JP2006114875A5 - - Google Patents
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- Publication number
- JP2006114875A5 JP2006114875A5 JP2005164090A JP2005164090A JP2006114875A5 JP 2006114875 A5 JP2006114875 A5 JP 2006114875A5 JP 2005164090 A JP2005164090 A JP 2005164090A JP 2005164090 A JP2005164090 A JP 2005164090A JP 2006114875 A5 JP2006114875 A5 JP 2006114875A5
- Authority
- JP
- Japan
- Prior art keywords
- region
- electrode
- insulating film
- memory device
- insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims 14
- 238000004519 manufacturing process Methods 0.000 claims 10
- 239000004065 semiconductor Substances 0.000 claims 10
- 239000012535 impurity Substances 0.000 claims 8
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005164090A JP4671765B2 (ja) | 2004-06-03 | 2005-06-03 | 記憶装置及びその作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004166274 | 2004-06-03 | ||
| JP2004270418 | 2004-09-16 | ||
| JP2005164090A JP4671765B2 (ja) | 2004-06-03 | 2005-06-03 | 記憶装置及びその作製方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010257134A Division JP5111593B2 (ja) | 2004-06-03 | 2010-11-17 | 記憶装置及びデータ書き込み方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006114875A JP2006114875A (ja) | 2006-04-27 |
| JP2006114875A5 true JP2006114875A5 (cg-RX-API-DMAC7.html) | 2008-07-17 |
| JP4671765B2 JP4671765B2 (ja) | 2011-04-20 |
Family
ID=36383097
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005164090A Expired - Fee Related JP4671765B2 (ja) | 2004-06-03 | 2005-06-03 | 記憶装置及びその作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4671765B2 (cg-RX-API-DMAC7.html) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4884784B2 (ja) * | 2005-01-28 | 2012-02-29 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法及び半導体装置 |
| CN101523611B (zh) * | 2006-10-04 | 2012-07-04 | 株式会社半导体能源研究所 | 半导体器件及其制造方法 |
| US7994607B2 (en) | 2007-02-02 | 2011-08-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
| JP5525694B2 (ja) | 2007-03-14 | 2014-06-18 | 株式会社半導体エネルギー研究所 | 半導体装置及び半導体装置の作製方法 |
| JP5198785B2 (ja) | 2007-03-30 | 2013-05-15 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| KR100873705B1 (ko) | 2007-06-22 | 2008-12-12 | 삼성모바일디스플레이주식회사 | 유기전계발광표시장치 및 그의 제조방법 |
| JP4535136B2 (ja) * | 2008-01-17 | 2010-09-01 | ソニー株式会社 | 半導体集積回路、および、スイッチの配置配線方法 |
| KR101836067B1 (ko) * | 2009-12-21 | 2018-03-08 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 박막 트랜지스터와 그 제작 방법 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9217743D0 (en) * | 1992-08-19 | 1992-09-30 | Philips Electronics Uk Ltd | A semiconductor memory device |
| GB9416899D0 (en) * | 1994-08-20 | 1994-10-12 | Philips Electronics Uk Ltd | Manufacture of electronic devices comprising thin-film circuitry |
| JPH1140758A (ja) * | 1997-07-23 | 1999-02-12 | Fujitsu Ltd | 記憶装置及びその製造方法、並びに情報書き込み方法及び情報読み出し方法 |
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2005
- 2005-06-03 JP JP2005164090A patent/JP4671765B2/ja not_active Expired - Fee Related