JP2006189349A - Nondestructive defect inspection system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a nondestructive defect inspection system capable of detecting automatically the presence of a defect or a hole in an inside, and a position thereof, in the nondestructive defect inspection system using an X-ray. <P>SOLUTION: An X-ray source 2 and an X-ray detector 3 are arranged in a position for insertion-clamping a sample 1, two or more of ultrasonic flaw detection probes 4, 5 are attached to the sample 1, and the position of the defect is specified by processing in an arithmetic processing unit 7, based on a projection image obtained from the X-ray detector 3 and a flaw detection echo data obtained from the flaw detection probes 4, 5. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an inspection system that non-destructively inspects internal defects of products, and more particularly to a non-destructive defect inspection system that performs non-destructive inspection using X-rays and ultrasonic waves.

  Generally, when casting a metal casting, a void called a nest may be formed inside the casting process. For example, when a cast product is a motorcycle general-purpose engine using an aluminum casting, even if a nest is generated, it is shipped as a product as long as there is no problem with the engine function. However, for example, if a nest is formed in the vicinity of the cooling water flow path, cooling water flowing at a high pressure during engine operation may crush the wall of the flow path and cause the flow path and the nest to communicate with each other. Due to the communication between the flow path and the nest, cooling water leaks and cooling performance deteriorates. In the worst case, the engine may be damaged.

  Therefore, in the final process of engine production, high-pressure water is actually circulated through the cooling water flow path to check for the presence of nests near the flow path, and improper synthetic products are excluded from the line. In addition to the cooling water flow path, there is a similar risk depending on the nest generation site, so that an inspection process is provided, and nonconforming products are picked up and discarded.

  However, in this manufacturing process, since various inspections are performed after the engine is assembled, even if a nonconformity occurs during casting, the nonconformity is not found until the assembly process of the engine is completed. Accordingly, non-conforming products are uniformly passed through the manufacturing process, resulting in a great cost loss. Therefore, if the position of the nest generated in the cast product is nondestructively inspected at an early stage and it can be determined whether the nest is generated in a part that affects product performance, the defective engine should be selected at an early stage of the process. Can lead to significant cost reduction.

  Similar problems are present not only in engine production but also in all industrial fields. In view of this, devices and systems for flaw detection inside the sample using X-rays and ultrasonic waves have been developed. Conventionally, an inspector visually inspects a sample image obtained by X-rays or ultrasonic waves. Recently, for example, a system for automatically inspecting a digital image by image processing as in Patent Document 1 is also provided. Yes.

FIG. 5 is a conceptual diagram illustrating the invention disclosed in Patent Document 1. The sample is irradiated with X-rays from an X-ray source to obtain a transmission X-ray distribution on the imaging plate. The X-ray distribution on the imaging plate is A / D converted by a data processing PC to form a digital image. The obtained digital image is evaluated by image processing using an image processing PC, and density differences and defects inside the sample are detected.
According to this system, fine density differences and defects can be detected for more accurate inspections, and industrial products on the line can be automatically inspected, eliminating the need for inspectors and greatly increasing costs. Can be reduced.

  However, since this system performs an inspection using a two-dimensional image of X-rays, it is difficult to specify the position of the eyelid even if the density difference or the presence or absence of a defect can be detected. It is conceivable to obtain X-ray transmission images from two vertical and horizontal directions using two X-ray inspection apparatuses, and to reconstruct a three-dimensional image from two two-dimensional images to specify the position of the eyelid. If there are two or more of the same type of wrinkles, the position cannot be determined.

  Therefore, this patent document also discloses a nondestructive internal inspection system using X-ray CT described with reference to FIG. In the X-ray CT inspection of the disclosed invention, X-ray transmission images from all directions are obtained for one cross section by irradiating X-rays while rotating the sample, and a sample is obtained by reconstructing a number of obtained transmission images. The inside is visualized in detail in one section. If the sample is tomographically imaged, the density distribution and defects inside the sample can be detected very clearly. X-ray CT inspection is industrially widely used for internal inspection of semiconductor chips and the like.

