JP3204284B2 - Centrifugal dryer - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a centrifugal drying apparatus, more specifically, a method in which moisture adhering to the surface of a substrate such as a silicon wafer after washing is scattered by centrifugal force, and air is caused to flow on the surface of the substrate. The present invention relates to a centrifugal dryer for drying a substrate.

[0002]

2. Description of the Related Art A centrifugal dryer of this type is conventionally known as shown in FIG.

[0003] This conventional centrifugal drying apparatus includes a turntable 1 as a rotating body that is driven to rotate along a horizontal plane;
The cradle includes a plurality of cradle's 2, i.e., cassette holding members, which are attached at appropriate positions on the outer peripheral portion deviated from the rotation center of the turntable. Then, a plurality of substrate holding cassettes 4 in which a plurality of substrates 3 such as silicon wafers after cleaning are stored at equal pitches such that their main surfaces are parallel to each other are loaded into each cradle 2 from above. 2 is rotated 90 ° downward along a vertical plane about a support shaft 5 that pivotally supports the base 2 so that the main surface of each substrate 3 is in a horizontal state, that is, orthogonal to the rotation center 1 a of the turntable 1. The state is maintained, and then the turntable 1 is rotated. An upper end of a spindle 6 is connected to the turntable 1, and a pulley 7 is fitted to the other end of the spindle 6. Then, a belt 10 is wound around another pulley 9 fitted to the output shaft of the motor 8 and this pulley 7, and the torque of the motor 8 is applied to the turntable 1 to be driven to rotate.

FIGS. 14 and 15 show the details of the substrate holding cassette 4. As is clear from the drawings, the entire substrate 3 is accommodated in the substrate holding cassette 4. Further, as shown in FIG.
Are formed in a box shape as a whole, and receiving grooves 4a for the number of the substrates 3 to be accommodated are arranged in parallel inside thereof.
Each of the substrates 3 is engaged with each of the receiving grooves 4a at its outer peripheral portion so that adjacent substrates 3 do not contact each other. Further, handles 4b for supporting the substrate holding cassette 4 are formed on both sides.

FIG. 16 shows a vertical section of another substrate holding cassette 12 provided for the above-mentioned centrifugal drying apparatus.
As shown, in the substrate holding cassette 12,
Substrate 3 is accommodated only in a substantially lower half thereof. In the figure, reference numeral 12a indicates a receiving groove arranged in parallel with the substrate holding cassette 12 so that an outer peripheral portion of each substrate 3 is engaged with the receiving groove.
Reference numeral 12b indicates a handle.

[0006]

In the above-mentioned conventional centrifugal drying apparatus, the substrate holding cassettes 4 and 12 to be used are used.
Is relatively large and occupies a large space, and since these are dispersed on the turntable 1, they are used for drying large-diameter silicon wafers, for example, 8-inch silicon wafers. Has the disadvantage that the entire apparatus must be made larger.

Further, in the large substrate holding cassettes 4 and 12 as described above, a large amount of liquid adheres to the cassettes, and the drying is not completed unless the turntable 1 is rotated for a long time. Since the contact area is large, the amount of static electricity generated by friction with air accompanying rotation of the turntable 1 is large, and there is a problem that the substrate 3 is damaged.

The present invention has been made in view of the above-mentioned drawbacks of the prior art, and is sufficiently small for drying a large-diameter substrate, shortening the drying time, and reducing the influence of static electricity on the substrate. It is an object of the present invention to provide a centrifugal dryer that has achieved the above.

[0009]

