JP2000353685A - Centrifugal drying apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a centrifugal drying apparatus, in which the destruction of a substrate cam be surely detected as the substrate is destroyed during drying, when a turntable is rotated. SOLUTION: This centrifugal drying apparatus is provided with a means for detecting abnormal vibrations, consisting of a vibration detecting means which detects a vibration producing on the wall surface of a chamber 6, when a substrate 20 is destroyed during the rotation of a turntable 1 and its broken piece hits the wall surface thereof, a comparison means for comparing the output signal from the vibration detecting means with a preset reference level signal, and a deciding means for deciding whether the substrate 20 is destroyed on the basis of an output from the comparison means, ad the reference level signal in a means for detecting the abnormal vibration is set variably according to the rotary condition of the turntable 1, thereby detecting the destruction of the substrate 20.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a centrifugal drying apparatus for drying a liquid adhered to a substrate such as a silicon wafer after cleaning by a centrifugal force and drying the liquid by flowing air over the surface of the substrate by rotation. In particular, the present invention relates to a centrifugal drying apparatus capable of promptly responding, for example, immediately stopping when a substrate is broken during operation of the apparatus.

[0002]

2. Description of the Related Art Conventionally, a centrifugal drying apparatus of this kind is shown in FIG.
The following are known.

[0003] As shown in FIG. 6, a centrifugal drying apparatus includes a turntable 1 as a rotating body rotatable along a horizontal plane.
It has. Further, for example, two cradles 2 as substrate holding members are mounted on the turntable 1 at appropriate positions on the outer peripheral portion deviated from the rotation center 1a. These cradle 2 are arranged symmetrically with respect to the rotation center 1 a of the turntable 1.

The turntable 1 is disposed in a substantially cylindrical chamber 6 provided on a chamber mounting table 5, and is mounted on an upper end of a spindle 7.
The spindle 7 is supported by bearings 9 and 10 near its upper and lower ends. A pulley 11 is fitted on the lower end of the spindle 7.
Is rotated by a driving force from a motor (not shown) applied through a belt (not shown) wrapped around the pulley 11.

[0005] A cylindrical anti-vibration plate 13 is fitted to a substantially central portion in the axial direction of the spindle 7. A cylinder 14 is disposed on the side of the anti-vibration plate 13, and a roller 15 rotatably mounted on the output shaft of the cylinder 14 is pressed against the outer peripheral surface of the anti-vibration plate 13 to rotate the shaft of the spindle 7. Prevent run-out.

Further, the chamber 6 is opened at the upper part, and a lid 17 for opening and closing the opening is provided. The lid 17 is rotatably supported by a hinge 18 (indicated by an arrow E), and is opened and closed by a driving force applied by a cylinder (not shown).

[0007] A packing 19 is provided over the entire periphery of the upper edge of the chamber 6, and the lid 17 comes into close contact with the packing 19 when closed.

On the other hand, the above-mentioned cradles 2 and 2 hold a plurality of substrates 20 such as silicon wafers arranged at equal pitches so that their main surfaces are parallel to each other. As shown by the solid line and the two-dot chain line in the figure, both cradle 2 and 2 are in a state where the main surface of the held substrate 20 is substantially orthogonal to the rotation center 1a of the turntable 1, that is, in a substantially horizontal state It is rotatable between the position and another position that is substantially parallel (indicated by an arrow F in the figure). The main surface means a main surface of the substrate 20, and refers to a front surface that is a pattern surface and a back surface that is not a pattern surface, such as a semiconductor wafer. And, the main surfaces mean that the main surfaces of a plurality of substrates face each other. For example, in the case of a semiconductor wafer, the front and back surfaces of adjacent substrates, the front and back surfaces, and the back and back surfaces face each other. State.

The cradle 2 has a shaft 22 fitted at one end thereof, and the shaft 22 is rotatably attached to the turntable 1. A projection 2a is provided at the other end of the cradle 2,2, that is, at a free end, and the projection 2a is engaged with a stopper 23 fixed on the cradle 2,2, whereby the cradle 2,2 is moved to the lower rotation position. Is positioned. The shaft 22 is driven to rotate by a cylinder (not shown), and the cradle 2 is positioned at the above position.

The intake of the atmosphere into the chamber 6 is as follows.
It is made through an air inlet 17 a provided at the center of the lid 17. On the other hand, the air used for drying the substrate 20 in the chamber 6, that is, the atmosphere, is guided outward through an opening (not shown) formed in the side surface of the chamber 6, and 25 exhaust ports 2
It is discharged from 5a.