JP 2001-201465 A

  However, the X-ray CT examination takes a very long time for imaging a sample from various angles. In the current general apparatus, it takes several minutes to obtain an image of one cross section. For example, if a 30 cm sample is photographed in increments of 0.2 mm, it takes several tens of hours. Therefore, it is impossible to apply to line inspection that requires discrimination in minutes or tens of seconds.

  Therefore, the problem to be solved by the present invention is a non-destructive defect inspection system using X-rays, and a non-destructive defect inspection system that automatically detects the presence and position of internal defects and vacancies in a short time. Is to provide.

The nondestructive defect inspection system according to the present invention includes a projection imaging device, a distance measuring device, and an arithmetic device.
The projection imaging device is composed of a radiation source, an image receiving device, and an image processing device. The radiation source and the image receiving device are arranged at positions sandwiching the sample, respectively, and the sample is irradiated with transmission rays from the radiation source toward the sample and the image receiving device. An image obtained by allowing the image to pass through and projecting the image on the image receiving apparatus is captured as a digital image by the image processing apparatus, and image processing is performed to calculate the presence / absence of a defect in the sample and a two-dimensional position.
The distance measuring device comprises a wave source and a detector, emits a flaw detection wave from the wave source toward the inside of the sample, detects an echo reflected by the defect by the detector, and measures the distance from the detection point to the defect. In the present invention, two or more distance measuring devices are arranged in contact with the surface of the sample to provide two or more detection points, and the distance from each detection point to the defect is measured.

The arithmetic device calculates a straight line connecting the source and the defect from the two-dimensional position calculated by the image processing device, and calculates the position of the defect from the straight line and the distance from the detection point to the defect determined by the distance measuring device. . The arithmetic unit presents the presence / absence, number and position of defects.
As the transmission lines used in the projection imaging apparatus, strong light rays or γ rays, preferably X-rays, are used depending on the material and shape of the sample. The flaw detection wave used in the distance measuring device may be a sound wave, a shock wave, or the like, but it is preferable to use an ultrasonic wave with good wavelength selectivity, particularly when a plurality of flaw detectors are used simultaneously. The projection imaging apparatus may use a two-dimensional imaging apparatus, but when comparing a large sample, if a large two-dimensional imaging apparatus is used, the apparatus becomes expensive. Two-dimensional imaging may be performed by scanning an imaging device.

  In the nondestructive defect inspection system of the present invention, a two-dimensional position of an internal defect is detected as a projection image by projection imaging using a transmission line. This two-dimensional position is obtained as a position where a straight line connecting the source and the defect reaches the image receiving device. Therefore, for example, when there is one defect, a straight line connecting the two-dimensional position on the image receiving apparatus where the defect is detected by projection photographing and the radiation source is obtained, and the defect exists somewhere on the straight line. I understand that.

  The distance measuring device measures a distance from a detection point to a defect using a reflected wave. Therefore, if there is a defect, a single sphere with the detection point as the center and the measurement distance as the radius is obtained for each defect. There is a defect on the sphere. When two distance measuring devices are used, in order to measure the distance from two different detection points to the defect, one sphere equation is obtained for each distance measuring device, and the two sphere equations are common. The equation of a circle with a defect is calculated as a solution.

Therefore, the position where the defect exists can be calculated as the point where the straight line obtained by the projection imaging and the circle obtained by the flaw detection intersect. The position of the defect inside the sample can be confirmed by replacing the calculation result on the sample.
Depending on the relative position between the defect and the measuring device, the straight line obtained by projection imaging comes on the surface including the circle obtained by the flaw detection, and intersects with the flaw detection circle at two points to uniquely determine the position of the defect. There may not be. Although such a case is rare, in order to make it difficult for the transmission line to coincide with the surface of the flaw detection circle, the two distance measuring devices are shifted back and forth rather than symmetrically arranged on the opposite surface of the sample. It is preferable to give appropriate considerations such as arranging them on the same surface.
In addition, since the defect has a size, the equation of the straight line obtained by the projection photographing and the equation of the two spheres obtained by the two distance measuring devices do not have exactly a common solution. Therefore, the calculation of the position has an allowable range corresponding to the size of the defect.

