JP2006120720A - 薄膜装置の製造方法、アクティブマトリクス基板、電気光学装置、電子機器 - Google Patents
薄膜装置の製造方法、アクティブマトリクス基板、電気光学装置、電子機器 Download PDFInfo
- Publication number
- JP2006120720A JP2006120720A JP2004304621A JP2004304621A JP2006120720A JP 2006120720 A JP2006120720 A JP 2006120720A JP 2004304621 A JP2004304621 A JP 2004304621A JP 2004304621 A JP2004304621 A JP 2004304621A JP 2006120720 A JP2006120720 A JP 2006120720A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- layer
- film device
- substrate
- release layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 91
- 239000010409 thin film Substances 0.000 title claims abstract description 89
- 238000000034 method Methods 0.000 title claims abstract description 50
- 239000011159 matrix material Substances 0.000 title claims description 10
- 230000008569 process Effects 0.000 title abstract description 19
- 239000010410 layer Substances 0.000 claims abstract description 191
- 239000000463 material Substances 0.000 claims abstract description 15
- 239000012790 adhesive layer Substances 0.000 claims abstract description 10
- 238000000059 patterning Methods 0.000 claims abstract description 10
- 239000010408 film Substances 0.000 claims description 33
- 238000004519 manufacturing process Methods 0.000 claims description 31
- 239000004065 semiconductor Substances 0.000 claims description 27
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 14
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- 239000000853 adhesive Substances 0.000 claims description 10
- 230000001070 adhesive effect Effects 0.000 claims description 10
- 239000010419 fine particle Substances 0.000 claims description 10
- 239000012535 impurity Substances 0.000 claims description 10
- 239000004020 conductor Substances 0.000 claims description 6
- 238000005401 electroluminescence Methods 0.000 claims description 6
- 239000004973 liquid crystal related substance Substances 0.000 claims description 6
- 230000001747 exhibiting effect Effects 0.000 claims description 3
- 238000001962 electrophoresis Methods 0.000 claims 1
- 239000002699 waste material Substances 0.000 abstract description 3
- 239000002585 base Substances 0.000 description 19
- 230000015572 biosynthetic process Effects 0.000 description 10
- 238000000926 separation method Methods 0.000 description 9
- 239000007789 gas Substances 0.000 description 8
- 230000006870 function Effects 0.000 description 7
- 239000004033 plastic Substances 0.000 description 7
- 229920003023 plastic Polymers 0.000 description 7
- 239000000203 mixture Substances 0.000 description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 239000001257 hydrogen Substances 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 4
- 238000005304 joining Methods 0.000 description 4
- 230000002829 reductive effect Effects 0.000 description 4
- 238000002679 ablation Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- -1 polyethylene Polymers 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052910 alkali metal silicate Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 210000002858 crystal cell Anatomy 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000010329 laser etching Methods 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