In the exhaust pipe 25, there are provided a plurality of blocking plates 26 for blocking liquid scattered from the substrate 20 by centrifugal force from reaching the outside.

Next, the operation of the centrifugal drying apparatus will be described.

The following operation is controlled by a control unit including a microcomputer (not shown).

First, as shown in FIG. 6, the lid 17 is opened by a cylinder (not shown) as shown by a two-dot chain line. In addition, the stopper plate 13 is pressed against the cylinder 14 to fix the spindle 7. Then, after the other cradle 2, 2 is rotated upward by the operation of another cylinder (not shown) to stand by, the substrate 20 to be dried is stored in each cradle 2, 2.

When the storage of the substrate 20 is completed, the cylinders are operated to rotate the two cradles 2 and 2 downward. 17 closes. By rotating the cradle 2 downward in this manner, the main surface of each substrate 20 held by the cradle 2, 2 is substantially perpendicular to the rotation center 1a of the turntable 1. In this state, the turntable 1 is driven to rotate. As a result, a centrifugal force acts to scatter the cleaning liquid adhering to each substrate 20, and at the same time, air flows on the surface of each substrate 20 by rotation, thereby drying each substrate.

When each substrate is sufficiently dried, the turntable 1 is stopped. Then, the lid 17 is opened, and the stopper plate 13 is pressed against the cylinder 14 to fix the spindle 7. Thereafter, the cradle 2 is rotated upward.
In this state, the substrates 20 in the cradle 2 are collected.

The motor (not shown) for rotating the turntable 1 is of an inverter type. To stop the turntable 1, an electromagnetic force in the opposite direction is applied.

The above-described series of operations is performed when there is no problem. However, if the substrate 20 during rotation of the turntable 1 is broken due to centrifugal force or the like, the substrate 20 is destroyed due to the breakage of the substrate 20. Abnormal sound is generated when the debris collides with the chamber wall or the like. This abnormal sound is collected by an acoustic sensor 42 composed of a microphone attached by a bracket 43 in the base 41 communicating with the exhaust port 25a of the exhaust pipe 25, and the signal amplified by the amplifier is previously set. When the reference level is exceeded, it is determined that the sound is abnormal, and the turntable 1 is immediately stopped. At the same time, an alarm buzzer or an alarm lamp (not shown) prompts the operator to take action.

[0019]

In the conventional centrifugal drying apparatus, when the substrate 20 is broken while the turntable 1 of the rotating body is rotating at high speed, that is, during the drying operation, the debris collides with the wall surface of the chamber 6 or the like. The abnormal sound generated by this is captured by the microphone as the acoustic sensor 42.

The acoustic signal emitted from the acoustic sensor 42 due to the abnormal sound is amplified by an amplifier, and when the amplified signal exceeds a certain reference level, an alarm is output to stop the turntable of the centrifugal dryer. .
However, since the microphone as the acoustic sensor 42 detects faint sound, there is a possibility that a malfunction may occur due to sound or noise generated during rotation of the turntable.

The abnormal sound is detected during the high speed rotation of the turntable of the rotating body, and is performed from the start of rotation of the rotating body to reaching the high speed rotation and from the deceleration from the high speed rotation to the stop. No abnormal sound was detected during this period.

In view of the above, the present invention has been made in view of the above point, and it is possible to reliably detect the destruction of a substrate generated during a drying operation from the start of rotation of a rotating body to the stop thereof. It is an object of the present invention to provide a centrifugal dryer that can be used.

[0023]

In a centrifugal drying apparatus according to the present invention, a plurality of substrates are aligned at a position deviated from the center of rotation of a rotating body so that their main surfaces are parallel to each other, and the main surfaces are aligned. In a centrifugal drying device that is loaded in a state substantially orthogonal to the rotation center and dries the substrate by rotating and driving the rotating body, for detecting vibration generated during the operation of the centrifugal drying device. Vibration detection means;
Comparing means for comparing an output signal from the vibration detecting means with a preset reference level signal, and abnormal vibration detecting means including determining means for determining breakage of the substrate based on an output of the comparing means, The reference level signal of the comparing means in the abnormal vibration detecting means is variably set according to the rotation state of the rotating body.

Further, the abnormal vibration detecting means of the centrifugal drying apparatus according to the present invention stores a signal output by the vibration detecting means at the time of normal drying of the centrifugal drying apparatus as vibration data, and sets a maximum value of the stored vibration data. An automatic reference level setting means for adding an offset value to the value and setting the data resulting from the addition as a reference level signal for the comparing means.

