JP2003170290A - Laser beam transmission welding method and apparatus therefor - Google Patents
Laser beam transmission welding method and apparatus thereforInfo
- Publication number
- JP2003170290A JP2003170290A JP2001375576A JP2001375576A JP2003170290A JP 2003170290 A JP2003170290 A JP 2003170290A JP 2001375576 A JP2001375576 A JP 2001375576A JP 2001375576 A JP2001375576 A JP 2001375576A JP 2003170290 A JP2003170290 A JP 2003170290A
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- Prior art keywords
- laser beam
- laser
- joined
- transmission welding
- materials
- Prior art date
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、レーザ光を用いガ
ラスや石英などの透明な無機材料の接合を行う接合方法
に関するものであり、特にガラス接合に好適なレーザ光
透過溶接法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a joining method for joining transparent inorganic materials such as glass and quartz using laser light, and more particularly to a laser beam transmission welding method suitable for joining glass. .
【０００２】[0002]
【従来の技術】近年、ＩＴ機器用デバイスのニ−ズが増
大している。特に光通信用のマイクロガラス部品や半導
体ラインで使用されるガラス部品の精密マイクロ接合の
開発が待たれている。一般に、ガラス部品では図５
（イ）に示すようにガラス部品同志の間にボンド等の接
着剤を用いる接合が中心であり、この方法では使用環境
の制限や接着剤の凝固時間が不安定なために、位置決め
誤差が生じるなどの問題がある。また他の接合方法とし
て、図５（ロ）に示すようにレーザによってガラス自身
を溶融するガラス溶融接合が行われている。溶融接合で
は接合部の母体全体を溶融するため、ガラス表面を傷つ
ける可能性や感熱による付属部品への悪影響も考えられ
る。2. Description of the Related Art In recent years, the needs for IT equipment devices have been increasing. In particular, the development of precision micro joining of micro glass parts for optical communication and glass parts used in semiconductor lines is awaited. Generally, for glass parts,
As shown in (a), the bonding mainly uses an adhesive such as a bond between the glass parts. In this method, the positioning error occurs due to the limitation of the operating environment and the unstable coagulation time of the adhesive. There are problems such as. Further, as another joining method, as shown in FIG. 5B, glass fusion joining is performed in which the glass itself is fused by a laser. In fusion bonding, since the entire base material of the joint is melted, there is a possibility of damaging the glass surface and adverse effects on heat-sensitive accessory parts.
【０００３】また、レーザ光を使用した他のレーザ溶着
方法として特開２０００−１０５４９９号、特開平１０
−８５９６５号に開示された方法等も提案されている。
しかしこれら公報に記載された技術は、接合部でのレー
ザ光吸収が不十分であり、ガラス等の無機材料を確実に
溶接することが難しいという問題がある。Other laser welding methods using laser light are disclosed in Japanese Patent Laid-Open Nos. 2000-105499 and 10-1998.
The method disclosed in No. -85965 is also proposed.
However, the techniques described in these publications have a problem that the laser light absorption at the joint is insufficient and it is difficult to reliably weld an inorganic material such as glass.
【０００４】[0004]
【発明が解決しようとする課題】今後、光通信用デバイ
スにおいては部品の熱伝導率を同等にするため、光学系
にレンズ以外の他の部位にもガラス材を用いたり、半導
体製造ラインでは半導体に対し、金属反応を起こしにく
いガラス部品により製造ラインを構築するなど、このよ
うなガラス部品の使用箇所の接合にはより精密な接合方
法の開発が必要である。In the future, in order to equalize the thermal conductivity of parts in optical communication devices, glass materials will be used in parts other than lenses in the optical system, and semiconductors will be used in semiconductor manufacturing lines. On the other hand, it is necessary to develop a more precise joining method for joining the places where such glass components are used, such as constructing a production line with glass components that are resistant to metal reactions.
【０００５】そこで本発明は、無機材料からなる被接合
材の接合面（ガラス接合面等）に、レーザ光を吸収する
吸収材を塗布あるいは添付あるいは成膜し、この接合面
にレーザ（例えばＹＡＧレ−ザ）を照射することで被接
合材を接合界面のみで溶接するレーザ光透過溶接法を提
供し、上記問題点を解決することを目的とする。本発明
は、レーザ光を透過する２枚の被接合材を上下に突き合
わせ（重ね合わせ）、ファイバ−伝送のＹＡＧレ−ザに
よってその接合界面のみをスポット接合して被接合材同
志を接合することに特徴がある。Therefore, according to the present invention, an absorbing material that absorbs laser light is applied to, attached to, or formed on a bonding surface (glass bonding surface, etc.) of materials to be bonded made of an inorganic material, and a laser (eg, YAG) is applied to the bonding surface. It is an object of the present invention to provide a laser beam transmission welding method for welding a material to be joined only at a joining interface by irradiating a laser, and to solve the above problems. According to the present invention, two materials to be bonded which transmit a laser beam are butted against each other (overlapped), and only the bonding interface is spot-bonded by a fiber-transmission YAG laser to bond the materials to be bonded. Is characterized by.
