JP2006110980A - Scribing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a scribing apparatus which forms a scribe line excellent in straightness on a curved surface of a work member accurately. <P>SOLUTION: The scribing apparatus comprises: a main plate on which a cutter section 20, an oscillation excitation section 10, a height adjustment means 40 and a prepressing means 50 are sequentially disposed and fixed with aligning the center axes thereof in a straight line; and a vertical movement section 70 connected with the main plate 60 for driving the main plate 60 vertically. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a scribing apparatus for forming a scribe line on a working member made of a brittle material such as glass or semiconductor.

  In general, when a material such as plate glass is to be broken, a scribe line is formed in advance on the surface of the working member, and the material is broken along the scribe line. That is, when pressure is applied to the surface of the working member while vibrating a cutter made of a material having excellent hardness such as diamond, cracks are generated in the thickness direction on the surface of the working member. When the cutter is moved along the surface of the working member in this state, a continuous scribe line is formed on the surface of the working member. After forming the scribe line on the working member in this way, when the force is applied along the scribe line, the working member is cut.

  As described above, in the scribing apparatus that forms the scribe line on the work member, the scribe line formed on the surface of the work member by the scribing apparatus has excellent straightness in order to accurately perform the work member breaking operation. Should. For this purpose, a scribing device capable of precisely adjusting the height of the cutter by the surface bending of the working member is required.

  It is an object of the present invention to provide a scribing device that can form a scribe line excellent in straightness precisely corresponding to the surface bending of a working member.

  In order to achieve the above object, the present invention provides a scribing device for forming a scribe line on a work member, a vibration generating unit that generates vibration; and a scribe on the work member that receives vibration generated from the vibration generating unit. A cutter part for forming a line; provided interposed between the vibration generating part and the cutter part, and a shaft for transmitting the vibration of the vibration generating part to the cutter part; provided on the upper side of the vibration generating part, A height adjusting means for adjusting the height of the cutter part by bending of the working member; a preload providing means provided above the height adjusting means for providing a preload to the cutter part; and the cutter part, vibration A main body which is provided in combination with the generating unit and the preload providing means, and is fixed so that the centers of the cutter unit, the vibration generating unit, the height adjusting unit and the preload providing unit are positioned in a straight line in order. And a vertical movement unit that is connected to the main plate and drives the main plate in the vertical direction. The vibration generating unit, the cutter unit, the shaft, the height adjusting unit, and the preload providing unit. Provides a scribing device arranged to have the same center line.

  The scribing apparatus according to the present invention has an effect that a scribe line can be formed in a constant manner by reacting in real time with the surface bending of the working member.

  Further, by preventing the occurrence of flaking phenomenon, there is an effect that the life of the apparatus is prolonged.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  As shown in FIG. 1, the scribing apparatus 1 according to the present embodiment includes a vibration generating unit 10, a cutter unit 20, a shaft 30, a height adjusting unit 40, a preload providing unit 50, a main plate 60, a vertical moving unit 70, and a horizontal movement. Part (not shown).

  The vibration generator 10 is a component that generates a vibration force for vibrating the cutter, and includes an actuator 12, an actuator bracket 14, an upper actuator plate 16, and a lower actuator plate 18, as shown in FIG.

  Here, the actuator 12 is a component that vibrates itself and provides a vibration force when power is applied, and a parallel pre-stressed actuator is provided as the actuator of the present embodiment. It is done.

  The actuator bracket 14 is a component that couples the actuator 12, the shaft 30, and the main plate 60 as shown in FIG. 5. At this time, the actuator bracket 14 is coupled so that the shaft 30 moves linearly by the vibration of the actuator 14. That is, the shaft 30 is inserted into a circular through hole formed in the actuator bracket 14 when coupled to the actuator bracket 14, and thus moves linearly along the through hole. The upper end of the actuator 12 is fixed to the actuator bracket 14.

  The upper actuator plate 16 is a component that is coupled to the upper end of the actuator 12 and the actuator bracket 14 so that the actuator 12 can be attached and detached, as shown in FIGS. The lower actuator plate 18 is a component that is coupled to the lower end of the actuator 12 and the shaft 30 so that the actuator 12 can be attached and detached.