[0025]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A centrifugal dryer according to an embodiment of the present invention will be described with reference to the drawings.
The centrifugal drying apparatus according to the present invention has the same configuration as the centrifugal drying apparatus shown in FIG. 6 except for the parts described below, and overlapping parts are omitted in the description of the configuration and operation of the entire apparatus, Only the main part will be explained. Also,
In the following description and FIG. 1, the same components as those of the centrifugal drying device shown in FIG. 6 are denoted by the same reference numerals.

The centrifugal drying apparatus according to the present invention is provided with abnormal vibration detecting means for detecting abnormal vibration generated when the substrate is broken during the drying operation.

Hereinafter, an abnormal vibration detecting means for detecting abnormal vibration caused by destruction of the substrate during operation of the centrifugal drying apparatus according to the present invention will be described.

As shown in FIG. 2, the abnormal vibration detecting means comprises:
A vibration detection sensor 60 including a piezoelectric element as vibration detection means for detecting vibration, and a comparison means for amplifying and integrating a signal from the vibration detection sensor 60 and comparing the integrated signal with a reference level signal. And a microcomputer 45 as a judging means for judging the breakage of the substrate by receiving a signal from the vibration detector 58.

The microcomputer 45 issues a command to the motor driving device 49 to control the operation of the entire centrifugal drying apparatus, such as controlling the rotation and stop of the motor 44. Also,
The motor 44 is for driving the turntable 1 to rotate.

As shown in FIG. 1, a vibration detecting sensor 60 composed of a piezoelectric element as a vibration detecting means is provided in a chamber 6.
Is attached so as to be in close contact with the side surface of the substrate 20.
Is to detect the acceleration component of the vibration generated in the chamber 6 due to the destruction of.

FIG. 3 shows a vibration detector 58 which amplifies and integrates a signal from the vibration detection sensor 60, compares the integrated signal with a reference level signal, and detects abnormal vibration.
This will be described with reference to FIG.

As shown in FIG. 3, a vibration detector 58 includes an amplifier 61 connected sequentially from a vibration detection sensor 60 and a first
It has an integrator 62, a second integrator 63, a voltage comparator 64, a signal converter 67, an alarm output device 66, a level setting device 65, and a signal converter 67.

A level setter 65 is connected to one input side of the voltage comparator 64 as a comparing means.
The level setting device 65 is a D / A converter, and an input terminal of the D / A converter is connected to an input / output unit 45 a of the microcomputer 45. The microcomputer 45 inputs digital data to an input terminal of a D / A converter in the level setting device 65, and the D / A converter converts the digital data from the microcomputer 45 into an analog signal.

The level setter 65 inputs the analog signal output from the D / A converter to one input terminal of the voltage comparator 64 as a reference level signal for judging abnormal vibration.

The amplifier 61 amplifies the voltage of the electric charge generated in the piezoelectric element of the vibration detecting sensor 60 by the acceleration of the vibration at a predetermined amplification factor. The signal amplified by the amplifier 61 is input to the first integrator 62.

The first integrator 62 is composed of an operational amplifier, a capacitor, a resistor, and the like. The first integrator 62 integrates a signal from the amplifier 61 by an integrating circuit, and outputs a voltage proportional to the time integral of the input voltage. That is, the input signal of the first integrator 62 is a voltage proportional to the magnitude of the acceleration of the vibration, and by integrating the acceleration with time, a voltage proportional to the magnitude of the velocity of the vibration is output from the first integrator 62 by the first integrator 62. 2 is output to the integrator 63.

The second integrator 63, like the first integrator 62, comprises an operational amplifier, a capacitor, a resistor, and the like. The second integrator 63 integrates the signal from the first integrator 62 by an integrating circuit, and performs time integration of the input voltage. Outputs a voltage proportional to. That is,
The input signal of the second integrator 63 is a voltage proportional to the magnitude of the vibration velocity, and by integrating the velocity with time, a voltage proportional to the magnitude of the displacement (amplitude) of the vibration is converted to the voltage of the second integrator 6.
3 is output to the voltage comparator 64 and the signal converter 67.

The voltage comparator 64 compares the reference level signal from the level setter 65 as a level setting means with the signal output from the second integrator 63, and compares the result of the comparison with the alarm output unit. 66 is output.