【０００６】[0006]
【課題を解決するための手段】このため、本発明が採用
した技術解決手段は、レーザ光を被接合材の接合界面に
照射することにより被接合材を溶融し溶接する方法であ
って、前記被接合材の両接合面にはレーザ光吸収材を塗
布または添付または成膜し、前記レーザ光吸収材にレー
ザ光を吸収させ被接合材同志を溶接することを特徴とす
るレーザ光透過溶接法である。また、前記被接合材に塗
布または成膜するレーザ光吸収材は、少なくとも有色塗
料、金属の真空蒸着膜、金属のスパッタ蒸着膜、セラミ
ック材蒸着膜のいずれか一つであることを特徴とするレ
ーザ光透過溶接法である。また、前記被接合材は、ガラ
ス、石英のいずれかであることを特徴とするレーザ光透
過溶接法である。また、前記被接合材のうちレーザ照射
側は、ガラス、石英のいずれかであることを特徴とする
レーザ光透過溶接法である。また、前記レーザ光はＹＡ
Ｇレーザであることを特徴とするレーザ光透過溶接法で
ある。また、前記レーザ光は複数ショットで被接合材界
面に照射されることを特徴とするレーザ光透過溶接法で
ある。また、前記レーザ光透過溶接はクラックの発生を
防止するために被接合材に適した高温雰囲気中で行うこ
とを特徴とするレーザ光透過溶接法である。また、レー
ザ光と、このレーザ光を集光し試料上に照射する集光手
段と、レーザ光を走査する走査手段と、被接合材載置用
のステージとによって構成され、前記レーザ光は複数に
分岐され、被接合材に向けて照射できることを特徴とす
るレーザ光透過溶接装置である。また、前記レーザ光
は、ＹＡＧレーザであることを特徴とする請求項７に記
載のレーザ光透過溶接装置である。Therefore, the technical solution adopted by the present invention is a method of melting and welding a material to be joined by irradiating a joining interface of the material to be joined with a laser beam. Laser light transmission welding method characterized in that a laser light absorbing material is applied to or attached to or formed on both surfaces of the materials to be bonded, and the laser light absorbing material absorbs laser light to weld the materials to be bonded together. Is. Further, the laser light absorbing material applied or formed on the material to be joined is at least one of a colored paint, a vacuum deposition film of metal, a sputter deposition film of metal, and a ceramic material deposition film. It is a laser beam transmission welding method. Further, in the laser beam transmission welding method, the material to be bonded is either glass or quartz. The laser irradiation side of the materials to be joined is either glass or quartz, which is a laser light transmission welding method. Also, the laser light is YA
It is a laser light transmission welding method characterized by being a G laser. Further, in the laser beam transmission welding method, the laser beam is applied to the interface of the materials to be joined in a plurality of shots. Further, the laser light transmission welding method is a laser light transmission welding method, characterized in that the laser light transmission welding is performed in a high temperature atmosphere suitable for the materials to be joined in order to prevent the occurrence of cracks. Further, it is configured by a laser beam, a condensing unit that condenses the laser beam and irradiates the sample on the sample, a scanning unit that scans the laser beam, and a stage for mounting a material to be bonded. The laser beam transmission welding device is characterized in that it can be radiated toward the materials to be joined. The laser beam transmission welding device according to claim 7, wherein the laser beam is a YAG laser.
【０００７】[0007]
【発明の実施の形態】以下、本発明の実施形態を図面を
参照して説明すると、図１は本発明に係るレーザ光透過
溶接法に用いる装置の構成図である。BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a block diagram of an apparatus used in a laser beam transmission welding method according to the present invention.
