JP2000353684A - Centrifugal drying apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a centrifugal drying apparatus, in which the destruction of a substrate can be surely detected when the substrate is destroyed during drying. SOLUTION: This centrifugal drying apparatus is provided with a means for detecting an abnormal sound, when a substrate 20 is destroyed, while a turntable is rotated at a high speed and a means for detecting an abnormal vibration which detects an abnormal vibration producing when the substrate 20 is destroyed and its broken piece hits the wall surface of a chamber, and it decides whether the substrate is destroyed, on the basis of the detection signal emitted from the means for detecting abnormal sounds and the means for detecting abnormal vibration, and stops the rotary body it decides that the substrate has been destroyed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a centrifugal drying apparatus for drying a liquid adhered to a substrate such as a silicon wafer after cleaning by a centrifugal force and drying the liquid by flowing air over the surface of the substrate by rotation. In particular, the present invention relates to a centrifugal drying apparatus capable of promptly responding, for example, immediately stopping when a substrate is broken during operation of the apparatus.

[0002]

2. Description of the Related Art Conventionally, a centrifugal drying apparatus of this kind is shown in FIG.
The following are known.

[0003] As shown in FIG. 5, a centrifugal drying apparatus is a turntable 1 as a rotating body rotatable along a horizontal plane.
It has. Further, for example, two cradles 2 as substrate holding members are mounted on the turntable 1 at appropriate positions on the outer peripheral portion deviated from the rotation center 1a. These cradle 2 are arranged symmetrically with respect to the rotation center 1 a of the turntable 1.

The turntable 1 is disposed in a substantially cylindrical chamber 6 provided on a chamber mounting table 5, and is mounted on an upper end of a spindle 7.
The spindle 7 is supported by bearings 9 and 10 near its upper and lower ends. A pulley 11 is fitted on the lower end of the spindle 7.
Is rotated by a driving force from a motor (not shown) applied through a belt (not shown) wrapped around the pulley 11.

[0005] A cylindrical anti-vibration plate 13 is fitted to a substantially central portion in the axial direction of the spindle 7. A cylinder 14 is disposed on the side of the anti-vibration plate 13, and a roller 15 rotatably mounted on the output shaft of the cylinder 14 is pressed against the outer peripheral surface of the anti-vibration plate 13 to rotate the shaft of the spindle 7. Prevent run-out.

Further, the chamber 6 is opened at the upper part, and a lid 17 for opening and closing the opening is provided. The lid 17 is rotatably supported by a hinge 18 (indicated by an arrow E), and is opened and closed by a driving force applied by a cylinder (not shown).

[0007] A packing 19 is provided over the entire periphery of the upper edge of the chamber 6, and the lid 17 comes into close contact with the packing 19 when closed.

On the other hand, the above-mentioned cradles 2 and 2 hold a plurality of substrates 20 such as silicon wafers arranged at equal pitches so that their main surfaces are parallel to each other. As shown by the solid line and the two-dot chain line in the figure, both cradle 2 and 2 are in a state where the main surface of the held substrate 20 is substantially orthogonal to the rotation center 1a of the turntable 1, that is, in a substantially horizontal state It is rotatable between the position and another position that is substantially parallel (indicated by an arrow F in the figure). The main surface means a main surface of the substrate 20, and refers to a front surface that is a pattern surface and a back surface that is not a pattern surface, such as a semiconductor wafer. And, the main surfaces mean that the main surfaces of a plurality of substrates face each other. For example, in the case of a semiconductor wafer, the front and back surfaces of adjacent substrates, the front and back surfaces, and the back and back surfaces face each other. State.

A shaft 22 is fitted at one end of each of the cradle 2 and 2, and the shaft 22 is rotatably attached to the turntable 1.
A projection 2a is provided at the other end of the cradle 2,2, that is, at a free end, and the projection 2a is engaged with a stopper 23 fixed on the cradle 2,2, thereby rotating both cradle 2,2 downward. Positioned in position. The shaft 22 is driven to rotate by a cylinder (not shown), and the cradle 2 is positioned at the above position.

