JP2006242433A - Centrifugal drier - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a centrifugal drier capable of improving drying processing capacity of a processing object, while preventing damage of the processing object by reducing vibration. <P>SOLUTION: This centrifugal drier has a turntable 13 stored in a chamber and rotating around a rotary shaft 12, cradles 15A and 15B and cradles 16A and 16B arranged on the turntable at an equal angle interval in two pairs in a symmetrical position on the rotary shaft and holding a base board 18 by the respective cradles, an upper stage balance mechanism part 27A and a lower stage balance mechanism part 27B correspondingly arranged to the cradles 15A and 15B in an outside lower part of the chamber and having a weight 33 movable in the direction orthogonal to the rotary shaft, an upper stage balance mechanism part 28A and a lower stage balance mechanism part 28B correspondingly arranged to the cradles 16A and 16B in the outside lower part of the chamber and having a weight 38 movable in the direction orthogonal to the rotary shaft; and dries the base board held by the cradles by rotation of the turntable. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a centrifugal drying apparatus that performs a drying process on the object to be processed by scattering moisture adhering to the surface of the object to be processed such as a cleaned substrate by centrifugal force.

  For example, there is an apparatus described in Patent Document 1 as a centrifugal drying apparatus that scatters moisture adhering to the substrate surface by centrifugal force to dry the substrate. The centrifugal drying apparatus is provided with a pair of turntables that are housed in a chamber and rotate around a rotation axis, a pair of cradles that are arranged symmetrically with respect to the rotation axis in the turntable, each holding a substrate, and a rotation axis And a pair of balance mechanism portions arranged at symmetrical positions and orthogonal to the pair of cradle.

  If the number of substrates stored in the pair of cradles is the same, the weight balance at the time of rotation of the turntable including the cradle is appropriate. However, for example, a defective substrate is removed in the manufacturing process. The number of substrates stored in the cradle may be different. In such a case, the centrifugal drying device of Patent Document 1 detects the number of substrates stored in the pair of cradles, and changes the positions of the weights of the pair of balance mechanism units according to the difference in the number of sheets. The weight balance of the turntable including the cradle is made appropriate to reduce vibration and noise during high-speed rotation of the turntable.

Japanese Patent No. 3129895

  However, in the above-described centrifugal drying apparatus of Patent Document 1, since only one pair of cradle is arranged on the turntable, the number of substrates that can be processed in one drying process is small, and an efficient drying process cannot be performed. .

  The object of the present invention has been made in consideration of the above circumstances, and is capable of reducing vibrations and preventing damage to the object to be processed, and improving the processing capacity for drying the object to be processed. It is to provide a drying apparatus.

  The centrifugal drying device according to the invention of claim 1 is housed in a chamber, and a turntable that rotates around a rotation axis, a plurality of pairs at symmetrical positions with respect to the rotation axis, and each pair at equal angular intervals. A holding member that is disposed on the turntable and holds the workpieces to each other, a support member that is attached to the rotary shaft in a plurality of stages along the axial direction of the rotary shaft outside the chamber, and these support members Each of the holding members is provided corresponding to each pair of the holding members and has a balance mechanism portion having a weight movable in a direction perpendicular to the rotation axis. The held object to be processed is dried.

  A centrifugal drying apparatus according to a second aspect of the present invention includes a turntable housed in a chamber and rotating around a rotation axis, and a pair of the turntables arranged at positions symmetrical with respect to the rotation axis in each turntable. A holding member for holding an object, a supporting member attached to the rotating shaft in a plurality of stages along the axial direction of the rotating shaft outside the chamber, and a pair of the holding members on each of these supporting members. And a balance mechanism provided with a weight movable in a direction orthogonal to the rotation axis, and drying the workpiece to be processed held by the holding member by the rotation of the turntable. It is characterized by this.

  According to a third aspect of the present invention, the centrifugal drying apparatus according to the first aspect of the present invention is characterized in that in the first aspect of the invention, the holding member is arranged in two pairs at right angles at positions symmetrical with respect to the rotation axis. Is.

  According to a fourth aspect of the present invention, there is provided the centrifugal drying apparatus according to any one of the first to third aspects, wherein the support member is provided in two upper and lower stages, and the upper balance mechanism portion is provided on the upper support member and the lower support member is provided on the upper support member. Each member is provided with a lower balance mechanism.

  According to a fifth aspect of the present invention, in the centrifugal drying apparatus according to the fourth aspect of the invention, the weight of the upper balance mechanism is a holding member that holds a large amount of the object to be processed among the corresponding pair of holding members. The weight of the lower balance mechanism portion is positioned on the same side with respect to the rotation shaft with respect to the holding member that holds a large amount of workpieces. is there.