Images
Landscapes
- Liquid Crystal (AREA)
- Electroluminescent Light Sources (AREA)
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Thin Film Transistor (AREA)
Abstract
【解決手段】 転写元基板(100)上に、所定のエネルギ付与によって剥離する特性を有し、かつ、導電性を呈する剥離層(102)を形成する工程、剥離層上に薄膜装置を含む被転写層(110)を形成する工程、被転写層の一方の面に接着層(120)を介して転写先基板(122)を接合する工程、剥離層(102)にエネルギを付与して転写元基板(100)と剥離層(102)との間に剥離を生じさせ、剥離層とともに被転写層を転写先基板(122)に転写する工程、及び転写先基板に転写されて露出した剥離層(102)をパターニングして、薄膜装置と電気的に接続された配線層(102a〜d)を形成する工程を備える。
【選択図】 図3
Description
1)転写元基板上に、所定のエネルギ付与によって剥離する特性を有し、かつ、導電性を呈する剥離層を形成する工程;
2)剥離層上に薄膜装置を含む被転写層を形成する工程;
3)被転写層の一方の面に接着層を介して転写先基板を接合する工程;
4)剥離層にエネルギを付与して転写元基板と剥離層との間に剥離を生じさせ、剥離層とともに被転写層を転写先基板に転写する工程;及び
5)転写先基板に転写されて露出した剥離層をパターニングして、薄膜装置と電気的に接続された配線層を形成する工程。
図2(a)に示すように、転写元基板100上に剥離層102が形成される。転写元基板(製造元基板)100として、薄膜トランジスタを製造するための高温プロセスに十分耐えられる基板、例えば、1000℃程度に耐える石英ガラス党の透光性耐熱基板を利用する。転写元基板100には、石英ガラスの他、ソーダガラス、コーニング7059、日本電気ガラスOA―2等の耐熱性ガラス等を使用可能である。転写元基板100の厚みは、最終製品に用いられるものではないため大きな制限要素はないが、0.1mm〜0.5mm程度であることが好ましく、0.5mm〜1.5mmであることがより好ましい。転写元基板の厚さが薄すぎると強度の低下を招き、逆に厚すぎると、転写元基板の透過率が低い場合に照射光の減衰を招く。ただし、転写元基板の照射光の透過率が高い場合には、上記上限値を越えてその厚みを厚くすることができる。
図2(b)〜(f)は被転写層110の形成工程である。
図3(a)に示すように、薄膜トランジスタT1及びT2を含む被転写層110が形成されたら、被転写層上に接着剤をスピンコートなどによって塗布することにより、接着層120が形成される。接着層120の上に転写用基板5を載置し、接合する。
図3(b)及び図3(c)に示すように、転写先基板122の接合後、剥離層102にエネルギを付与して転写元基板100と剥離層102との間に剥離を生じさせ、剥離層102とともに被転写層110を転写先基板122に転写する。
図3(d)に示すように、転写元基板100と剥離層102とが剥離されたら、転写先基板122に転写されて露出した剥離層102をパターニングして、薄膜トランジスタと電気的に接続された配線層102a〜dを形成する。
Claims (11)
- 転写元基板上に、所定のエネルギ付与によって剥離する特性を有し、かつ、導電性を呈する剥離層を形成する工程と、
前記剥離層上に薄膜装置を含む被転写層を形成する工程と、
前記被転写層の一方の面に接着層を介して転写先基板を接合する工程と、
前記剥離層に前記エネルギを付与して前記転写元基板と前記剥離層との間に剥離を生じさせ、前記剥離層とともに前記被転写層を前記転写先基板に転写する工程と、
前記転写先基板に転写されて露出した前記剥離層をパターニングして、前記薄膜装置と電気的に接続された配線層を形成する工程と、を備えたことを特徴とする薄膜装置の製造方法。 - 前記被転写層は、
前記剥離層上に下地層を形成する工程と、
前記下地層に貫通孔を設ける工程と、
前記下地層に設けられた前記貫通孔に導電性材料を設ける工程と、
前記下地層に設けられた前記貫通孔上に前記薄膜装置の接続点が位置するように前記薄膜装置を形成する工程と、により形成される、請求項1に記載の薄膜装置の製造方法。 - 前記薄膜装置は、配線膜、電極、または半導体装置のいずれか1以上を含む、請求項1または2に記載の薄膜装置の製造方法。
- 前記剥離層は、金属微粒子を含んで構成される、請求項1乃至3のいずれかに記載の薄膜装置の製造方法。
- 前記剥離層は、光の照射によって原子間又は分子間の結合力が消失又は減少する材料で形成されている、請求項1乃至4のいずれかに記載の薄膜装置の製造方法。
- 前記剥離層は、アモルファスシリコンを含む、請求項5に記載の薄膜装置の製造方法。
- 前記剥離層は、前記アモルファスシリコンに対する不純物を含んで構成される、請求項6に記載の薄膜装置の製造方法。
- 前記接着層は永久接着剤である、請求項1乃至7のいずれかに記載の薄膜装置の製造方法。
- 請求項1乃至8のいずれかに記載の薄膜装置の製造方法を用いて、二次元に配置された複数の画素を駆動する複数の薄膜トランジスタを前記薄膜装置として製造したことを特徴とするアクティブマトリクス基板。
- 請求項9に記載の前記アクティブマトリクス基板を使用した電気光学装置。
- 前記電気光学装置は、液晶表示装置、電界発光装置、及び電気泳動装置のいずれかである請求項10に記載の電気光学装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004304621A JP4940402B2 (ja) | 2004-10-19 | 2004-10-19 | 薄膜装置の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004304621A JP4940402B2 (ja) | 2004-10-19 | 2004-10-19 | 薄膜装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006120720A true JP2006120720A (ja) | 2006-05-11 |
JP4940402B2 JP4940402B2 (ja) | 2012-05-30 |
Family
ID=36538341
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004304621A Active JP4940402B2 (ja) | 2004-10-19 | 2004-10-19 | 薄膜装置の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4940402B2 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008129196A (ja) * | 2006-11-17 | 2008-06-05 | Toppan Forms Co Ltd | 表示装置用電極基板の製造方法 |
