JP2006150348A5 - - Google Patents

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Publication number
JP2006150348A5
JP2006150348A5 JP2005312981A JP2005312981A JP2006150348A5 JP 2006150348 A5 JP2006150348 A5 JP 2006150348A5 JP 2005312981 A JP2005312981 A JP 2005312981A JP 2005312981 A JP2005312981 A JP 2005312981A JP 2006150348 A5 JP2006150348 A5 JP 2006150348A5
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JP
Japan
Prior art keywords
chemically active
substrate
filter
layer
carbon nanotubes
Prior art date
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Granted
Application number
JP2005312981A
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English (en)
Japanese (ja)
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JP2006150348A (ja
JP5051997B2 (ja
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Priority claimed from US10/904,633 external-priority patent/US7459013B2/en
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Publication of JP2006150348A publication Critical patent/JP2006150348A/ja
Publication of JP2006150348A5 publication Critical patent/JP2006150348A5/ja
Application granted granted Critical
Publication of JP5051997B2 publication Critical patent/JP5051997B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2005312981A 2004-11-19 2005-10-27 カーボン・ナノチューブを形成する方法、フィルタ、露光システム（化学的に修飾されたカーボン・ナノチューブ構造を含む化学的微粒子フィルタ） Expired - Fee Related JP5051997B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/904,633 US7459013B2 (en) 2004-11-19 2004-11-19 Chemical and particulate filters containing chemically modified carbon nanotube structures
US10/904633 2004-11-19

Publications (3)

Publication Number Publication Date
JP2006150348A JP2006150348A (ja) 2006-06-15
JP2006150348A5 true JP2006150348A5 (https=) 2008-08-14
JP5051997B2 JP5051997B2 (ja) 2012-10-17

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JP2005312981A Expired - Fee Related JP5051997B2 (ja) 2004-11-19 2005-10-27 カーボン・ナノチューブを形成する方法、フィルタ、露光システム（化学的に修飾されたカーボン・ナノチューブ構造を含む化学的微粒子フィルタ）

Country Status (3)

Country Link
US (5) US7459013B2 (https=)
JP (1) JP5051997B2 (https=)
CN (1) CN100425321C (https=)

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