CN102209605B

CN102209605B - Bonded structural body, bonding method and bonding apparatus

Info

Publication number: CN102209605B
Application number: CN200980145041.7A
Authority: CN
Inventors: 铃木端生; 矶明典; 藤森康朝
Original assignee: Shibaura Mechatronics Corp
Current assignee: Shibaura Mechatronics Corp
Priority date: 2008-09-29
Filing date: 2009-09-17
Publication date: 2014-03-05
Anticipated expiration: 2029-09-17
Also published as: TWI483800B; CN102209605A; KR20110079697A; WO2010035696A1; JPWO2010035696A1; TW201028237A; JP4883734B2; KR101266614B1

Abstract

A bonded structural body is provided with a first bonding member and a second bonding member, and at least the first bonding member or the second bonding member has a groove section on a bonding interface between the first bonding member and the second bonding member. In a state where the space in the groove section is depressurized and the first bonding member and the second bonding member are adhered, the first bonding member and the second bonding member are bonded. The bonding members or the bonding member and a light absorbing material can be easily adhered to each other when bonding is performed.

Description

Bonded structure, joint method and engagement device

Technical field

The present invention relates to bonded structure, joint method and engagement device, the bonded structure, joint method and the engagement device that in particular to a plurality of members are adjacent to mutually, engage.

Background technology

As the method that engages a plurality of members, there is the method for using frit or lead etc.For example, PDP(Plasma Display Panel), SED(Surface-conduction Electron-emitter Display), FED(Field Emission Display), there is the situation with following structure in the luminous plaque such as OLED display (Organic Electroluminescence Display), two glass engage by frame.Their the above-mentioned method of the many employings of joint.

In addition, the method as engaging a plurality of members, has the joint method that utilizes Ear Mucosa Treated by He Ne Laser Irradiation.This joint method is to make engagement member be heated melting and by the method for again solidifying to engage by absorb the energy of the laser irradiate at joint interface.For example there is following method, in the situation that engaging resin molding, in order further to improve laser absorption, on joint interface, sandwich light absorption material (the JP 2002-67164 of Japan communique).In addition, identical therewith, also have following joint method, on joint interface, apply light absorbent or it adhered to or carry out film forming, the inorganic substances such as glass are engaged to (the JP 2003-170290 of Japan communique).

This joint method of Ear Mucosa Treated by He Ne Laser Irradiation that utilizes is owing to being to make the joint method of engagement member fusing by heatings such as light absorbents, so the thermal efficiency that this light absorbent need to be sent out passes to engagement member well.For this reason, by engagement member each other or to make when engagement member engages with light absorbent it be adjacent to fixing very important.This be because if engagement member each other or engagement member and light absorbent be adjacent to state a little less than, hot transmission meeting reduces because of the gap existing on above-mentioned interface.Its result likely cannot obtain required bond strength.

As the method that makes engagement member each other or engagement member and light absorbent are adjacent to, there is employing mechanical mechanism (hold-down mechanism) engagement member to be imposed to the method for pressing.But there are the following problems, hold-down mechanism is troubling to the damage of engagement member, or in order to impose and to press equally and need special hold-down mechanism etc. engagement member.

Patent document 1: the JP 2002-67164 of Japan communique

Patent document 2: the JP 2003-170290 of Japan communique

Summary of the invention

The problem of the present invention based on such understanding is carried out, and provides by engagement member each other or can easily make its bonded structure being adjacent to, joint method and engagement device when engagement member engages with light absorbent.

According to a form of the present invention, a kind of bonded structure is provided, it is characterized in that possessing: the 1st engagement member, the 2nd engagement member, with the 3rd engagement member, in described the 1st engagement member and described the 2nd engagement member at least any is, on the joint interface between described the 1st engagement member and described the 2nd engagement member, there is slot part, in described the 2nd engagement member and described the 3rd engagement member at least any is, on the joint interface between described the 2nd engagement member and described the 3rd engagement member, there is slot part, described the 2nd engagement member is folded between described the 1st engagement member and described the 3rd engagement member, in the space of the slot part between described the 1st engagement member and described the 2nd engagement member and the space of the slot part between described the 2nd engagement member and described the 3rd engagement member be depressurized, under the state that described the 1st engagement member and described the 2nd engagement member are adjacent to and under the state that is adjacent to of described the 2nd engagement member and described the 3rd engagement member, described the 1st engagement member engages with described the 2nd engagement member, and described the 2nd engagement member engages and forms with described the 3rd engagement member.

According to another form of the present invention, a kind of bonded structure is provided, it is characterized in that possessing: the 1st engagement member, the 2nd engagement member, with the 3rd engagement member, in described the 1st engagement member and described the 2nd engagement member at least any is, on the joint interface between described the 1st engagement member and described the 2nd engagement member, there is slot part, in described the 2nd engagement member and described the 3rd engagement member at least any is, on the joint interface between described the 2nd engagement member and described the 3rd engagement member, there is slot part, described the 1st engagement member has the steam vent that forms exhaust line, described the 2nd engagement member is folded between described the 1st engagement member and described the 3rd engagement member, also there is the through hole that is communicated with following slot part, it is the slot part between described the 1st engagement member and described the 2nd engagement member, and the slot part between described the 2nd engagement member and described the 3rd engagement member, in the space of the slot part between described the 1st engagement member and described the 2nd engagement member and the space of the slot part between described the 2nd engagement member and described the 3rd engagement member by described steam vent and described through hole, be depressurized, under the state that described the 1st engagement member and described the 2nd engagement member are adjacent to and under the state that is adjacent to of described the 2nd engagement member and described the 3rd engagement member, described the 1st engagement member engages with described the 2nd engagement member, and described the 2nd engagement member engages and forms with described the 3rd engagement member.

According to another form of the present invention, a kind of joint method is provided, it is characterized in that, in the 1st engagement member and the 2nd engagement member at least on any, on the joint interface between described the 1st engagement member and described the 2nd engagement member, form slot part, , in described the 2nd engagement member and the 3rd engagement member at least on any, on the joint interface between described the 2nd engagement member and described the 3rd engagement member, form slot part, described the 2nd engagement member is folded between described the 1st engagement member and described the 3rd engagement member, in the space of the slot part between described the 1st engagement member and described the 2nd engagement member and the space of the slot part between described the 2nd engagement member and described the 3rd engagement member be depressurized, under the state that described the 1st engagement member and described the 2nd engagement member are adjacent to and described the 2nd engagement member and described the 3rd engagement member are adjacent to, described the 1st engagement member is engaged with described the 2nd engagement member, and described the 2nd engagement member is engaged with described the 3rd engagement member.

According to another form of the present invention, a kind of joint method is provided, it is characterized in that, in the 1st engagement member and the 2nd engagement member at least on any, on the joint interface between described the 1st engagement member and described the 2nd engagement member, form slot part, in described the 2nd engagement member and the 3rd engagement member at least on any, on the joint interface between described the 2nd engagement member and described the 3rd engagement member, form slot part, the steam vent that forms exhaust line is formed to described the 1st engagement member, described the 2nd engagement member is folded between described the 1st engagement member and described the 3rd engagement member, the through hole that is communicated with following slot part is formed to described the 2nd engagement member, it is the slot part between described the 1st engagement member and described the 2nd engagement member, and the slot part between described the 2nd engagement member and described the 3rd engagement member, in the space of the slot part between described the 1st engagement member and described the 2nd engagement member and the space of the slot part between described the 2nd engagement member and described the 3rd engagement member by described steam vent and described through hole, be depressurized, under the state that described the 1st engagement member and described the 2nd engagement member are adjacent to and described the 2nd engagement member and described the 3rd engagement member are adjacent to, described the 1st engagement member is engaged with described the 2nd engagement member, and described the 2nd engagement member is engaged with described the 3rd engagement member.

According to another form of the present invention, a kind of engagement device is provided, it is characterized in that possessing: energy illumination unit, to the 1st engagement member, the 2nd engagement member and the 3rd engagement member, emit laser, positioning unit, determines the relative position of described the 1st, the 2nd and the 3rd engagement member and described energy illumination unit, decompressing unit, it can reduce pressure to the space of formed slot part at least described the 1st engagement member on any in described the 1st engagement member and described the 2nd engagement member and the joint interface between described the 2nd engagement member, described the 1st engagement member and described the 2nd engagement member are adjacent to, and it can reduce pressure to the space of formed slot part at least described the 2nd engagement member on any in described the 2nd engagement member and described the 3rd engagement member and the joint interface between described the 3rd engagement member, described the 2nd engagement member and described the 3rd engagement member are adjacent to, and control part, control described positioning unit, so as by make described laser from described the 3rd engagement member side irradiate in: the 1st light absorbent is formed on the joint interface engaging with described the 1st engagement member on described the 2nd engagement member, with the 2nd light absorbent, it forms, on described the 2nd engagement member, on the joint interface engaging with described the 3rd engagement member, while observing in the direction of the joint interface perpendicular to engaging with described the 1st engagement member or the joint interface that engages with described the 3rd engagement member, have and the nonoverlapping part of described the 1st light absorbent.

Accompanying drawing explanation

Fig. 1 is the ideograph of the bonded structure that relates to of illustration the 1st embodiment of the present invention.

