JP2006133026A5 - - Google Patents

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Publication number
JP2006133026A5
JP2006133026A5 JP2004320771A JP2004320771A JP2006133026A5 JP 2006133026 A5 JP2006133026 A5 JP 2006133026A5 JP 2004320771 A JP2004320771 A JP 2004320771A JP 2004320771 A JP2004320771 A JP 2004320771A JP 2006133026 A5 JP2006133026 A5 JP 2006133026A5
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JP
Japan
Prior art keywords
beam splitter
light source
polarizing beam
objective lens
image sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004320771A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006133026A (ja
JP4485910B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004320771A priority Critical patent/JP4485910B2/ja
Priority claimed from JP2004320771A external-priority patent/JP4485910B2/ja
Priority to US11/262,826 priority patent/US7821644B2/en
Publication of JP2006133026A publication Critical patent/JP2006133026A/ja
Publication of JP2006133026A5 publication Critical patent/JP2006133026A5/ja
Application granted granted Critical
Publication of JP4485910B2 publication Critical patent/JP4485910B2/ja
Priority to US12/898,255 priority patent/US20110019200A1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2004320771A 2004-11-04 2004-11-04 外観検査装置 Expired - Fee Related JP4485910B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004320771A JP4485910B2 (ja) 2004-11-04 2004-11-04 外観検査装置
US11/262,826 US7821644B2 (en) 2004-11-04 2005-11-01 Apparatus for visual inspection
US12/898,255 US20110019200A1 (en) 2004-11-04 2010-10-05 Apparatus for visual inspection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004320771A JP4485910B2 (ja) 2004-11-04 2004-11-04 外観検査装置

Publications (3)

Publication Number Publication Date
JP2006133026A JP2006133026A (ja) 2006-05-25
JP2006133026A5 true JP2006133026A5 (enExample) 2007-07-19
JP4485910B2 JP4485910B2 (ja) 2010-06-23

Family

ID=36261419

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004320771A Expired - Fee Related JP4485910B2 (ja) 2004-11-04 2004-11-04 外観検査装置

Country Status (2)

Country Link
US (2) US7821644B2 (enExample)
JP (1) JP4485910B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8804111B2 (en) * 2007-10-04 2014-08-12 Kla-Tencor Corporation Multichip CCD camera inspection system
USD786935S1 (en) 2015-11-20 2017-05-16 Baldwin Filters, Inc. Filter element
CN105334230A (zh) * 2015-11-26 2016-02-17 凌云光技术集团有限责任公司 用于高纵深比pcb板孔缺陷检测的光源装置
JP6587264B1 (ja) * 2018-12-11 2019-10-09 レーザーテック株式会社 マスク検査装置、切り替え方法及びマスク検査方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61104243A (ja) * 1984-10-29 1986-05-22 Hitachi Ltd 異物検出方法及びその装置
JPS6220313A (ja) * 1985-07-19 1987-01-28 Hitachi Ltd パタ−ン検出方法及びその装置
JPH11237344A (ja) * 1998-02-19 1999-08-31 Hitachi Ltd 欠陥検査方法およびその装置
US6690469B1 (en) * 1998-09-18 2004-02-10 Hitachi, Ltd. Method and apparatus for observing and inspecting defects
JP3610837B2 (ja) * 1998-09-18 2005-01-19 株式会社日立製作所 試料表面の観察方法及びその装置並びに欠陥検査方法及びその装置
US6999183B2 (en) * 1998-11-18 2006-02-14 Kla-Tencor Corporation Detection system for nanometer scale topographic measurements of reflective surfaces
JP3858571B2 (ja) * 2000-07-27 2006-12-13 株式会社日立製作所 パターン欠陥検査方法及びその装置
US6673637B2 (en) * 2000-09-20 2004-01-06 Kla-Tencor Technologies Methods and systems for determining a presence of macro defects and overlay of a specimen
JP3965325B2 (ja) * 2002-05-29 2007-08-29 株式会社日立ハイテクノロジーズ 微細構造観察方法、および欠陥検査装置
US7145661B2 (en) * 2003-12-31 2006-12-05 Carl Zeiss Meditec, Inc. Efficient optical coherence tomography (OCT) system and method for rapid imaging in three dimensions
JP4494160B2 (ja) * 2004-10-14 2010-06-30 株式会社トプコン 光画像計測装置

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