The intake of the atmosphere into the chamber 6 is as follows.
It is made through an air inlet 17 a provided at the center of the lid 17. On the other hand, the air used for drying the substrate 20 in the chamber 6, that is, the atmosphere, is guided outward through an opening (not shown) formed in the side surface of the chamber 6, and 25 exhaust ports 2
It is discharged from 5a.

In the exhaust pipe 25, there are provided a plurality of blocking plates 26 for blocking liquid scattered from the substrate 20 by centrifugal force from reaching the outside.

Next, the operation of the centrifugal drying apparatus will be described.

The following operation is controlled by a control unit including a microcomputer (not shown).

First, as shown in FIG. 5, the lid 17 is opened by a cylinder (not shown) as shown by a two-dot chain line. In addition, the stopper plate 13 is pressed against the cylinder 14 to fix the spindle 7. Then, after the other cradle 2, 2 is rotated upward by the operation of another cylinder (not shown) to stand by, the substrate 20 to be dried is stored in each cradle 2, 2.

When the storage of the substrate 20 is completed, the cylinders are operated to rotate both cradle 2 and 2 downward,
The cylinder 14 separates from the vibration-preventing plate 13 to release the fixing of the spindle 7, and the lid 17 is closed. By rotating the cradle 2 downward in this manner, the main surface of each substrate 20 held by the cradle 2, 2 is substantially perpendicular to the rotation center 1a of the turntable 1. In this state, the turntable 1 is driven to rotate. As a result, a centrifugal force acts to scatter the cleaning liquid adhering to each substrate 20, and at the same time, air flows on the surface of each substrate 20 by rotation, thereby drying each substrate.

When each substrate is sufficiently dried, the turntable 1 is stopped. Then, the lid 17 is opened, and the stopper plate 13 is pressed against the cylinder 14 to fix the spindle 7. Thereafter, the cradle 2 is rotated upward. In this state, the substrates 20 in the cradle 2 are collected.

The motor (not shown) for rotating the turntable 1 is of an inverter type. To stop the turntable 1, an electromagnetic force in the opposite direction is applied.

The above-described series of operations is performed when there is no problem. However, if the substrate 20 during rotation of the turntable 1 is broken due to centrifugal force or the like, the substrate 20 is destroyed due to the breakage of the substrate 20. Abnormal sound is generated when the debris collides with the chamber wall or the like. This abnormal sound is collected by the acoustic sensor 42 attached to the exhaust port 25a of the exhaust pipe 25, and when the signal amplified by the amplifier exceeds a previously set reference level, it is determined to be an abnormal sound.
Stop the turntable 1 immediately. At the same time,
The operator is prompted to take action by an alarm buzzer or an alarm lamp (not shown).

[0019]

In the conventional centrifugal drying apparatus, when the substrate 20 is broken while the turntable 1 of the rotating body is rotating at high speed, that is, during the drying operation, the debris collides with the wall surface of the chamber 6 or the like. The abnormal sound generated by this is captured by the microphone as the acoustic sensor 42.

The acoustic signal emitted from the acoustic sensor 42 due to the abnormal sound is amplified by an amplifier, and when the amplified signal exceeds a certain reference level, an alarm is output to stop the turntable of the centrifugal dryer. .
However, since the microphone as the acoustic sensor 42 detects faint sound, there is a possibility that a malfunction may occur due to sound or noise generated during rotation of the turntable.

Accordingly, the present invention has been made in view of the above points, and an object of the present invention is to provide a centrifugal drying apparatus capable of reliably detecting breakage of a substrate.

[0022]

In a centrifugal drying apparatus according to the present invention, a plurality of substrates are aligned at a position deviated from the center of rotation of a rotating body so that their main surfaces are parallel to each other, and the main surfaces are aligned. In a centrifugal drying apparatus for loading the substrate in a state substantially perpendicular to the rotation center and drying the substrate by rotationally driving the rotating body, to detect an abnormal sound generated during the operation of the centrifugal drying apparatus. And an abnormal vibration detecting means for detecting abnormal vibration generated during the operation of the centrifugal drying apparatus.