SUMMARY OF THE INVENTION The present invention has a plurality of receiving grooves with which a peripheral portion of a substrate is engaged along a longitudinal direction, and is arranged parallel to and separated from each other along the peripheral portion of the substrate. The main surface of the substrate held by being engaged with the receiving groove of the substrate holding cassette having a plurality of substrate supporting members and a flat plate-shaped side member interconnecting the ends of the substrate supporting members. A centrifugal drying apparatus for drying the substrate by loading the rotating body and rotating the rotating body so as to be orthogonal to the rotation center of the rotating body, wherein the substrate supporting member is
A third member located below the side member and attached to the side member.
A first substrate supporting member and a position above the first substrate supporting member.
And a second substrate support attached to the side member
It consists of a support member, a cassette holding member for detachably accommodating hold the substrate holding cassette is provided on the rotating body, extending in the direction of alignment of the substrate in a rectangular plate shape at the top of the cassette holding member A plurality of substrate receiving members that are provided and have a plurality of receiving grooves with which the outer peripheral portion of the substrate is engaged in the longitudinal direction to prevent the substrate from falling off, and are provided separately from the bottom of the cassette holding member, and a plurality of cassettes bearing member for supporting the substrate holding cassette, the cassette supporting member, supporting a first bearing surface for supporting the first substrate supporting member, a front Stories second substrate supporting member And a second support surface for supporting the substrate holding cassette at a position inside the outer dimensions of the substrate. The cassette holding member is located at a position deviated from the rotation center of the rotating body. Further, the cassette holding member is movable between a position where the main surface of the substrate is substantially perpendicular to a rotation center of the rotating body and a position where the main surface is substantially parallel to the rotation center of the rotating body. Further, the substrate receiving member includes:
So as to sandwich the substrate in a direction parallel to the main surface of the substrate
And is disposed on or near a virtual straight line substantially perpendicular to the direction of the centrifugal force and passing through the center of the substrate. The side member has a width of an upper end portion in a direction parallel to the main surface of the substrate smaller than an outer dimension of the substrate. Further, the cassette supporting member has a substrate receiving portion having a plurality of receiving grooves with which an outer peripheral portion of the substrate is engaged, and the substrate is in a state where the substrate holding cassette is supported by the cassette supporting member. It engages with the receiving groove of the substrate receiving portion and separates from the substrate holding cassette.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A centrifugal drying apparatus as an embodiment of the present invention will be described below with reference to the accompanying drawings. The centrifugal drying apparatus according to the present invention is configured similarly to the conventional apparatus shown in FIG. 13 except for the parts described below.
The description of the entire apparatus will be omitted and only the main part will be described. Further, in the following description, the same reference numerals are used for the same or corresponding components as those of the conventional centrifugal drying apparatus and for the substrates to be handled.

FIG. 1 shows a longitudinal section of a centrifugal drying apparatus as an embodiment of the present invention. In the figure, reference numeral 20 denotes a small substrate holding cassette used in the centrifugal drying apparatus. I have. First, the substrate holding cassette 20 will be described in detail.

As shown in FIGS. 2 and 3, the substrate holding cassette 20 is formed in a symmetrical shape in each of the left-right direction and the front-back direction, and is provided to extend in the front-back direction in parallel with each other. For example, four longitudinal substrate support members 2
1 and a pair of front and rear plate- shaped side members 22 interposed between the ends of the respective substrate support members 21 to mutually connect the ends.
Consists of Note that the substrate holding cassette 20 holds a plurality of, in this case, for example, 25 substrates 3 aligned at equal pitches so that their main surfaces are parallel to each other. The direction parallel to the plane is called the left-right direction, and the alignment direction is called the front-back direction. As is clear from FIGS. 2 and 3, the substrate support member 21 and the side member 22 are fastened by small screws 23 and are integrated with each other.
3 and 4, reference numeral 21a denotes the small screw 2
3 shows a screw hole formed in the substrate supporting member 21 to be screwed.

Here, each of the substrate support members 21 will be described in detail.

The four substrate supporting members 21 are formed in the same shape and the same size, and are spaced apart from each other along the outer periphery of the substrate 3 to be held as shown in FIG. . And the cross-sectional shape is a circular shape with a part protruding. As is apparent from FIG. 4, receiving grooves 21b for the number of the substrates 3 to be held are arranged in the protruding portion along the longitudinal direction. 21b so that the adjacent substrates 3 do not contact each other. In addition,
The substrate support member 21 is not limited to such a shape, and may employ various configurations. Also, below the side member 22
The substrate support member 21 located at the first substrate support member,
Above the first substrate support member (above the side member 22)
The substrate support member 21 located at
Name.