Fig. 2 is the ideograph of the engagement member that relates to of the variation of illustration slot part.

Fig. 3 is placed on the ideograph of analysing and observe of bonded structure objective table from forward observation.

Fig. 4 is placed on the ideograph of analysing and observe of bonded structure objective table from the place ahead amplifying observation.

Fig. 5 be from the place ahead amplifying observation be placed on the bonded structure objective table variation analyse and observe ideograph.

Fig. 6 is the ideograph of the joint method that relates to of illustration present embodiment.

Fig. 7 is the ideograph of the bonded structure that relates to of illustration the 2nd embodiment of the present invention.

Fig. 8 is placed on the ideograph of analysing and observe of bonded structure objective table from forward observation.

Fig. 9 is placed on the ideograph of analysing and observe of bonded structure objective table from the place ahead amplifying observation.

Figure 10 be from the place ahead amplifying observation be placed on the bonded structure objective table variation analyse and observe ideograph.

Figure 11 is the amplification mode figure of amplifying observation engagement member 104.

Figure 12 observes the ideograph of engagement member 104 integral body from top, be equivalent to the ideograph of observing from the direction of the arrow A shown in Fig. 7.

Figure 13 is the amplification mode figure of the variation of amplifying observation engagement member 104.

Figure 14 is the ideograph of the joint method that relates to of illustration present embodiment, is equivalent to the B-B cutaway view shown in Fig. 7.

Figure 15 is the ideograph of the joint method that relates to of illustration present embodiment, is equivalent to the B-B cutaway view shown in Fig. 7.

Figure 16 is the ideograph of joint method of the engagement member of the variation shown in illustration Figure 13, is equivalent to the B-B cutaway view shown in Fig. 7.

Figure 17 is the ideograph of analysing and observe that the bonded structure that relates to from the place ahead amplifying observation modified embodiment of the present embodiment is placed on state objective table.

Figure 18 is the ideograph of analysing and observe that bonded structure that other variation from the place ahead amplifying observation present embodiment relate to is placed on state objective table.

Figure 19 is for the ideograph of the illuminating method of laser is described.

Figure 20 is for the ideograph of other illuminating methods of laser is described.

Figure 21 is the ideograph of the joint method that relates to of illustration modified embodiment of the present embodiment.

Figure 22 is placed on the ideograph of analysing and observe of bonded structure objective table from the place ahead amplifying observation.

Figure 23 is the block diagram of the formation of the engagement device that relates to of illustration present embodiment.

Figure 24 is the block diagram of the formation of the engagement device that relates to of illustration modified embodiment of the present embodiment.

Symbol description

101a, 101b, 101c, 101d, 101e, 101f, 101g, 102a, 102b, 102c, 104,104a, 104b-engagement member; 106a, 106b, 106c, 106d, 106e, 106f, 106g, 106h-light absorbent; 108a, 108b, 108d, 108e, 108g-slot part; 112,112a, 112c, 112e, 112f-steam vent; 114-through hole; 120,120a, 120b, 120c, 120d-laser; 124,132a, 134-engagement member; 136a, 136b-light absorbent; 138a, 138b, 138c, 138d-slot part; 142a, 142b-steam vent; 144a, 144b-through hole; 150-space; 152a, 154-engagement member; 156a, 156b, 156c, 156d, 156e, 156f, 156g-light absorbent; 158a, 158b, 158c, 158d, 158e-slot part; 162a, 162b, 162c-steam vent; 164a, 164b-through hole; 172a, 172b, 174-engagement member; 178a, 178b-slot part; 184-through hole; 194-engagement member; 198a, 198b-slot part; 200-chamber; 202-laser entrance window; 204-objective table; 206-pump; 208-valve; 210-objective table drive division; 214-steam vent; 222a, 222b-optical system; 224a, 224b-laser oscillator; 226a, 226b-power supply; 228a, 228b-optical system drive division; 230-control part; 234,254-objective table; 241-power supply; 245-emits system; 247-emits system drive portion; 249-heating source; 264,264a, 264b, 264c, 274,274a, 274b, 274c-steam vent; 284-objective table.

The specific embodiment

Below, with reference to accompanying drawing, embodiments of the present invention are described.In addition, in each accompanying drawing, same inscape is marked to same-sign, suitably detailed.

Fig. 1 (a) decomposes the bonded structure that present embodiment relates to and the resolution model figure observing, and Fig. 1 (b) means the integrated mode figure of the state after the bonded structure combination that present embodiment relates to.

Fig. 2 (a) is the three-dimensional pattern figure that observes sideling the bonded structure integral body that this variation relates to, Fig. 2 (b)～Fig. 2 (d) be the slot part that relates to of this variation of illustration section configuration analyse and observe ideograph.

Bonded structure shown in Fig. 1 possesses engagement member 101a(the 1st engagement member) and engagement member 101b(the 2nd engagement member).On the joint interface engaging with engagement member 101b on engagement member 101a, slot part 108a is set to ring-type.But, about the shape of slot part 108a, being not only defined as the ring-type shown in Fig. 1, can suitably change according to position or shape etc.That is to say, variation is as shown in Figure 2 (a) shows such, and slot part also can be set to a plurality of slot part 108h and leave.And the section configuration of this slot part 108h can be also the essentially rectangular as shown in Fig. 2 (b), or can be also roughly circular arc as shown in Figure 2 (c), or can be also general triangular as shown in Figure 2 (d) shows.In addition, the opening shape of slot part 108h is not only defined as the circular shown in Fig. 2 (a), for example, can be also essentially rectangular.

As described in detail below, engagement member 101a and engagement member 101b are that the joint method that swashs optical, electrical or combustion gas etc. by utilizing is bonded with each other.Below, about Fig. 3～Fig. 6, above-mentioned bonded structure and joint method are carried out to more specific description.

And Fig. 3～Fig. 5 is equivalent to the D-D cutaway view shown in Fig. 1.

As mentioned above, on the joint interface engaging with engagement member 101b on engagement member 101a, be provided with slot part 108a.Therefore, between engagement member 101a and engagement member 101b, there is the formed space of slot part 108a.And, on engagement member 101a, be provided with the steam vent 112a that forms exhaust line.

On the objective table 204 of placing

engagement member

101a, 101b, be provided with the steam vent 214 that forms exhaust line.The shape of this steam vent 214 is not only defined as hole, also can have groove.Objective table 204 links by steam vent 214 and pump 206.Pump 206 can lean on the gas in the space that suction links and be reduced pressure in this space.Therefore, pump 206 can reduce pressure to the space between engagement member 101a and engagement member 101b (the formed space of slot part 108a) by steam vent 214 and steam vent 112a.

After the space between engagement member 101a and engagement member 101b is depressurized, between this space and space outerpace, will produce pressure differential (draught head).That is, the pressure in the space between engagement member 101a and engagement member 101b becomes lower than the pressure of space outerpace.Therefore, can easily make engagement member 101a and engagement member 101b be adjacent to.

In addition, variation shown in Fig. 5 (a), also can be at engagement member 101c(the 1st engagement member) on be only provided with steam vent 112c, at engagement member 101d(the 2nd engagement member) on the joint interface engaging with engagement member 101c on be provided with slot part 108d.Thus, because be only provided with steam vent 112c on engagement member 101c, so can keep the intensity (rigidity) of engagement member 101c largelyr.Therefore,, when moving into or arranging engagement member 101c, can further prevent this engagement member 101c distortion.

Or the variation shown in Fig. 5 (b), can be also at engagement member 101e(the 1st engagement member) on be provided with slot part 108e and steam vent 112e, and at engagement member 101e and engagement member 101b(the 2nd engagement member) between Existential Space 150.Thus, can make the space 150 being surrounded by engagement member 101e and engagement member 101b become seal cavity, such as the luminous plaque that can be applicable to PDP, SED, FED, OLED display etc.

Or the variation shown in Fig. 5 (c), also can be at the engagement member 101f(of the variation shown in Fig. 5 (b) the 1st engagement member) on be only provided with steam vent 112f, at engagement member 101g(the 2nd engagement member) on the joint interface engaging with engagement member 101f on be provided with slot part 108g.Thus, can larger keep the intensity of engagement member 101f in, make the space 150 being surrounded by engagement member 101f and engagement member 101g become seal cavity.Therefore, as before this, about as described in Fig. 5 (b), for example, can be applicable to luminous plaque.

As mentioned above, even in the variation as shown in Fig. 5 (a)～Fig. 5 (c), the pressure in the space between the 1st engagement member and the 2nd engagement member also can become lower than the pressure of space outerpace.Therefore, can easily make the 1st engagement member and the 2nd engagement member be adjacent to.

Fig. 6 (a) is that illustration is directly radiated at laser the ideograph of the joint method on joint interface, and Fig. 6 (b) is that illustration is across the ideograph of engagement member joint method on joint interface by Ear Mucosa Treated by He Ne Laser Irradiation.In addition, Fig. 6 (a) and Fig. 6 (b) are equivalent to the D-D cutaway view shown in Fig. 1.

