JP2006140506A5 - - Google Patents

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Publication number
JP2006140506A5
JP2006140506A5 JP2005332689A JP2005332689A JP2006140506A5 JP 2006140506 A5 JP2006140506 A5 JP 2006140506A5 JP 2005332689 A JP2005332689 A JP 2005332689A JP 2005332689 A JP2005332689 A JP 2005332689A JP 2006140506 A5 JP2006140506 A5 JP 2006140506A5
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JP
Japan
Prior art keywords
pattern
dummy
manufacturing
semiconductor device
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005332689A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006140506A (ja
JP4398420B2 (ja
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Publication date
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Priority to JP2005332689A priority Critical patent/JP4398420B2/ja
Priority claimed from JP2005332689A external-priority patent/JP4398420B2/ja
Publication of JP2006140506A publication Critical patent/JP2006140506A/ja
Publication of JP2006140506A5 publication Critical patent/JP2006140506A5/ja
Application granted granted Critical
Publication of JP4398420B2 publication Critical patent/JP4398420B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2005332689A 2005-11-17 2005-11-17 半導体装置の製造方法 Expired - Lifetime JP4398420B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005332689A JP4398420B2 (ja) 2005-11-17 2005-11-17 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005332689A JP4398420B2 (ja) 2005-11-17 2005-11-17 半導体装置の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP34542999A Division JP4307664B2 (ja) 1999-12-03 1999-12-03 半導体装置

Publications (3)

Publication Number Publication Date
JP2006140506A JP2006140506A (ja) 2006-06-01
JP2006140506A5 true JP2006140506A5 (enrdf_load_stackoverflow) 2009-09-10
JP4398420B2 JP4398420B2 (ja) 2010-01-13

Family

ID=36621036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005332689A Expired - Lifetime JP4398420B2 (ja) 2005-11-17 2005-11-17 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JP4398420B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5554973B2 (ja) * 2009-12-01 2014-07-23 ルネサスエレクトロニクス株式会社 半導体集積回路装置の製造方法
JP2018006443A (ja) 2016-06-29 2018-01-11 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
CN114647145B (zh) * 2022-05-23 2022-09-13 合肥新晶集成电路有限公司 光罩及半导体结构

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