Each of the substrate support members 21 and the side members 22 is made of, for example, a perfluoroalkoxy fluororesin (P
FA) It is formed using polytetrafluoroethylene (PTFE) or polyetheretherketone (PEEK) as a raw material.

In the substrate holding cassette 20 having the above-described structure, the maximum dimension in the direction parallel to the main surface of the substrate 3 to be held, that is, in the left-right direction, is the maximum width dimension B ₁ of the side members 22 provided at both front and rear ends. see FIG. 3) is it, the maximum dimension B ₁ represents, is set smaller than the outer dimensions of the substrate 3 in the same direction, i.e. the diameter D.
As shown in FIG. 3, the maximum dimension B ₁ represents a side member 2
2 is the width of the upper half, and the width B ₂ of the lower half is set smaller than the upper half. Further, in FIG. 3, reference numeral H indicates the height of the substrate holding cassette 20, and the height H is set to be about １ ／ or less of the diameter D of the substrate 2.

As described above, the small substrate holding cassette 20
By using, the centrifugal drying apparatus can be sufficiently reduced in size for drying a large-diameter substrate. Also,
The small substrate holding cassette 20 has a small amount of liquid adhering thereto, so that it is quickly dried and generates a static electricity which adversely affects the substrate 3 due to a small contact area with air. Can be suppressed.

As shown in FIGS. 2 and 3, the substrate holding cassette 20 is provided with a handle 25. Specifically, two handles 25 are arranged on each of the outer surfaces of both side members 22 forming ends in the alignment direction of the substrate 3, that is, in the front-rear direction, and are fastened to the side members 22 by machine screws 26. Have been. As described above, the handle 25 is provided so as not to protrude in the direction parallel to the main surface of the substrate 3, that is, in the left-right direction, but to protrude in the front-rear direction which is the alignment direction of the substrate 3. maximum dimension does not become a dimension B ₁ or more as described above in the left and right direction of 20.

The handle 25 holds the substrate holding cassette 20 when the operator holds the substrate holding cassette 20.
It is used when the substrate holding cassette 20 is supported by a device that automatically loads and unloads the substrate holding cassette 20 with respect to a centrifugal dryer or the like.

That is, the loading / unloading device is provided in parallel with the centrifugal drying device according to the present invention, and a hanger member 29 for suspending and supporting the substrate holding cassette 20 with its handle 25.
Holding means (shown in FIG. 2) for holding the substrate holding cassette 20 (not shown except for the hanger member 29)
And transport means (not shown) for transporting the substrate holding cassette 20 to and from the centrifugal dryer by moving the holding means along a predetermined path. As shown in FIG. 2, the hanger member 29 is engaged with the handle 25 at its claw portion 29a.

In this embodiment, the substrate holding cassette 20 is formed by assembling the substrate supporting member 21, the side member 22, and the handle 25 with each other using small screws. It is also possible to integrally mold the holding cassette 20 as a whole. By thus forming an integrally molded product, generation of dust (particles) from the substrate holding cassette is reduced.

Next, a cradle 31 as a cassette holding member which is mounted on the centrifugal drying apparatus according to the present invention and in which the above-described substrate holding cassette 20 is removably mounted will be described.

As shown in FIG. 1, a plurality of cradles 31 are provided, and are provided on a turntable 1 as a rotating body at a position deviated from a rotation center 1a.
These cradles 31 are arranged symmetrically with respect to the rotation center 1 a of the turntable 1.

As shown in FIG. 1, the turntable 1 is enclosed by a cylindrical casing 34 which is open at the top, and is provided with a lid 35 which opens and closes the opening. The lid 35 is rotatably (indicated by an arrow L) attached to a frame 36 constituting a main body of the centrifugal drying apparatus by a hinge 37.
A driving force is applied by a cylinder (not shown) to open and close.

As shown by a solid line and a two-dot chain line in FIG. 1, each cradle 31 is located at a position where the main surface of the substrate 3 held by the cradle 31 is substantially perpendicular to the rotation center 1a of the turntable 1. It is rotatable between other parallel positions (indicated by an arrow M in FIG. 1). Specifically, the cradle 31 is fitted to a shaft 39 at an end thereof, and the shaft 39 is rotatably attached to the turntable 1. And
A cylinder (not shown) is provided as positioning means for rotating and positioning the cradle 31 between the two positions by rotating the shaft 39.