  Further, it is preferable that a bushing 17 is further provided at a contact portion between the actuator bracket 14 and the shaft 30 as shown in FIGS. The bushing 17 not only guides the linear motion of the shaft 30 but also prevents the straightness of the cutter from being deteriorated due to shaft damage due to friction generated from the linear reciprocating motion of the shaft 30. Therefore, the bushing 17 is preferably formed of a material having a strong resistance to friction. As the bushing 17 of this embodiment, a linear metal bushing is provided.

  In addition, as shown in FIG. 5, the vibration generating unit 10 is preferably further provided with a bushing cover 19 on one side of the lower end surface of the bushing 17 in order to prevent the bushing from being detached during the linear motion process. . The bushing cover 19 has one side coupled and fixed to the lower end surface of the actuator bracket 17 and the other side being in contact with one side of the lower end surface of the bushing 17 to prevent the bushing from being detached.

  In addition, as shown in FIG. 6, the vibration generator 10 is preferably further provided with an actuator cooling bracket 15 in order to prevent the temperature of the actuator 12 from rising during the vibration process of the actuator 12. Here, it is preferable that the actuator cooling bracket 15 is disposed only in a portion where the electrode 13 provided for applying power to the actuator 12 is provided. The actuator cooling bracket 15 is preferably further provided with pressure adjusting means (not shown) for adjusting the pressure of the refrigerant supplied to the actuator cooling bracket 15.

  The cutter unit 20 includes a cutter 22 and a cutter holder 24 as shown in FIG.

  Here, the cutter 22 is a component that directly contacts the surface of the working member to form a crack in the working member in order to form a scribe line. Therefore, the cutter 22 should be formed of a material having a hardness higher than that of the working member, and is generally formed of diamond.

  As shown in FIG. 3, the cutter holder 24 is a component that is fixedly coupled to the cutter 22 and that couples the cutter 22 and the shaft 30. The cutter holder 24 is formed with a coupling groove 24a into which the end of the cylindrical shaft 30 is inserted and coupled, and a groove in which the cutter 22 is fixedly coupled is formed at the outer lower end of the cutter holder 24. Is done. As shown in FIG. 3, the cutter 22 is slightly separated from the center line of the cutter holder 24 and is eccentrically arranged. Therefore, when the cutter holder 24 is rotatably provided and moves forward, the cutter 22 is rearward of the center line of the cutter holder 24 and is a virtual line having a predetermined distance from the center line of the cutter holder 24. Will move along. Therefore, the scribe line formed by the cutter 22 has an advantage of having excellent straightness. In addition, it is preferable that the cutter 22 coupled to the cutter holder 24 is further provided with a cutter cover (not shown) that is fixed to prevent the cutter 22 from being detached from the cutter holder 24.

  At this time, it is preferable that a ball plunger 26 is further provided between the shaft 30 and the cutter holder 24. As shown in FIG. 3, the ball plunger 26 is provided by being inserted into a plunger groove 31 formed at the lower end of the shaft 30. Further, as shown in FIG. 4, the ball plunger 26 is configured such that a ball 26a is disposed at a lower portion thereof, a spring 26b is disposed at an upper portion thereof, and a plate 26c is disposed between the balls 26a and the spring 26b. Is done. Further, the ball plunger 26 moves the cutter 22 in a vertical direction within a predetermined interval when forming the scribe line while moving horizontally with the cutter 22 being in contact with the work member. As a result, the straightness of the scribe line formed is improved.

  On the other hand, the cutter holder 24 is rotatably provided in a coupled state with the shaft 30. This is to give a degree of freedom so that the cutter 22 always moves along the same path as the center line of the cutter holder 24 when moving horizontally due to the eccentric structure of the cutter 22. At this time, when the cutter holder 24 is rotated 360 °, it is difficult to control the movement of the cutter. Therefore, the cutter holder 24 needs to be rotated only within a predetermined angle. Therefore, in this embodiment, a predetermined portion of the end side surface of the shaft 30 is chamfered to form a chamfered groove 32, and a through hole 24b is formed in a portion of the side wall of the cutter holder 24 corresponding to the chamfered groove 32. Form in the direction. A wedge 28 is inserted and fixed in the through hole 24b. The end of the wedge 28 is disposed in contact with the chamfer groove 32. Further, as shown in FIG. 3, the end of the wedge 28 is processed with a curved surface, so that the cutter holder 24 rotates within a predetermined angle.