That is, the voltage comparator 64 determines whether the amplitude of the output signal from the second integrator 63 is
When the amplitude of the output signal from the second integrator 63 is smaller than the reference level signal of the level setter 65, the output is "0 (low level)." Is output to the alarm output device 66.

The alarm output unit 66 has a signal holding circuit (not shown). When "1 (high level signal)" is output from the voltage comparator 64, "1 (high level signal)" is output thereafter. And outputs it to the input / output unit 45a of the microcomputer 45. The release of the signal holding of the signal holding circuit of the alarm output device 66 is performed by the microcomputer 4.
Release signal (Reset signal) from the input / output unit 45a of No. 5
It is performed by

The signal converter 67 of the vibration detector 58
Is an A / D converter, which converts an analog voltage value proportional to the magnitude of the displacement (amplitude) of the vibration output from the second integrator 63 into a digital value. The digital value as the displacement data of the vibration output by the signal converter 67 is
It is output to the input / output unit 45a of the microcomputer 45. The digital output value of the signal converter 67 is used as vibration data when calculating the reference level signal of the level setter 65.

Hereinafter, the substrate 20 by the abnormal vibration detecting means will be described.
A processing method for detecting the destruction of the object will be described.

When the substrate 20 is broken during the operation of the centrifugal drying device, a debris of the substrate 20 collides with a wall surface of the chamber 6 or the like, so that an impact force is applied to the chamber 6. Also,
When the substrate 20 is broken, the equilibrium state of the turntable 1 is destroyed, and vibration occurs in the turntable 1. Vibration due to an impact caused by colliding with the wall surface of the chamber 6 or the like due to the destruction of the substrate 20 is captured by the vibration detection sensor 60.

The signal of the acceleration component of the vibration generated from the vibration detection sensor 60 due to the vibration due to the impact is amplified by the amplifier 61 shown in FIG. 3 and input to the first integrator 62. The first integrator 62 integrates an acceleration signal generated by the vibration of the chamber 6 by an integration circuit, and outputs a signal as a velocity component of the vibration to the second integrator 63.

The second integrator 63 integrates the velocity signal of the vibration from the first integrator by the integration circuit, and outputs a displacement (amplitude) signal of the vibration to the voltage comparator 64.

The voltage comparator 64 compares the reference level signal set by the level setter 65 with the signal output by the second integrator 63, and the signal output by the second integrator 63 is compared with the reference level signal. If it is larger than the signal,
“1 (high level signal)” is output to the alarm output device 66.

When the output from the voltage comparator 64 changes to "1 (high level signal)",
The signal holding circuit holds “1 (high level signal)” and outputs “1 (high level signal)” as an alarm signal.

The microcomputer 45 checks the output signal from the alarm output unit 66, and when the output signal of the alarm output unit 66 is "1 (high level signal)", judges that the board 20 has been broken, and rotates the motor. Perform a stop.

Next, the process of calculating the reference level signal set by the level setting unit 65 will be described with reference to the flowchart shown in FIG. The following process of calculating the reference level signal is executed based on a program stored in a memory (storage device, not shown) of the microcomputer 45.

The microcomputer 45 outputs a rotation start signal of the motor to the motor driving device 49 to rotate the motor (step S1).

The vibration detection sensor 60 attached to the chamber 6 detects the acceleration generated in the chamber 6,
The detected acceleration signal is output to the vibration detector 58. The signal output from the vibration detection sensor 60 is amplified by the amplifier 61 of the vibration detector 58, and is amplified by the first integrator 62 and the second integrator 62.
The integration is performed by the integrator 63. The integrated signal is converted into vibration data as a digital value by the signal converter 67, and the converted data is read from the input / output unit 45a of the microcomputer 45 (step S2), and is stored in the memory (not shown) of the microcomputer 45. (Step S3).

The microcomputer 45 reads the vibration data from the signal converter 67 and stores it in the memory of the microcomputer 45 a predetermined number of times (step S4).

Next, it is confirmed that the rotation of the motor 44 has reached the high-speed rotation (step S5), the vibration data is read from the signal converter 67 (step S6) and stored in the memory of the microcomputer 45 (step S6). Step S7)
Is executed a predetermined number of times (step S8).

After the vibration data has been read a predetermined number of times,
The rotation of the motor 44 is reduced (step S9), and the vibration data is read from the signal converter 67 (step S10).
The storage in the memory of the microcomputer 45 (step S11) is executed a predetermined number of times (step S1).
2).