Here, the configuration of the cradle 31 will be described in detail.

As shown in FIGS. 5 and 6, the cradle 3
1 has a case 41 formed in a substantially rectangular parallelepiped shape and opened at an upper portion. As shown in both figures, a reinforcing member 42 having an L-shaped cross section is fixed to the lower surface of the case 41. As shown in FIG. 5, an overhang portion 41a is provided at one end of the case 41, and a boss 41b (also shown in FIG. 6) is fixed to the overhang portion 41a.
b is fitted to the shaft 39 described above, and is fixed to the shaft 39 by a key or the like.

As is apparent from FIG.
A pair of cassette support members 45 for supporting the substrate holding cassette 20 housed in the cradle 31 on the side where the centrifugal force acts, that is, on the side where the centrifugal force is directed, are fixed to the bottom and both left and right sides of the cradle 31. Has been established. The two cassette supporting members 45 are formed in the same shape and the same size as each other, and are made of the same material as that of the substrate holding cassette 20 (PFA, PTFE, PEE, for example).
K etc.) are selected. FIG. 7 shows this cassette support member 45.
FIG. 5 is a perspective view of the cassette supporting member 45, which is particularly apparent from FIG.
As shown in FIG. 5, the case 41 is provided so as to extend over substantially the entire length of the case 41. As shown in FIGS. 6 and 7, a flat surface 45b perpendicular to a flat bottom surface 45a is formed at both ends of the cassette support member 45 and on the back side thereof. 41 are in contact with both left and right inner side surfaces. The back side sandwiched between the two flat surfaces 45b is a concave portion 45c.

As shown in FIGS. 6 and 7, the cassette supporting member 45 has two flat upper and lower flat bearing surfaces 45 on its inner side.
e and 45f are formed, and the substrate holding cassette 20
The four substrate support members 21 provided are supported over substantially the entire length by the support surfaces 45e and 45f. With this configuration, the substrate holding cassette 20 is evenly supported by the cassette supporting member 45 over substantially the entire bottom surface thereof, and is reinforced by the cassette supporting member 45. Note that the bearing surface 45f is the first bearing surface, the bearing
The surface 45e is also referred to as a second bearing surface.

As shown in FIGS. 5 and 6, the cradle 3
A pair of left and right board receiving members 48 is attached to the upper part of the one case 41. The two substrate receiving members 48 are formed in the same shape and the same size as each other, and are made of, for example, the same material as the cassette supporting member 45 and the substrate holding cassette 20 (PFA, PTFE,
PEEK etc.) are used. FIG. 8 shows this substrate receiving member 4.
Although it is a perspective view of FIG. 8, as is particularly clear from the figure, the substrate receiving member 48 is formed in a substantially rectangular plate shape as a whole. Then, as is apparent from FIG. 5, they are provided to extend in the direction in which the substrates 3 are arranged. 6 and 8
As shown in FIG. 7, the substrate receiving member 48 has receiving grooves 48a with which the outer peripheral portions of the respective substrates 3 are engaged, which are arranged side by side in the longitudinal direction.

When the cradle 31 rotates downward as shown by the two-dot chain line in FIG. 1, the above-mentioned substrate receiving member 48 prevents the substrates 3 from falling off from the substrate holding cassette 20. Act as a means. Since such a drop-off preventing means is provided, and the above-mentioned cassette supporting member 45 serves to reinforce the substrate holding cassette 20, the substrate holding cassette 20 can be made small as described above. It has become.

As described above, a plurality of, in this case, a pair of, the substrate receiving members 48 are provided so as to sandwich the substrate 3 in a direction parallel to the main surface of the substrate 3. As described above, since the substrate 3 is sandwiched between the plurality of substrate receiving members 48, the substrate 3 is stabilized, and the falling off can be reliably prevented. As is clear from FIG. 6, the substrate receiving member 48 is disposed on or near an imaginary straight line 50 passing through the center of the substrate 3 substantially perpendicularly to the direction of the centrifugal force. Due to such a configuration, the substrate 3 is most effectively received in order to prevent the substrate 3 from falling off.