  According to a sixth aspect of the present invention, in the centrifugal drying apparatus according to the fourth aspect, the weight of the upper balance mechanism is provided on both sides with respect to the rotation shaft, and the object to be processed among the corresponding pair of holding members. The weight on the same side as the holding member in which a large amount of the holding member is held is positioned closest to the rotating shaft, and the weight of the lower balance mechanism portion is provided on both sides with respect to the rotating shaft. Of these, the weight opposite to the holding member holding a large amount of the object to be processed is positioned closest to the rotation shaft.

  According to a seventh aspect of the present invention, in the centrifugal drying apparatus according to the first aspect of the present invention, the weight of the balance mechanism is screwed to a ball screw extending in a direction perpendicular to the rotation axis. The ball screw is coupled to the weight driving unit and rotated at a predetermined position accompanying the rotation of the turntable, whereby the weight is positioned at a desired position.

  According to an eighth aspect of the present invention, in the centrifugal drying apparatus according to the first aspect of the present invention, the number of workpieces held by the pair of holding members is a predetermined position accompanying the rotation of the turntable. Thus, based on the difference in the number of objects to be processed in the pair of holding members, the weight position of the balance mechanism portion corresponding to the pair of holding members is positioned at a desired position. It is characterized by that.

  According to the first to seventh aspects of the present invention, a plurality of stages of support members rotate along the axial direction of the rotation shaft outside the chamber that houses the turntable on which the pair or plural pairs of holding members are arranged. Since the balance mechanism provided with the weight is provided on each support member, not only the weight balance in the diameter direction of the turntable but also the weight balance in the rotation axis direction of the turntable can be set well. Therefore, vibration during the drying process can be reduced, and damage to the object to be processed held by the holding member can be prevented.

  Further, when a plurality of pairs of holding members are provided on the turntable, a large number of objects to be processed can be dried by one drying process by rotating the turntable, so that the processing capability can be improved.

  Since the balance mechanism portion is disposed outside the chamber that houses the turntable, dust generated by the balance mechanism portion does not flow into the chamber, and accordingly, the cover held by the holding member of the turntable in the chamber. The influence of dust on the processed material can be greatly reduced.

  According to the eighth aspect of the present invention, the number of objects to be processed held by the pair of holding members is detected by the detector disposed outside the chamber, and the balance mechanism section is based on the difference in the number of these objects to be processed. Since the weight is positioned at a desired position and the workpiece is dried by rotating the turntable, a series of processing from detection of the number of workpieces to drying can be automatically performed by a single device. .

  The best mode for carrying out the present invention will be described below with reference to the drawings.

  FIG. 1 is a schematic side view showing an embodiment of a centrifugal drying apparatus according to the present invention. FIG. 2 is a perspective view showing a main part of the centrifugal drying apparatus of FIG. 3 is a view taken in the direction of arrow III in FIG.

  The centrifugal drying apparatus 10 shown in FIGS. 1 to 3 includes a turntable 13 that is housed in a chamber 11 and is driven to rotate around a rotary shaft 12, and a balance unit 14 that is disposed below the chamber 11. The substrate 18 in the substrate cassette 17 housed in each of the cradles 15A, 15B, 16A, and 16B as holding members installed on the turntable 13 is applied to the centrifugal force due to the high-speed rotation of the turntable 13. In this case, the water is scattered and dried. Here, the substrate 18 is an object to be processed such as a semiconductor substrate (silicon wafer) or a glass substrate.

  The chamber 11 has a bottomed cylindrical shape, and an upper opening can be opened and closed by a lid (not shown). Further, the turntable 13 has a substantially bottomed cylindrical shape, and the rotation shaft 12 is fixed to the center position of the bottom portion 19. The rotary shaft 12 extends vertically below the bottom portion 19 of the turntable 13 and is rotationally driven by a drive motor 22 via a pulley 20 and a timing belt 21. The drive motor 22 is supported by the frame 23 in the same manner as the chamber 11. Further, the rotary shaft 12 is also rotatably supported by the frame 23.

  As shown in FIG. 2, the substrate cassette 17 stacks and stores a plurality of substrates 18 in parallel at an equal pitch. For example, the substrate cassette 17 can store a maximum of 25 substrates 18. As shown in FIG. 3, two pairs of cradles 15A, 15B, 16A and 16B which carry in and hold the substrate cassette 17 are arranged orthogonally at positions symmetrical with respect to the rotating shaft 12 on the turntable 13. . That is, in the turntable 13, the pair of cradles 15A and 15B are disposed at positions symmetrical with respect to the rotating shaft 12, and the other pair of cradles 16A and 16B are at positions symmetrical with respect to the rotating shaft 12 and the cradle 15A and 15B Arranged in a direction orthogonal to the direction of alignment.