Further, in the centrifugal drying apparatus according to the present invention, the rotating body is stopped based on a detection signal issued from the abnormal sound detecting means and the abnormal vibration detecting means.

Further, the abnormal sound detecting means of the centrifugal drying apparatus according to the present invention includes an ultrasonic sensor for detecting sound in an ultrasonic band, and an acoustic detection for amplifying a signal from the ultrasonic sensor to detect an abnormal sound. And a microcomputer that performs processing by receiving a signal from the sound detection unit.

Further, the abnormal vibration detecting means of the centrifugal drying apparatus according to the present invention includes: a vibration detecting sensor for detecting vibration;
It comprises a vibration detecting section for amplifying and integrating the signal from the vibration detecting sensor to detect abnormal vibration, and a microcomputer for receiving and processing the signal from the vibration detecting section.

Further, the ultrasonic sensor of the abnormal sound detecting means of the centrifugal drying apparatus according to the present invention is arranged near an exhaust port from which an atmosphere used for drying the substrate is exhausted.

Further, the vibration detecting sensor of the abnormal vibration detecting means of the centrifugal drying apparatus according to the present invention is provided on a side surface on the chamber.

[0028]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A centrifugal dryer according to an embodiment of the present invention will be described with reference to the drawings.
The centrifugal drying apparatus according to the present invention has the same configuration as the centrifugal drying apparatus shown in FIG. 5 except for the parts described below, and overlapping parts are omitted in the description of the configuration and operation of the entire apparatus, Only the main part will be explained. Also,
In the following description and FIG. 1, the same components as those of the centrifugal drying apparatus shown in FIG. 5 are denoted by the same reference numerals.

The centrifugal drying apparatus according to the present invention includes abnormal sound detecting means for detecting abnormal sound generated when the substrate is destroyed in the drying operation, and abnormal vibration detecting means for detecting abnormal vibration generated when the substrate is destroyed. I have.

An abnormal sound detecting means for detecting an abnormal sound generated during the drying operation of the centrifugal drying apparatus according to the present invention will be described.

As shown in FIG. 2, the abnormal sound detecting means includes an ultrasonic sensor 50 for detecting sound in an ultrasonic band, a sound / vibration for amplifying a signal from the ultrasonic sensor 50 and detecting an abnormal sound. It comprises a sound detection section 58a of the detector 58 and a microcomputer 45 which performs processing by receiving a signal from the sound detection section 58a of the sound / vibration detector 58.

Note that the microcomputer 45 is
A command is issued to the motor driving device 49 to rotate the motor 44,
The operation control of the whole centrifugal drying apparatus, such as the control of stop, is performed. The motor 44 is for rotating the turntable 1.

The ultrasonic sensor 50 of the abnormal sound detecting means
Has a cylindrical base portion 41 as shown in FIG.
The base 41 is attached so as to communicate with the exhaust port 25 a of the exhaust tube 25. As shown in the figure, an ultrasonic sensor 50 of abnormal sound detecting means is disposed in the internal space of the base portion 41, and
It is attached to one. However, the ultrasonic sensor 5
Numeral 0 points the sound receiving side to the exhaust port 25a.

The sound detector 58a of the sound / vibration detector 58 for amplifying the signal from the ultrasonic sensor 50 and detecting an abnormal sound will be described below with reference to FIG.

As shown in FIG. 3, the sound / vibration detector 58
The acoustic detection unit 58a includes a first amplifier 51, a filter 52, a first voltage comparator 53, and a first alarm output unit 55 which are sequentially connected from the ultrasonic sensor 50.

A first level setter 5 as level setting means is connected to one input side of the first voltage comparator 53.
4 are connected. The first level setter 54 has a D
The input terminal of the D / A converter is connected to the input / output unit 45a of the microcomputer 45. Input / output unit 45a of microcomputer 45
The digital data is input to the input terminal of the D / A converter as the first level setter 54, and is converted into an analog signal by the D / A converter.