Here, the mounting structure of the board receiving member 48 to the cradle 31 will be described in detail.

As shown in FIG. 8, a step portion 48b is formed on the back side of the substrate receiving member 48. As shown in FIG. 6, the case 4 of the cradle 31 is provided with the step portion 48b.
1 to be placed on the upper edge. As shown in FIG. 5, an enlarged diameter portion 41d extending outward is formed at the upper edge of the case 41.
8, the enlarged diameter portion 41d is removed over a range R (see FIG. 5).

As shown in FIGS. 5 and 6, a rectangular mounting plate 52 is provided so as to sandwich the upper portion of the case 41 between the mounting plate 52 and the substrate receiving member 48.
At the bottom thereof together with the substrate receiving member 48, the case 41
Are tightened with small screws 53. The upper portion of the mounting plate 52 is fastened to the board receiving member 48 by a small screw 53. As is apparent from FIG. 8, the substrate receiving member 48 has an insertion hole 48d through which the small screw 53 is inserted.

Next, the operation of the centrifugal drying apparatus having the above-described configuration will be briefly described.

First, in FIG. 1, the lid 35 provided on the chamber 34 is opened by a cylinder (not shown) for operating the lid 35. Then, each cradle 31 is rotated upward by the operation of another cylinder (not shown) to stand by.

In this state, the substrate holding cassette 20 accommodating the substrate 3 to be dried is put in the cradle 31, and is placed on the cassette supporting member 45 provided at the bottom of the cradle 31. At this time, each substrate 3 is engaged with each receiving groove 48a of the substrate receiving member 48 provided in the cradle 31.

Next, the above-mentioned cylinders are operated in reverse, each cradle 31 is rotated downward, and the lid 35 on the chamber 34 is closed. Thus, cradle 31
Is rotated downward, so that the main surface of each substrate 3 is substantially perpendicular to the rotation center 1a of the turntable 1 (see FIG. 1). In this state, the turntable 1 is driven to rotate. As a result, a centrifugal force acts on each substrate 3 and the liquid adhering to the surface of the substrate 3 is scattered.

When the liquid is removed from the surface of each substrate 3 and drying is completed, the turntable 1 is stopped. Then, while rotating the cradle 31 upward, the lid 3
Open 5. In this state, the substrate 3 is collected together with the substrate holding cassette 20 holding the substrate.

The loading and unloading of the substrate holding cassette 20 with respect to the cradle 31 can be easily performed in a single time, similarly to the conventional substrate holding cassette.

In the present embodiment, the substrate receiving member 48 is provided as means for preventing the substrate 3 from falling off from the substrate holding cassette 20. However, as another means for preventing the substrate 3 from falling off, for example, the cradle 31 itself is dedicated. It is conceivable to provide a lid (not shown) that can be freely opened and closed. However, when the lid is provided in this manner, the configuration becomes relatively complicated, and this lid must be operated each time the substrate holding cassette 20 is taken in and out, resulting in an increase in time loss.

In this embodiment, the substrate 3 to be handled has a diameter of, for example, 8 inches (about 200 mm).
When handling a silicon wafer having a larger diameter or a smaller diameter, not only the various dimensions of the substrate holding cassette 20 are appropriately increased or decreased, but also a substrate which is not circular as in the present embodiment is handled. In this case, it is needless to mention that the dimensions of each part are changed in accordance with the case.

The centrifugal drying apparatus of the present embodiment is installed with the rotation center 1a of the turntable 1 substantially coincident with the direction of gravity. In addition, the centrifugal drying apparatus in which the rotation center is horizontal is also used. The present invention can be applied.

FIG. 9 shows another cradle 61 to be provided as a cassette member in the centrifugal drying apparatus shown in FIG. Note that the cradle 61 has the same configuration as the cradle 31 described with reference to FIGS. 5 to 8 except for the parts described below, so that the description of the cradle as a whole will be omitted and only the main part will be described. In the following description, the same components as those of the cradle 31 are denoted by the same reference numerals.