  As shown in FIGS. 1 and 3, each cradle 15 </ b> A, 15 </ b> B, 16 </ b> A, 16 </ b> B is pivotally supported by the turntable 13 using a pivotal shaft 24 and is stored in the main surface of the substrate 18 via the substrate cassette 17. However, a drive means (not shown) such as a cylinder is provided between a fixed position α substantially orthogonal to the rotation axis 12 of the turntable 13 and a loading / unloading position β parallel to the rotation axis 12 of the turntable 13. It is provided so that it can be rotated about 90 degrees. The cradle 15A, 15B, 16A, and 16B is set to the loading / unloading position β when the substrate cassette 17 is loaded or unloaded, and is set to the fixed position α when it is not loading / unloading (including the drying process). At this fixed position α, the substrate 18 is arranged in a horizontal state.

  By the way, as shown in FIGS. 1, 2, and 4, the balance unit 14 is provided in two stages on the rotary shaft 12 at a predetermined distance along the axial direction of the rotary shaft 12 below the outside of the chamber 11. Support members (upper stage support member 25, lower stage support member 26) and balance mechanism parts (upper stage balance mechanism part 27A, lower stage balance mechanism part 27B, upper stage balance mechanism) supported by these upper stage support member 25 and lower stage support member 26 28A and lower balance mechanism 28B).

  As shown in FIG. 2, the upper support member 25 and the lower support member 26 have support frames 29 and 30 that are arranged orthogonal to each other and are fixed to the rotary shaft 12 at intersections, and both end portions of these support frames 29 and 30 are connected to each other. It is connected by the support arm 31.

  An upper balance mechanism portion 27A is disposed along the support frame 29 on the upper support member 25, and an upper balance mechanism portion 28A is disposed along the support frame 30 at right angles to the upper balance mechanism portion 27A. . Further, a lower balance mechanism portion 27B is disposed along the support frame 29 on the lower support member 26, and a lower balance mechanism portion 28B is disposed along the support frame 30 and orthogonal to the upper balance mechanism portion 28A. Is done. The upper balance mechanism portion 27A and the lower balance mechanism portion 27B are arranged corresponding to the pair of cradles 15A and 15B, and the upper balance mechanism portion 28A and the lower balance mechanism portion 28B are another pair of cradle. It is arranged corresponding to 16A and 16B.

  The upper balance mechanism portion 27 </ b> A and the lower balance mechanism portion 27 </ b> B are obtained by screwing weights 33 into two ball screws 32 extending in a direction perpendicular to the rotary shaft 12 on both sides of the support frame 29. The weight 33 can be moved in a direction orthogonal to the rotation shaft 12 by the rotation of the ball screw 32. Both end portions of the ball screw 32 are rotatably supported by the support frame 29, and a driven gear 34 is coupled to one end portion of the ball screw 32. These driven gears 34 are meshed and connected by a drive gear 35 having a lock hole 36.

  The upper balance mechanism 28 </ b> A and the lower balance mechanism 28 </ b> B are provided on both sides of the support frame 30 so as to avoid the ball screw 32 and the support frame 29, and two ball screws 37 extending in a direction perpendicular to the rotation shaft 12. A weight 38 is screwed to each of the two. The weight 38 can be moved in a direction orthogonal to the rotation shaft 12 by the rotation of the ball screw 37. Both ends of the ball screw 37 are rotatably supported by the support frame 30, and the driven gear 34 is coupled to one end of the ball screw 37. These driven gears 34 are meshed with and connected to the drive gear 35.

  The ball screws 32 of the upper balance mechanism portion 27A and the lower balance mechanism portion 27B and the ball screws 37 of the upper balance mechanism portion 28A and the lower balance mechanism portion 28B are rotated by the weight drive portion 39 at predetermined positions accompanying the rotation of the turntable 13. Driven. In other words, the weight drive unit 39 is installed at two locations on the same vertical line of the frame 23 as shown in FIG.