【０００８】図において、１は被接合材、２はレーザ
光、３はレンズホルダー、４は光ファイバー、５は３軸
コントロールステージ、６はレーザ発振器である。レー
ザ発振器６で発振されたレーザ光は、光ファイバー４、
レンズホルダー３内のレンズを通して被接合界面に集光
され照射される。この時、レーザスポットはレンズホル
ダー３を支持しているレーザ光走査手段（３軸コントロ
ールステージ）５によって照射したい位置に容易に制御
できる。なお、被接合材１を載置するステージ側を３軸
コントロールし、照射位置を制御することも可能であ
る。さらに必要に応じてレ−ザ発振器から出力されたレ
−ザ光を複数に分岐させた光ファイバにより伝送し、複
数の接合を同時に行うこともできる。また、上記装置で
接合する被接合材１は図２に示すように、接合する互い
の面にレーザ光吸収材７が塗布または添付または成膜さ
れ、それらの面同志を接合した状態で、上記装置にセッ
トされる。In the figure, 1 is a material to be bonded, 2 is a laser beam, 3 is a lens holder, 4 is an optical fiber, 5 is a triaxial control stage, and 6 is a laser oscillator. The laser light oscillated by the laser oscillator 6 is transmitted through the optical fiber 4,
The light is focused and irradiated on the interface to be bonded through the lens in the lens holder 3. At this time, the laser spot can be easily controlled by the laser beam scanning means (three-axis control stage) 5 supporting the lens holder 3 to a position to be irradiated. It is also possible to control the irradiation position by performing triaxial control on the stage side on which the material to be joined 1 is placed. Further, if necessary, the laser light output from the laser oscillator can be transmitted through a plurality of branched optical fibers to perform a plurality of splices at the same time. Further, as shown in FIG. 2, the material to be bonded 1 to be bonded by the above-mentioned device is applied with or attached to or formed with a laser light absorbing material 7 on the surfaces to be bonded, and the surfaces are bonded together. Set on the device.
【０００９】上記装置によって接合を行う材料として
は、レーザ光を透過する無機材料を対象とすることがで
きる。また、レーザ光としては、透明な被接合材を透過
することができる性質をもつことが重要であり、ＹＡＧ
レーザなどが好適である。さらに、レーザ光吸収材とし
ては黒色塗料等の他、レーザ光を吸収する有色の油性塗
料、金属の真空蒸着膜、金属のスパッタ蒸着膜、セラミ
ック材蒸着膜などレーザ光を効率良く吸収できる材料が
好適である。An inorganic material that transmits laser light can be used as a material for bonding with the above apparatus. Further, it is important that the laser light has a property of being able to pass through a transparent material to be bonded.
A laser or the like is suitable. Further, as the laser light absorbing material, in addition to black paint and the like, there are materials that can efficiently absorb laser light, such as colored oil-based paint that absorbs laser light, a vacuum deposition film of metal, a sputter deposition film of metal, and a ceramic material deposition film. It is suitable.
【００１０】上記装置を使用してガラスを接合する場合
を例にとって本方法を説明する。先ず被接合材としての
ガラス１の接合面に、図２（イ）に示すようにレーザ光
吸収材（ここでは黒色の油性塗料）７を塗布する。つい
で図２（ロ）に示すようにレーザ光吸収材７を塗布した
面同志を重ね合わせ、重ね合わせたガラス１を上記装置
のステージ上にセットする。この状態でＹＡＧレーザを
ガラス接合界面に照射する。レーザ光はレンズホルダー
内のレンズによって図２（ハ）に示すようにガラスを透
過して接合界面で集光され、接合面に塗布したレーザ光
吸収材で吸収される。この時の吸収熱により図２
（ニ）、図３に示すように接合部８のガラス同志が溶融
して接合する。このように本方法では、ガラス中ではＹ
ＡＧレーザが透過するため、ガラス表面は傷つけずに、
レーザ光吸収材を塗布した界面でのみ溶接できる。レー
ザ光は微細加工に適しているため、この方法を用いるこ
とによりマイクロ部品の精密溶接も可能である。また、
レーザ光をパルス発振することで、母材に対する熱影響
を少なくすることができ、またレーザを適宜手段で分岐
することで、同時に複数箇所の溶接が容易となる。The present method will be described by taking as an example the case where glass is bonded using the above apparatus. First, as shown in FIG. 2A, a laser light absorbing material (here, black oil paint) 7 is applied to the bonding surface of the glass 1 as the material to be bonded. Then, as shown in FIG. 2B, the surfaces coated with the laser light absorbing material 7 are superposed on each other, and the superposed glass 1 is set on the stage of the above apparatus. In this state, the glass bonding interface is irradiated with YAG laser. The laser light passes through the glass by the lens in the lens holder as shown in FIG. 2C, is condensed at the bonding interface, and is absorbed by the laser light absorbing material applied to the bonding surface. Due to the absorption heat at this time,
(D) As shown in FIG. 3, the glass members of the joint portion 8 are melted and joined. Thus, in this method, Y
Since the AG laser transmits, the glass surface is not damaged,
Welding is possible only at the interface coated with the laser light absorber. Since laser light is suitable for fine processing, precision welding of micro parts is also possible by using this method. Also,
By pulse-oscillating the laser light, it is possible to reduce the thermal effect on the base material, and by branching the laser by an appropriate means, it is easy to weld at a plurality of locations at the same time.