As shown in FIG. 9, in the cradle 61, a pair of cassette supporting members 62 provided to support the substrate holding cassette 20 on the side of the centrifugal force acting direction.
The cassette support member 4 provided in the cradle 31
5 is different. The pair of cassette support members 62 are formed in the same shape and the same size as each other.
The cradle 31 is formed of the same material.

FIGS. 10 to 12 show the details of the cassette support member 62. FIG. As is apparent from the drawings, the cassette support member 62 has upper and lower flat support surfaces 62a and 62b formed thereon, and as shown in FIG. Book substrate support member 2
1 is supported by these bearing surfaces 62a and 62b over substantially the entire length.

The cassette bearing member 62 has the bearing surface 6
2b, a substrate receiving portion 62d extending perpendicular to the bottom surface 62c is formed, and a plurality of receiving grooves 6 with which the outer peripheral portion of each substrate 3 engages are formed on the top of the substrate receiving portion 62d.
2e are juxtaposed. As is apparent from FIG. 9, when the substrate holding cassette 20 is supported by the cassette supporting member 62, each substrate 3 is inserted into the receiving groove 62.
e, and is detached from the substrate holding cassette 20 (the receiving groove 21b formed in the substrate supporting member 21). At this time, each substrate 3 also engages with the receiving groove 48a of the substrate receiving member 48 disposed above. As described above, when the substrate 3 is loaded into the cradle 61, it is firmly supported by each receiving groove.
The substrate 3 is stable, and a good dry state by high-speed rotation can be obtained. Further, since the centrifugal drying is performed in a state where each substrate 3 is transferred from the substrate holding cassette 20 to the cassette supporting member 62, the wear of the substrate holding cassette 20 is suppressed.

As shown in FIGS. 10 and 11, a bolt (not shown) for fastening the cassette support member 62 to the case 41 as a cradle body is inserted through the cassette support member 62. Insertion hole 62f is formed. In addition, a concave portion 62g whose bottom surface is located at a position lower than the above-described bearing surfaces 62a and 62b is formed,
A through hole 62h is formed in the bottom surface of the concave portion 62g. When the substrate holding cassette 20 is placed on the cassette supporting member 62 together with the substrate 3 held by the substrate holding cassette 20, the concave portion 62g and the through hole 62h
0 and the liquid dropped from the substrate 3 are collected into a cradle 61.
It is for dropping below.

[0050]

As described above, in the centrifugal drying apparatus according to the present invention, a cassette supporting member for supporting the substrate holding cassette on the side of the centrifugal force acting to perform a reinforcing action on the substrate holding cassette, It has a drop-off preventing means for preventing the substrate from dropping out of the holding cassette, thereby making it possible to reduce the size of the substrate holding cassette. Specifically, the maximum dimension of the substrate holding cassette in a direction parallel to the main surface of the substrate to be held is smaller than the outer dimension of the substrate in the direction. Since a small substrate holding cassette can be used in this way, there is an effect that the substrate can be sufficiently reduced in size for drying a large-diameter substrate. In addition, a small substrate holding cassette can be dried quickly due to a small amount of liquid adhering thereto, and can suppress generation of static electricity which adversely affects the substrate due to a small contact area with air. The effect is obtained.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of a centrifugal drying apparatus as an embodiment of the present invention.

FIG. 2 is a side view including a partial cross section showing a substrate holding cassette to be loaded into the centrifugal drying apparatus shown in FIG. 1 and substrates held in the cassette.

FIG. 3 is a front view including a half section of the substrate holding cassette and the substrate shown in FIG. 2;

FIG. 4 is a perspective view showing a substrate supporting member included in the substrate holding cassette shown in FIGS. 2 and 3, and a part of a substrate held by the substrate supporting member.

FIG. 5 is a longitudinal sectional view showing a cradle as a cassette holding member provided in the centrifugal drying device shown in FIG. 1 and a substrate holding cassette housed in the cradle.

FIG. 6 is a view on arrow AA of FIG. 5;

FIG. 7 is a perspective view showing a cassette support member provided in the cradle shown in FIGS. 5 and 6;

FIG. 8 is a perspective view of a board receiving member as a drop-off preventing means provided on the cradle shown in FIGS. 5 and 6.

