JP2006161040A - 条痕が減少したケミカルメカニカル研磨パッドを形成するための装置 - Google Patents
条痕が減少したケミカルメカニカル研磨パッドを形成するための装置 Download PDFInfo
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- JP2006161040A JP2006161040A JP2005338381A JP2005338381A JP2006161040A JP 2006161040 A JP2006161040 A JP 2006161040A JP 2005338381 A JP2005338381 A JP 2005338381A JP 2005338381 A JP2005338381 A JP 2005338381A JP 2006161040 A JP2006161040 A JP 2006161040A
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Classifications
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29B—PREPARATION OR PRETREATMENT OF THE MATERIAL TO BE SHAPED; MAKING GRANULES OR PREFORMS; RECOVERY OF PLASTICS OR OTHER CONSTITUENTS OF WASTE MATERIAL CONTAINING PLASTICS
- B29B7/00—Mixing; Kneading
- B29B7/30—Mixing; Kneading continuous, with mechanical mixing or kneading devices
- B29B7/58—Component parts, details or accessories; Auxiliary operations
- B29B7/72—Measuring, controlling or regulating
- B29B7/726—Measuring properties of mixture, e.g. temperature or density
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29B—PREPARATION OR PRETREATMENT OF THE MATERIAL TO BE SHAPED; MAKING GRANULES OR PREFORMS; RECOVERY OF PLASTICS OR OTHER CONSTITUENTS OF WASTE MATERIAL CONTAINING PLASTICS
- B29B7/00—Mixing; Kneading
- B29B7/74—Mixing; Kneading using other mixers or combinations of mixers, e.g. of dissimilar mixers ; Plant
- B29B7/7476—Systems, i.e. flow charts or diagrams; Plants
- B29B7/748—Plants
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29B—PREPARATION OR PRETREATMENT OF THE MATERIAL TO BE SHAPED; MAKING GRANULES OR PREFORMS; RECOVERY OF PLASTICS OR OTHER CONSTITUENTS OF WASTE MATERIAL CONTAINING PLASTICS
- B29B7/00—Mixing; Kneading
- B29B7/74—Mixing; Kneading using other mixers or combinations of mixers, e.g. of dissimilar mixers ; Plant
- B29B7/7476—Systems, i.e. flow charts or diagrams; Plants
- B29B7/7485—Systems, i.e. flow charts or diagrams; Plants with consecutive mixers, e.g. with premixing some of the components
- B29B7/749—Systems, i.e. flow charts or diagrams; Plants with consecutive mixers, e.g. with premixing some of the components with stirring means for the individual components before they are mixed together
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29B—PREPARATION OR PRETREATMENT OF THE MATERIAL TO BE SHAPED; MAKING GRANULES OR PREFORMS; RECOVERY OF PLASTICS OR OTHER CONSTITUENTS OF WASTE MATERIAL CONTAINING PLASTICS
- B29B7/00—Mixing; Kneading
- B29B7/80—Component parts, details or accessories; Auxiliary operations
- B29B7/88—Adding charges, i.e. additives
- B29B7/90—Fillers or reinforcements, e.g. fibres
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
- B29C39/22—Component parts, details or accessories; Auxiliary operations
- B29C39/24—Feeding the material into the mould
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
- B29C39/22—Component parts, details or accessories; Auxiliary operations
- B29C39/44—Measuring, controlling or regulating
