JP2006156651A - Manufacturing method of ceramic substrate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide the manufacturing method of a ceramic substrate for forming the ceramic substrate which includes a void, and in which the void is opened to the outer periphery with high dimension accuracy. <P>SOLUTION: The manufacturing method of the ceramic substrate includes the steps of preparing a ceramic green sheet 11, molding the ceramic green sheet 11 into a frame, baking a frame-shaped ceramic green sheet 14 into a frame-shaped ceramic substrate 15, and dividing the frame-shaped ceramic substrate 15 to obtain a ceramic substrate 1 which has a void and in which the void is opened to the outer periphery. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a method for manufacturing a ceramic substrate having a blank portion and having a blank portion opened to the outer periphery.

  Conventionally, a ceramic substrate made of, for example, an aluminum oxide sintered body is manufactured as follows. First, a suitable organic binder, solvent, etc. are added to and mixed with raw material powders such as aluminum oxide, silicon oxide, magnesium oxide, and calcium oxide to form a slurry, which is formed into a sheet by the doctor blade method or the calender roll method. Molding to obtain a ceramic green sheet (ceramic green sheet). Next, through holes are formed in the ceramic green sheet by punching or the like. And the metal paste used as a wiring conductor is printed and apply | coated to a predetermined pattern. Thereafter, a plurality of ceramic green sheets are laminated, and the laminated body is cut to produce a ceramic generating body for a ceramic substrate. Finally, a ceramic substrate is produced by sintering the ceramic production form at a high temperature (about 1600 ° C.).

When manufacturing a ceramic substrate having a blank portion and open to the outer periphery (for example, a so-called U-shape, L-shape, etc.), this blank portion and the blank portion are open to the outer periphery. A ceramic green sheet was prepared and fired to obtain a ceramic substrate having a desired shape.
JP 2001-244578 A

  However, since the ceramic green sheet having a blank portion and having the blank portion opened to the outer periphery is not fixed at the tip on the open portion side, when it shrinks by firing, the open portion and other portions are affected by thermal stress. There was a problem in that a difference in the amount of distortion occurred, the tip on the open part side approached, and the open part narrowed. As described above, in the conventional manufacturing method, it is difficult to form the ceramic substrate into a shape having a blank portion and open to the outer periphery.

  The present invention has been devised in view of the above-described problems of the prior art, and an object of the present invention is to provide a ceramic substrate having a blank portion and having a blank portion open to the outer periphery with high dimensional accuracy. It is in providing the manufacturing method of.

  The method for producing a ceramic substrate of the present invention includes a step of preparing a ceramic green sheet, a step of forming the ceramic green sheet into a frame shape, a step of firing the frame-shaped ceramic green sheet into a frame-shaped ceramic substrate, And dividing the frame-shaped ceramic substrate to obtain a ceramic substrate having a blank portion and having the blank portion open to the outer periphery.

  The method for producing a ceramic substrate of the present invention is characterized in that a plurality of ceramic substrates having the same shape are obtained by equally dividing a frame-shaped ceramic substrate.

  The method for producing a ceramic substrate according to the present invention forms a substrate region and a dummy region on a frame-shaped ceramic green sheet, and obtains a ceramic substrate having a desired shape by removing the dummy region of the frame-shaped ceramic substrate after firing. It is characterized by.

  The method for manufacturing a ceramic substrate of the present invention includes a step of firing a frame-shaped ceramic green sheet to form a frame-shaped ceramic substrate, and dividing the frame-shaped ceramic substrate to have a blank portion and the blank portion is open to the outer periphery. A ceramic substrate having a blank portion and having the blank portion opened to the outer periphery can be formed with high dimensional accuracy.

  That is, by firing a frame-shaped ceramic green sheet, a frame-shaped ceramic substrate with little deformation can be obtained. Then, by dividing the frame-shaped ceramic substrate to obtain a ceramic substrate having a blank portion and having the blank portion opened to the outer periphery, the ceramic substrate having the blank portion and the blank portion being opened to the outer periphery is obtained. It can be formed well.