  As shown in FIG. 4, the weight drive unit 39 includes a revolver 42 having a lock pin 41 attached to a motor shaft (not shown) of the drive motor 40, and the drive motor 40 is connected to a base 44 via a slider 43. Is provided. A cylinder 45 is installed on the base 44. The movement of the rod 46 of the cylinder 45 causes the slider 43 to reciprocate with respect to the base 44, and the drive motor 40 advances and retreats. Due to the forward / backward movement of the drive motor 40, the lock pin 41 of the revolver 42 meshes with the lock hole 36 of the drive gear 35 in the upper balance mechanism portion 27A and the lower balance mechanism portion 27B, and the upper balance mechanism portion 28A and the lower balance mechanism portion 28B. When the drive motor 40 is started in this state, the ball screws 32 and 37 are rotated.

  The drive motor 40 is, for example, a stepping motor, and the weights 33 and 38 are moved to desired positions (described later) by rotating the ball screws 32 and 37 forward or reverse with reference to the leads (pitch) of the ball screws 32 and 37. Position.

  As shown in FIG. 6A, the weight 33 of the upper balance mechanism 27A is a cradle 15A or 15B in which a large number of substrates 18 are held via the substrate holder 17 out of the corresponding pair of cradles 15A and 15B (see FIG. 6 is positioned on the opposite side with respect to the rotary shaft 12 with respect to the cradle 15A). Further, the weight 33 of the lower balance mechanism 27B is relative to the cradle 15A or 15B (the cradle 15A in FIG. 6) in which a large number of substrates 18 are held via the substrate cassette 17 among the corresponding pair of cradles 15A and 15B. The rotary shaft 12 is positioned on the same side.

  Similarly, the weight 38 of the upper balance mechanism portion 28A is the cradle 16A or 16B (in FIG. 6, the cradle 16A shown in FIG. ) With respect to the rotary shaft 12. Also, the weight 38 of the lower balance mechanism 28B is attached to the cradle 16A or 16B (the cradle 16A in FIG. 6) in which a large number of substrates 18 are held via the substrate cassette 17 among the corresponding pair of cradles 16A and 16B. In contrast, the rotary shaft 12 is positioned on the same side.

  As shown in FIG. 2, the number of substrates 18 held by the pair of cradles 15 </ b> A and 15 </ b> B and the other pair of cradles 16 </ b> A and 16 </ b> B is illustrated at the predetermined position accompanying the rotation of the turntable 13. It is detected by two sheet number detectors 47 arranged opposite to the frame not to be used. One of the number detectors 47 is installed at a position directly above the weight driving unit 39. As shown in FIG. 5, the number detector 47 has a nut block 50 screwed into a ball screw 49 driven by a sensor motor 48, and a photo sensor 51 attached to the nut block 50. When the sensor motor 48 is activated, the photosensor 51 moves through the ball screw 49 and the nut block 50 along the stacking direction of the substrates 18 held by the cradle 15A, 15B, 16A, 16B via the substrate holder 17, The number of substrates 18 in each substrate holder 17 is detected.

  From the number of substrates 18 in the pair of cradles 15A and 15B detected by the number detector 47 in this way, the difference in the number of substrates 18 in the pair of cradles 15A and 15B is calculated. (Detailed later) is used to determine the position of the weight 33 (the desired position) in each of the upper balance mechanism portion 27A and the lower balance mechanism portion 27B corresponding to the pair of cradle 15A and 15B. Similarly, from the number of substrates 18 in the other pair of cradles 16A and 16B detected by the number detector 47, the difference in the number of substrates 18 in the other pair of cradles 16A and 16B is calculated. Is used to determine the position of the weight 38 (the desired position) in each of the upper balance mechanism 28A and the lower balance mechanism 28B corresponding to the other pair of cradle 16A and 16B.

  For example, as shown in FIG. 6B, the correlation table includes the difference in the number of substrates 18 in the pair of cradles 15A and 15B (or the other pair of cradles 16A and 16B), the upper stage balance mechanism unit 27A, and the lower stage balance mechanism. This shows the relationship with the position of the weight 33 of the portion 27B (or the weight 38 of the upper balance mechanism portion 28A and the lower balance mechanism portion 28B), and the position of the weight 33 (or weight 38) indicates the position of the rotary shaft 12. Shown as zero. The calculation procedure of the correlation table in FIG. 6B will be specifically described for the upper balance mechanism unit 27A and the lower balance mechanism unit 27B corresponding to the pair of cradles 15A and 15B. The same applies to the upper balance mechanism portions 28A and 28B corresponding to the other pair of cradle 16A and 16B.