First, engagement member 101a and engagement member 101b are placed on objective table 204, then make pump 206 work.So about as described in Fig. 3～Fig. 5, engagement member 101a and engagement member 101b are adjacent to mutually as before this.Under this state, as shown in Figure 6 (a), by laser 120 direct irradiations on the joint interface between engagement member 101a and engagement member 101b.

When laser 120 is radiated on joint interface,

engagement member

101a, 101b can absorbing lasers 120 and are generated heat.And by heating, in engagement member 101a and engagement member 101b at least any can melt, solidify, form therefrom junction surface.Its result, at this junction surface, engagement member 101a engages with engagement member 101b.Then, for example, when engagement member 101a is engaged on complete cycle with engagement member 101b, by making laser optical system roughly be parallel to this

engagement member

101a, 101b, suitably move, can on complete cycle, engagement member 101a be engaged with engagement member 101b.

In addition, the direction of illumination of laser 120 is not limited to the illustrated direction of Fig. 6 (a), also can be as shown in Figure 6 (b), for example from be approximately perpendicular to engagement member 101b above direction across engagement member 101b, irradiate.In the case, engagement member 101b must have permeability to laser.At this, laser is had to permeability and refer to following character: can make laser as heating source reflect hardly also not absorb and see through, even or partially absorb or reflect laser can melting (melting) yet, and can make remaining laser see through and arrive joint interface.In addition, the joint method of engagement member 101a and engagement member 101b is not limited to the such joint method that utilizes laser of joint method as shown in Figure 6, can be also the joint method that utilizes electricity or combustion gas etc.

As discussed above, by making engagement member be adjacent to and engage each other, can prevent hot transmission because the gap existing on joint interface reduces, its result can obtain larger bond strength between engagement member.In addition, owing to not using such as mechanical presses vacuum chamber or the engagement member special devices such as mechanism each other, can easily make engagement member be adjacent to each other, so can simplify engagement device.

Under the state (vacuum state) of comparing with outside in decompression, due to the insulation effect of this vacuum, heat is difficult to spread to periphery.At this, because engagement member 101a compares the state in decompression with the formed space of slot part 108a between engagement member 101b with outside, so the heat that

engagement member

101a, 101b are sent out is difficult to spread to periphery.Therefore, at least any melting more effectively in engagement member 101a and engagement member 101b.Its result can obtain larger bond strength between engagement member.In addition, because without carrying out too much heat input, so can suppress because hot impact brings damage to

engagement member

101a, 101b.

About the bonded structure shown in Fig. 1～Fig. 6 and joint method, although so that the 1st engagement member and the 2nd engagement member direct butt and situation about engaging is that example is illustrated mutually, can be also that light absorbent that the energy of absorbing laser is generated heat is folded between the 1st engagement member and the 2nd engagement member and engages.In the case, light absorbent absorbing laser and generating heat, by this heating, in the 1st engagement member, the 2nd engagement member and light absorbent at least any can melt, solidify, thus, the 1st engagement member engages by light absorbent with the 2nd engagement member.Below, about Fig. 7～Figure 23, the situation that engages a plurality of engagement members by light absorbent of take is example, with reference to accompanying drawing, describes.

Fig. 7 (a) decomposes the bonded structure that present embodiment relates to and the resolution model figure observing, and Fig. 7 (b) means the integrated mode figure of the state after the bonded structure combination that present embodiment relates to.

Bonded structure shown in Fig. 7 possesses: engagement member 102a(the 1st engagement member); Engagement member 102b(the 3rd engagement member), by material laser to permeability, formed; And engagement member 104(the 2nd engagement member), by material laser to permeability, formed, be folded between engagement member 102a and engagement member 102b.In following content, laser is had to permeability and refer to following character: can make laser as heating source reflect hardly also not absorb and see through, even or partially absorb or reflect laser can melting (melting) yet, can make remaining laser see through and arrive light absorbent.

Engagement member 102a both can be formed by material laser to permeability, also can be formed by material laser to non-permeability.As laser being there is to the member of non-permeability, for example, can be set forth on this member and be manufactured with wiring pattern, or be provided with member of electronic component, optical element etc. etc.In addition, although engagement member 104 is in the form of a ring, be not only defined as this, also can be identical with

engagement member

102a, 102b, be tabular.

As described in detail below,

engagement member

102a, 102b engage respectively by Ear Mucosa Treated by He Ne Laser Irradiation with engagement member 104.And, at engagement member 104, in the form of a ring in the situation that, form the seal cavity with engagement member 104 encirclements by engagement member 102a, 102b.As such bonded structure, such as the luminous plaque that can enumerate PDP, SED, FED, OLED display etc.Below, as illustrated in luminous plaque, the situation that engages a plurality of engagement members by ring-type (frame shape) engagement member of take describes as example.

And Fig. 8～Figure 10 is equivalent to the B-B cutaway view shown in Fig. 7.

On the joint interface engaging with engagement member 102a on engagement member 104, identical with ring-type engagement member 104, slot part 108a is set to ring-type.In addition, on the joint interface engaging with engagement member 102b on engagement member 104, identical with ring-type engagement member 104, slot part 108b is set to ring-type.Therefore, between engagement member 102a and engagement member 104, there is the formed space of slot part 108a.In addition, between engagement member 102b and engagement member 104, there is the formed space of slot part 108b.And, on engagement member 104, be provided with the through hole 114 that is communicated with slot part 108a and slot part 108b.

On engagement member 102a, be provided with the steam vent 112 that forms exhaust line.In addition, be provided with the steam vent 214 that forms exhaust line placing on

engagement member

102a, 102b, 104 objective table 204.The shape of this steam vent 214 is not only defined as hole, also can have groove.The setting position of steam vent 112,214 is without the setting position corresponding to through hole 114, and magnitude setting is also without the magnitude setting corresponding to through hole 114.For example, can be also that 214 of steam vent 112 and steam vents are located at a place, through hole 114 is arranged on many places more than two places.

As shown in Figure 9, between engagement member 102a and engagement member 104, be provided with the energy of absorbing laser and light absorbent 106a, 106c(the 1st light absorbent that generates heat).On the other hand, between engagement member 102b and engagement member 104, be provided with equally the energy of absorbing laser and light absorbent 106b, 106d(the 2nd light absorbent that generates heat).

Objective table 204 links by steam vent 214 and pump 206.Pump 206 can lean on the gas in the space that suction links and be reduced pressure in this space.Therefore, pump 206 can reduce pressure to the space between engagement member 102a and engagement member 104 (the formed space of slot part 108a) by steam vent 214 and steam vent 112.And, because be provided with the through hole 114 that is communicated with slot part 108a and slot part 108b on engagement member 104, so pump 206 also can reduce pressure to the space between engagement member 102b and engagement member 104 (the formed space of slot part 108b).

After the space between the space between engagement member 102a and engagement member 104 and engagement member 102b and engagement member 104 is depressurized, between above-mentioned space and space outerpace, will produce pressure differential (draught head).That is, the pressure in the space between the space between engagement member 102a and engagement member 104 and engagement member 102b and engagement member 104 becomes lower than the pressure of space outerpace.Therefore, can easily make engagement member 102a and engagement member 104 be adjacent to.And, can easily make engagement member 102b and engagement member 104 be adjacent to.

So, by engagement member is adjacent to each other, can prevent that heat from transmitting reduces because of the gap existing on joint interface.Its result can obtain larger bond strength between engagement member.In addition, owing to not using such as mechanical presses vacuum chamber or the engagement member special devices such as mechanism each other, can easily make engagement member be adjacent to each other, so can simplify engagement device.And reducing pressure in the space 150 engagement member 102a, engagement member 102b and engagement member 104 not being surrounded, just can easily make bonding part be adjacent to.

Under the state of comparing with outside in decompression, due to the insulation effect of vacuum, heat is difficult to spread to periphery.At this, because engagement member 102a compares the state in decompression with space and engagement member 102b between engagement member 104 with the space between engagement member 104 with outside, so the heat that light absorbent 106a, 106b, 106c, 106d are sent out is difficult to spread to periphery.Therefore the heat that, light absorbent 106a, 106b, 106c, 106d sent out respectively efficiency passes to

engagement member

102a, 102b, 104 well.So,

engagement member

102a, 102b, 104 and light absorbent 106a, 106b, 106c, 106d at least any can melt more effectively.Its result can obtain larger bond strength between engagement member.In addition, because without carrying out too much heat input, so can suppress because hot impact brings damage to

engagement member

102a, 102b, 104.

About utilizing the joint method of Ear Mucosa Treated by He Ne Laser Irradiation, when this laser irradiating part is all vacuum state around, the insulation effect of vacuum becomes larger.Therefore, when bonding part being adjacent to slot part space decompression to engage, for example variation is as shown in figure 10 such, and while being slot part around in irradiation portion, insulation effect becomes larger.

In the variation shown in Figure 10, by making pump 206 work, can to the formed space of slot part 138a, 138c, reduce pressure by steam vent 274,274a, 274b and steam vent 142a, 142b.And, because be provided with the through hole 144a that is communicated with slot part 138a and slot part 138b and be communicated with the through hole 144b of slot part 138c and slot part 138d on engagement member 134, so also can reduce pressure to the formed space of slot part 138b, 138d.Therefore the joint interface (laser irradiating part) that, is provided with light absorbent 136a, 136b all becomes post-decompression space around.So for example variation is as shown in figure 10 such, while being slot part around in irradiation portion, the insulation effect of vacuum becomes larger, and the heat producing in the irradiation portion of laser is difficult to spread to periphery more.