  Moreover, the manufacturing method of the ceramic substrate of this invention can improve the manufacturing efficiency of a ceramic substrate by equally dividing a frame-shaped ceramic substrate into a plurality of ceramic substrates having the same shape.

  Also, the method for manufacturing a ceramic substrate according to the present invention includes forming a substrate region and a dummy region on a frame-shaped ceramic green sheet, and removing the dummy region of the frame-shaped ceramic substrate after firing to have a blank portion and a blank space. By obtaining a ceramic substrate whose part is open to the outer periphery, a ceramic substrate having a more complicated shape than conventional ones can be formed with high dimensional accuracy.

  A method for manufacturing a ceramic substrate according to the present invention will be described in detail with reference to the accompanying drawings. First, FIG. 1 is a plan view showing an example of a ceramic substrate 1 manufactured by the manufacturing method of the present invention. In FIG. 1, reference numeral 1 denotes a ceramic substrate having a blank portion and the blank portion is opened to the outer periphery, and 2 denotes a blank portion. FIG. 1 shows a so-called U-shaped ceramic substrate.

  The ceramic substrate 1 is made of a ceramic material such as an aluminum oxide sintered body, an aluminum nitride sintered body, a mullite sintered body, and glass-ceramics. A wiring conductor 3 made of metal powder metallization such as tungsten, molybdenum, copper, or silver is formed on the surface of the ceramic substrate 1. The wiring conductor 3 is used for transmission / reception of an electric signal between an electronic component (not shown) and an external electric circuit board.

  In addition, when a metal having excellent corrosion resistance such as nickel or gold is deposited on the exposed surface of the wiring conductor 3 to a thickness of about 1 to 20 μm, the wiring conductor 3 can be effectively prevented from being oxidized and corroded, When an electrode such as an electronic component is bonded to the wiring conductor 3 by wire bonding or the like, the bonding can be strengthened. Therefore, a nickel plating layer having a thickness of about 1 to 10 μm and a gold plating layer having a thickness of about 0.1 to 3 μm are sequentially deposited on the exposed surface of the wiring conductor 3 by an electrolytic plating method or an electroless plating method. preferable.

  Next, a method for manufacturing the ceramic substrate 1 shown in FIG. 1 will be described.

  First, as shown in FIG. 2A, a ceramic green sheet 11 for the ceramic substrate 1 is prepared. For example, when the ceramic substrate 1 is made of an aluminum oxide sintered body, the ceramic green sheet 11 is made of an organic binder and solvent suitable for ceramic raw material powders such as aluminum oxide, silicon oxide, calcium oxide, and magnesium oxide. A plasticizer, a dispersant, and the like are added and mixed to form a slurry, and this is manufactured by forming a sheet with a predetermined thickness by a sheet forming technique such as a doctor blade method.

  Next, the ceramic green sheet 11 for the ceramic substrate 1 is punched by using a die for punching through holes (not shown) for leading the wiring conductor from the upper surface to the lower surface of the ceramic substrate 1. The through-hole 12 is punched into the part using a mold. Then, a metallized paste 13 for the wiring conductor 3 is printed and applied in a predetermined pattern on the upper and lower surfaces and the through holes of the ceramic green sheet 11 for the ceramic substrate 1 by a screen printing method. And the frame-shaped ceramic green sheet 14 as shown in FIG.2 (b) can be obtained by cut | disconnecting to a predetermined dimension. Then, by sintering the frame-shaped ceramic green sheet 14 at a high temperature (about 1600 ° C.), a frame-shaped ceramic substrate 15 as shown in FIG. 2C is manufactured.

  Then, by dividing the frame-shaped ceramic substrate 14 along the dividing line N, a U-shaped ceramic substrate 1 having a blank portion 2 opened on one side as shown in FIG. 2D is obtained. be able to. As a method of dividing the frame-shaped ceramic substrate 15 and forming the ceramic substrate 1 having a blank portion and opened to the outer periphery, a cut is made in a portion that becomes the dividing line N of the frame-shaped ceramic green sheet 11. The frame-shaped ceramic substrate 15 is cut along the dividing line N by a method of forming and dividing the fired frame-shaped ceramic substrate 15 by applying stress along the dividing line N, a slicing method, or the like. And the like can be used.