In order for the rotary shaft 12 to rotate without swinging, the sum of the centripetal force acting on the cradle 15A and 15B holding the substrate 18 and the centripetal force acting on the weight 33 of the lower balance mechanism portion 27B is the upper balance mechanism. It is necessary to be equal to the centripetal force acting on the weight 33 of the portion 27A. Here, in general, the centripetal force F is F = mrω ² (m: mass, r: radius, ω: angular velocity). However, since rotation on one rotating shaft 12 is considered, all ω ² are common and can be omitted. Therefore, it is only necessary to balance the moment of force around the rotary shaft 12 and balance the moment of force between the weights 33 of the cradle 15A and 15B and the weight 33 of the lower balance mechanism 27B with the weight 33 of the upper balance mechanism 27A as a fulcrum. .

Here, the weights of the cradles 15A and 15B holding the substrate 18 are M _W1 (the number of substrates: W1) and M _W2 (the number of substrates: W2), respectively, and the distance of the cradle 15A, 15B from the rotating shaft 12 is L. and then, the weight of the weights 33 of the upper balance mechanism 27A a, the distance from the rotational axis 12 of the weight 33 of the upper balance mechanism portion 27A and L _a, B the weight of the weight 33 of the lower balance mechanism 27B , the distance from the axis of rotation 12 of the weight 33 of the lower balance mechanism 27B and _{L B,} the distance from the ball screw 32 of the upper balance mechanism 27A to the bottom 19 of the turntable 13 H, the upper balancing mechanism 27A ball When the distance from the screw 32 to the ball screw 32 of the lower balance mechanism 27B and _{H W,} the two balance equation above _{(M W1} · _{-M W2 · L) + B ·} L B = A · L A ......... (1)
H (M _W1 · L−M _W2 · L) = H _W · B · L _B (2)
It becomes.
Assuming that A = M and B = m, the equations (1) and (2) are expressed as L (M _W1 −M _W2 ) + m · L _B = M · L _A (3)
H (M _W1 −M _W2 ) L = H _W · m · L _B (4)
It becomes.

When the cradle 15A holding the substrate 18 has a larger number of substrates 18, the movable distance of the weights 33 of the upper balance mechanism portion 27A and the lower balance mechanism portion 27B (0 ≦ L _A ≦ 200 mm, 0 ≦ L _B ≦ 200 mm). ), The weights of the weights 33 of the upper balance mechanism portion 27A and the lower balance mechanism portion 27B are obtained.

First, from Expression (4), 0 ≦ L _B = (M _W1 −M _W2 ) H · L / (H _W · m) ≦ 200 (5)
Next, 0 ≦ _L A ₌ from equation _{(3) (M W1 -M W2} ) L / M + m · L B / M ≦ 200 ...... (6)
Wherein the (5) by substituting the erasing distance _{L B (M W1 -M W2)} · (H W + H) · L / H W ≦ 200M ......... (7)
Here, H = 290 mm, H _W = 300 mm, L = 197.5 mm, and the weight of the substrate 18 is 640 g / 25 sheets. Further, when the number of substrates 18 in the cradle 15A and 15B, which is the most severe condition, is 25, M _W1 −M _W2 = 640 g.
From equation (5), m ≧ 0.61 kg,
From equation (7), M ≧ 1.24 kg.

  Accordingly, when the weight 33 of the upper balance mechanism 27A is M = 1.3 kg and the weight 33 of the lower balance mechanism 27B is m = 0.65 kg, the correlation table of FIG. 6B can be obtained. Become. As described above, when the weight of the cradle 15A, 15B, 16A, 16B when the substrate 18 is held most is a reference value, the weight 33 of the upper balance mechanism portion 27A and the upper balance mechanism portion 28A The weight of the weight 38 is set to about twice the reference value, and the weight 33 of the lower balance mechanism unit 27B and the weight 38 of the lower balance mechanism unit 28B are set to a weight substantially equal to the reference value.

  Next, operation | movement of the centrifugal drying apparatus 10 is demonstrated using FIG.7 and FIG.8.

  The substrate cassette 17 storing the substrate 18 is carried into the pair of cradles 15A and 15B using a transfer robot or the like (S1). Next, the turntable 13 is rotated to align each of the pair of cradles 15A and 15B with the number detector 47 (S2).

  Thereafter, the cylinder 45 of the weight drive unit 39 is operated, and the lock pin 41 of the revolver 42 is fitted into the lock hole 36 of the drive gear 35 of the upper balance mechanism portion 27A and the lower balance mechanism portion 27B. 35 are combined (S3). Next, the number of substrates 18 in the substrate cassette 17 in the pair of cradles 15A and 15B is detected by the number detector 47 (S4).