【００１１】なお、溶接の際、レーザ光吸収材を一方の
被接合材の接合面に塗布した場合、一方の被接合材にレ
−ザ光が吸収されるだけで他方の被接合材はレ−ザを透
過してしまい二枚の被接合材を溶接することはできな
い。このため２枚の被接合材の接合面にレーザ光吸収材
を塗布することが重要である。双方の被接合材の接合界
面にレ−ザ光吸収材を塗布することで、一方の被接合材
に瞬時に吸収されたレ−ザ光は、他方のガラス界面にも
吸収され、また、溶けたガラスは大気中への逃げ場がな
いため、その場で急速に凝固して接合が行われる。ま
た、レーザ光は図４に示すように１ショット、３ショッ
ト（複数ショット）、オーバーラップした状態で接合面
に照射することができ、ショット数を変えた場合には、
溶接条件を制御することができる。During welding, when the laser light absorbing material is applied to the joining surface of one of the joined materials, the laser light is absorbed by one of the joined materials and the other joined material is laser-absorbed. -It is impossible to weld two materials to be welded because it penetrates through the hole. Therefore, it is important to apply the laser light absorbing material to the bonding surfaces of the two materials to be bonded. By applying the laser light absorbing material to the bonding interface of both materials to be bonded, the laser light instantly absorbed in one material to be bonded is also absorbed in the other glass interface and melts. Since glass has no escape into the atmosphere, it rapidly solidifies and joins there. In addition, as shown in FIG. 4, the laser beam can be applied to the bonding surface in one shot, three shots (a plurality of shots) in an overlapping state, and when the number of shots is changed,
Welding conditions can be controlled.
【００１２】続いてレーザ光透過溶接法を行う際の条件
について説明する。高温雰囲気下におけるレ−ザ光透過
溶接法常温においてのガラスのレ−ザ透過溶接では、レ
−ザの急熱急冷や熱衝撃によって、接合部にクラックが
入り、これが溶接強度に影響を及ぼすことが考えられ
る。そこで、高温雰囲気下において、レ−ザ透過溶接法
を適用し、接合部のクラックを抑制することができる。
例えば、雰囲気温度を４００°Ｃ及び６００°Ｃに設定
し溶接した被試験体について、それぞれのせん断部のノ
マルスキ顕微鏡観察とせん断試験を行った結果、常温時
にみられたクラックが抑制されていることが分かった。
これは、高温雰囲気でレ−ザ透過溶接を行うことで、熱
衝撃や急熱急冷が減少したものと考えられる。このよう
に、レーザ光透過溶接法を行う場合には、必要に応じて
加工雰囲気温度を高温状態とすることが有効である。Next, the conditions for performing the laser beam transmission welding method will be described. Laser light transmission welding method in high temperature atmosphere In laser transmission welding of glass at room temperature, cracks occur at the joint due to rapid heat and quenching of the laser and thermal shock, which affects the welding strength. Can be considered. Therefore, in a high temperature atmosphere, the laser transmission welding method can be applied to suppress cracks in the joint.
For example, as a result of performing a Nomarski microscope observation and a shear test of each sheared portion on a test object welded at an atmospheric temperature set to 400 ° C and 600 ° C, cracks observed at room temperature are suppressed. I understood.
This is considered to be due to the reduction of thermal shock and rapid heat quenching by performing laser transmission welding in a high temperature atmosphere. As described above, when the laser beam transmission welding method is performed, it is effective to set the processing atmosphere temperature to a high temperature as necessary.