The D / A converter serving as the first level setter 54 uses an analog signal output from the D / A converter as a reference level signal for determining an abnormal sound.
The signal is input to one input terminal of the first voltage comparator 53.

The first amplifier 51 amplifies the signal output from the ultrasonic sensor 50 at a predetermined amplification factor, and outputs the amplified signal to the filter 52. The filter 52 includes:
The signal from the first amplifier 51 is discriminated from a signal having only a predetermined frequency and output to the first voltage comparator 53. The first voltage comparator 53 compares the magnitude of the reference level signal from the first level setter 54 as the level setting means with the signal output from the filter 52, and compares the comparison result with the first alarm output unit. Output to 55.

That is, the first voltage comparator 53 sets the amplitude of the output voltage signal from the filter 52 to the first level setter 5.
If the amplitude of the output signal from the filter 52 is smaller than the reference level signal of the first level setter 54, "0 (low level)" Signal) "is output.

The first alarm output unit 55 has a signal holding circuit (not shown). When “1 (high-level signal)” is output from the first voltage comparator 53, the first alarm output unit 55 is set to “1 (high-level signal)”. Signal) ", and outputs it to the input / output unit 45a of the microcomputer 45.

The release of the signal holding of the signal holding circuit of the first alarm output unit 55 is performed by a release signal (Reset signal) from the input / output unit 45a of the microcomputer 45.

Next, an abnormal vibration detecting means for detecting abnormal vibration generated during operation of the centrifugal dryer according to the present invention will be described.

When the substrate 20 is broken during the operation of the centrifugal drying device, the debris of the substrate 20 collides with the wall surface of the chamber 6 or the like, and an impact force is applied to the chamber 6. Also,
When the substrate 20 is broken, the equilibrium state of the turntable 1 is destroyed, and vibration occurs in the turntable 1.

As shown in FIG. 2, the abnormal vibration detecting means comprises:
Vibration detection sensor 60 composed of a piezoelectric element for detecting vibration
And a signal from the vibration detector 58b of the sound / vibration detector 58 for amplifying and integrating the signal from the vibration detection sensor 60 to detect abnormal vibration and a signal from the vibration detector 58b of the sound / vibration detector 58. It comprises a microcomputer 45 for receiving and processing.

As shown in FIG. 1, a vibration detecting sensor 60 composed of a piezoelectric element as a vibration detecting means is mounted so as to be in close contact with the side surface of the chamber 6, and the vibration generated in the chamber 6 due to the destruction of the substrate 20. This is for detecting an acceleration component.

The signal detected by the vibration detection sensor 60 is input to a vibration detection unit 58b of the sound / vibration detector 58.

A sound / vibration detector 5 for amplifying and integrating the signal from the vibration detection sensor 60 to detect abnormal vibration will be described below.
8 will be described with reference to FIG.

As shown in FIG. 3, the sound / vibration detector 58
The vibration detection unit 58b includes a second amplifier 61, a first integrator 62, a second integrator 63, a second voltage comparator 64, and a second alarm output unit 66 which are sequentially connected from the vibration detection sensor 60.
Consists of

A second level setter 6 as level setting means is connected to one input side of the second voltage comparator 64.
5 is connected. The second level setter 65 has a D
The input terminal of the D / A converter is connected to the input / output unit 45a of the microcomputer 45. Digital data is input from the microcomputer 45 to an input terminal of a D / A converter as the second level setting device 65, and is converted into an analog signal by the D / A converter.

The D / A converter serving as the second level setter 65 uses one of the second voltage comparators 64 as an analog signal output from the D / A converter as a reference level signal for judging abnormal vibration. Input terminal.

The second amplifier 61 amplifies the voltage by the electric charge generated in the piezoelectric element of the vibration detecting sensor 60 by the acceleration of the vibration at a predetermined amplification factor. The signal amplified by the second amplifier 61 is input to the first integrator 62.

