 JP2005064687A JP2005064687A JP2006250587A5 JP 2006250587 A5 JP2006250587 A5 JP 2006250587A5 JP 2005064687 A JP2005064687 A JP 2005064687A JP 2005064687 A JP2005064687 A JP 2005064687A JP 2006250587 A5 JP2006250587 A5 JP 2006250587A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2005064687A
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Japanese (ja)
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JP4650619B2 (ja
JP2006250587A (ja
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Priority to JP2005064687A priority Critical patent/JP4650619B2/ja
Priority claimed from JP2005064687A external-priority patent/JP4650619B2/ja
Publication of JP2006250587A publication Critical patent/JP2006250587A/ja
Publication of JP2006250587A5 publication Critical patent/JP2006250587A5/ja
Application granted granted Critical
Publication of JP4650619B2 publication Critical patent/JP4650619B2/ja
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JP2005064687A 2005-03-09 2005-03-09 駆動ユニット、光学ユニット、光学装置、並びに露光装置 Active JP4650619B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005064687A JP4650619B2 (ja) 2005-03-09 2005-03-09 駆動ユニット、光学ユニット、光学装置、並びに露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005064687A JP4650619B2 (ja) 2005-03-09 2005-03-09 駆動ユニット、光学ユニット、光学装置、並びに露光装置

Publications (3)

Publication Number Publication Date
JP2006250587A JP2006250587A (ja) 2006-09-21
JP2006250587A5 true JP2006250587A5 (de) 2010-04-22
JP4650619B2 JP4650619B2 (ja) 2011-03-16

Family

ID=37091269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005064687A Active JP4650619B2 (ja) 2005-03-09 2005-03-09 駆動ユニット、光学ユニット、光学装置、並びに露光装置

Country Status (1)

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JP (1) JP4650619B2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3226073A3 (de) 2003-04-09 2017-10-11 Nikon Corporation Belichtungsverfahren und -vorrichtung sowie verfahren zur herstellung der vorrichtung
TWI457712B (zh) 2003-10-28 2014-10-21 尼康股份有限公司 照明光學裝置、投影曝光裝置、曝光方法以及元件製造方法
TWI519819B (zh) 2003-11-20 2016-02-01 尼康股份有限公司 光束變換元件、光學照明裝置、曝光裝置、以及曝光方法
TWI494972B (zh) 2004-02-06 2015-08-01 尼康股份有限公司 偏光變換元件、光學照明裝置、曝光裝置以及曝光方法
KR20170089028A (ko) 2005-05-12 2017-08-02 가부시키가이샤 니콘 투영 광학계, 노광 장치 및 디바이스 제조 방법
WO2007086557A1 (ja) 2006-01-30 2007-08-02 Nikon Corporation 光学部材保持装置、光学部材の位置調整方法、及び露光装置
JP2009026862A (ja) 2007-07-18 2009-02-05 Canon Inc 光学素子位置決めシステム、投影光学系及び露光装置
JP5267029B2 (ja) 2007-10-12 2013-08-21 株式会社ニコン 照明光学装置、露光装置及びデバイスの製造方法
US8379187B2 (en) 2007-10-24 2013-02-19 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9116346B2 (en) 2007-11-06 2015-08-25 Nikon Corporation Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method
US8792079B2 (en) * 2007-12-28 2014-07-29 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method having encoders to measure displacement between optical member and measurement mount and between measurement mount and movable body
JP6478593B2 (ja) * 2014-11-28 2019-03-06 キヤノン株式会社 投影光学系の製造方法、および、デバイス製造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6011458Y2 (ja) * 1981-12-29 1985-04-16 サムタク株式会社 ロ−タリ−エンコ−ダ−
JPS60107722U (ja) * 1983-12-26 1985-07-22 株式会社ニコン モジユラ−型エンコ−ダ
JPH01291101A (ja) * 1988-05-18 1989-11-22 Tokyo Electron Ltd Ｎ次元エンコーダ
JPH075361Y2 (ja) * 1990-05-08 1995-02-08 株式会社ミツトヨ 検出ヘッドの取付姿勢調整装置
JP3142355B2 (ja) * 1992-03-11 2001-03-07 敏男 福田 パラレルリンク機構の運動姿勢演算装置
JPH08115128A (ja) * 1993-07-15 1996-05-07 Agency Of Ind Science & Technol パラレルリンク機構
JPH08178701A (ja) * 1994-12-27 1996-07-12 Canon Inc 変位センサ
JPH10267603A (ja) * 1996-11-22 1998-10-09 Eizou Nishimura 位置姿勢検出装置
JPH10267642A (ja) * 1997-03-25 1998-10-09 Eizou Nishimura 位置姿勢検出装置
JPH1133944A (ja) * 1997-07-24 1999-02-09 Olympus Optical Co Ltd マイクロパラレルリンク機構
JPH11274031A (ja) * 1998-03-20 1999-10-08 Canon Inc 露光装置およびデバイス製造方法ならびに位置決め装置
AU5653699A (en) * 1999-09-20 2001-04-24 Nikon Corporation Parallel link mechanism, exposure system and method of manufacturing the same, and method of manufacturing devices
JP4311524B2 (ja) * 2002-04-26 2009-08-12 株式会社ミツトヨ 検出器位置調整機構
JP2004103740A (ja) * 2002-09-06 2004-04-02 Canon Inc 露光装置

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