And, in the bonded structure shown in Fig. 8 and Fig. 9, although be only provided with

slot part

108a, 108b on engagement member 104, be not only defined as this, can be to be also provided with slot part on engagement member 102a or engagement member 102b.In the case, also can between engagement member 102a and engagement member 104 and between engagement member 102b and engagement member 104, produce space.That is, between engagement member 102a and engagement member 104 and between engagement member 102b and engagement member 104, there is the space that can reduce pressure.But, if consider the manufacturing procedure of slot part, because only forming

slot part

108a, 108b on engagement member 104 can simplify this operation, so more preferred.

Figure 11 (a) is the ideograph of overlooking from top amplifying observation engagement member 104.Be equivalent to the ideograph of observing from the direction of the arrow A shown in Fig. 7.Figure 11 (b) is the ideograph of analysing and observe from the place ahead amplifying observation engagement member 104, is equivalent to the C-C cutaway view shown in Figure 11 (a).

Figure 13 (a) is the ideograph of overlooking from the engagement member of top this variation of amplifying observation, is equivalent to the ideograph of observing from the direction of the arrow A shown in Fig. 7.Figure 13 (b) is the ideograph of analysing and observe from the engagement member of the place ahead this variation of amplifying observation, is equivalent to the C-C cutaway view shown in Figure 13 (a).

As previously mentioned, on engagement member 104 (joint interface engaging with engagement member 102b) and below (joint interface engaging with engagement member 102a), identical with ring-type engagement member 104,

slot part

108b, 108a are set to respectively ring-type.In addition, as shown in Figure 11 (a) and Figure 12, with predetermined distance, be provided with the through hole 114 that is communicated with slot part 108a and slot part 108b.

Above engagement member 104, be pre-formed light absorbent 106b, 106d, be pre-formed light absorbent 106a, 106c below.And, perpendicular to above it or below while observing engagement member 104, light absorbent 106a and light absorbent 106b are formed phase non-overlapping copies.Identical therewith, light absorbent 106c and light absorbent 106d are formed phase non-overlapping copies.

In addition, as shown in figure 12, identical with ring-type engagement member 104, light absorbent 106a, light absorbent 106b, light absorbent 106c and light absorbent 106d are formed ring-type.And, from perpendicular to above it or below direction while observing engagement member 104, light absorbent 106a and light absorbent 106b are formed in all local phase non-overlapping copies that ring-type is extended.Identical therewith, light absorbent 106c and light absorbent 106d are formed in all local phase non-overlapping copies that ring-type is extended.

In addition, in the engagement member 104 shown in Figure 11 and Figure 12, although illustrative, be that light absorbent 106a, the 106c that is configured in engagement member 104 inner sides (open side) is pre-formed below, the light absorbent 106b, the 106d that are configured in engagement member 104 outsides are pre-formed superincumbent situation, but be not only defined as this, also can be that light absorbent 106a, 106c are pre-formed in the above, light absorbent 106b, 106d be pre-formed below.

And, in the engagement member 104 shown in Figure 11 and Figure 12, although be to be pre-formed two light absorbent 106b, 106d in the above, two light absorbent 106a, 106c have been pre-formed below, but variation is as shown in figure 13 such, also can be to be only pre-formed a light absorbent 106d in the above, only be pre-formed below a light absorbent 106a.Even such situation, also can be adjacent to engagement member 102a and engagement member 104, and make, under state that engagement member 102b and engagement member 104 be adjacent to, engagement member to be engaged with each other.This is also the same in following embodiment described later and variation.

The material of light absorbent 106a, 106b, 106c, 106d is the combination etc. of metal, pottery, colored paint or above-mentioned material preferably, and its form is paper tinsel, film, powder, band or plate preferably.In addition, light absorbent 106a, 106b, 106c, 106d also can be pre-formed on engagement member 104 unlike shown in Figure 11 and Figure 12.But, if consider operation while arranging or contraposition of setting position etc. between engagement member, be preferably pre-formed on engagement member 104 and engagement member 102a, 102b.About the formation method of light absorbent 106a, 106b, 106c, 106d, can use the technology such as evaporation, sputter, bonding, coating or transfer printing.

Figure 14～Figure 15 is the ideograph of the joint method that relates to of illustration present embodiment, is equivalent to the B-B cutaway view shown in Fig. 7.

First, engagement member 102a is placed on to (Figure 14 (a)) on objective table 204.Then the engagement member 104 that, makes to be formed with in advance light absorbent 106b, 106d in the above and be formed with below in advance light absorbent 106a, 106c is connected to engagement member 102a upper (Figure 14 (a)).Then, make engagement member 102b be connected to (Figure 14 (a)) on engagement member 104.

So,

engagement member

102a, 102b, 104 are placed on objective table 204 with following state, that is: light absorbent 106a, 106c are folded between engagement member 102a and engagement member 104, and light absorbent 106b, 106d are folded in (Figure 14 (b)) between engagement member 102b and engagement member 104.

Then, make pump 206 work.So, the gas in the space of the such pumping exhaust of pump 206 arrow as shown in Figure 15 (a) shows hole 214 and steam vent 112.Its result, because pump 206 is communicated with the space (the formed space of slot part 108a) between engagement member 102a and engagement member 104 by steam vent 214,112, so the formed space of slot part 108a is depressurized.And, because engagement member 102b is communicated with the formed space of slot part 108a by through hole 114 with the space (the formed space of slot part 108b) between engagement member 104, so the formed space of slot part 108b is also depressurized.

After the formed space of

slot part

108a, 108b is depressurized, as previously mentioned, between above-mentioned space and space outerpace, will produce pressure differential (draught head).Therefore, engagement member 102a and engagement member 104 and engagement member 102b and engagement member 104 are adjacent to mutually.Now, in the situation that 204 pairs of laser of objective table have non-permeability, or on engagement member 102a such as be manufactured with wiring pattern or be provided with electronic component, optical element etc. in the situation that, cannot across objective table 204 and engagement member 102a by Ear Mucosa Treated by He Ne Laser Irradiation on light absorbent 106a, 106c.

Therefore, as shown in Figure 15 (b), under the state that the joint method that present embodiment relates to can be adjacent to mutually at

engagement member

102a, 102b, 104, only from engagement member 102b side, respectively

laser

120a, 120b, 120c, 120d are radiated to (Figure 15 (b)) light absorbent 106a, 106b, 106c, 106d.As aforesaid about Figure 11 and Figure 12 institute, perpendicular to above it or below direction on while observing engagement member 104, because light absorbent 106a and light absorbent 106b are formed phase non-overlapping copies, so laser 120a can arrive light absorbent 106a.Identical therewith, laser 120c can arrive light absorbent 106c.

In addition, engagement member 124 in variation is as shown in figure 13 such, even if be only provided with a light absorbent 106a on the joint interface engaging with engagement member 102a, and in the situation that be only provided with a light absorbent 106d on the joint interface engaging with engagement member 102b, also can as shown in Figure 16, only from engagement member 102b side, respectively

laser

120a, 120d be radiated at light absorbent 106a, 106d.Perpendicular to above it or below direction on while observing engagement member 124, because light absorbent 106a and light absorbent 106d are formed phase non-overlapping copies, so laser 120a can arrive light absorbent 106a.

Light absorbent 106a, 106c be absorbing

laser

120a, 120c and generate heat respectively.And, by this heating, in engagement member 102a, engagement member 104, light absorbent 106a, 106c at least any can melt, solidify, at light absorbent 106a place, form thus junction surface (the 1st junction surface), at light absorbent 106c place, form junction surface, at above-mentioned junction surface, engagement member 102a engages with engagement member 104.In addition, light absorbent 106b,

106d absorbing laser

120b, 120d and generate heat respectively.And, by this heating, in engagement member 102b, engagement member 104, light absorbent 106b, 106d at least any can melt, solidify, at light absorbent 106b place, form thus junction surface (the 2nd junction surface), at light absorbent 106d place, form junction surface, at above-mentioned junction surface, engagement member 102b engages with engagement member 104.

Then, by making laser optical system roughly be parallel to

engagement member

102a, 102b, 104 and suitably move, can

laser

120a, 120b, 120c, 120d be radiated at and form light absorbent 106a, the 106b of all shapes, on the complete cycle of 106c, 106d respectively.Its result can engage engagement member 102a on complete cycle with engagement member 104, and can on complete cycle, engagement member 102b be engaged with engagement member 104.In addition,

laser

120a, 120b, 120c, 120d both can be irradiated by different separately laser optical systems, also can be irradiated in the lump by the optical system that can realize a plurality of focuses.And, can be also that the separation by laser of a laser optical system being irradiated by separator etc. is a plurality of.But also can as shown in Figure 6 (a) laser be directly radiated on light absorbent, not across engagement member 102b.

