JP2006210460A5 - - Google Patents

Claims (7)

Using an electron optical system that includes a plurality of blanking electrodes that individually control irradiation of a plurality of electron beams and a transmission line that transmits a drive signal for driving the blanking electrodes, an exposure beam is applied to the sample . In an electron beam exposure apparatus that converges and exposes a predetermined pattern,
The transmission line includes an optical transmission line, a first photoelectric conversion unit that converts the drive signal from an electric signal to an optical signal on the start point side of the optical transmission line, and the first photoelectric conversion unit on the end point side of the optical transmission line. characterized by a second photoelectric conversion unit for converting the converted optical signal by the photoelectric conversion section into an electrical signal, and inputs the electric signal converted by the second photoelectric conversion unit to said blanking electrodes An electron beam exposure apparatus. The electron beam exposure apparatus according to claim 1, wherein the optical transmission path has an optical waveguide formed on a substrate. A first substrate on which the blanking electrode is formed, and the optical transmission path is formed on the first substrate together with the second photoelectric conversion unit placed at an end point thereof. 3. The electron beam exposure apparatus according to claim 2, wherein A first substrate on which the blanking electrode is formed; and a second substrate for relaying a drive signal to the blanking electrode formed on the first substrate, wherein the optical transmission path is The electron beam exposure apparatus according to claim 2, wherein the electron beam exposure apparatus is formed on the second substrate together with the second photoelectric conversion unit placed at the end point. The second photoelectric conversion unit is a power generating element, it electron beam exposure apparatus according to any one of claims 1 to 4, characterized in. An optical fiber that transmits the optical signal converted by the first photoelectric conversion unit; and an optical coupler that is placed at a starting point of the optical waveguide and is coupled to the optical fiber, and the drive signal is via the street the optical coupler of the optical fiber is introduced into the optical waveguide, the blanking drives the ranking electrodes, that the electron beam exposure apparatus according to any one of claims 2 to 5, wherein . Device using an electron beam exposure apparatus according to any one of claims 1 to 6, and performing exposure to the sample, a step of developing the exposed the sample, characterized by comprising Production method.