  In the above-described method, first, a circle that may have a defect is calculated based on the distance information obtained from the two distance measuring devices, and then the radiation source obtained from the projection imaging device is used. The point of intersection with the straight line passing through the defect is obtained. First, the point of the defect obtained by one distance measuring device is obtained from the intersection of the sphere on the surface, the radiation source, and the line passing through the defect, and then another one. There are various solutions such as a method of determining the intersection where the sphere obtained by the distance measuring device passes as the true intersection where the defect exists.

When there are two or more defects, the maximum number of defects can be obtained for both the projection imaging device and the distance measuring device. However, it is not known which defect corresponds to the distance information obtained by each distance measuring device. Therefore, calculation is performed for all combinations of equations obtained by the projection imaging device and the two distance measuring devices, and a combination having a common solution is found to determine that the equation represents the same defect.
For example, when there are two defects, defect 1 and defect 2, linear expressions A ₁ and A ₂ representing the defect 1 and the defect 2 respectively are obtained by the projection imaging apparatus. Also, spheres B ₁ , B ₂ , C ₁ , and C ₂ are obtained from the two distance measuring devices. At this time, it cannot be determined which defect the sphere obtained from the distance measuring device relates to. When formulas are selected for each device from the formulas A _{1 to} C ₂ obtained from the three inspection devices, eight combinations are obtained. When common solutions are calculated for all the combinations, overlapping common solutions are obtained for two combinations of [A ₁ , B ₁ , C ₁ ] and [A ₂ , B ₂ , C ₂ ]. These two common solutions are the positions where defects exist.

In actual calculation, first, a common solution of the equation obtained from the projection imaging device and the equation obtained from one distance measuring device is obtained, and each obtained solution is obtained from the other distance measuring device. What is necessary is just to judge whether it can become the solution of the equation which was decided.
For example, when the position of a defect is detected from the expressions A _{1 to} C ₂ obtained from three inspection devices, as an example, first, a common solution of A ₁ and B ₁ is calculated, and two common solutions obtained are obtained. By calculating whether each can be a solution of C ₁ and C ₂ , a common solution of the three equations is calculated. A combination of three equations having a common solution is an equation indicating the same defect.

  Since the defects are distributed three-dimensionally, when the number of defects is small, there is almost no possibility that a common solution exists in a combination where no defects actually exist. Also, most fake solutions can be eliminated by examining whether the solution exists inside the sample. Therefore, it is sufficient in practice to use two distance measuring devices. However, when using a sample containing a large amount of pores, such as porous ceramic materials, or inspecting a very small sample, increase the number of distance measuring devices to three or more if there is a risk of false solutions. In this way, it is possible to avoid the generation of false solutions.

  Note that the projection imaging apparatus detects defects inside the sample by using the difference in absorption / scattering coefficient when the transmission line passes through the sample. The projected image of the transmission line projected on the image receiving device is A / D converted, converted into digital image data of about 10 bits for each pixel, for example, taken into the image processing device, and image analysis is performed on the image processing device. The presence / absence and position of a defect is determined by distinguishing from the shape of the sample based on the density difference of the transmission line.

  At this time, if defect-free master image data is stored in the image processing apparatus in advance and a defect is detected by taking a difference between the sample image obtained by inspection and the master image, a minute defect can be clearly detected. The master image can be obtained by specially creating and shooting a sample that does not have defects, but it can also be obtained by leveling the defects by taking the average of a large number of sample images. It is also possible to obtain a master image in which no defect exists by subtracting the defective part.