So, the joint method relating to according to present embodiment, engages by Ear Mucosa Treated by He Ne Laser Irradiation under the state that can mutually be adjacent at

engagement member

102a, 102b, 104.Therefore, can prevent that heat transmission from, because the gap existing on joint interface reduces, can obtain larger bond strength between

engagement member

102a, 102b, 104.Its result, can improve the reliability of joint.In addition, even if the outermost engagement member of objective table 204 or a side (engagement member 102a) has non-permeability to laser, also can be by only irradiating laser and engagement member be engaged with each other from laser being there is to outermost engagement member (engagement member 102b) side of the opposite side of permeability.Therefore, engaging time can be shortened, joint operating efficiency can be improved.And, can also obtain with before this about the identical effect of the effect described in Fig. 8 and Fig. 9.

Figure 17 is the ideograph of analysing and observe that the bonded structure that relates to from the place ahead amplifying observation modified embodiment of the present embodiment is placed on state objective table.And identical with Fig. 9, Figure 17 is equivalent to the B-B cutaway view shown in Fig. 7.

On the joint interface engaging with engagement member 152a on the engagement member 154 of this variation, identical with ring-type engagement member 154,

slot part

158a, 158c, 158e are set to ring-type.In addition, on the joint interface engaging with engagement member 102b on engagement member 154, identical with ring-type engagement member 154, slot part 158b, 158d are set to ring-type.

Therefore, between engagement member 152a and engagement member 154, there is

slot part

158a, 158c, the formed space of 158e.In addition, between engagement member 102b and engagement member 154, there is the formed space of slot part 158b, 158d.And, although

slot part

158a, 158b, 158c, 158d, 158e have curved surface as shown in figure 17, also can be identical with the engagement member 104 shown in Fig. 9, there is plane.In addition, on engagement member 154, be provided be communicated with slot part 158a and slot part 158b through hole 164a, be communicated with the through hole 164b of slot part 158d and slot part 158e.

On engagement member 152a, be respectively equipped with steam vent 162a, the 162b, the 162c that form exhaust line.In addition, placing on

engagement member

152a, 102b, 154 objective table 254, be respectively equipped with steam vent 264a, the 264b, the 264c that form exhaust line.And,

steam vent

264a, 264b, 264c with pump 206(with reference to Fig. 8) being midway connected as steam vent 264 of being communicated with.

As shown in figure 17, between engagement member 152a and engagement member 154, be provided with the energy of absorbing laser and light absorbent 156a, the 156c, 156e, the 156g that generate heat.On the other hand, between engagement member 102b and engagement member 154, be provided with equally the energy of absorbing laser and light absorbent 156b, the 156d, the 156f that generate heat.In other structure aspects, identical with the structure of the bonded structure shown in Fig. 8 and Fig. 9.

According to this variation, by making pump 206 work, can reduce pressure to the space between engagement member 152a and engagement member 154 (

slot part

158a, 158c, the formed space of 158e).And, because be provided with through

hole

164a, 164b on engagement member 154, so also can reduce pressure to the space between engagement member 102b and engagement member 154 (the formed space of slot part 158b, 158d) by this through

hole

164a, 164b.

So, because can produce pressure differential between above-mentioned space and space outerpace, so can easily make engagement member 152a and engagement member 154 be adjacent to.And, can easily make engagement member 102b and engagement member 154 be adjacent to.Now, because on engagement member 154 or below,

slot part

158a, 158b, 158c, 158d, 158e are arranged in a big way in side, left and right, so in this variation, can make

engagement member

152a, 102b, 154 be adjacent in larger scope each other.

By engagement member is adjacent to each other in larger scope, can make the gap that exists on joint interface less.Therefore, can prevent that heat from transmitting reduces because of this gap.Its result can obtain larger bond strength between engagement member, can improve the reliability of joint.In addition, because dispose slot part 158b, 158d near light absorbent 156c, near light absorbent 156d, dispose

slot part

158a, 158c, near light absorbent 156e, dispose

slot part

158c, 158e, so, as before this, about as described in Figure 10, in above-mentioned irradiation portion, the insulation effect of vacuum becomes larger.At this, " near " refer to that near distance obtains and can suppress by the vacuum insulation effect of slot part heat and spread to the periphery of light absorbent.About other effect, also can access front about the identical effect of effect described in Fig. 8 and Fig. 9 therewith.

In addition, as shown in figure 17, perpendicular to above it or below while observing engagement member 154, light absorbent 156a, 156b, 156c, 156d, 156e, 156f, 156g are formed phase non-overlapping copies.Therefore, as before this about as described in Figure 15, even if for example objective table 254 and engagement member 152a have non-permeability to laser, also can be by only irradiating laser and engagement member be engaged with each other from laser being there is to the engagement member 102b side of permeability.

Figure 18 is the ideograph of analysing and observe that bonded structure that other variation from the place ahead amplifying observation present embodiment relate to is placed on state objective table.And identical with Fig. 9, Figure 18 is equivalent to the B-B cutaway view shown in Fig. 7.

On the joint interface engaging with engagement member 102a on the engagement member 174 of this variation, identical with ring-type engagement member 174, slot part 178a is set to ring-type.On the other hand, on the joint interface engaging with engagement member 172b on engagement member 174, be not provided with the such slot part of engagement member 104 as shown in Figure 9.And, on the engagement member 172b with butt above engagement member 174, on the joint interface engaging with engagement member 174, be provided with slot part 178b.Identical with ring-type engagement member 174, this slot part 178b is set to ring-type.In other structure aspects, identical with the structure of the bonded structure shown in Fig. 8 and Fig. 9.

According to this variation, because be only provided with slot part 178a on ring-type engagement member 174, so can keep the intensity (rigidity) of engagement member 174 largelyr.Therefore,, when moving into or engagement member 174 is set, can further prevent this engagement member 174 distortion.On the other hand, although on engagement member 172b, be provided with slot part 178b, because engagement member 172b is tabular, so the possibility that its intensity (rigidity) significantly reduces is little.

Between engagement member 172b and engagement member 174, exist and be arranged on the formed space of slot part 178b on engagement member 172b.In addition, between engagement member 102a and engagement member 174, there is the formed space of slot part 178a.And, on engagement member 174, be provided be communicated with slot part 178a with above through hole 184.

Therefore,, in this variation, by making pump 206 work, also can reduce pressure to the space between engagement member 102a and engagement member 174 (the formed space of slot part 178a).And, because be provided with through hole 184 on engagement member 174, so also can reduce pressure by the space between 184 couples of engagement member 172b of this through hole and engagement member 174 (the formed space of slot part 178b).And, by aforesaid effect, can easily make engagement member 102a and engagement member 174 be adjacent to.In addition, can easily make engagement member 172b and engagement member 174 be adjacent to.Under this state, can be by only irradiating laser and engagement member be engaged with each other from laser being there is to the engagement member 172b side of permeability.

And, in the variation shown in Figure 17 and Figure 18, although be provided with a plurality of light absorbents on joint interface, as before this, about as described in Figure 13, can be also on each joint interface, to be only provided with respectively a light absorbent.Even such situation, also can be by engagement member is adjacent to each other, and only from laser being there is to the engagement member side of permeability, irradiate laser, thereby engagement member is engaged with each other.

Below, with reference to accompanying drawing, the illuminating method of laser is described.

Figure 19 (a) is the ideograph of overlooking from top amplifying observation bonded structure, is equivalent to the ideograph of observing from the direction of the arrow A shown in Fig. 7.Figure 19 (b) is the side-looking ideograph from the place ahead amplifying observation bonded structure, is equivalent to the B-B cutaway view shown in Fig. 7.

As one of illuminating method of laser, as shown in Figure 15 (b), can enumerate the method for being irradiated by the laser optical system that corresponds respectively to light absorbent 106a, 106b, 106c, 106d.On the other hand, this illuminating method is that the laser 120a of a laser optical system output is radiated on light absorbent 106a and light absorbent 106b.And, the laser 120b of another laser optical system output is radiated on light absorbent 106c and light absorbent 106d.

As shown in figure 19, the focal position of laser 120a is the roughly intermediate point of the above-below direction of light absorbent 106a and light absorbent 106b, and the focal position of laser 120b is the roughly intermediate point of the above-below direction of light absorbent 106c and light absorbent 106d.This is roughly consistent with roughly intermediate point below above with engagement member 104.So, even if the focal position of

laser

120a, 120b is upper in the formation position of light absorbent 106a, 106b, 106c, 106d (setting position), but there are enough energy that heats or melt for making light absorbent 106a, 106b, 106c,

106d absorbing laser

120a, 120b.

And, by the focal position of laser 120a being set on the roughly intermediate point of above-below direction of light absorbent 106a and light absorbent 106b, can make the irradiation energy approximate equality of the laser 120a on light absorbent 106a and light absorbent 106b.Identical therewith, by the focal position of laser 120b being set on the roughly intermediate point of above-below direction of light absorbent 106c and light absorbent 106d, can make the irradiation energy approximate equality of the laser 120b on light absorbent 106c and light absorbent 106d.