  From the difference in the number of substrates 18 in each substrate cassette 17 in the pair of cradles 15A and 15B detected by the number detector 47, the upper balance mechanism 27A and the lower balance mechanism 27B corresponding to the cradle 15A and 15B. The movement amount of the weight 33 is determined based on the correlation table of FIG. 6B with the rotation shaft 12 position as a reference (position 0) (S5).

  Next, the drive motor 40 of the weight drive unit 39 is rotated forward or backward to move the weights 33 of the upper balance mechanism unit 27A and the lower balance mechanism unit 27B to desired positions determined by the correlation table (S6). . After the weights 33 of the upper balance mechanism 27A and the lower balance mechanism 27B are moved, the cylinder 45 of the weight drive unit 39 is operated, and the revolver 42 of the weight drive unit 39 is moved to the upper balance mechanism 27A and the lower balance mechanism. Disconnect from the drive gear 35 of 27B (S7).

  Next, the turntable 13 is rotated 90 degrees (S8), and the substrate cassette 17 storing the substrate 18 is carried into another pair of cradles 16A and 16B using a transfer robot or the like (S9). Thereafter, the cylinder 45 of the weight drive unit 39 is actuated so that the lock pin 41 of the revolver 42 is fitted in the lock hole 36 of the drive gear 35 of the upper balance mechanism unit 28A and the lower balance mechanism unit 28B, and the revolver 42 and the drive gear are engaged. 35 are combined (S10).

  Next, the number of substrates 18 in the substrate cassette 17 in the pair of cradles 16A and 16B is detected by the number detector 47 (S11). From the difference in the number of substrates 18 in each substrate cassette 17 in the pair of cradles 16A and 16B detected by the substrate detector 47, the upper balance mechanism unit 28A and the lower balance mechanism unit 28B corresponding to the cradle 16A and 16B. The amount of movement of the weight 38 is determined based on the correlation table of FIG. 6B with the position of the rotary shaft 12 as the reference (position 0) (S12).

  Thereafter, the drive motor 40 of the weight drive unit 39 is rotated forward or backward to move the weights 38 of the upper balance mechanism unit 28A and the lower balance mechanism unit 28B to desired positions determined by the correlation table (S13). After the weights 38 of the upper balance mechanism 28A and the lower balance mechanism 28B are moved, the cylinder 45 of the weight drive unit 39 is operated, and the revolver 42 of the weight drive unit 39 is moved to the upper balance mechanism 28A and the lower balance mechanism unit. Disconnect from the drive gear 35 of 28B (S14).

  Next, the turntable 13 is rotated at a high speed, the water adhering to the substrate 18 accommodated in the cradle 15A, 15B, 16A, 16B via the substrate cassette 17 is scattered, and the substrate 18 is dried (S15). ). After a predetermined time has elapsed after the start of high-speed rotation of the turntable 13, the rotation of the turntable 13 is stopped (S16), and the substrate cassette 17 containing the substrate 18 is unloaded from the cradle 15A, 15B, 16A, 16B (S17). ), And finishes the drying process.

  With the configuration as described above, the following effects (1) to (4) are achieved according to the above embodiment.

  (1) An upper balance mechanism portion 27A and a lower balance mechanism portion provided with weights 33 below the chamber 11 that houses the pair of cradles 15A and 15B and the turntable 13 in which the other pair of cradles 16A and 16B are disposed. 27B is disposed corresponding to the pair of cradles 15A and 15B, and the upper balance mechanism portion 28A and the lower balance mechanism portion 28B including the weight 38 are disposed corresponding to the other pair of cradles 16A and 16B. Therefore, since not only the weight balance in the diameter direction of the turntable 13 but also the weight balance in the direction of the rotation axis 12 of the turntable 13 can be set well, vibration during the drying process can be reduced, and the cradles 15A, 15B, 16A can be reduced. , 16B can be prevented from being damaged.

  (2) Since the turntable 13 is provided with two pairs of cradles (cradles 15A and 15B, cradle 16A and 16B), a large number of substrates 18 can be dried by a single drying process by rotating the turntable 13. The processing capacity can be improved.

  (3) The balance unit 14 (the upper balance mechanism portion 27A and the lower balance mechanism portion 27B, and the upper balance mechanism portion 28A and the lower balance mechanism portion 28B) is disposed below the chamber 11 that houses the turntable 13. The dust generated by the balance unit 14 does not flow into the chamber 11, and therefore the influence of dust on the substrate 18 held on the cradle 15 A, 15 B, 16 A, 16 B in the turntable 13 in the chamber 11 is extremely reduced. it can.