  In addition to flaws, flaw detection wave data detected by the distance measuring device includes echoes reflected from the outer wall of the sample and echoes reflected from normal vacancies inside the sample. May become difficult to detect. Therefore, it is good to clarify the defect echo by installing the distance measuring device at a predetermined position on the sample and performing the inspection, and taking the difference between the sample data and the master data obtained from the defect-free sample or leveling operation. .

  As described above, according to the nondestructive defect inspection system of the present invention, the position of the defect in the sample can be automatically calculated. In addition, since the result can be obtained by simple imaging using transmission lines and flaw detection using flaw detection waves, the inspection is completed in about several tens of seconds. Therefore, if the nondestructive defect inspection system of the present invention is used, the inspection time and cost can be greatly reduced.

Further, it is more convenient to set in advance a site that becomes a problem when a defect occurs in the non-defect inspection system of the present invention, and issue a non-conformance signal only when a defect occurs in such a site. For example, when the inspection target is a general-purpose engine made of aluminum, there are limited parts that become problematic when holes such as defects in the vicinity of the cooling water flow path occur, and even if there are holes in other parts, Does not affect performance. Therefore, only a defective product can be discharged from the line by generating a nonconformity signal only when a defect exists in a problematic part.
If the non-defect inspection system of the present invention is installed on the production line and equipped with means for eliminating defective products when a defect is detected, non-destructive inspection is performed in-line and non-conforming products are automatically excluded from the line. be able to.

  In particular, when the nondestructive defect inspection system of the present invention is arranged downstream of the aluminum casting process in a general-purpose engine production line, it is possible to detect the presence and position of vacancies generated as defects in the cast aluminum at an early stage. it can. Therefore, when a defect that causes a problem in engine performance occurs in the cast aluminum, it is possible to detect and eliminate the defect before proceeding to the subsequent assembly process. It can be greatly reduced.

Hereinafter, the nondestructive defect inspection system of the present invention will be described in detail using embodiments.
FIG. 1 is a schematic plan view showing the principle of the nondestructive defect inspection system of this embodiment, and FIG. 2 is a schematic elevation view thereof. The present embodiment is a nondestructive defect inspection system comprising a projection imaging apparatus using X-rays and a distance measuring apparatus using ultrasonic waves.
The X-ray source 2 and the X-ray detector 3 are disposed at a position where the sample 1 is sandwiched, and the ultrasonic flaw detectors 4 and 5 are disposed so as to contact the sample 1. An image processing device 6 is attached to the X-ray detector 3, and an arithmetic device 7 is connected to the image processing device 6 and the ultrasonic flaw detectors 4 and 5. The calculation device 7 includes a display device, and the calculation result is presented to the operator via the display device. In addition, when used as an in-line inspection device of a manufacturing apparatus, the calculation result is transmitted to the control device of the manufacturing apparatus.

The image processing device 6 and the arithmetic processing device 7 can be all or partly configured in the same electronic computer. Also, the detection circuits for the ultrasonic flaw detectors 4 and 5 can be made into software and placed in the same electronic computer.
X-rays irradiated from the X-ray source 2 pass through the sample 1 and are projected onto the X-ray detector 3. The X-ray density detected by the X-ray detector 3 is A / D converted and input to the image processing apparatus 6 as digital image data of about 10 bits for each pixel, for example. When there is a detection command, the ultrasonic flaw detectors 4 and 5 emit ultrasonic waves into the sample, detect echoes, calculate the distance to the target based on the response time, and input detection data to the arithmetic unit 7.