Then, when roughly

laser

120a, 120b being radiated at respectively on light absorbent 106a, 106b and light absorbent 106c, 106d simultaneously, arrow is as shown in Figure 19 (a) such, by making laser optical system roughly be parallel to

engagement member

102a, 102b, 104 and suitably move,

laser

120a, 120b can be radiated at and form light absorbent 106a, the 106b of ring-type, on the complete cycle of 106c, 106d.Its result can engage engagement member 102a on complete cycle with engagement member 104, and can on complete cycle, engagement member 102b be engaged with engagement member 104.

Thus, even in the situation that engaging everywhere junction surface, also can engage by two laser optical systems.Therefore, the magnitude setting of laser optical system can be reduced, engagement device can be simplified.And, due to

laser

120a, 120b that can be to each light absorbent 106a, 106b, 106c, 106d irradiation energy approximate equality, so, roughly the same bond strength can be obtained at each junction surface.Therefore, the control of engaging condition becomes easier.And, because can roughly simultaneously by Ear Mucosa Treated by He Ne Laser Irradiation on light absorbent 106a, 106b, 106c, 106d so that heating and engaging, so heating engages and compares with indivedual irradiation respectively, can suppress the crooked impact of engagement member that junction surface produces.Therefore, can between engagement member, obtain larger bond strength.Its result, can improve the reliability of joint.

In addition, light absorbent 106a, 106b also can be formed: perpendicular to (joint interface engaging with engagement member 102b) above it or below (joint interface engaging with engagement member 102a) while observing engagement member 104, light absorbent 106a(the 1st light absorbent) the end and light absorbent 106b(the 2nd light absorbent of a side) the end of a side roughly overlap.That is, light absorbent 106a, 106b form as follows: perpendicular to above it or below while observing engagement member 104, mutually completely not overlapping.

In the case, the part roughly overlapping in the end of a side of light absorbent 106a and the end of a side of light absorbent 106b, as shown in Figure 19 (a) and Figure 19 (b), can make the laser 120a of a laser optical system output be radiated on light absorbent 106a and light absorbent 106b.And, by making laser optical system roughly be parallel to

engagement member

102a, 102b, 104 and suitably move, laser 120a can be radiated on the complete cycle of the light absorbent 106a, the 106b that form ring-type.Its result, interior all ends at the junction surface of light absorbent 106a (the 1st junction surface) and interior all ends at the junction surface (the 2nd junction surface) of the either party in outer circumference end and light absorbent 106b and the arbitrary the opposing party in outer circumference end roughly overlap when overlooking.On this junction surface at light absorbent 106c and 106d too.

And, can be also the end of a side of light absorbent 106a and the end of a side of light absorbent 106b is overlapping is: the degree that the laser 120a of a laser optical system output can roughly be irradiated to simultaneously.Even such situation, also can be radiated at following part by the laser 120a of a laser optical system output: perpendicular to the boundary member of the light absorbent 106a above it or while observing engagement member 104 below and light absorbent 106b.Its result, interior all ends at the junction surface of light absorbent 106a and interior all ends at the junction surface of the either party in outer circumference end and light absorbent 106b and the arbitrary the opposing party in outer circumference end roughly overlap when overlooking.This on light absorbent 106c, 106d too.

Figure 20 (a) is the ideograph of overlooking from top amplifying observation bonded structure, is equivalent to the ideograph of observing from the direction of the arrow A shown in Fig. 7.Figure 20 (b) is the side-looking ideograph from the place ahead amplifying observation bonded structure, is equivalent to the B-B cutaway view shown in Fig. 7.

At this, consider to engage the situation of three

tabular engagement member

102a, 102b, 102c.Between engagement member 102a and engagement member 102b, be folded with ring-type engagement member 104a, between engagement member 102b and engagement member 102c, be folded with ring-type engagement member 104b.

So, in this illuminating method, the laser 120a of a laser optical system output is radiated on light absorbent 106a and light absorbent 106b.And, the laser 120b of another laser optical system output is radiated on light absorbent 106c and light absorbent 106d.And, the laser 120c of another laser optical system output is radiated on light absorbent 106e and light absorbent 106f.And, the laser 120d of another laser optical system output is radiated on light absorbent 106g and light absorbent 106h.

As shown in figure 20, the focal position of laser 120a is the roughly intermediate point of the above-below direction of light absorbent 106a and light absorbent 106b, and the focal position of laser 120b is the roughly intermediate point of the above-below direction of light absorbent 106c and light absorbent 106d.And the focal position of laser 120c is the roughly intermediate point of the above-below direction of light absorbent 106e and light absorbent 106f, the focal position of laser 120d is the roughly intermediate point of the above-below direction of light absorbent 106g and light absorbent 106h.Above-mentioned focal position respectively with separately roughly consistent with the roughly intermediate point of above-below direction below above of

engagement member

104a, 104b.

Thus, as before this, about as described in Figure 19, can make the irradiation energy approximate equality of the laser 120d on irradiation energy, light absorbent 106g and the light absorbent 106h of the laser 120c on irradiation energy, light absorbent 106e and the light absorbent 106f of the laser 120b on irradiation energy, light absorbent 106c and the light absorbent 106d of the laser 120a on light absorbent 106a and light absorbent 106b.

Then, arrow shown in Figure 20 (a), by making laser optical system roughly be parallel to

engagement member

102a, 102b, 102c, 104a, 104b and suitably move,

laser

120a, 120b, 120c, 120d can be radiated to form light absorbent 106a, 106b, 106c, 106d, 106e, the 106f of ring-type, on the complete cycle of 106g, 106h.Its result can be engaged with each other engagement member on complete cycle.

Thus, even in the situation that engaging three tabular engagement members, also can be by only irradiating laser and by two ring-type engagement members, engagement member be engaged with each other from a side.In addition, as shown in Figure 20 (b), even in the situation that engaging eight junction surfaces, place, also can engage by four laser optical systems.Therefore, the magnitude setting of laser optical system can be reduced, engagement device can be simplified.

And, as shown in Figure 20 (a), by laser 120a and laser 120c are irradiated slightly in tandem in direction of advance, and laser 120b and laser 120d are irradiated slightly in tandem in direction of advance, can irradiate in a wider context laser to direction of advance.And, aspect other effect, also can access front about the identical effect of the effect described in Figure 19 therewith.

In addition, as before this about as described in Figure 19, in this illuminating method, light absorbent 106a, 106b also can be formed: perpendicular to (joint interface engaging with engagement member 102b) above it or below (joint interface engaging with engagement member 102a) while observing engagement member 104, light absorbent 106a(the 1st light absorbent) the end and light absorbent 106b(the 2nd light absorbent of a side) the end of a side roughly overlap.And, can be also the end of a side of light absorbent 106a and the end of a side of light absorbent 106b is overlapping is: the degree that the laser 120a of a laser optical system output can roughly be irradiated to simultaneously.This on light absorbent 106c, 106d, 106e, 106f, 106g, 106h too.

In addition, in the illuminating method about the laser described in Figure 19 and Figure 20 before this, although the focal position of laser is arranged on to the roughly intermediate point of the above-below direction of light absorbent, be not only defined as this.The laser that for example, the optical system that can realize a plurality of focuses can be irradiated is radiated at respectively on light absorbent 106a and light absorbent 106b.That is the not confocal laser that has that, an optical system can be irradiated is radiated at respectively on light absorbent 106a and light absorbent 106b.

And in these cases,, by this optical system is roughly rotated around central shaft, can easily change the distance (spacing) having between not confocal two laser.Therefore, width, size or their setting position of corresponding light absorbent 106a and light absorbent 106b neatly.

Even in this case, because can reduce the magnitude setting of laser optical system, so also can simplify engagement device.And, because laser that can be to each light absorbent irradiation energy approximate equality, so, can obtain at each junction surface roughly the same bond strength.

And Figure 21 and Figure 22 are equivalent to the B-B cutaway view shown in Fig. 7.

In the joint method relating in this variation, when using chamber 200 that engagement member is adjacent to each other, by irradiating laser, engage.Chamber 200 shown in Figure 21 has: the laser entrance window 202 that can see through

laser

120a, 120b;

Engagement member

172a, 102b, 194 can be placed and also the objective table 234 of position can be adjusted upward at three axles; With the valve 208 that can open or close chamber 200 inside.

In addition, as shown in figure 22, on the joint interface engaging with engagement member 172a and engagement member 102b on engagement member 194, identical with ring-type engagement member 194,

slot part

198a, 198b are set to respectively ring-type.On the other hand, be not provided with the such connection slot part 198a of engagement member 104 as shown in Figure 9 and the through hole of slot part 198b.And engagement member 172a is not provided with the steam vent that forms exhaust line, on objective table 234, be not provided with the steam vent that forms exhaust line yet.

So first,

engagement member

172a, 102b, 194 are suitably moved into chamber 200 inside.Then,, to chamber 200 inner pressure relieves shut off valve 208, under this state, make engagement member 172a, engagement member 194 and engagement member 102b sequentially overlap according to this.Thus, following space becomes post-decompression roughly seal cavity: the space 150 being surrounded by engagement member 172a, engagement member 102b and engagement member 194; Space between engagement member 172a and engagement member 194 (the formed space of slot part 198a); And the space between engagement member 102b and engagement member 194 (the formed space of slot part 198b).And then valve 208 is opened, make the pressure rise of chamber 200 inside.