  (4) The number of substrates 18 held in the pair of cradles 15A and 15B and the other pair of cradles 16A and 16B is detected by a number detector 47 disposed outside the chamber 11, and the number of these substrates 18 is detected. Based on the difference, the positions of the weights 33 of the upper balance mechanism portion 27A and the lower balance mechanism portion 27B and the positions of the weights 38 of the upper balance mechanism portion 28A and the lower balance mechanism portion 28B are positioned at desired positions, respectively. Since the drying process of the substrate 18 is performed by the rotation, a series of processes from the detection of the number of the substrates 18 to the drying can be automatically performed using the single centrifugal drying apparatus 10.

  FIG. 9 (A) is another embodiment of the centrifugal drying apparatus according to the present invention, and is a side view schematically showing a pair of substrate cassettes, an upper balance mechanism portion, and a lower balance mechanism portion. FIG. 9B is a correlation table showing the relationship between the difference in the number of substrates in the substrate cassette in the pair of cradle and the weight position of the upper and lower balance mechanism portions in another embodiment of FIG. In other embodiments, the same parts as those in the above-described embodiment are denoted by the same reference numerals and the description thereof is omitted.

The other embodiment differs from the one embodiment in that, in the balance unit 14, the weights 33 of the upper balance mechanism portion 27A are provided on both sides with respect to the rotating shaft 12, and the corresponding cradle 15A and 15B The weight 33 on the same side as the cradle 15A or 15B (the cradle 15A in FIG. 9) on which many substrates 18 are held is set closest to the substrate 12 (distance L _AA ), and the weight 33 of the lower balance mechanism portion 27B is The weight 33 on the opposite side of the cradle 15A or 15B (the cradle 15A in FIG. 9) which is provided on both sides with respect to the rotary shaft 12 and holds a large number of the substrates 18 among the corresponding pair of cradles 15A and 15B. The closest point (distance L _BB ).

Further, the weight 38 of the upper balance mechanism portion 28A is provided on both sides with respect to the rotating shaft 12, and the cradle 16A or 16B (the cradle 16A in FIG. 9) in which a large number of the substrates 18 are held among the corresponding pair of cradles 16A and 16B. The weight 38 on the same side as that of the rotary shaft 12 is set closest to the rotary shaft 12 (distance L _AA ), and the weights 38 of the lower balance mechanism portion 28B are provided on both sides with respect to the rotary shaft 12, and a corresponding pair of other cradle 16A. 16B, the weight 38 opposite to the cradle 16A or 16B (cradle 16A in FIG. 9) on which a large number of substrates 18 are held is set closest to the rotary shaft 12 (distance L _BB ). Different from the embodiment.

In this other embodiment, since the movable distances (L _A , L _AA , L _B , L _BB ) of the weights 33 and 38 are 85 mm to 200 mm, they are calculated in the same manner as in the first embodiment, The weight of the weight 33 of the upper balance mechanism 27A and the weight 38 of the upper balance mechanism 28A is 2.2 kg, for example. The weight 33 of the lower balance mechanism 27B and the weight 38 of the lower balance mechanism 28B is 1. By setting the weight to 2 kg, the correlation table shown in FIG. 9B is obtained.

  Therefore, also in this embodiment, based on the difference in the number of substrates 18 stored in each of the pair of cradles 15A and 15B, the weights 33 of the upper balance mechanism portion 27A and the lower balance mechanism portion 27B are used using the correlation table. Based on the difference in the number of substrates 18 stored in each of the other pair of cradles 16A and 16B, the positions of the weights 38 of the upper balance mechanism portion 28A and the lower balance mechanism portion 28B are set using the correlation table. Since the position is set, the same effects as the effects (1) to (4) of the embodiment are obtained.

  As mentioned above, although this invention was demonstrated based on the said embodiment, this invention is not limited to this. For example, in the above embodiments, two pairs of cradles (cradles 15A and 15B and cradles 16A and 16B) are arranged at positions symmetrical with respect to the rotating shaft 12 in the turntable 13. A plurality of pairs of cradles may be arranged at equiangular intervals around the rotation axis 12, or a pair of cradles may be arranged symmetrically with the rotation axis 12.