The image processing device 6 stores in advance X-ray projection image data and flaw detection echo data of a sample having no defect. When image data and echo data are input, the image processing device 6 takes a difference between the data stored in advance and the input data, and detects a portion having a large difference.
When a defect 8 such as a foreign substance or a void exists in the sample, the X-ray transmission coefficient differs between the substance constituting the sample 1 and the defect portion 8, so that the concentration of the X-ray projected onto the X-ray detector 3 is different. A difference appears. A portion having this density difference is projected on the X-ray detector 3 and appears as a density difference signal 9, which is a two-dimensional representation of the position where the defect 8 exists. In addition, if there is a defect 8 such as a foreign substance or a void, the ultrasonic wave is reflected at the boundary between the sample composition material and the defect part, so the presence of the defect 8 is detected as an ultrasonic echo in the ultrasonic flaw detectors 4 and 5. Then, the distance between the flaw detectors 4 and 5 and the defect 8 is calculated.

FIG. 3 is a conceptual diagram schematically showing the detection result on the cross section of the sample 1.
In the X-ray projection image data from the X-ray detector 3, a two-dimensional position 9 where a defect exists as an X-ray density difference on the X-ray detector 3 is expressed. This indicates that there is a defect at any position on the straight line 10 connecting the two-dimensional position detected on the X-ray detector 3 and the radiation source 2 inside the sample 1.
Further, in the flaw detection data from the ultrasonic flaw detectors 4 and 5, the return time of the flaw detection wave echo, that is, the distance from each flaw detector to the defect is detected. This indicates that a defect exists on the spheres 11 and 12 having a radius obtained from the distance obtained with the flaw detector as the center.

  Therefore, there is a defect at a point on the straight line 10 obtained by the X-ray detector 3 and on the surface of the two spheres 11 and 12 obtained by the two ultrasonic flaw detectors 4 and 5. It will be. According to this condition, the nondestructive defect inspection system of the present embodiment detects the position of the defect by calculating points that satisfy all possible points obtained from the X-ray detector 3 and the ultrasonic flaw detectors 4 and 5. Is.

  As shown in FIG. 3, a straight line 10 connecting the two-dimensional position 9 on which the defect 8 is projected and the X-ray source 2 is obtained from the measurement result of the X-ray detector 3. In addition, a sphere 11 whose radius is the distance detected with the ultrasonic probe 4 as the center by the inspection with the first ultrasonic probe 4 and a sphere 12 with the second ultrasonic probe 5 are obtained. . The intersection 13 of the straight line 10, the sphere 11, and the sphere 12 is a position where a defect exists. Therefore, the position of the defect can be calculated by obtaining a common solution of equations representing the straight line 10, the sphere 11, and the sphere 12.

When there is one defect in the sample, the position of the defect can be calculated by the above method. However, when there are a plurality of defects, there are linear and spherical equations corresponding to the maximum number of defects for each of the X-ray detector 3, the first ultrasonic probe 4, and the second ultrasonic probe 5. At this point, it is uncertain which defect each equation corresponds to.
FIG. 4 is a conceptual diagram illustrating a processing method when there are a plurality of defects.
For example, when there are two defects, as shown in FIG. 4, the two straight lines 20 and 21 are formed by the X-ray detector 3, the two spheres 22 and 23 are formed by the first ultrasonic flaw detector 4, and the second ultrasonic wave Two spheres 24 and 25 are obtained by the probe 5 respectively. In this case, the straight line 20 intersects with both of the two spheres 22 and 23 obtained by the first ultrasonic flaw detector 4, and it cannot be determined which intersection is a solution indicating a defect. Therefore, it is determined whether the two spheres 24 and 25 detected by the second ultrasonic flaw detector 5 have intersections at the same position, and the true defect position is confirmed.