So, between the internal pressure in the space 150 being surrounded by engagement member 172a, engagement member 102b and engagement member 194 and external pressure, can produce pressure differential.And, between the internal pressure in slot part 198a, the formed space of 198b and external pressure, can produce pressure differential.

Now, needn't make the pressure rise of chamber 200 inside to atmospheric pressure.The pressure rise that makes chamber 200 inside is to following degree: between the internal pressure in space 150 and external pressure and slot part 198a, the internal pressure in the formed space of 198b and at least either party between external pressure, generation can make the degree of the pressure differential that engagement member is adjacent to each other.Thus, by making the inner decompression state keeping to a certain degree of chamber 200, and rely on before this about the insulation effect of the vacuum described in Fig. 8～Figure 10, can suppress heat from

engagement member

172a, 102b, 194 surface to chamber 200 diffusion inside.

By doing like this,

engagement member

172a, 102b, 194 are adjacent to mutually.Under this state, adopt before this about the illuminating method of the laser described in Figure 15 (b), Figure 19 or Figure 20, only from engagement member 102b side, respectively

laser

120a, 120b are roughly radiated at light absorbent 106a, 106b, 106c, 106d simultaneously.

Thus, the through hole that is communicated with slot part 198a and slot part 198b is not set on engagement member 194, just can makes engagement member be adjacent to each other.And, the steam vent that forms exhaust line is not set on engagement member 172a, objective table 234, just can make engagement member be adjacent to each other.Therefore, the operation of processing through hole on engagement member 194 can be omitted in, the operation of processing steam vent on engagement member 172a, objective table 234 can be omitted in.That is, can improve the efficiency that engages operation.And, can simplify

engagement member

172a, 194 and the shape of objective table 234.

By so making engagement member be adjacent to each other, can prevent that heat from transmitting reduces because of the gap existing on joint interface.Its result can obtain larger bond strength between engagement member, can improve the reliability of joint.And, as previously mentioned, because by making the inner decompression state keeping to a certain degree of chamber 200, and rely on the insulation effect of vacuum, heat is difficult to spread to periphery, so the heat that light absorbent 106a, 106b, 106c, 106d are sent out respectively efficiency passes to

engagement member

172a, 102b, 194 well.Its result can obtain larger bond strength between engagement member.In addition, because without carrying out too much heat input, so can suppress because hot impact brings damage to

engagement member

172a, 102b, 194.

The engagement device that present embodiment relates to possesses:

optical system

222a, 222b(energy illumination unit), have the laser as heating source is carried out to optically focused and is radiated at respectively the optical element of the camera lens etc. of assigned position;

Laser oscillator

224a, 224b, Output of laser; Power supply 226a, 226b, be added to the driving electric power of arbitrary size on

laser oscillator

224a, 224b; Optical

system drive division

228a, 228b(positioning unit), can adjust respectively at three the position of

optical system

222a, 222b on axially; Objective table drive division 210(positioning unit), can adjust upward at three axles the position of objective table; With control part 230, the driving electric power being added on

laser oscillator

224a, 224b by power supply 226a, 226b is controlled.

In addition, according to the foregoing method that the slot part forming on joint interface is reduced pressure engagement member is adjacent to, suitably possess chamber 200, pump 206.And, although the engagement device shown in Figure 23 possesses two

optical system

222a, 222b, be not only defined as this, also can possess three above a plurality of optical systems according to the quantity at junction surface.On the other hand, also can only possess an optical system.In the case, power supply, laser oscillator and optical system drive division respectively possess one.

According to user's indication, control part 230 can be controlled power supply 226a, 226b, so that the pulse shape of

laser

120a, 120b, pulse width etc. are set to change.That is, the pulse shape of laser 120a, the 120b of

laser oscillator

224a, 224b output is according to being controlled by the waveform of the additional driving electric power of power supply 226a, 226b.Under the control of control part 230, owing to being added to the waveform of the driving electric power on

laser oscillator

224a, 224b by power supply 226a, 226b, be changed, so, there is the peak power output of regulation and laser 120a, the 120b of energy density export from

laser oscillator

224a, 224b.

In addition, control part 230 can be controlled the action of optical system drive division 228a, 228b.That is to say, control part 230 can be controlled optical

system drive division

228a, 228b according to the positional information of predefined engagement member, makes

laser

120a, 120b be radiated at assigned position.And control part 230 can also be controlled the action of objective table drive division 210.That is to say, the irradiation position of

laser

120a, 120b also can be controlled the position of objective table by objective table drive division 210 and adjusted on axially at three due to control part 230.Thus, optical

system drive division

228a, 228b(positioning unit) and objective table drive division 210(positioning unit) at least any can determine engagement member and

optical system

222a, 222b(energy illumination unit) relative position.

In addition, the engagement device shown in Figure 23 also can also possess for obtaining the not shown optical elements such as video camera of the image of engagement member.Thus, the view data that video camera is taken is output to control part 230 and carries out image analysis.Then, according to this result, control part 230 can be controlled optical

system drive division

228a, 228b, makes

laser

120a, 120b be radiated at assigned position.By setting like this, can more correctly

laser

120a, 120b be radiated to assigned position with the shorter time.

In the engagement device relating in this variation, heating source is not laser, but makes electricity consumption or combustion gas etc.That is to say, the heating source in the joint method of a plurality of engagement members is not only defined as laser.

So the engagement device that this variation relates to possesses the system of the emitting 245(energy illumination unit of emitting as the electricity of heating source or combustion gas etc.).And possess: power supply 241, is added to the driving electric power of arbitrary size in the system of emitting 245; Emit the 247(of system drive portion positioning unit), can adjust respectively the position that emits system 245 on axially at three; Objective table drive division 210(positioning unit), can adjust upward at three axles the position of objective table; With control part 230, the driving electric power being added in the system of emitting 245 by power supply 241 is controlled.And, according to the foregoing method that the slot part forming on joint interface is reduced pressure engagement member is adjacent to, suitably possess chamber 200, pump 206.

According to user's indication, control part 230 can be controlled power supply 241, so that the output of the heating source 249 of electricity or combustion gas etc. is set to change.That is, emit heating source 249 that system 245 emits according to being controlled by the additional driving electric power of power supply 241.

In addition, control part 230 can be controlled the action of emitting system drive portion 247.That is to say, control part 230 can be controlled and emit system drive portion 247 according to the positional information of predefined engagement member, and heating source 249 is emitted at assigned position.And control part 230 can also be controlled the action of objective table drive division 210.That is to say the emitting position and also can control the position of objective table by objective table drive division 210 and adjusted on axially at three due to control part 230 of heating source 249.Thus, emit the 247(of system drive portion positioning unit) and objective table drive division 210(positioning unit) at least any can determine engagement member and emit system 245(energy illumination unit) relative position.In addition, as before this, about as described in Figure 23, the engagement device of this variation also can also possess for obtaining the not shown optical elements such as video camera of the image of engagement member.

According to the engagement device shown in Figure 24, by emitting at assigned position as the electricity of heating source or combustion gas etc., in a plurality of engagement members at least any can melt, solidify, form thus junction surface.Its result, at this junction surface, a plurality of engagement members are engaged with each other.And, because the engagement device of this variation identical with the engagement device that uses laser be to utilize heat and engage, so can access the insulation effect of above-mentioned vacuum.

That is to say, because by making the inner decompression state keeping to a certain degree of chamber 200, and rely on the insulation effect of vacuum, heat is difficult to periphery diffusion, so the heat based on electricity or combustion gas etc. can efficiency pass to engagement member well.Its result can obtain larger bond strength between engagement member.In addition, because without carrying out too much heat input, so can suppress to bring damage due to hot impact to engagement member.

As discussed above, according to present embodiment, can use space (the formed space of slot part 108a) between 206 couples of engagement member 102a of pump and engagement member 104 and the space (the formed space of slot part 108b) between engagement member 102b and engagement member 104 to reduce pressure.Therefore, by engagement member each other or can easily make it be adjacent to when engagement member engages with light absorbent.Thus, can prevent that heat from transmitting reduces because of the gap existing on joint interface.Its result can obtain larger bond strength between engagement member, can improve the reliability of joint.

In addition, by using chamber 200, through hole or steam vent are not set on engagement member or objective table, just can reduce pressure to the space 150 being surrounded by engagement member 102a, engagement member 102b and engagement member 104, the formed space of slot part 198a, 198b.Therefore, by engagement member each other or can easily make it be adjacent to when engagement member engages with light absorbent.Thus, also can obtain aforesaid effect.

And, perpendicular to above it or below observe engagement member at 104,124,154,174,194 o'clock, light absorbent is formed phase non-overlapping copies each other.Therefore, even if the outermost member of a side has non-permeability to laser, also can be by only irradiating laser and engagement member be engaged with each other from laser being there is to the outermost member side of the opposite side of permeability.

Above, embodiments of the present invention are illustrated.But the present invention is not limited to above description.As long as possess feature of the present invention, those skilled in the art to aforesaid embodiment suitably in addition the technology after design alteration be also contained in scope of the present invention.For example, the set-up mode of the shape of each key element that engagement device etc. possess, size, material, configuration etc. or light absorbent etc. is not limited to illustrated content, can suitably change.