FIG. 9 is a longitudinal sectional view showing another cradle to be provided as a cassette holding member in the centrifugal drying apparatus shown in FIG. 1 and a substrate holding cassette housed in the cradle.

FIG. 10 is a side view of a cassette support member provided in the cradle shown in FIG. 9;

FIG. 11 is a view taken in the direction of arrows EE in FIG. 10;

FIG. 12 is a view on arrow FF in FIG. 10;

FIG. 13 is a longitudinal sectional view of a conventional centrifugal dryer.

FIG. 14 is a longitudinal sectional view of a substrate holding cassette to be loaded into the centrifugal drying device shown in FIG.

FIG. 15 is a sectional view taken along the line CC of FIG. 14;

FIG. 16 is a longitudinal sectional view of another substrate holding cassette to be loaded in the centrifugal drying device shown in FIG.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Turntable (rotary body) 1a Rotation center 3 Substrate 8 Motor 20 Substrate holding cassette 21 Substrate support member 22 Side member 25 Handle 29 Hanger member 31, 61 Cradle (cassette holding member) 41 Case 45, 62 Cassette support member 48 Substrate receiver Members (means for preventing falling off)

──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int.Cl. ⁷ , DB name) H01L 21/304 651 F26B 5/08 F26B 11/08

Claims (6)

(57) [Claims] A plurality of substrate supporting members having a plurality of receiving grooves with which an outer peripheral portion of the substrate is engaged along a longitudinal direction, the plurality of substrate supporting members being arranged parallel to and separated from each other along the outer periphery of the substrate ;
A main surface of the substrate held and engaged with the receiving groove of the substrate holding cassette having a flat plate-shaped side member interconnecting the ends of the substrate supporting members with respect to a rotation center of a rotating body; A centrifugal drying device that dries the substrate by being loaded so as to be orthogonal and rotating the rotating body, wherein the substrate support member is located below the side member and
A first substrate supporting member attached to a side member;
1 and is located above the substrate supporting member.
Ri Tagged consists of a second substrate supporting member, the substrate wherein provided on the rotating body and the cassette holding member for detachably accommodating hold the substrate holding cassette, in a rectangular plate shape at the top of the cassette holding member A plurality of substrate receiving members which are provided extending in the alignment direction and have a plurality of receiving grooves with which the outer peripheral portion of the substrate is engaged in the longitudinal direction to prevent the substrate from falling off; and provided apart from the bottom, and a plurality of cassettes bearing member for supporting the substrate holding cassette, the cassette supporting member includes a first bearing surface for supporting the first substrate supporting member, pre-Symbol A second support surface for supporting a second substrate support member, wherein the substrate holding cassette is supported at a position inside the outer dimensions of the substrate. 2. The centrifugal drying apparatus according to claim 1, wherein the cassette holding member is located at a position deviated from a rotation center of the rotating body. 3. The cassette holding member is movable between a position at which a main surface of the substrate is substantially perpendicular to a rotation center of the rotator and a position at which the main surface is substantially parallel to the rotation center of the rotator. The centrifugal drying device according to claim 1 or 2, wherein 4. The substrate receiving member, wherein the substrate receives the substrate
Provided in a direction parallel to the main surface of the
The centrifugal drying apparatus according to any one of claims 1 to 3, wherein the centrifugal drying apparatus is disposed on or near a virtual straight line that is substantially perpendicular to the direction of the force and passes through the center of the substrate. . 5. The side member according to claim 1, wherein a width of an upper end in a direction parallel to a main surface of the substrate is smaller than an outer dimension of the substrate. The centrifugal drying device according to the above. 6. The cassette supporting member has a substrate receiving portion having a plurality of receiving grooves with which an outer peripheral portion of the substrate is engaged,
2. The substrate according to claim 1, wherein the substrate is detached from the substrate holding cassette by engaging with the receiving groove of the substrate receiving portion when the substrate holding cassette is supported by the cassette supporting member. Any one of 5
The centrifugal drying device according to the above.