Thereafter, it is confirmed that the rotation of the motor 44 has stopped (step S13).

By the above operation, three kinds of rotation states of the motor 44, that is, first, during the period from the start of rotation of the motor to high-speed rotation (the period is referred to as mode 1), and second, during the high-speed rotation operation (during this Is the mode 2), and thirdly, the vibration data corresponding to each rotation from the high-speed rotation to the deceleration to the stop (the period is referred to as the mode 3) is stored in the memory of the microcomputer 44.

Next, the maximum value of the vibration data stored in the memory of the microcomputer 45 in each of the mode 1, mode 2, and mode 3 according to the rotation state of the motor 44 is searched (step S14).

A preset offset value is added to the searched maximum value of the vibration data of each mode (step S15), and the added result is stored in the memory of the microcomputer 44 as a reference level signal of each mode. Hold.

The offset value is used to correct the variation in the vibration data because the vibration data generated in each normal drying operation of the centrifugal drying apparatus (drying operation in which the substrate is not broken) is not constant. Is the correction value.

In the following description, the value of the reference level signal calculated in mode 1 is (D1), the value of the reference level signal calculated in mode 2 is (D2), and the value of the reference level signal calculated in mode 3 is (D1). Is (D3).

The operator confirms that the substrate has not been destroyed in the above-described operation of calculating the reference level signal and that the drying operation has been completed normally. The operation of calculating the reference level signal may be performed only once, for example, at the start of operation immediately after the introduction of the centrifugal drying apparatus. Moreover, you may perform it suitably as needed.

The values of the three kinds of reference level signals were calculated according to the rotation state of the motor. However, since the vibrations generated in the chamber 6 differ depending on the rotation state of the motor, the optimum values according to the rotation state of the motor are determined. This is for setting a reference level signal.

Next, the operation of detecting abnormal vibration of the centrifugal dryer based on the reference level signal calculated by the processing shown in FIG. 4 will be described with reference to the flowchart shown in FIG.

First, digital data (D1) serving as a mode 1 reference level signal is output from the input / output unit 45a of the microcomputer 45 to the level setter 65 (step S30).

Next, a rotation start signal of the motor 44 is output from the input / output unit 45a of the microcomputer 45 to the motor driving device 49, and the motor 44 starts rotating (step S31).

The microcomputer 45 includes an input / output unit 45
The output signal of the alarm output device 66 is read from a (step S32).

Next, it is checked whether the signal of the alarm output device 66 read in step S32 is "1 (high level signal)" (step S33).

If the alarm output device 66 is "0 (low level signal)", it is checked whether the motor has reached the prescribed high speed rotation (step S34). If not, the operation from step 32 is performed. repeat.

When the alarm output unit 66 is "1 (high level signal)", it is determined that the substrate 20 during the drying operation has been destroyed, and a stop signal for the motor 44 is issued to the motor driving unit 49, and the motor is immediately stopped. 44 is stopped (step S
43).

Then, an alarm signal is output to an alarm device (not shown) (step S44), and an operator is urged to take action by an alarm buzzer or an alarm lamp (not shown).

When the motor 44 reaches a high speed, digital data (D2) serving as a mode 2 reference level signal is output from the input / output unit 45a of the microcomputer 45 to the level setter 65 (step S35).

The microcomputer 45 includes an input / output unit 4
The signal of the alarm output device 66 is read from 5a (step S36).

It is checked whether the signal of the alarm output device 66 read in step S37 is "1 (high level signal)" (step S37).

When the alarm output device 66 is "0 (low level signal)", it is checked whether or not the high-speed rotation of the motor has started a deceleration after a predetermined time has elapsed (step S3).
8) During high-speed rotation, the operation from step 36 is repeated.

When the alarm output device 66 is "1" (high level signal), it is determined that the substrate 20 during the drying operation has been destroyed, and the processing from step S43 is performed.

When the motor 44 starts to decelerate, digital data (D3) serving as a mode 3 reference level signal is output from the input / output unit 45a of the microcomputer 45 to the level setter 65 (step S39).

The microcomputer 45 includes an input / output unit 4
The signal of the alarm output device 66 is read from 5a (step S40).

It is checked whether the signal of the alarm output device 66 read in step S37 is "1 (high level signal)" (step S41).

If the alarm output unit 66 is "0 (low level signal)", it is checked whether the rotation of the motor has stopped (step S42). If the motor is decelerating, the operation from step 40 is repeated.