In addition, material, vpg connection at machined object, be not limited to illustrated content, can suitably change.Machined object is not only defined as the luminous plaque of PDP, SED, FED, OLED display etc., such as can be also solar panel or secondary cell etc.And, as laser being there is to the material of permeability, such as enumerating glass being used in luminous plaque or solar panel etc.On the other hand, as laser being there is to the material of non-permeability, such as the resin that can enumerate the metal of the tank etc. that is used in secondary cell or tank etc.

In addition, as previously mentioned, be folded in tabular engagement member 102a and the engagement member 104 between engagement member 102b etc. and be not limited to ring-type, also can be tabular.

In addition, as long as technical feasible, each key element that can possess aforesaid each embodiment combines, as long as comprise feature of the present invention, the technology that these have been carried out to combination equally within the scope of the present invention.

According to the present invention, can provide by engagement member each other or can easily make its bonded structure being adjacent to, joint method and engagement device when engagement member engages with light absorbent.

Claims

1. a bonded structure, is characterized in that, possesses:

The 1st engagement member;

The 2nd engagement member;

With the 3rd engagement member,

In described the 1st engagement member and described the 2nd engagement member at least any is, on the joint interface between described the 1st engagement member and described the 2nd engagement member, there is slot part,

In described the 2nd engagement member and described the 3rd engagement member at least any is, on the joint interface between described the 2nd engagement member and described the 3rd engagement member, there is slot part,

Described the 2nd engagement member is folded between described the 1st engagement member and described the 3rd engagement member,

In the space of the slot part between described the 1st engagement member and described the 2nd engagement member and under the state that the space of the slot part between described the 2nd engagement member and described the 3rd engagement member is depressurized, described the 1st engagement member and described the 2nd engagement member are adjacent to and under the state that is adjacent to of described the 2nd engagement member and described the 3rd engagement member, described the 1st engagement member engages with described the 2nd engagement member, and described the 2nd engagement member engages and forms with described the 3rd engagement member.

2. a bonded structure, is characterized in that, possesses:

The 1st engagement member;

The 2nd engagement member;

With the 3rd engagement member,

Described the 1st engagement member has the steam vent that forms exhaust line,

Described the 2nd engagement member is folded between described the 1st engagement member and described the 3rd engagement member, also there is the through hole that is communicated with following slot part, be the slot part between described the 1st engagement member and described the 2nd engagement member, and the slot part between described the 2nd engagement member and described the 3rd engagement member

In the space of the slot part between described the 1st engagement member and described the 2nd engagement member and under the state that the space of the slot part between described the 2nd engagement member and described the 3rd engagement member is depressurized by described steam vent and described through hole, described the 1st engagement member and described the 2nd engagement member are adjacent to and under the state that is adjacent to of described the 2nd engagement member and described the 3rd engagement member, described the 1st engagement member engages with described the 2nd engagement member, and described the 2nd engagement member engages and forms with described the 3rd engagement member.

3. a joint method, is characterized in that,

In the 1st engagement member and the 2nd engagement member at least on any, on the joint interface between described the 1st engagement member and described the 2nd engagement member, form slot part,

In described the 2nd engagement member and the 3rd engagement member at least on any, on the joint interface between described the 2nd engagement member and described the 3rd engagement member, form slot part,

In the space of the slot part between described the 1st engagement member and described the 2nd engagement member and the space of the slot part between described the 2nd engagement member and described the 3rd engagement member is depressurized, under described the 1st engagement member and described the 2nd engagement member is adjacent to and described the 2nd engagement member and described the 3rd engagement member are adjacent to state, described the 1st engagement member is engaged with described the 2nd engagement member, and described the 2nd engagement member is engaged with described the 3rd engagement member.

4. joint method according to claim 3, is characterized in that,

Described decompression is by keeping the chamber of reduced atmosphere to carry out.

5. joint method according to claim 4, is characterized in that,

Described the 1st engagement member, described the 2nd engagement member and described the 3rd engagement member are moved in described chamber, to reducing pressure in described chamber, make described the 1st engagement member and described the 2nd engagement member butt and make described the 2nd engagement member and described the 3rd engagement member butt after, by the pressure setting in described chamber, be than the high pressure of described post-decompression pressure, by making to produce between the internal pressure of described slot part and the external pressure of described slot part pressure differential, be adjacent to described in being undertaken.

6. joint method according to claim 4, is characterized in that,

Described the 1st engagement member, described the 2nd engagement member and described the 3rd engagement member are moved in described chamber, to reducing pressure in described chamber, make described the 1st engagement member and described the 2nd engagement member butt and make described the 2nd engagement member and described the 3rd engagement member butt after, pressure setting in described chamber for than the high pressure forcing down than atmosphere of described post-decompression pressure, is adjacent to described in being undertaken by making to produce between the internal pressure of described slot part and the external pressure of described slot part pressure differential.

7. joint method according to claim 3, is characterized in that,

On the joint interface engaging with described the 1st engagement member on described the 2nd engagement member, form the 1st light absorbent,

On the joint interface engaging with described the 3rd engagement member on described the 2nd engagement member, form the 2nd light absorbent, while observing in the direction of the joint interface perpendicular to engaging with described the 1st engagement member or the joint interface that engages with described the 3rd engagement member, described the 2nd light absorbent has and the nonoverlapping part of described the 1st light absorbent

Make described the 1st engagement member and described the 1st light absorbent butt,

Make described the 3rd engagement member and described the 2nd light absorbent butt,

By laser is radiated at respectively the described the 1st and the 2nd light absorbent from described the 3rd engagement member side,

Make in described the 1st engagement member, described the 2nd engagement member and described the 1st light absorbent at least any melts, solidifies, form the 1st junction surface, described the 1st engagement member is engaged with described the 2nd engagement member,

Make in described the 2nd engagement member, described the 3rd engagement member and described the 2nd light absorbent at least any melts, solidifies, form the 2nd junction surface, described the 2nd engagement member is engaged with described the 3rd engagement member.

8. joint method according to claim 7, is characterized in that,

By a part for laser is radiated on described the 1st light absorbent, another part of described laser is radiated on described the 2nd light absorbent, thereby forms described the 1st junction surface and described the 2nd junction surface simultaneously.

9. a joint method, is characterized in that,

The steam vent that forms exhaust line is formed to described the 1st engagement member,

Described the 2nd engagement member is folded between described the 1st engagement member and described the 3rd engagement member, the through hole that is communicated with following slot part is formed to described the 2nd engagement member, it is the slot part between described the 1st engagement member and described the 2nd engagement member, and the slot part between described the 2nd engagement member and described the 3rd engagement member

In the space of the slot part between described the 1st engagement member and described the 2nd engagement member and the space of the slot part between described the 2nd engagement member and described the 3rd engagement member is depressurized by described steam vent and described through hole, under described the 1st engagement member and described the 2nd engagement member is adjacent to and described the 2nd engagement member and described the 3rd engagement member are adjacent to state, described the 1st engagement member is engaged with described the 2nd engagement member, and described the 2nd engagement member is engaged with described the 3rd engagement member.

10. joint method according to claim 9, is characterized in that,

11. joint methods according to claim 10, is characterized in that,

12. joint methods according to claim 10, is characterized in that,

13. joint methods according to claim 9, is characterized in that,

14. joint methods according to claim 13, is characterized in that,

15. 1 kinds of engagement devices, is characterized in that possessing:

Energy illumination unit, emits laser to the 1st engagement member, the 2nd engagement member and the 3rd engagement member;

Positioning unit, determines the relative position of described the 1st, the 2nd and the 3rd engagement member and described energy illumination unit;

Decompressing unit, it can reduce pressure to the space of formed slot part at least described the 1st engagement member on any in described the 1st engagement member and described the 2nd engagement member and the joint interface between described the 2nd engagement member, described the 1st engagement member and described the 2nd engagement member are adjacent to, and it can reduce pressure to the space of formed slot part at least described the 2nd engagement member on any in described the 2nd engagement member and described the 3rd engagement member and the joint interface between described the 3rd engagement member, described the 2nd engagement member and described the 3rd engagement member are adjacent to,

And control part, control described positioning unit, so as by make described laser from described the 3rd engagement member side irradiate in:

The 1st light absorbent is formed on the joint interface engaging with described the 1st engagement member on described the 2nd engagement member;

With the 2nd light absorbent, it forms, on described the 2nd engagement member, on the joint interface engaging with described the 3rd engagement member, while observing in the direction of the joint interface perpendicular to engaging with described the 1st engagement member or the joint interface that engages with described the 3rd engagement member, have and the nonoverlapping part of described the 1st light absorbent.

16. engagement devices according to claim 15, is characterized in that,

Described decompressing unit is the chamber that can keep reduced atmosphere.

17. engagement devices according to claim 15, is characterized in that,

The objective table that also possesses placement the described the 1st, the 2nd and the 3rd engagement member,

Described objective table has the steam vent being communicated with described slot part, aspirates the gas in the space of described slot part, thereby can reduce pressure to described space by described steam vent.

18. engagement devices according to claim 15, is characterized in that,

The focal position of described laser is set on the roughly intermediate point of above-below direction of described the 1st light absorbent and described the 2nd light absorbent.