The first integrator 62 is composed of an operational amplifier, a capacitor, a resistor, etc., integrates the signal from the second amplifier 61 by an integrating circuit, and outputs a voltage proportional to the time integral of the input voltage. I do. That is, the first integrator 6
The input signal of No. 2 is a voltage proportional to the magnitude of the acceleration of the vibration, and a voltage proportional to the magnitude of the velocity of the vibration is output from the first integrator 62 by integrating the acceleration with time.

The second integrator 63 is composed of an operational amplifier, a capacitor, a resistor and the like, like the first integrator 62.
The signal from the first integrator 62 is integrated by an integration circuit, and a voltage proportional to the time integration of the input voltage is output.
That is, the input signal of the second integrator 63 is a voltage proportional to the magnitude of the vibration speed, and by integrating the velocity with time, a voltage proportional to the magnitude of the displacement (amplitude) of the vibration is converted to the second integrator 63. 63 to the second voltage comparator 64.

The second voltage comparator 64 includes a reference level signal from a second level setter 65 as a level setting means,
The magnitude of the signal output from the second integrator 63 is compared with the signal output from the second integrator 63, and the comparison result is output to the second alarm output unit 66.

That is, the second voltage comparator 64 sets the amplitude of the output signal from the second integrator 63 to the second level setter 65.
When the amplitude of the output signal from the second integrator 63 is smaller than the reference level signal of the second level setter 65, "1 (high level signal)" is output. (Low level signal) ".

The second alarm output unit 66 has a signal holding circuit, and when “1 (high level signal)” is output from the second voltage comparator 64, holds “1 (high level signal)” thereafter. Then, the data is output to the input / output unit 45a of the microcomputer 45. The release of the signal holding circuit of the second alarm output device 66 is performed by a release signal (Reset signal) from the input / output unit 45a of the microcomputer 45.

A method for detecting the destruction of the substrate 20 when the substrate 20 is broken during the drying operation by the centrifugal drying apparatus will be described below.

When the turntable 1 as a rotating body is rotated at a high speed, that is, when the substrate 20 is broken during the drying operation, the ultrasonic sensor 50 detects an abnormal sound caused by the debris colliding with the wall of the chamber 6 or the like. Can be

Based on the abnormal sound, the ultrasonic sensor 50
Is amplified by the first amplifier 51 of the sound detector 58a of the sound / vibration detector 58 shown in FIG.

The signal amplified by the first amplifier circuit 51 is input to a filter 52. The filter 52 includes a first
The signal from the amplifier 51 is discriminated from a signal having only a predetermined frequency and output to the first voltage comparator 53. First voltage comparator 5
3 compares the magnitude of the reference level signal from the first level setter 54 as the level setting means with the signal output from the filter 52, and adjusts the amplitude of the output voltage signal from the filter 52 to the first level setter. If it is larger than the reference level signal from 54, “1 (high level signal)” is output to the first alarm output unit 55.

When the output from the first voltage comparator 53 changes to "1 (high-level signal)", the first alarm output unit 55 holds "1 (high-level signal)" in the signal holding circuit. "1 (high level signal)" is output as an alarm signal.

On the other hand, when the substrate 20 is broken while the turntable 1 as a rotating body is rotating at a high speed, that is, during the drying operation, the vibration caused by the impact of the debris colliding with the wall surface of the chamber 6 causes the ultrasonic wave. Sensor 50
And the vibration detection sensor 60 captures the signal.

The signal of the acceleration component of the vibration generated by the vibration detection sensor 60 due to the vibration due to the impact is shown in FIG.
Are amplified by a second amplifier 61 shown in FIG.
2 is input. The first integrator 62 includes the chamber 6
The acceleration signal generated by the vibration of
A signal as a velocity component of the vibration is output to the second integrator 63.