JP2008129195A (ja) * | 2006-11-17 | 2008-06-05 | Toppan Forms Co Ltd | 表示装置用電極基板の製造方法 |
US7786576B2 (en) | 2007-02-06 | 2010-08-31 | Seiko Epson Corporation | Semiconductor device, method of manufacturing semiconductor device, and electronic apparatus |
WO2012173086A1 (ja) * | 2011-06-15 | 2012-12-20 | シャープ株式会社 | 半導体装置およびその製造方法 |
WO2013035298A1 (ja) * | 2011-09-08 | 2013-03-14 | シャープ株式会社 | 表示装置及びその製造方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01181570A (ja) * | 1988-01-12 | 1989-07-19 | Nec Corp | 薄膜トランジスタの製造方法 |
JPH05257171A (ja) * | 1991-12-02 | 1993-10-08 | Canon Inc | 画像表示装置及びその製造方法 |
JPH10125930A (ja) * | 1996-08-27 | 1998-05-15 | Seiko Epson Corp | 剥離方法 |
JPH10125931A (ja) * | 1996-08-27 | 1998-05-15 | Seiko Epson Corp | 薄膜素子の転写方法,薄膜素子,薄膜集積回路装置,アクティブマトリクス基板および液晶表示装置 |
JPH10125929A (ja) * | 1996-08-27 | 1998-05-15 | Seiko Epson Corp | 剥離方法 |
JP2003142666A (ja) * | 2001-07-24 | 2003-05-16 | Seiko Epson Corp | 素子の転写方法、素子の製造方法、集積回路、回路基板、電気光学装置、icカード、及び電子機器 |
-
2004
- 2004-10-19 JP JP2004304621A patent/JP4940402B2/ja active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01181570A (ja) * | 1988-01-12 | 1989-07-19 | Nec Corp | 薄膜トランジスタの製造方法 |
JPH05257171A (ja) * | 1991-12-02 | 1993-10-08 | Canon Inc | 画像表示装置及びその製造方法 |
JPH10125930A (ja) * | 1996-08-27 | 1998-05-15 | Seiko Epson Corp | 剥離方法 |
JPH10125931A (ja) * | 1996-08-27 | 1998-05-15 | Seiko Epson Corp | 薄膜素子の転写方法,薄膜素子,薄膜集積回路装置,アクティブマトリクス基板および液晶表示装置 |
JPH10125929A (ja) * | 1996-08-27 | 1998-05-15 | Seiko Epson Corp | 剥離方法 |
JP2003142666A (ja) * | 2001-07-24 | 2003-05-16 | Seiko Epson Corp | 素子の転写方法、素子の製造方法、集積回路、回路基板、電気光学装置、icカード、及び電子機器 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008129196A (ja) * | 2006-11-17 | 2008-06-05 | Toppan Forms Co Ltd | 表示装置用電極基板の製造方法 |
JP2008129195A (ja) * | 2006-11-17 | 2008-06-05 | Toppan Forms Co Ltd | 表示装置用電極基板の製造方法 |
US7786576B2 (en) | 2007-02-06 | 2010-08-31 | Seiko Epson Corporation | Semiconductor device, method of manufacturing semiconductor device, and electronic apparatus |
WO2012173086A1 (ja) * | 2011-06-15 | 2012-12-20 | シャープ株式会社 | 半導体装置およびその製造方法 |
WO2013035298A1 (ja) * | 2011-09-08 | 2013-03-14 | シャープ株式会社 | 表示装置及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP4940402B2 (ja) | 2012-05-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR101028393B1 (ko) | 반도체 장치 | |
TWI336921B (en) | Method for manufacturing semiconductor device | |
CN1945856B (zh) | 半导体器件及其制造方法 | |
CN100565307C (zh) | 半导体器件及其制备方法,液晶电视系统,和el电视系统 | |
JP3897173B2 (ja) | 有機el表示装置及びその製造方法 | |
US7105422B2 (en) | Thin film circuit device, manufacturing method thereof, electro-optical apparatus, and electronic system | |
US6864133B2 (en) | Device, method of manufacturing device, electro-optic device, and electronic equipment | |
TW200528825A (en) | Display device, manufacturing method thereof, and television receiver | |
TW200524168A (en) | Method for manufacturing semiconductor device | |
US7253087B2 (en) | Method of producing thin-film device, electro-optical device, and electronic apparatus | |