First, common solutions 26 and 27 for the equation of the straight line 20, the equation of the first sphere 22, and the equation of the second sphere 23 are calculated. Subsequently, for each of the obtained first common solution 26 and second common solution 27, it is verified in turn whether the solution can be a solution of the two spheres 24 and 25 obtained by the second ultrasonic flaw detector 5. In FIG. 4, the first common solution 26 of the straight line 20 and the first sphere 22 is the solution of the fourth sphere 25 by the second ultrasonic flaw detector, and this first common solution 26 is the position where the defect exists. Is shown. Other combinations [first common solution 26, third sphere 24 by second ultrasonic flaw detector], [second common solution 27, third sphere 24], [second common solution 27, fourth sphere 25] Since there is no common solution on the surface of the sphere, it can be judged as a fake solution that does not show an actual defect.
The same calculation is performed for the other straight lines, and all defects are detected. In FIG. 4, the second straight line 21 intersects with the second sphere 23 and the third sphere 24 at one point and does not intersect with the sphere at other positions, so that the intersection 28 indicates the position of the defect. There is no doubt, but when the straight line has a plurality of intersections with the sphere, the position of the defect is determined by performing the same verification. Even when one straight line intersects with one sphere at two points, the existence position can be determined by the same solution.

FIG. 5 is a flowchart of the inspection procedure according to the algorithm in this embodiment.
The inspection is started by the inspection start command (S1), and it is determined whether the position of the sample 1 is appropriate for the detector (S2). If the position is not correct, the process is interrupted, and a display is made to redo the setting of sample 1 (S3).
When the position of the sample 1 is appropriate, a measurement start command is issued from the arithmetic unit 7 to each detector (S4). In response to the measurement start command, X-rays are emitted from the X-ray source 2 toward the sample 1 (S5), the X-ray detector 3 detects X-rays (S6), and the result is transferred to the arithmetic unit 6 (S7). Similarly, the ultrasonic flaw detectors 4 and 5 respectively detect ultrasonic echoes (S8, S10), and transfer the results to the arithmetic unit 7 (S9, S11).

In the calculation device 7, data is obtained from three detection devices (S12), and the difference between the X-ray projection image data and the flaw detection echo data of the sample having no defect stored in advance is calculated (S13). The presence / absence of a defect is determined (S14). If there is no defect, the fact that there is no defect is displayed on the screen, and the process is completed (S15).
If there is a defect, the computing device 7 calculates a possible straight line on which the defect exists based on the detection result digital image from the X-ray detector 3 and sets it as data α (S16). Subsequently, the distance from the ultrasonic flaw detector to the defect is calculated based on the ultrasonic echo data from the ultrasonic flaw detectors 4 and 5, and is set as data β and γ (S17, S18). The defect location is calculated from the data α to γ (S19), the process is completed, and the defect location is displayed on the screen (S20).

  As described above, in the nondestructive defect inspection system of the present embodiment, the position of the defect in the sample 1 is calculated based on the detection results from the X-ray detector 3 and the plurality of ultrasonic flaw detectors 4 and 5. The nondestructive defect inspection system of the present embodiment performs an internal inspection by one-time X-ray irradiation and ultrasonic flaw detection from two or more detection points with the sample fixed, so that the inspection result can be obtained very quickly. Can be obtained. The time required for one inspection is tens of seconds or less. In addition, since the arithmetic unit controls everything from the start of detection to the calculation of the defect position, the burden on the inspector is effectively reduced.

  Furthermore, in the nondestructive defect inspection system of the present embodiment, not only the presence / absence of a defect but also the position where the defect exists can be specified. Therefore, it is very suitable for inspection of products such as a general purpose engine made of aluminum, where the conformity / nonconformity of the product is determined depending on the position of the defect, and its application range covers the entire industry.

When the nondestructive defect inspection system of this embodiment is incorporated in a production line, defect inspection can be performed efficiently. The production line according to this aspect includes a nondestructive defect inspection system and a sample removal means, and feeds back the detection result of the nondestructive defect inspection system to the line to select products on the line.
When the sample flows from the upstream of the line to the inspection area of the nondestructive defect inspection system, the sample is adjusted and the detector is set. When the positioning of the sample is completed, an internal inspection is performed with X-rays and ultrasonic waves. If there is a defect, the defect location is verified. An area where the existence of a defect cannot be tolerated is specified in advance, and if the defect is within the range, the sample is selected and excluded as a nonconforming product. To do.
In this way, the production line of this aspect can perform non-destructive internal inspection of the sample before assembly and automatically eliminate any nonconforming product from the line. Manufacturing can be performed.