The second integrator 63 integrates the velocity signal of the vibration from the first integrator by an integration circuit, and outputs a displacement (amplitude) signal of the vibration to the second voltage comparator 64.

The second voltage comparator 64 is the second level setter 6
The magnitude of the reference level signal set by the second integrator 63 and the magnitude of the signal output by the second integrator 63 are compared.
When the signal output by the signal No. 3 is larger than the reference level signal, “1 (high level signal)” is output to the second alarm output device 66.

When the output from the second voltage comparator 64 changes to "1 (high level signal)", the second alarm output unit 66 holds "1 (high level signal)" by a signal holding circuit. "1 (high level signal)" is output as an alarm signal.

The microcomputer 45 checks the output signals from the first alarm output unit 55 and the second alarm output unit 66, and the output signals of the first alarm output unit 55 and the second alarm output unit 66 are both "1 ( (High level signal) ", it is determined that the substrate 20 has been broken, and the rotation of the motor is stopped.

The operation of detecting an abnormality in the centrifugal drying apparatus described above will be described with reference to a flowchart shown in FIG.

First, binary digital data serving as a reference level signal for detecting an abnormal sound is output from the input / output unit 45a of the microcomputer 45 to the first level setting unit 54 (step S1).

Subsequently, binary digital data serving as a reference level signal for detecting abnormal vibration is output from the input / output unit 45a of the microcomputer 45 to the second level setter 65 (step S2).

Next, a rotation start signal of the motor 44 is output from the input / output unit 45a of the microcomputer 45 to the motor driving device 49, and the motor 44 starts rotating (step S3).

The microcomputer 45 outputs a motor rotation start signal to the motor driving device 49 and simultaneously activates a timer (not shown) built in the microcomputer 45 (step S4). The timer sets the time required for the turntable 1 as a rotating body to reach a prescribed high-speed rotation.

After a predetermined time has elapsed, the timer of the microcomputer 45 notifies the CPU (Central Processing Unit) of the microcomputer 45 of the completion of the operation (step S).
5).

After the motor reaches a predetermined high-speed rotation, the microcomputer 45 outputs a Reset signal to the first alarm output unit 55 and the second alarm output unit 66 to release the signal holding circuit (step S6). .

Next, the microcomputer 45 reads the signal of the first alarm output unit 55 from the input / output unit 45a (step S7) and reads the signal from the second alarm output unit 66 (step S8).

Next, it is checked whether the signals of the first alarm output unit 55 and the second alarm output unit 66 read in step S7 and step 8 are both "1 (high level signal)" (step S9).

When both the first alarm output unit 55 and the second alarm output unit 66 are "0 (low level signal)", it is checked whether the motor has rotated for a specified time (step S10). , Step 7
Repeat the operation from.

When both the first alarm output unit 55 and the second alarm output unit 66 are "1 (high level signal)" in step S9, it is determined that the substrate 20 during the drying operation has been destroyed. , A stop signal for the motor 44 is issued, and the motor 44 is stopped immediately (step S
11).

Then, an alarm signal is output to an alarm device (not shown) (step S12), and the operator is urged to take action by an alarm buzzer or an alarm lamp (not shown).

With the above configuration, the destruction of the substrate 20 can be reliably detected.

In this embodiment, the substrate 20 is directly loaded into the cradle 2, 2 rotatably mounted on the turntable 1, but the cassette (see FIG. (Not shown).

The transfer of the substrate 20 to the cradle 2 or 2 is not described in the centrifugal drying apparatus according to the present invention. Substrate 20 stored in
Can be applied to any case of manually transferring. The operation control when the substrate 20 is automatically transferred is controlled by a computer (not shown) provided in an automatic cleaning device or the like in addition to the microcomputer 45 shown in FIG.