【００１３】接合界面に塗布するレーザ光吸収材前記レ
−ザ透過溶接法を用いてガラス接合を行う実施形態の場
合には、ガラス基板に有色の油性塗料を塗布し、ＹＡＧ
レ−ザを吸収させることによって、ガラス界面のみの溶
接を行ってきた。しかし、レーザ光吸収材として用いる
油性塗料では、融点が高いため、高融点の石英ガラスな
どに本溶接法を適用する場合、ＹＡＧレ−ザが油性塗料
に吸収され発熱するエネルギよりも高融点ガラスの融点
が高いため溶接することは困難である。そこで、石英ガ
ラスよりも融点が高い吸収材として、金属をガラスに真
空蒸着、またはスパッタ蒸着し、ＹＡＧレ−ザを金属膜
に吸収材させ、その融解エネルギによってガラスを溶融
させることできる。また、蒸着法では、ガラス基板に均
一に吸収層が形成され、表面も鏡面になるために、ガラ
ス同士の密着性が良好になる。Laser Light Absorbing Material Applied to Bonding Interface In the case of the embodiment in which glass bonding is performed by using the laser transmission welding method, a colored oil paint is applied to the glass substrate, and YAG is applied.
Only the glass interface has been welded by absorbing the laser. However, since the oil-based paint used as the laser light absorbing material has a high melting point, when the present welding method is applied to high-melting-point quartz glass, etc., the YAG laser has a higher melting point than the energy generated by being absorbed by the oil-based paint. It is difficult to weld because of its high melting point. Therefore, as an absorber having a higher melting point than quartz glass, a metal can be vacuum-deposited or sputter-deposited on glass, a YAG laser can be absorbed on a metal film, and the glass can be melted by its melting energy. Further, in the vapor deposition method, the absorption layer is uniformly formed on the glass substrate and the surface is also a mirror surface, so that the adhesion between the glasses is improved.
【００１４】以上本発明に係る実施形態について説明し
たが、被接合材は上記したガラス、石英に限定されるこ
となく、レーザ光を透過する材料であれば種々の材料を
対象とすることができる。また、レーザ光吸収材も上記
した例に限定されることはない。また、被接合材はレー
ザ光が透過できる状況であれば３枚以上を重ね、それぞ
れの接合面にレーザ光の焦点を照射し溶接することも可
能である。さらに、本発明はその精神または主要な特徴
から逸脱することなく、他のいかなる形でも実施でき
る。そのため、前述の実施形態はあらゆる点で単なる例
示にすぎず限定的に解釈してはならない。Although the embodiments according to the present invention have been described above, the materials to be bonded are not limited to the above-mentioned glass and quartz, and various materials can be used as long as they are materials that transmit laser light. . Also, the laser light absorbing material is not limited to the above example. Further, it is also possible to stack three or more pieces of the materials to be joined in a situation where the laser light can be transmitted and to irradiate the respective joining surfaces with a focus of the laser light to perform welding. Furthermore, the present invention may be embodied in any other form without departing from its spirit or main characteristics. Therefore, the above-described embodiments are merely examples in all respects and should not be limitedly interpreted.
【００１５】[0015]
【発明の効果】以上の説明から明らかなように、本発明
によれば、レ−ザ光をファイバ光学系を直交３軸駆動ス
テ−ジに導き、レ−ザ光をガラス接合界面にスポット照
射する。この時ガラス界面にはあらかじめ、レ−ザ吸収
率を高めるために、例えば黒色の油性塗料を塗布してお
き、レ−ザ光を接合界面においてのみ吸収させることに
より被接合材を確実に溶接することができる、という優
れた効果を奏することができる。As is apparent from the above description, according to the present invention, the laser light is guided to the orthogonal three-axis drive stage through the fiber optical system, and the laser light is spot-irradiated on the glass bonding interface. To do. At this time, for example, a black oil paint is applied to the glass interface in advance to increase the laser absorption rate, and the laser light is absorbed only at the bonding interface to reliably weld the materials to be bonded. It is possible to exert an excellent effect that it is possible.
【図１】本発明に係るレーザ光透過溶接法に用いる装置
の構成図である。FIG. 1 is a configuration diagram of an apparatus used in a laser beam transmission welding method according to the present invention.
【図２】被接合材の接合手順を説明する図である。FIG. 2 is a diagram illustrating a bonding procedure of materials to be bonded.
【図３】レーザ光によって被接合材を接合する説明図で
ある。FIG. 3 is an explanatory diagram of joining materials to be joined with laser light.
【図４】レーザ光の照射状態を説明する図である。FIG. 4 is a diagram illustrating an irradiation state of laser light.
【図５】従来のガラスの接合方法を説明する図である。FIG. 5 is a diagram illustrating a conventional glass joining method.