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Manufacture Of Macromolecular Shaped Articles (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Processes Of Treating Macromolecular Substances (AREA)
- Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
Abstract
【解決手段】ポリマー材料を有するタンクと、微小球を有する貯蔵サイロと、硬化剤を有する硬化剤貯蔵タンクとを含む装置である。装置はさらに、ポリマー材料と微小球との予備混合物を形成するためのプレミックス準備タンクと、所望のかさ密度に達するまで予備混合物を再循環させるための、プレミックス準備タンクの再循環ループとを提供する。装置はさらに、予備混合物を貯蔵するためのプレミックス実行タンクと、予備混合物と硬化剤との混合物を形成するためのミキサと、混合物を成形するための型とを含む装置である。
【選択図】なし
Description
Claims (10)
- ケミカルメカニカル研磨パッドを形成するための装置であって、
ポリマー材料を有するタンクと、
微小球を有する貯蔵サイロと、
硬化剤を有する硬化剤貯蔵タンクと、
ポリマー材料と微小球との予備混合物を形成するためのプレミックス準備タンクと、
所望のかさ密度に達するまで予備混合物を再循環させるための、プレミックス準備タンクの再循環ループと、
予備混合物を貯蔵するためのプレミックス実行タンクと、
予備混合物と硬化剤との混合物を形成するためのミキサと、
混合物を成形するための型と
を含む装置。 - プレミックス準備タンクの中で予備混合物を攪拌するための攪拌機をさらに含む、請求項1記載の装置。
- プレミックス準備タンクを脱気するための真空源をさらに含む、請求項1記載の装置。
- 予備混合物のかさ密度を計測するための、再循環ループ中のインライン濃度計をさらに含む、請求項1記載の装置。
- 微小球が、ポリビニルアルコール、ペクチン、ポリビニルピロリドン、ヒドロキシエチルセルロース、メチルセルロース、ヒドロプロピルメチルセルロース、カルボキシメチルセルロース、ヒドロキシプロピルセルロース、ポリアクリル酸、ポリアクリルアミド、ポリエチレングリコール、ポリヒドロキシエーテルアクリライト、デンプン、マレイン酸コポリマー、ポリエチレンオキシド、ポリウレタン、シクロデキストリン、アクリロニトリルと塩化ビニリデンとのコポリマー及びこれらの組み合わせを含む、請求項1記載の装置。
- ポリマー材料が、ポリウレタン、ポリカーボネート、ポリエステル、シリコーン、ポリイミド、ポリスルホン、ポリ塩化ビニル、ポリアクリロニトリル、ポリメチルメタクリレート、ポリフッ化ビニリデン、ポリエチレンテレフタレート、ポリエーテルエーテルケトン、ポリエーテルケトン、ポリエーテルイミド、エチルビニルアセテート、ポリ酪酸ビニル、ポリ酢酸ビニル、アクリロニトリルブタジエンスチレン、フッ化エチレンプロピレン及びペルフルオロアルコキシポリマーならびにこれらの組み合わせを含む、請求項1記載の装置。
- ケミカルメカニカル研磨パッドを形成するための装置であって、
第一のポリマー材料を有する第一のプレポリマー貯蔵タンクと、
微小球を有する貯蔵サイロと、
硬化剤を有する硬化剤貯蔵タンクと、
第一のポリマー材料と微小球との予備混合物を形成するためのプレミックス準備タンクと、
所望のかさ密度に達するまで予備混合物を再循環させるための、プレミックス準備タンクの再循環ループと、
予備混合物を貯蔵するためのプレミックス実行タンクと、
予備混合物と硬化剤との混合物を形成するためのミキサと、
所望のかさ密度に達するまで第二のポリマー材料を混合物に供給するための、第二のポリマー材料を有する少なくとも1個の第二のプレポリマー貯蔵タンクと、
混合物を成形するための型と
を含む装置。 - 第一のポリマー材料と第二のポリマー材料とが同じである、請求項7記載の装置。
- ケミカルメカニカル研磨パッドを形成するための装置であって、
ポリマー材料を有するプレポリマー貯蔵タンクと、
微小球を有する貯蔵サイロと、
硬化剤を有する硬化剤貯蔵タンクと、
ポリマー材料と微小球との予備混合物を形成するためのプレミックス実行/準備タンクと、
所望のかさ密度に達するまで予備混合物を再循環させるための、プレミックス実行/準備タンクの再循環ループと、
予備混合物と硬化剤との混合物を形成するためのミキサと、
混合物を成形するための型と
を含む装置。 - さらなるポリマー材料を混合物に供給するための別のプレポリマー貯蔵タンクをさらに含む、請求項9記載の装置。
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US10/996,199 | 2004-11-23 | ||
US10/996,199 US7275928B2 (en) | 2004-11-23 | 2004-11-23 | Apparatus for forming a striation reduced chemical mechanical polishing pad |
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JP2006161040A true JP2006161040A (ja) | 2006-06-22 |
JP4842623B2 JP4842623B2 (ja) | 2011-12-21 |
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US (1) | US7275928B2 (ja) |
JP (1) | JP4842623B2 (ja) |
KR (1) | KR101137409B1 (ja) |
CN (1) | CN1781668B (ja) |
TW (1) | TWI359718B (ja) |
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CN1781668A (zh) | 2006-06-07 |
TW200618943A (en) | 2006-06-16 |
KR101137409B1 (ko) | 2012-04-20 |
CN1781668B (zh) | 2010-05-26 |
JP4842623B2 (ja) | 2011-12-21 |
TWI359718B (en) | 2012-03-11 |
KR20060057504A (ko) | 2006-05-26 |
US7275928B2 (en) | 2007-10-02 |
US20060110488A1 (en) | 2006-05-25 |
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