[0083]

As described above, in the centrifugal drying apparatus according to the present invention, the abnormal sound detecting means for detecting the abnormal sound generated during the operation of the apparatus and the abnormal vibration detecting means for detecting the abnormal vibration are provided. In addition, abnormal sounds and abnormal vibrations caused by the substrate being broken during the drying operation and the debris colliding with the chamber wall or the like can be reliably detected. In addition, in order to determine the destruction of the substrate by the alarm signal from the abnormal detection means sound and abnormal vibration detection means, compared with the detection of only the acoustic sensor of the conventional centrifugal drying device,
It is possible to provide a centrifugal drying apparatus that has a low false detection and a high detection rate of substrate destruction.

The abnormal sound can be detected not only when the substrate is destroyed but also when a component such as a screw included in the turntable is detached and flipped off, and the turntable is immediately stopped and an alarm is generated. In addition, damage to the substrate can be prevented or minimized.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of a centrifugal drying device according to the present invention.

FIG. 2 is a block diagram showing an operation control system of the centrifugal drying apparatus shown in FIG.

FIG. 3 is a block diagram illustrating a configuration of a sound / vibration detector illustrated in FIG. 2;

FIG. 4 is a flowchart showing an operation of the centrifugal drying apparatus shown in FIG.

FIG. 5 is a longitudinal sectional view of a conventional centrifugal dryer.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Turntable (rotary body) 1a Center of rotation (of turntable 1) 2 Cradle 6 Chamber 7 Spindle 17 Lid 20 Substrate 25 Exhaust tube 25a Exhaust port 41 (of exhaust tube 25) 41 Base unit 42 Acoustic sensor 43 Bracket 44 Motor 45 Microcomputer 45a Input / output unit of microcomputer 47 Protective member 49 Motor drive device 50 Ultrasonic sensor 51 First amplifier 52 Filter 53 First voltage comparator 54 First level setting device (D / A converter) 55 First alarm output device 58 sound / vibration detector 58a sound detection unit 58b vibration detection unit 60 vibration detection sensor 61 second amplifier 62 first integrator 63 second integrator 64 second voltage comparator 65 second level setter (D / A converter) 66 2nd alarm output device

Continued on front page F term (reference) 3L113 AA01 AA04 AB08 AC07 AC45 AC46 AC49 AC57 AC63 AC67 AC73 AC75 AC76 AC77 AC78 AC79 AC81 AC82 AC90 BA34 CA20 CB28 CB34 CB35 CB37 CB38 DA21 DA25

Claims (6)

[Claims] At a position deviated from a rotation center of a rotating body,
A plurality of substrates are loaded so that their main surfaces are aligned so that their main surfaces are parallel to each other and the main surfaces are substantially orthogonal to the rotation center, and the substrate is driven by rotating the rotating body. In a centrifugal drying apparatus for drying, an abnormal sound detecting means for detecting an abnormal sound generated during operation of the centrifugal drying apparatus and an abnormal vibration detecting means for detecting abnormal vibration generated during operation of the centrifugal drying apparatus are provided. A centrifugal dryer. 2. The centrifugal drying apparatus according to claim 1, wherein said rotating body is stopped based on detection signals issued from said abnormal sound detecting means and said abnormal vibration detecting means. 3. The abnormal sound detecting means includes: an ultrasonic sensor that detects sound in an ultrasonic band; a sound detecting unit that amplifies a signal from the ultrasonic sensor to detect an abnormal sound; 2. The centrifugal drying apparatus according to claim 1, further comprising a microcomputer that performs a process upon receiving the signal. 4. An abnormal vibration detecting means, a vibration detecting sensor for detecting vibration, a vibration detecting section for amplifying and integrating a signal from the vibration detecting sensor to detect abnormal vibration, and a signal from the vibration detecting section. 2. The centrifugal drying apparatus according to claim 1, further comprising a microcomputer that performs processing upon receiving. 5. The ultrasonic sensor of the abnormal sound detecting means,
4. The centrifugal drying apparatus according to claim 3, wherein the apparatus is disposed near an exhaust port from which an atmosphere used for drying the substrate is discharged. 6. The centrifugal drying apparatus according to claim 4, wherein the vibration detecting sensor of the abnormal vibration detecting means is provided on a side surface on the chamber.