  As described above in detail, according to the nondestructive defect inspection system of the present embodiment, it is possible to automatically detect the presence and position of internal defects and holes in a short time. Moreover, if the nondestructive defect inspection system of the present embodiment is installed in the production line, the nondestructive internal inspection of the sample can be performed inline.

It is a schematic plan view of the nondestructive defect inspection system of the present embodiment. 1 is a schematic elevation view of a nondestructive defect inspection system of the present embodiment. It is the conceptual diagram which represented the detection result typically on the cross section of a sample. It is another conceptual diagram which represented the detection result typically on the cross section of the sample. It is an algorithm figure showing the inspection procedure of the nondestructive defect inspection system of a present Example. It is a conceptual diagram explaining the nondestructive defect inspection system of conventional invention. It is a conceptual diagram explaining the nondestructive defect inspection system of the other aspect of conventional invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Sample 2 X-ray source 3 X-ray detector 4 Ultrasonic flaw detector 5 Ultrasonic flaw detector 6 Image processing device 7 Arithmetic device 8 Defect 9 Two-dimensional position display of a defect 10, 20, 21 Straight line 11, 12, 22, 23 , 24, 25 Sphere 13 Intersection 26, 27 Common solution 28 Intersection
S1-S20 step

Claims (8)

A non-destructive defect inspection system comprising a radiation source, an image receiving device, an image processing device, a projection imaging device for projecting and photographing the inside of a sample with a transmission line, a distance measuring device for detecting a distance to a defect, and a computing device , The source and the image receiving device are respectively arranged at positions where the sample is sandwiched, and the image receiving device receives a transmission line emitted from the source and transmitted through the sample to obtain a two-dimensional transmission image, An image processing apparatus captures the transmission image as an image, calculates a two-dimensional position of the defect, and makes two or more of the distance measuring devices contact the surface position of the sample as two or more detection points, A distance measuring device detects a distance from the detection point to the defect, and the arithmetic unit obtains a straight line connecting the defect and the radiation source based on a two-dimensional position of the defect obtained by the projection imaging device. , The straight line and the distance measuring device Nondestructive defect inspection system characterized by presenting to calculate the position of the defect based on the obtained the detection point of the distance to the defect Ri. The nondestructive defect inspection system according to claim 1, wherein the projection imaging apparatus obtains a transmission image inside the sample using X-rays. 3. The non-transmission apparatus according to claim 2, wherein the X-ray projection imaging apparatus is a one-dimensional X-ray detector, and a two-dimensional transmission image of the sample is obtained by scanning the one-dimensional X-ray detector. Destructive defect inspection system. The image processing apparatus stores a transmission image of a standard sample having no defect, and calculates the position of the defect by obtaining a difference between the transmission image obtained by inspection and the transmission image of the stored standard sample. The nondestructive defect inspection system according to any one of claims 1 to 3. The nondestructive defect inspection system according to claim 1, wherein the distance measuring device is an ultrasonic flaw detector. The distance measuring device is attached at a predetermined position relative to the sample, flaw detection data of a standard sample having no defect is stored, flaw detection data obtained by inspection and flaw detection of the stored standard sample 6. The nondestructive defect inspection system according to claim 1, wherein a distance from the detection point to the defect is detected by obtaining a data difference. The nondestructive defect inspection system according to claim 1, wherein a specific part in the sample is registered in advance and it is determined whether or not the defect is generated in the specific part. A non-destructive defect inspection system according to claim 1 is provided on a production line, and a non-destructive defect inspection of a product is performed in-line.

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