１ 被接合材 ２ レーザ光 ３ レンズホルダー ４ 光ファイバー ５ ３軸コントロールステージ ６ レーザ発振器 ７ レーザ光吸収材 1 Materials to be joined 2 laser light 3 lens holder 4 optical fiber 5 3-axis control stage 6 Laser oscillator 7 Laser light absorber
───────────────────────────────────────────────────── フロントページの続き (72)発明者 荒金 秀則 愛知県豊橋市曙町字南松原101−２−４Ｆ Ｆターム(参考） 4E068 BF00 CD03 CE03 CF01 CJ00 DB12 DB13 4G026 BA04 BB04 BD02 BD04 BD06 BD14 BF01 BF09 BF41 BG02 BG13 BH06 ─────────────────────────────────────────────────── ─── Continued front page (72) Inventor Hidenori Arakane 101-2-4F Minamimatsubara, Akebono-cho, Toyohashi City, Aichi Prefecture F term (reference) 4E068 BF00 CD03 CE03 CF01 CJ00 DB12 DB13 4G026 BA04 BB04 BD02 BD04 BD06 BD14 BF01 BF09 BF41 BG02 BG13 BH06
Claims (9)
ことにより被接合材を溶融し溶接する方法であって、前
記被接合材の両接合面にはレーザ光吸収材を塗布または
添付または成膜し、前記レーザ光吸収材にレーザ光を吸
収させ被接合材同志を溶接することを特徴とするレーザ
光透過溶接法。1. A method of melting and welding a material to be joined by irradiating a joining interface of the material to be joined with a laser beam, wherein a laser light absorbing material is applied to or attached to both joining surfaces of the material to be joined. Alternatively, a laser beam transmission welding method is characterized in that a film is formed, the laser beam is absorbed by the laser beam absorbing material, and the materials to be joined are welded together.
光吸収材は、少なくとも有色塗料、金属の真空蒸着膜、
金属のスパッタ蒸着膜、セラミック材蒸着膜のいずれか
一つであることを特徴とする請求項１に記載のレーザ光
透過溶接法。2. The laser light absorbing material applied or formed on the material to be joined is at least a colored paint, a vacuum deposition film of metal,
The laser beam transmission welding method according to claim 1, wherein the method is one of a metal sputter deposition film and a ceramic material deposition film.
であることを特徴とする請求項１または請求項２に記載
のレーザ光透過溶接法。3. The laser beam transmission welding method according to claim 1, wherein the material to be joined is glass or quartz.
ス、石英のいずれかであることを特徴とする請求項１ま
たは請求項２に記載のレーザ光透過溶接法。4. The laser beam transmission welding method according to claim 1, wherein the laser-irradiated side of the materials to be joined is either glass or quartz.
特徴とする請求項１〜請求項４のいずれかに記載のレー
ザ光透過溶接法。5. The laser beam transmission welding method according to claim 1, wherein the laser beam is a YAG laser.
面に照射されることを特徴とする請求項１〜請求項５の
いずれかに記載のレーザ光透過溶接法。6. The laser beam transmission welding method according to claim 1, wherein the laser beam is applied to the interface of the materials to be joined in a plurality of shots.
防止するために被接合材に適した高温雰囲気中で行うこ
とを特徴とする請求項１〜請求項６のいずれかに記載の
レーザ光透過溶接法。7. The laser beam according to claim 1, wherein the laser beam transmission welding is performed in a high temperature atmosphere suitable for the materials to be joined in order to prevent the occurrence of cracks. Transmission welding method.
に照射する集光手段と、レーザ光を走査する走査手段
と、被接合材載置用のステージとによって構成され、前
記レーザ光は複数に分岐され、被接合材に向けて照射で
きることを特徴とするレーザ光透過溶接装置。8. A laser beam, a focusing unit for focusing the laser beam and irradiating the sample on a sample, a scanning unit for scanning the laser beam, and a stage for placing a material to be joined. The laser light transmission welding device is characterized in that the light is branched into a plurality of lights and can be irradiated toward the materials to be joined.
を特徴とする請求項８に記載のレーザ光透過溶接装置。9. The laser beam transmission welding apparatus according to claim 8, wherein the laser beam is a YAG laser.
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| JP2001375576A JP2003170290A (en) | 2001-12-10 | 2001-12-10 | Laser beam transmission welding method and apparatus therefor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001375576A JP2003170290A (en) | 2001-12-10 | 2001-12-10 | Laser beam transmission welding method and apparatus therefor |
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|---|---|
| JP2003170290A true JP2003170290A (en) | 2003-06-17 |
Family
ID=19183922
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| JP (1) | JP2003170290A (en) |
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