  Further, as shown in FIG. 1, the shaft 30 is a component that is interposed between the vibration generating unit 10 and the cutter unit 20 and transmits the vibration of the vibration generating unit 10 to the cutter unit 20. is there.

  Further, as shown in FIG. 1, the height adjusting means 40 is a component that is provided on the upper side of the vibration generating unit 10 and adjusts the height of the cutter unit 20 by bending the working member. Generally, the surface of the working member to be broken by the scribing device is processed to be flat, but the surface of the actual working member has many fine bends, and even if it is locally flat, In some cases, bending may be formed as a whole. Therefore, it is necessary to improve the straightness of the scribe line formed on the work member by adjusting the height of the cutter portion 20 along the surface bending of the work member. Therefore, in the present embodiment, there is provided a height adjusting unit that senses such bending of the working member and reflects this in real time to adjust the height of the cutter unit 20. As the height adjusting means 40 of the present embodiment, when the applied load is equal to or less than a predetermined value input in advance, the length is expanded, and when the applied load is equal to or greater than the predetermined value input in advance. Preferably, a load cell whose length is contracted is provided.

  The preload providing means 50 is a component that is provided below the height adjusting means 40 and serves to provide preload to the cutter unit 20. Here, the preload refers to a force that compresses the cutter unit 20 in the axial direction. Therefore, when the cutter 22 contacts the working member to form a scribe line, the preload providing means 50 compresses the cutter 22 in the axial direction and applies an impact in the thickness direction to the working member.

  As the preload providing means 50 of the present embodiment, an air cylinder that generates pressure by air pressure is provided. The air cylinder is preferably a micro speed cylinder.

  Moreover, it is preferable that the scribing apparatus 1 according to the present embodiment further includes a pressure adjusting means 80. As shown in FIG. 1, the pressure adjusting means 80 is provided between the height adjusting means 40 and the preload providing means 50. The pressure adjusting unit 80 serves to adjust the pressure so that the pressure provided by the preload providing unit 50 is equal to or less than a predetermined size set in advance. That is, when an excessive pressure is applied by the preload providing means 50, the working member may be damaged. Therefore, the pressure adjusting means 80 does not apply a pressure exceeding a predetermined level determined by the working member. Adjust the pressure so that. Here, an electro-pneumatic regulator is provided as the pressure adjusting means 80 of the present embodiment.

  Further, as shown in FIG. 1, the main plate 60 is provided in combination with the cutter unit 20, the vibration generating unit 10, and the preload providing unit 50, and the cutter unit 20, the vibration generating unit 10, and height adjustment. The center line of the means 40 and the preload providing means 50 serves to fix the center lines so as to be sequentially positioned on a straight line. Further, the cutter unit 20, the vibration generating unit 10, the height adjusting unit 40, and the preload providing unit 50 are moved in the vertical direction and the horizontal direction while being fixed to the main plate 60.

  In this embodiment, as shown in FIG. 1, it is preferable that a spacing member 62 is further provided between the main plate 60 and the preload providing means 50. The spacing member 62 serves to fix the center axis of the preload providing means 50 and the center axis of the cutter portion 20 so as to prevent positional fluctuation in the driving process of the preload providing means 50. .

  The vertical movement unit 70 is a component that is coupled to the main plate 60 and drives the main plate 60 in the vertical direction. As shown in FIGS. 1 and 2, the up-and-down moving unit 70 is fixed to a side base 72 and includes a motor 74, a ball screw 76, and a moving block 78. Here, the motor 74 is a component that provides power necessary for the vertical movement of the main plate 60, and the motor 74 of the present embodiment precisely controls the vertical movement of the main plate 60. Servo motors are provided.