When the alarm output device 66 is "1" (high level signal), it is determined that the substrate 20 during the drying operation has been destroyed, and the processing from step S43 is performed.

By changing the reference level signal according to the rotation state of the motor 44 by the above operation, the motor 4
The destruction of the substrate 20 generated during the drying operation until the rotation of the substrate 4 stops until the rotation of the substrate 4 can be reliably detected.

In the embodiment, the configuration is shown in which the substrates 20 are directly loaded into the cradle 2, 2 rotatably mounted on the turntable 1, but a cassette (FIG. (Not shown).

The transfer of the substrate 20 to the cradle 2 or 2 is not described in the centrifugal drying apparatus according to the present invention. Substrate 20 stored in
Can be applied to any case of manually transferring. The operation control when the substrate 20 is automatically transferred is controlled by a computer (not shown) provided in an automatic cleaning device or the like in addition to the microcomputer 45 shown in FIG.

[0084]

As described above, the centrifugal drying apparatus according to the present invention is provided with the abnormal vibration detecting means for detecting the abnormal vibration generated from the start to the end of the drying operation of the apparatus. Is broken, and abnormal vibrations caused by the debris colliding with the chamber wall or the like can be reliably detected. Therefore, as compared with the detection by the acoustic sensor of the conventional centrifugal dryer, the number of erroneous detections is small, and the detection rate of the substrate destruction is high.

Further, the centrifugal drying apparatus according to the present invention can detect the abnormal sound not only when the substrate is destroyed but also when a component such as a screw included in the turntable is detached and is blown off. It is possible to prevent or minimize the damage to the substrate, such as stopping and generating an alarm.

The centrifugal drying apparatus according to the present invention calculates a reference level signal for detecting abnormal vibration from a signal output from the vibration detecting means during normal drying, and automatically sets the calculated reference level signal. The setting operation and adjustment of the reference level signal for detection become unnecessary, and the operation rate of the device is improved.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of a centrifugal drying device according to the present invention.

FIG. 2 is a block diagram showing an operation control system of the centrifugal drying apparatus shown in FIG.

FIG. 3 is a block diagram illustrating a configuration of a vibration detector illustrated in FIG. 2;

FIG. 4 is a flowchart illustrating a process of calculating a reference level signal.

FIG. 5 is a flowchart showing the operation of the centrifugal drying apparatus shown in FIG.

FIG. 6 is a longitudinal sectional view of a conventional centrifugal dryer.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Turntable (rotating body) 1a Center of rotation (of turntable 1) 2 Cradle 6 Chamber 7 Spindle 17 Lid 20 Substrate 25 Exhaust tube 25a Exhaust port 41 (of exhaust tube 25) 41 Base unit 44 Motor 45 Microcomputer 45a Microcomputer Input / output unit 49 Motor drive device 58 Vibration detector 60 Vibration detection sensor 61 Amplifier 62 First integrator 63 Second integrator 64 Voltage comparator 65 Level setting device (D / A converter) 66 Alarm output device 67 Signal converter (A / D converter)

Continued on front page F-term (reference) 3B201 AA03 AA43 AB33 AB44 AB50 CC13 CD41 3L113 AA03 AB08 AC45 AC46 AC54 AC57 AC63 AC65 AC67 AC75 AC76 AC81 AC90 BA34 CA06 CA20 CB25 CB28 CB34 CB37 DA04 DA21 DA25

Claims (2)

[Claims] At a position deviated from a rotation center of a rotating body,
A plurality of substrates are aligned so that their main surfaces are parallel to each other, and the main surfaces are loaded in a state where the main surfaces are substantially orthogonal to the rotation center, and the substrate is driven by rotating the rotating body. In a centrifugal drying apparatus for drying, a vibration detecting means for detecting vibration generated during the operation of the centrifugal drying apparatus, a comparing means for comparing an output signal from the vibration detecting means with a preset reference level signal, An abnormal vibration detection unit comprising: a determination unit that determines the destruction of the substrate based on an output of the comparison unit. The reference level signal of the comparison unit in the abnormal vibration detection unit according to a rotation state of the rotating body. A centrifugal drying apparatus characterized by being variably set. 2. The abnormal vibration detecting means stores a signal output by the vibration detecting means during normal drying of the centrifugal drying apparatus as vibration data, and adds an offset value to a maximum value of the stored vibration data. 2. The centrifugal drying apparatus according to claim 1, further comprising an automatic reference level setting means for setting data obtained by the addition as a reference level signal of said comparison means.