It is a schematic side view which shows one Embodiment of the centrifugal drying apparatus which concerns on this invention. It is a perspective view which shows the principal part of the centrifugal drying apparatus of FIG. FIG. 3 is a view taken in the direction of arrow III in FIG. 1. It is IV arrow line view of FIG. The number detector provided with the photosensor shown in FIG. 1 is shown, (A) is a front view, and (B) is a side view. (A) is a side view schematically showing the pair of substrate cassettes, the upper balance mechanism portion, and the lower balance mechanism portion of FIG. 1, and (B) is the difference in the number of substrates in the substrate cassette in the pair of cradles, and the upper step. And a correlation table showing the relationship between the weight position of the lower balance mechanism section. It is a flowchart which shows a part of operation | movement in the centrifugal drying apparatus of FIG. It is a flowchart which shows the remainder of operation | movement in the centrifugal drying apparatus of FIG. (A) is other embodiment in the centrifugal drying apparatus which concerns on this invention, Comprising: It is a side view which shows typically a pair of substrate cassette, an upper stage balance mechanism part, and a lower stage balance mechanism part, (B) is 9A is a correlation table showing the relationship between the difference in the number of substrates in a substrate cassette in a pair of cradle and the weight position of the upper and lower balance mechanism sections in another embodiment of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Centrifugal dryer 11 Chamber 12 Rotating shaft 13 Turntable 14 Balance unit 15A, 15B Cradle (holding member)
16A, 16B Cradle (holding member)
17 Substrate cassette 18 Substrate (object to be processed)
25 Upper support member 26 Lower support member 27A Upper balance mechanism portion 27B Lower balance mechanism portion 28A Upper balance mechanism portion 28B Lower balance mechanism portion 32, 37 Ball screw 33, 38 Weight 39 Weight drive portion 47 Number detector

Claims (8)

A turntable that is housed in a chamber and rotates about a rotation axis;
A plurality of pairs at positions symmetrical with respect to the rotation axis, each pair being arranged on the turntable at equiangular intervals, and holding members for holding the objects to be processed respectively.
A support member attached to the rotary shaft in a plurality of stages along the axial direction of the rotary shaft outside the chamber;
Each of these support members has a balance mechanism provided with a weight that is provided corresponding to each pair of the holding members and is movable in a direction perpendicular to the rotation axis,
A centrifugal drying apparatus for drying an object to be processed held by the holding member by rotation of the turntable. A turntable that is housed in a chamber and rotates about a rotation axis;
In this turntable, a pair of symmetrically arranged positions with respect to the rotation axis, holding members for holding the objects to be processed,
A support member attached to the rotary shaft in a plurality of stages along the axial direction of the rotary shaft outside the chamber;
Each of these support members is provided corresponding to each pair of the holding members, and has a balance mechanism portion provided with a weight movable in a direction perpendicular to the rotation axis,
A centrifugal drying apparatus for drying an object to be processed held by the holding member by rotation of the turntable.   The centrifugal drying apparatus according to claim 1, wherein two pairs of the holding members are orthogonally arranged at positions symmetrical with respect to the rotation axis.   The centrifuge according to any one of claims 1 to 3, wherein the support member is provided in two upper and lower stages, and an upper balance mechanism portion is provided on the upper support member, and a lower balance mechanism portion is provided on the lower support member. Drying equipment. The weight of the upper balance mechanism is positioned on the opposite side with respect to the rotation shaft with respect to the holding member in which a large number of workpieces are held among the corresponding pair of holding members,
5. The centrifugal drying apparatus according to claim 4, wherein the weight of the lower balance mechanism portion is positioned on the same side with respect to the rotation shaft with respect to the holding member that holds a large amount of the object to be processed. Weights of the upper balance mechanism portion are provided on both sides with respect to the rotation shaft, and the weight on the same side as the holding member that holds a large amount of the object to be processed among the corresponding pair of holding members is positioned closest to the rotation shaft. ,
Further, the weight of the lower balance mechanism is provided on both sides with respect to the rotation shaft, and the weight on the opposite side of the holding member that holds a large amount of the object to be processed among the corresponding pair of holding members is the most on the rotation shaft. The centrifugal drying device according to claim 4, wherein the centrifugal drying device is positioned close to the centrifugal drying device.   The balance mechanism unit is configured such that a weight is screwed to a ball screw extending in a direction orthogonal to the rotation axis, and the ball screw is coupled to the weight driving unit and rotated at a predetermined position accompanying the rotation of the turntable. The centrifugal drying apparatus according to claim 1, wherein the weight is positioned at a desired position. The number of workpieces held by the pair of holding members is detected by a detector disposed outside the chamber at a predetermined position accompanying the rotation of the turntable, and the difference between the number of workpieces in the pair of holding members is The centrifugal drying device according to any one of claims 1 to 7, wherein the weight of the balance mechanism portion corresponding to the pair of holding members is positioned at a desired position.

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