JP2006202842A5 - - Google Patents

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Publication number
JP2006202842A5
JP2006202842A5 JP2005010512A JP2005010512A JP2006202842A5 JP 2006202842 A5 JP2006202842 A5 JP 2006202842A5 JP 2005010512 A JP2005010512 A JP 2005010512A JP 2005010512 A JP2005010512 A JP 2005010512A JP 2006202842 A5 JP2006202842 A5 JP 2006202842A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005010512A
Other languages
Japanese (ja)
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JP2006202842A (ja
JP4890765B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005010512A priority Critical patent/JP4890765B2/ja
Priority claimed from JP2005010512A external-priority patent/JP4890765B2/ja
Publication of JP2006202842A publication Critical patent/JP2006202842A/ja
Publication of JP2006202842A5 publication Critical patent/JP2006202842A5/ja
Application granted granted Critical
Publication of JP4890765B2 publication Critical patent/JP4890765B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2005010512A 2005-01-18 2005-01-18 半導体装置及びその製造方法 Expired - Fee Related JP4890765B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005010512A JP4890765B2 (ja) 2005-01-18 2005-01-18 半導体装置及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005010512A JP4890765B2 (ja) 2005-01-18 2005-01-18 半導体装置及びその製造方法

Publications (3)

Publication Number Publication Date
JP2006202842A JP2006202842A (ja) 2006-08-03
JP2006202842A5 true JP2006202842A5 (xx) 2007-12-27
JP4890765B2 JP4890765B2 (ja) 2012-03-07

Family

ID=36960593

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005010512A Expired - Fee Related JP4890765B2 (ja) 2005-01-18 2005-01-18 半導体装置及びその製造方法

Country Status (1)

Country Link
JP (1) JP4890765B2 (xx)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2345082A4 (en) * 2008-11-05 2013-07-31 Ss Sc Ip Llc VERTICAL BARRIER FIELD EFFECT TRANSISTORS WITH TILTED SIDE WALLS AND METHOD FOR THEIR MANUFACTURE
JP2010147405A (ja) * 2008-12-22 2010-07-01 Renesas Technology Corp 半導体装置およびその製造方法
JP5607947B2 (ja) * 2010-02-17 2014-10-15 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
JP5561343B2 (ja) * 2012-11-05 2014-07-30 富士電機株式会社 炭化珪素半導体装置の製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2692036B2 (ja) * 1995-05-22 1997-12-17 財団法人半導体研究振興会 静電誘導トランジスタおよびその製造方法
JP2003069039A (ja) * 2001-08-29 2003-03-07 Denso Corp 炭化珪素半導体装置およびその製造方法
JP4153811B2 (ja) * 2002-03-25 2008-09-24 株式会社東芝 高耐圧半導体装置及びその製造方法
JP2004134547A (ja) * 2002-10-10 2004-04-30 Hitachi Ltd 半導体装置

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