  The method for manufacturing a ceramic substrate according to the present invention includes a step of firing a frame-shaped ceramic green sheet 14 to form a frame-shaped ceramic substrate 15, and dividing the frame-shaped ceramic green sheet 14 into a blank portion 2. The step of obtaining the ceramic substrate 1 having the blank portion 2 opened to the outer periphery can form the ceramic substrate 1 having the blank portion and the blank portion opened to the outer periphery with high dimensional accuracy.

  In other words, since the entire periphery of the frame of the frame-shaped ceramic green sheet 14 is connected, it is possible to prevent the frame-shaped ceramic green sheet 14 from being distorted in one direction and being extremely greatly deformed when fired. As a result, a frame-shaped ceramic substrate 15 with small deformation can be obtained.

  Further, by dividing the frame-shaped ceramic substrate 15 to obtain the ceramic substrate 1 having the blank portion 2 and having the blank portion 2 open to the outer periphery, the desired shape can be obtained from the frame-shaped ceramic substrate 15 with small deformation. Therefore, the ceramic substrate 1 having the blank portion 2 and having the blank portion 2 opened to the outer periphery can be formed with high dimensional accuracy.

  1 and 2 show a so-called U-shaped ceramic substrate 1 and a manufacturing method thereof as an example, but the shape of the ceramic substrate 1 is not limited to the U-shape, and so-called A ceramic substrate having a shape in which one side is opened, such as an L-shape, a C-shape, and an E-shape, and is easily deformed when a ceramic green sheet is fired can be formed with high dimensional accuracy. .

  Moreover, the manufacturing method of the ceramic substrate 1 of this invention shall obtain the several ceramic substrate 1 of the same shape by dividing | segmenting the frame-shaped ceramic substrate 15 equally. FIG. 3 shows a method for manufacturing a ceramic substrate when two so-called U-shaped ceramic substrates 1 are formed.

  First, as shown in FIG. 3A, a ceramic green sheet 11 for the ceramic substrate 1 is prepared. Next, the ceramic green sheet 11 for the ceramic substrate 1 is punched by using a die for punching through holes (not shown) for leading the wiring conductor from the upper surface to the lower surface of the ceramic substrate 1. The through hole 12 is formed by punching out the part using a mold. A metallized paste 13 for the wiring conductor 3 is printed and applied in a predetermined pattern by screen printing on the upper and lower surfaces of the ceramic green sheet 11 for the ceramic substrate 1 and in the through holes. Then, by cutting to a predetermined size, a frame-shaped ceramic green sheet 24 that is point-symmetric with the dividing line N as the center as shown in FIG. 3B can be obtained. Then, by sintering the frame-shaped ceramic green sheet 14 at a high temperature (about 1600 ° C.), the point-symmetric frame-shaped ceramic substrate 15 centering on the dividing line N as shown in FIG. Is manufactured.

  Then, by dividing the frame-shaped ceramic substrate 15 along the dividing line N, two U-shaped ceramic substrates 1 as shown in FIG. 3D can be obtained. Thereby, the plurality of ceramic substrates 1 can be obtained from the frame-shaped ceramic substrate 15 in a state of small deformation, and the plurality of ceramic substrates 1 can be formed with high dimensional accuracy.

  The method for manufacturing a ceramic substrate according to the present invention also includes forming a substrate region 14a and a dummy region 14b on the frame-shaped ceramic green sheet 14, and removing the dummy region of the frame-shaped ceramic substrate after firing. A ceramic substrate 1 having a blank portion opened to the outer periphery is obtained. As a result, a frame-shaped ceramic substrate 15 with small deformation can be formed, so that the frame-shaped ceramic substrate 15 can be favorably divided into a predetermined shape into a substrate region 15a and a dummy region 15b, and a blank portion is provided. Then, the ceramic substrate having the blank portion opened to the outer periphery can be formed with high dimensional accuracy.

  Further, as shown in FIG. 4 as another example of the method for manufacturing a ceramic substrate of the present invention, the frame-shaped ceramic substrate 15 due to variations in firing between the substrate region 14a and the dummy region 14b of the frame-shaped ceramic green sheet 14 In order to make the deformation smaller, a dummy conductor 17 or the like may be formed in the dummy region 15b of the frame-shaped ceramic substrate 15. First, as shown in FIG. 4A, a ceramic green sheet 11 for the ceramic substrate 1 is prepared. Next, the ceramic green sheet 11 for the ceramic substrate 1 is punched by using a die for punching through holes (not shown) for leading the wiring conductor from the upper surface to the lower surface of the ceramic substrate 1. The through hole 12 is formed by punching out the part using a mold.

  The metallized paste 13 for the wiring conductor 3 and the metallized paste 16 for the dummy conductor 17 are printed in a predetermined pattern on the upper and lower surfaces and through holes of the ceramic green sheet 11 for the ceramic substrate 1 by screen printing. To do. Then, by cutting to a predetermined dimension, a frame-shaped ceramic green sheet 14 having a substrate region 14a and a dummy region 14b as shown in FIG. 4B can be obtained. Then, by sintering the frame-shaped ceramic green sheet 14 at a high temperature (about 1600 ° C.), a frame-shaped ceramic substrate 15 as shown in FIG. 4C is manufactured. Then, by dividing the frame-shaped ceramic substrate 15 into the substrate region 15a and the dummy region 15b along the dividing line N, as shown in FIG. 4D, the ceramic substrate 1 and the dummy substrate 18 having a desired shape are obtained. Can be obtained.

  Further, the present invention is not limited to the above-described embodiments, and it goes without saying that various modifications are possible. For example, as shown in the plan view of the ceramic substrate in FIG. 5, the width of the opening side and the back side of the blank portion 2 may be different. Such a ceramic substrate can be formed by forming through holes in a predetermined shape in accordance with the shape on the opening side, firing, and then cutting. In the above example, the method of manufacturing the ceramic substrate 1 having the blank portion and having the blank portion opened to the outer periphery from the single ceramic green sheet 11 is shown. It may be formed by laminating sheets (ceramic production form). 6A is a plan view of the ceramic substrate, and FIG. 6B is a sectional view taken along line XX ′ of the ceramic substrate in FIG. 6A. The shape of the blank portion 2 is different for each layer of the ceramic substrate. It does not matter.

It is a top view which shows an example of the structure of the ceramic substrate obtained by the manufacturing method of the ceramic substrate of this invention. It is a figure which shows the manufacturing method of the ceramic substrate shown in FIG. It is a figure which shows the other example of the manufacturing method of the ceramic substrate of this invention. It is a figure which shows the other example of the manufacturing method of the ceramic substrate of this invention. It is a figure which shows the other example of the manufacturing method of the ceramic substrate of this invention. (A) is a top view which shows the other example of the structure of the ceramic substrate obtained by the manufacturing method of the ceramic substrate of this invention, (b) is XX 'line | wire of the ceramic substrate shown to (a) FIG.

Explanation of symbols

1: Ceramic substrate 2: Blank portion 3: Wiring conductor 11: Ceramic green sheet 12: Through hole 13: Metallized paste 14: Frame-shaped ceramic green sheet 15: Frame-shaped ceramic substrate

Claims (3)

A step of preparing a ceramic green sheet; a step of forming the ceramic green sheet into a frame shape; a step of firing the frame-shaped ceramic green sheet into a frame-shaped ceramic substrate; and the frame-shaped ceramic substrate. And a step of obtaining a ceramic substrate having a blank portion and having the blank portion open to the outer periphery. The method of manufacturing a ceramic substrate according to claim 1, wherein a plurality of ceramic substrates having the same shape are obtained by equally dividing the frame-shaped ceramic substrate. A substrate region and a dummy region are formed on the frame-shaped ceramic green sheet, and the blank region is opened to the outer periphery by removing the dummy region of the frame-shaped ceramic substrate after firing. The method for manufacturing a ceramic substrate according to claim 1, wherein the ceramic substrate is obtained.

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