JP2006187684A - マイクロ流体素子 - Google Patents

マイクロ流体素子 Download PDF

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Publication number
JP2006187684A
JP2006187684A JP2004382120A JP2004382120A JP2006187684A JP 2006187684 A JP2006187684 A JP 2006187684A JP 2004382120 A JP2004382120 A JP 2004382120A JP 2004382120 A JP2004382120 A JP 2004382120A JP 2006187684 A JP2006187684 A JP 2006187684A
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JP
Japan
Prior art keywords
layer
reaction
pattern layer
temperature control
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004382120A
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English (en)
Japanese (ja)
Other versions
JP2006187684A5 (enExample
Inventor
Takayuki Yamada
高幸 山田
Kazuaki Tabata
和章 田畑
Mutsuya Takahashi
睦也 高橋
Yoshifumi Yamazaki
芳文 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Business Innovation Corp
Original Assignee
Fuji Xerox Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Xerox Co Ltd filed Critical Fuji Xerox Co Ltd
Priority to JP2004382120A priority Critical patent/JP2006187684A/ja
Priority to US11/206,100 priority patent/US7708950B2/en
Publication of JP2006187684A publication Critical patent/JP2006187684A/ja
Publication of JP2006187684A5 publication Critical patent/JP2006187684A5/ja
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
    • F28F3/12—Elements constructed in the shape of a hollow panel, e.g. with channels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
    • B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
    • B01F25/433—Mixing tubes wherein the shape of the tube influences the mixing, e.g. mixing tubes with varying cross-section or provided with inwardly extending profiles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
    • B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
    • B01F25/433—Mixing tubes wherein the shape of the tube influences the mixing, e.g. mixing tubes with varying cross-section or provided with inwardly extending profiles
    • B01F25/4331—Mixers with bended, curved, coiled, wounded mixing tubes or comprising elements for bending the flow
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00—Other mixers; Mixing plants; Combinations of mixers
    • B01F33/30—Micromixers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0093—Microreactors, e.g. miniaturised or microfabricated reactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00783—Laminate assemblies, i.e. the reactor comprising a stack of plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00819—Materials of construction
    • B01J2219/00822—Metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00819—Materials of construction
    • B01J2219/00824—Ceramic
    • B01J2219/00826—Quartz
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00819—Materials of construction
    • B01J2219/00824—Ceramic
    • B01J2219/00828—Silicon wafers or plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00819—Materials of construction
    • B01J2219/00831—Glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00851—Additional features
    • B01J2219/00858—Aspects relating to the size of the reactor
    • B01J2219/0086—Dimensions of the flow channels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00873—Heat exchange
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00889—Mixing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0809—Geometry, shape and general structure rectangular shaped
    • B01L2300/0816—Cards, e.g. flat sample carriers usually with flow in two horizontal directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/0867—Multiple inlets and one sample wells, e.g. mixing, dilution
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/0874—Three dimensional network
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0887—Laminated structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/18—Means for temperature control
    • B01L2300/1838—Means for temperature control using fluid heat transfer medium
    • B01L2300/185—Means for temperature control using fluid heat transfer medium using a liquid as fluid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/18—Means for temperature control
    • B01L2300/1883—Means for temperature control using thermal insulation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L7/00—Heating or cooling apparatus; Heat insulating devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F2260/00—Heat exchangers or heat exchange elements having special size, e.g. microstructures
    • F28F2260/02—Heat exchangers or heat exchange elements having special size, e.g. microstructures having microchannels
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/25—Chemistry: analytical and immunological testing including sample preparation
    • Y10T436/2575—Volumetric liquid transfer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Dispersion Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Organic Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Pipeline Systems (AREA)
JP2004382120A 2004-12-28 2004-12-28 マイクロ流体素子 Pending JP2006187684A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2004382120A JP2006187684A (ja) 2004-12-28 2004-12-28 マイクロ流体素子
US11/206,100 US7708950B2 (en) 2004-12-28 2005-08-18 Microfluidic device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004382120A JP2006187684A (ja) 2004-12-28 2004-12-28 マイクロ流体素子

Publications (2)

Publication Number Publication Date
JP2006187684A true JP2006187684A (ja) 2006-07-20
JP2006187684A5 JP2006187684A5 (enExample) 2008-02-14

Family

ID=36684082

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004382120A Pending JP2006187684A (ja) 2004-12-28 2004-12-28 マイクロ流体素子

Country Status (2)

Country Link
US (1) US7708950B2 (enExample)
JP (1) JP2006187684A (enExample)

Cited By (13)

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Publication number Priority date Publication date Assignee Title
JP2008212811A (ja) * 2007-03-02 2008-09-18 Fuji Xerox Co Ltd 微細流路構造体およびその製造方法
JP2008238313A (ja) * 2007-03-27 2008-10-09 Fuji Xerox Co Ltd マイクロ流路デバイス及びマイクロ流路デバイスの製造方法
JP2008246349A (ja) * 2007-03-29 2008-10-16 Fujifilm Corp マイクロ流体デバイス
JP2009090164A (ja) * 2007-10-04 2009-04-30 Jeol Ltd マイクロチップデバイス
JP2009109401A (ja) * 2007-10-31 2009-05-21 Fuji Xerox Co Ltd マイクロ流路デバイス及びその製造方法
US8349273B2 (en) 2007-10-12 2013-01-08 Fuji Xerox Co., Ltd. Microreactor device
US8360243B2 (en) 2009-09-28 2013-01-29 Fuji Xerox Co., Ltd. Liquid transporting apparatus, classifying apparatus, and classifying method
US8365922B2 (en) 2009-03-26 2013-02-05 Fuji Xerox Co., Ltd. Classifying method and classifying device
US8418719B2 (en) 2006-07-18 2013-04-16 Fuji Xerox Co., Ltd. Microchannel device
US8585278B2 (en) 2009-03-16 2013-11-19 Fuji Xerox Co., Ltd. Micro fluidic device and fluid control method
US8679336B2 (en) 2008-11-14 2014-03-25 Fuji Xerox Co., Ltd. Microchannel device, separation apparatus, and separation method
CN109027688A (zh) * 2018-10-26 2018-12-18 郑州大学 一种低压液路集成块及其加工工艺
WO2023008096A1 (ja) * 2021-07-26 2023-02-02 株式会社日立プラントサービス マイクロリアクタおよび生成物生成方法

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JP2006187685A (ja) * 2004-12-28 2006-07-20 Fuji Xerox Co Ltd 微小構造体、マイクロリアクタ、熱交換器、および微小構造体の製造方法
KR100831836B1 (ko) * 2005-10-12 2008-05-28 이비덴 가부시키가이샤 벌집형 유닛 및 벌집형 구조체
US20100028206A1 (en) * 2006-10-26 2010-02-04 Konica Minolta Medical & Graphic, Inc. Microchip and method of manufacturing microchip
JP2009101299A (ja) * 2007-10-24 2009-05-14 Fuji Xerox Co Ltd マイクロナノバブル発生方法、マイクロ流路の洗浄方法、マイクロナノバブル発生システム、及び、マイクロリアクター
KR101569836B1 (ko) * 2009-10-28 2015-11-17 삼성전자주식회사 미세 유체 소자의 초기화 방법, 미세 유체 소자의 초기화 장치 및 미세 유체 소자 패키지
FR2955039B1 (fr) * 2010-01-11 2012-10-19 Commissariat Energie Atomique Dispositif formant reacteur chimique a efficacite amelioree integrant un circuit d'echange thermique
KR101266257B1 (ko) * 2010-05-18 2013-05-22 주식회사 나노엔텍 유체분석용 칩
EP2420478A1 (en) * 2010-08-17 2012-02-22 Koninklijke Philips Electronics N.V. Method and device for purifying water
JP5642488B2 (ja) * 2010-10-04 2014-12-17 株式会社神戸製鋼所 流路構造体
TWI532530B (zh) * 2010-10-29 2016-05-11 萬國商業機器公司 具有浸入通道之多層微流體探針頭及其製造方法
JP2012120962A (ja) * 2010-12-07 2012-06-28 Kobe Steel Ltd 流路構造体
US9506934B2 (en) * 2013-04-29 2016-11-29 Honeywell International Inc. Polymer test cartridge mixer for cell lysis
USD804682S1 (en) * 2015-08-10 2017-12-05 Opko Diagnostics, Llc Multi-layered sample cassette
CN112673090B (zh) * 2018-10-29 2025-02-11 Nok株式会社 微流控芯片及微流控器件
US12269029B2 (en) * 2019-08-28 2025-04-08 King Abdullah University Of Science And Technology Pressure-driven fluidic logic gate

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JP4954386B2 (ja) 2001-05-07 2012-06-13 財団法人神奈川科学技術アカデミー 電場または磁場印加によるマイクロチップ液液界面反応方法とそのためのマイクロチップ
US6821898B2 (en) 2001-09-14 2004-11-23 Wisconsin Alumni Research Foundation Method of forming a multi-layer microfluidic device
AU2002353049A1 (en) 2001-12-14 2003-06-30 Corning Incorporated Two step etching process for an optical fiber preform
JP2004167607A (ja) 2002-11-15 2004-06-17 Tama Tlo Kk マイクロ流体素子とその製造方法
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JPH08508197A (ja) * 1993-03-19 1996-09-03 イー・アイ・デユポン・ドウ・ヌムール・アンド・カンパニー 総合化学処理装置及びその準備のためのプロセス
JP2004223637A (ja) * 2003-01-21 2004-08-12 Fuji Xerox Co Ltd 積層構造体の製造方法および積層構造体

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8418719B2 (en) 2006-07-18 2013-04-16 Fuji Xerox Co., Ltd. Microchannel device
JP2008212811A (ja) * 2007-03-02 2008-09-18 Fuji Xerox Co Ltd 微細流路構造体およびその製造方法
JP2008238313A (ja) * 2007-03-27 2008-10-09 Fuji Xerox Co Ltd マイクロ流路デバイス及びマイクロ流路デバイスの製造方法
US8721992B2 (en) 2007-03-27 2014-05-13 Fuji Xerox Co., Ltd Micro fluidic device
US8381798B2 (en) 2007-03-29 2013-02-26 Fujifilm Corporation Micro fluid device having piping to control fluid temperature
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