US7393725B2 (en) | Method of manufacturing thin film device electro-optic device, and electronic instrument | |
JP4682645B2 (ja) | 半導体装置の製造方法及び電子機器 | |
JP4781082B2 (ja) | 半導体装置の作製方法 | |
JP4940402B2 (ja) | 薄膜装置の製造方法 | |
JP2004349539A (ja) | 積層体の剥離方法、積層体の製造方法、電気光学装置及び電子機器 | |
JP2005079395A (ja) | 積層体及びその製造方法、電気光学装置、電子機器 | |
JP4945726B2 (ja) | 薄膜装置の製造方法 | |
JP2005167212A (ja) | 半導体装置の作製方法、配線基板の作製方法 | |
JP5581599B2 (ja) | 薄膜装置、およびその製造方法、並びに電気光学装置 | |
JP2005093335A (ja) | 電気光学装置及びその製造方法並びに表示装置 | |
US20210184006A1 (en) | Thin film transistor, array substrate, display apparatus, and method of fabricating thin film transistor | |
JP2005301124A (ja) | 電気光学装置および電子機器 | |
JP2006210527A (ja) | 電気光学装置の製造方法及び電子機器 | |
US7923293B2 (en) | Method for manufacturing a semiconductor device wherein the electrical connection between two components is provided by capillary phenomenon of a liquid conductor material in a cavity therebetween | |
JP2009224360A (ja) | 薄膜トランジスタの製造方法および表示装置の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070827 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20110516 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110518 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110713 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120105 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20120112 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120203 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120118 |
|
A072 | Dismissal of procedure [no reply to invitation to correct request for examination] |
Free format text: JAPANESE INTERMEDIATE CODE: A073 Effective date: 20120306 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4940402 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150309 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150309 Year of fee payment: 3 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150309 Year of fee payment: 3 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150309 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150309 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150309 Year of fee payment: 3 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
S631 | Written request for registration of reclamation of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313631 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150309 Year of fee payment: 3 |
|
R371 | Transfer withdrawn |
Free format text: JAPANESE INTERMEDIATE CODE: R371 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
S631 | Written request for registration of reclamation of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313631 |
|
S633 | Written request for registration of reclamation of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313633 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150309 Year of fee payment: 3 |
|
R371 | Transfer withdrawn |
Free format text: JAPANESE INTERMEDIATE CODE: R371 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150309 Year of fee payment: 3 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150309 Year of fee payment: 3 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |