JP2006185971A - Substrate for mounting electronic components - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate for mounting electronic components capable of operating electronic components and the like stored inside normally and stably over a long period of time with high airtight reliability. <P>SOLUTION: The substrate for mounting electronic components is constituted by laminating three or more insulating layers, and also it is provided with a base 1 with a mounting part 1b where an electronic component 7 is mounted in the upper surface, and a metalized layer 2 formed from the undersurface of the base 1 to the side surface. While forming a groove 1c where a part of the metalized layer 2 is accommodated in the inside over the upper and lower surface of the base 1 in the side surface of the base 1, the opening width of the groove 1c is made larger in the upper layer compared with the lower layer of the laminated insulating layer. Since a delamination arising in the laminating part of the groove 1c of the insulating layer can be prevented, it is possible to secure the reliability of the electronic component 7 and the like of a mounting part 1b. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an electronic component mounting substrate for mounting various electronic components such as a semiconductor laser (LD), a photodiode (PD), an integrated circuit element (IC), and a chip capacitor.

  FIG. 3 shows a package in which a substrate is used as an example of a conventional electronic component mounting substrate (hereinafter also simply referred to as a substrate). FIG. 3A is a cross-sectional view of the package, and FIG. 3B is a plan view of the package.

  This conventional package is made of a rectangular parallelepiped or columnar insulating material having a concave portion 101a on the top surface, has a mounting portion 101b for mounting the electronic component 107 on the bottom surface of the concave portion 101a, and is electrically connected to the electrodes of the electronic component 107. It is mainly composed of a base 101 on which a first metallized layer 102 to be connected is formed. The base 101 is formed by laminating three or more insulating layers. The first metallized layer 102 connected to the electronic component is formed on the upper surface of the base 101, and the second metallized layer 103 is formed on the lower surface of the base 101. Is formed, and a groove portion 101c in which the metallized layer 104 is accommodated is formed from the lower surface to the side surface of the substrate 101. The metallized layer 104 also has a function of connecting the first metallized layer 102 and the second metallized layer 103 (see, for example, Patent Document 1).

  Then, the second metallized layer 103 is directly connected to an external electric circuit board (not shown) via a conductive adhesive such as a brazing material, or is connected to the second metallized layer 103 as shown in FIG. One end side is electrically and mechanically connected to an external electric circuit board through a lead terminal 109 joined through a conductive adhesive such as a brazing material.

When the external electric circuit board or the lead terminal 109 is joined to the second metallized layer 103 via a conductive adhesive such as a brazing material, the conductive adhesive wets and spreads on the surface of the metallized layer 104, and the substrate The meniscus of the conductive adhesive for joining 101 to the external electric circuit board or the lead terminal 109 can be made good. As a result, an external electric circuit substrate or a package substrate capable of firmly bonding the lead terminal 109 can be obtained.
Japanese Unexamined Patent Publication No. 2000-77943

  However, in the conventional package as shown in Patent Document 1, when the substrate 101 is formed by laminating a plurality of ceramic green sheets serving as three or more insulating layers, the first layer on the lower surface side of the substrate 101 is used. Insulating the second layer and the third layer positioned above the groove portion 101c, because the ceramic green sheets to be the second and third insulating layers on the upper layer are sequentially laminated and pressed on the insulating layer. When the layer is not supported by the groove portion 101c of the first insulating layer, the layer is not sufficiently pressed, and adhesion failure (delamination) occurs between the insulating layers immediately above the groove portion 101c. was there. For this reason, there are problems that the inside of the recess 101a of the base 101 cannot be kept airtight or the surface of the first metallized layer 102 cannot be sufficiently protected.

  Accordingly, the present invention has been completed in view of the above-mentioned problems, and an object of the present invention is to provide an electronic component mounting substrate that is highly airtight and can operate electronic components and the like housed therein normally and stably over a long period of time. Is to provide.

  The electronic component mounting substrate of the present invention is formed by laminating three or more insulating layers, a base having a mounting portion on which an electronic component is mounted on the upper surface, and a metallization formed from the lower surface to the side surface of the base A groove portion in which a part of the metallized layer is accommodated in the side surface of the substrate is formed between the upper and lower surfaces of the substrate, and the opening width of the groove portion is a lower layer of the laminated insulating layer. It is characterized by being larger in the upper layer than

  The substrate for mounting an electronic component of the present invention includes a substrate having a mounting portion on which an electronic component is mounted on the upper surface, and a metallized layer formed from the lower surface to the side surface of the substrate. And a groove portion in which a part of the metallized layer is accommodated on the side surface of the substrate is formed between the upper and lower surfaces of the substrate, and the opening width of the groove portion is larger in the upper layer than the lower layer of the laminated insulating layer. As a result, the groove portion is formed also in the insulating layer located above the groove portion, and the laminated portion of the insulating layer laminated immediately above the groove portion is eliminated, so that it is ensured that poor adhesion occurs between the insulating layers. Can be prevented. As a result, the concave portion of the substrate can be kept airtight and the surface of the metallized layer formed between the insulating layers can be protected, and the electronic components housed inside can operate normally and stably over a long period of time. The electronic component storage package can be made.

  Further, when the external electric circuit board or the lead terminal is joined to the lower surface of the base via a conductive adhesive such as a brazing material, the conductive adhesive may spread on the surface of the metallized layer accommodated in the groove. As a result, the meniscus of the conductive adhesive for joining the substrate and the external electric circuit board or the lead terminal can be improved. As a result, the base and the external electric circuit board or lead terminal can be firmly joined.

  Furthermore, since the opening width of the groove portion is larger in the upper layer than in the lower layer of the laminated insulating layer, adhesion failure occurs between the insulating layers even if the upper insulating layer is slightly shifted and laminated on the lower layer. Can be effectively prevented.

  The substrate (electronic component mounting substrate) of the present invention will be described in detail below. 1A and 1B show examples of embodiments of a package using a substrate of the present invention. FIG. 1A is a plan view of a package using the substrate of the present invention, and FIG. 1B is a cross-sectional view of the package of FIG. In the figure, reference numeral 1 denotes a base body having a mounting portion 1b on the top surface on which the electronic component 7 is mounted on the bottom surface of the recess 1a. The base body 1 includes a groove portion 1c in which a part 3 of the metallized layer 2 is accommodated. A substrate is formed by being formed between the upper and lower surfaces of one.

  In FIGS. 1A and 1B, reference numeral 5 denotes a metal seal ring which is bonded to the upper surface of the base body 1 and enables seam welding of the lid body 6, and 9 denotes a base body of the metallized layer 2 formed on the base body 1. 1 is a lead terminal joined to the lower surface portion of 1.

The substrate 1 of the present invention is made of an insulating material made of ceramic or resin such as alumina (Al ₂ O ₃ ) ceramic or aluminum nitride (AlN) ceramic, and has a dielectric constant according to the characteristics of the electronic component 7 to be mounted. And those having characteristics such as thermal expansion coefficient are appropriately selected.

When the substrate 1 is made of ceramics, it is produced as follows. For example, when the substrate 1 is made of an alumina ceramic, an organic binder and solvent suitable for raw material powders such as aluminum oxide (Al ₂ O ₃ ), silicon oxide (SiO ₂ ), magnesium oxide (MgO), and calcium oxide (CaO) Etc. are added and mixed to form a slurry. This slurry is formed into a green sheet as each insulating layer by a doctor blade method or a calender roll method, and cut into a required size. Next, in order to form the concave portion 1a, the groove portion 1c and the like in a plurality of green sheets selected from them, an appropriate punching process is performed.

  The groove portion 1c is punched so that the opening width of the groove portion 1c of the upper green sheet is larger than the opening width of the groove portion 1c of the lower green sheet.

  Then, these ceramic green sheets are printed and coated with a metal paste obtained by adding and mixing an appropriate organic binder, solvent, etc. to a refractory metal powder such as tungsten (W), molybdenum (Mo), manganese (Mn), etc. The metallized layer 2 is formed, and then the ceramic green sheets on which these conductor layers are formed are sequentially laminated and pressed from the lower surface of the substrate 1, and the laminated molded body is fired at a temperature of about 1600 ° C. 1 is produced.

  The metallized layer 2 is deposited on the substrate 1 by printing and coating in advance in a predetermined pattern on a ceramic green sheet to be the substrate 1 by a well-known screen printing method and baking.

  In addition, a part 3 of the metallized layer 2 accommodated in the groove 1c is formed on the ceramic green sheet in which the through hole that becomes the groove 1c of the insulating layer is formed by punching with a die or the like from one end of the through hole to the inside of the through hole. In the state of sucking, by screen printing from the other end side of the through hole, it was obtained by adding and mixing an appropriate organic binder, solvent, etc. into the refractory metal powder such as W, Mo, Mn etc. inside the through hole. The metal paste is sucked to adhere to the entire inner surface of the through-hole, and then the through-hole is divided into two and punched with a die so as to have the outer shape of the base body 1 and fired, thereby forming the groove 1c. It is deposited on the inner surface.

  Here, the groove portion 1c is formed so as to communicate between the upper and lower surfaces of the side surface of the substrate 1, and a part 3 of the metallized layer 2 is formed on the inner surface of the groove portion 1c of at least one insulating layer which is the lower layer of the substrate 1. Therefore, the groove portion 1c is also formed in the upper insulating layer stacked above the lower insulating layer, and the laminated portion of the insulating layer laminated immediately above the groove portion 1c. Even when the substrate 1 is formed by laminating a plurality of insulating layers of at least three layers, it is possible to reliably prevent the occurrence of poor adhesion between the upper insulating layers.

  That is, in the conventional configuration, since the groove 101c exists below the upper insulating layer, there is a portion where the upper insulating layer cannot be supported from below in the portion directly above the groove 101c. However, in the substrate of the present invention, since the groove portion 1c is also formed in the insulating layer that is the upper layer of the portion immediately above the groove portion 1c, the entire surface of the upper insulating layer is supported by the lower insulating layer. Therefore, when the ceramic green sheets that are the upper layers are sequentially laminated on the ceramic green sheets that are the lower layers and then pressed to adhere the ceramic green sheets, the gaps between the ceramic green sheets are reduced. It is no longer possible to apply pressure to the groove 1c.

  As a result, it is possible to eliminate a portion where delamination occurs due to insufficient adhesion between the insulating layers, so that the inside of the concave portion 1a of the base 1 is kept airtight, or a portion sandwiched between the insulating layers of the metallized layer 2 is not exposed. In other words, the electronic component mounting board that can operate normally and stably over a long period of time can be provided.

  When it is not necessary to form the recess 1a in the substrate 1, the ceramic green sheet on the upper side of the substrate 1 is set as the lowermost layer, and the ceramic green sheets on the lower side of the substrate 1 are sequentially laminated thereon, thereby forming the groove portion. The above problem can be solved even if the substrate 1c is not formed between the upper and lower surfaces of the substrate 1, but when the recess 1a is formed, the same problem occurs in the laminated portion directly above the recess 1a. The configuration is particularly effective.

  Then, as shown in FIG. 2, the opening width of the groove 1c increases from the lower layer of the laminated insulating layer to the upper layer, so that the upper insulating layer is slightly shifted and laminated on the lower layer. Even if it is done, it can prevent effectively that the adhesion defect arises between insulating layers.

  Preferably, the groove 1c has an opening width that is larger in the upper layer than the lower layer of the laminated insulating layer, and the groove depth is also deeper in the upper layer than the lower layer of the insulating layer. . Thereby, even if the insulating layers are laminated with a slight shift in both the front, rear, left and right directions, it is possible to effectively prevent the occurrence of poor adhesion between the insulating layers.

  Further, a lead terminal 9 is joined to the metallized layer 2 on the lower surface of the base 1 by a conductive adhesive such as silver (Ag) brazing, and the metallized layer 2 is connected to the external electric circuit board via the lead terminal 9. . The lead terminal 9 is preferably made of a metal approximate to the thermal expansion coefficient of the base 1 in order to effectively prevent thermal distortion due to the difference in thermal expansion coefficient with the base 1. The metal is preferably an Fe—Ni alloy, an Fe—Ni—Co alloy, or the like. For example, a predetermined metal processing method such as a rolling method or a stamping method is applied to an ingot of the Fe—Ni—Co alloy. It is formed into a shape.

  When the lead terminal 9 is joined to the metallized layer 2 on the lower surface side of the substrate 1 through a conductive adhesive such as Ag brazing, the conductive adhesive wets and spreads also on the surface of the part 3 of the metallized layer 2 The meniscus of the conductive adhesive for joining the substrate 1 and the lead terminal 9 can be made favorable. As a result, the base 1 and the lead terminal 9 can be firmly joined.

  Furthermore, since the part 3 of the metallized layer 2 is formed in the groove 1c, a meniscus of a conductive adhesive can be formed in the groove 1c, and the meniscus of the conductive adhesive is outside the side surface of the substrate 1. Even if the package is joined to the external electric circuit board without projecting, it can be prevented that it becomes an obstacle to the mounting of other components mounted on the external electric circuit board.

  When the groove portion 1c is formed so as to communicate between the upper and lower surfaces of the substrate 1, and the part 3 of the metallized layer 2 is formed over the entire surface between the upper and lower surfaces of the groove portion 1c, the conductive adhesive is applied to the substrate. It was difficult to improve the meniscus of the conductive adhesive by crawling up to the upper surface of 1 and the metallized layer 2 and the lead terminal 9 could not be firmly bonded, or crawled up to the upper surface of the substrate 1 Due to the conductive adhesive, the upper surface of the base body 1 is not flat, and the lid 6 cannot be hermetically bonded to the upper surface of the base body 1, and there is a possibility that the inside of the package cannot be hermetically sealed. . Furthermore, as the length of the part 3 of the metallized layer 2 becomes longer, reflection loss tends to occur in the high-frequency signal transmitted through the connection portion between the metallized layer 2 and the lead terminal 9, and the transmission efficiency of the high-frequency signal decreases. It will be. Therefore, a part 3 of the metallized layer 2 is formed only on the lower surface side of the substrate 1 on the inner surface of the groove 1c.

  The metallized layer 2 may be directly connected to the metallized layer 2 and the line conductor of the external electric circuit board via a conductive adhesive such as solder, without attaching the lead terminal 9 to the metallized layer 2. Preferably, the metallized layer 2 and the line conductor of the external electric circuit board are connected to each other through the lead terminal 9, and this configuration transmits the connection portion between the board of the present invention and the external electric circuit board. The impedance of the high-frequency signal can be matched at the lead terminal 9 by making the width of the lead terminal 9 the same over the entire length. In the connection part between the board and the external electric circuit board, transmission loss such as reflection loss is particularly likely to occur in the high-frequency signal, but this configuration suppresses the generation of transmission loss in the connection part as much as possible and efficiently generates the high-frequency signal. It is possible to transmit.

  Further, the configuration using the lead terminals 9 makes it easy to mount the base 1 on the external electric circuit board, and can prevent a large stress from acting on the base 1 due to a difference in thermal expansion from the external electric circuit board. It is possible to effectively prevent the occurrence of breakage such as cracks.

  As shown in FIG. 1, the electrical connection between the metallized layer 2 and the electronic component 7 is formed by forming the metallized layer 4 from the end of a part 3 of the metallized layer 2 to the periphery of the electronic component 7 on the upper surface of the base 1. Then, the end of the metallized layer 4 and the electronic component 7 may be electrically connected. As a result, the electrode of the electronic component 7 and the metallized layer 2 are electrically connected and the lead terminal 9 is connected to the external electric circuit board, thereby electrically connecting the electronic component 7 and the external electric circuit board. Signals can be input and output between the external electric circuit board and the electronic component 7.

  Alternatively, a metallized layer 4 is formed on the bottom surface of the recess 1 a of the base 1 or around the recess 1 a on the top surface of the base 1 and is electrically connected to the electrode of the electronic component 7. The metallization layer 2 is formed on the outer periphery of the lower surface of the base body 1, and the metallization layer 2 accommodated in the groove 1 c on the side surface of the base body 1 is formed. Part 3 may be formed.

  The internal wiring may be configured by combining a through-connection conductor perpendicular to the substrate 1 and a metallized layer parallel to the metallized layer 2 on the inner layer of the substrate 1. The internal wiring can route the electric circuit inside the base 1 by combining the through-connection conductor and the metallized layer in this way.

  Further, preferably, as shown in FIG. 1 (b), it is made of a metal that suppresses thermal distortion due to a difference in thermal expansion coefficient with the base body 1 and is joined to the upper surface of the base body 1 to enable seam welding of the lid body 6. The seal ring 5 may be joined through a brazing material such as Ag brazing. The metal is preferably an Fe-Ni alloy or an Fe-Ni-Co alloy. For example, an ingot of an Fe-Ni-Co alloy is subjected to a conventionally known metal processing method such as a rolling method or a punching method to obtain a predetermined shape. Formed.

  It should be noted that the present invention is not limited to the above-described embodiments, and various modifications may be made without departing from the scope of the present invention. For example, the shape of the electronic component mounting substrate in plan view may be a polygon shown in FIG. 1A, a polygon such as a hexagon, an octagon, or a circle, or any other shape.

(A) is a top view which shows an example of embodiment of the package using the board | substrate for electronic component mounting of this invention, (b) is sectional drawing of (a). It is a principal part expanded side view which shows an example of embodiment of the groove part 1c of the electronic component mounting board | substrate of this invention. (A) is sectional drawing of the conventional electronic component storage package, (b) is a top view of (a).

Explanation of symbols

DESCRIPTION OF SYMBOLS 1: Substrate 1a: Concave part 1b: Mounting part 1c: Groove part 2: Metallized layer 3: Part of metallized layer 6: Lid 7: Electronic component 8: Electrical connection means

Claims (1)

A substrate having a mounting portion on which an electronic component is mounted on the upper surface, and a metallization layer formed from the lower surface to the side surface of the substrate; In addition, a groove portion in which a part of the metallized layer is accommodated is formed between the upper and lower surfaces of the base, and the opening width of the groove portion is larger in the upper layer than the lower layer of the laminated insulating layer. A board for mounting electronic components.

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