  The ball screw 76 is a member that is connected to the motor 74 and is rotated, and a screw thread is formed on the outer peripheral surface thereof. In addition, the ball screw 76 is coupled to a moving block 78 fixed to the main plate 60, so that the moving block 78 is formed with a female screw hole large enough to allow the ball screw 76 to pass through. On the inner surface of the female screw hole, a female screw coinciding with the thread of the ball screw 76 is formed. Therefore, when the ball screw 76 is rotated by the motor 74, the moving block 78 moves in the vertical direction.

  In addition, the vertical movement unit 70 is preferably further provided with a linear block 75 and a linear guide 77 in order to guide the linear movement of the main plate 60. The linear block 75 is connected to the main plate 60 and guides the linear movement of the main plate 60. The linear guide 77 is coupled to the linear block 75 and guides the movement direction of the linear block 75.

  Moreover, it is preferable that the scribe device 1 of the present embodiment further includes a foreign substance removing unit 90 as shown in FIG. The foreign substance removing unit 90 is a component that removes foreign substances such as glass powder generated in the process of forming a scribe line on the work member, and includes a blower unit 92 and a suction unit 94.

  Here, as shown in FIG. 7, the blower unit 92 is disposed on one side of the cutter unit 20 and moves together with the cutter unit 20, and in the contact point direction between the cutter unit 20 and the working member S. By injecting gas, it plays a role of blowing away foreign substances generated in the work process in the opposite direction. At this time, it is preferable that the blower portion 92 is further provided with a nozzle 92a for injecting gas and an injection angle adjusting means 92b for adjusting the angle of the nozzle 92a. As shown in FIG. 7, the injection angle adjusting means 92b is configured to rotate in a coupled state with the nozzle 92a, so that the gas injection angle of the nozzle 92a can be adjusted.

  Further, as shown in FIG. 7, the suction portion 94 is disposed on the opposite side of the blower portion 92 with the cutter portion 20 as a center, moves together with the cutter portion 20, and is blown off by the blower portion 62. A component that absorbs and removes material.

  In the present embodiment, it is preferable that a horizontal movement unit that moves the main plate 60 and the vertical movement unit 70 in the horizontal direction is further provided.

  In addition, the scribing apparatus 1 of the present embodiment is further provided with a control unit (not shown) that controls the vibration generating unit 10 and also controls vibrations generated from the vibration generating unit 10.

  As shown in FIG. 8, the control unit includes a signal generation unit, a control unit, an amplification unit, and a display unit.

  Here, the signal generation unit is a component that first generates a signal for controlling the vibration generation unit 10, and the vibration generation unit 10 includes a triangular wave, a sine group, and a pulse group as illustrated in FIG. 9. Is generated. In this embodiment, after generating a sine signal having a voltage of 1 V and a predetermined frequency, the signal is transmitted to the control unit.

  The control unit is a component that appropriately changes the frequency of the signal generated from the vibration generation unit 10 and transmits the value to the display unit, and is an ADC (Analog to Digital) that switches an analog signal to a digital signal. Converter), an MCU (Micro Control Unit) that controls the frequency of the signal, and a DAC (Digital to Analog Converter) that switches a digital signal to an analog signal.

  As shown in FIG. 10, the amplifying unit is connected to a preliminary amplifying unit for preamplifying the signal, a main amplifying unit for amplifying the signal amplified by the preliminary amplifying unit, and the main amplifying unit. And a booster that stabilizes the main amplifying unit. At this time, the preliminary amplification unit preliminarily amplifies the signal transmitted from the control unit, thereby replacing the signal with a signal suitable for the main amplification unit. Further, in the present amplifying unit, the voltage is amplified to a voltage required by the vibration generating unit 10, but in this embodiment, the voltage is amplified to have a voltage of 20V. In the present embodiment, it is preferable that a shock absorber is further provided between the main amplifying unit and the vibration generating unit 10. That is, since the main amplifying unit is directly connected to the vibration generating unit 10, the influence generated from the vibration generating unit 10 is directly transmitted to the main amplifying unit, and the main amplifying unit is damaged. There is. Therefore, the shock absorber serves to protect the main amplifying unit by preventing and removing the influence generated from the vibration generating unit 10.

  The display unit is a component that displays a frequency value and a voltage value transmitted from the control unit and the amplification unit. Therefore, the operating state of the control unit according to the present embodiment can be grasped at a glance by this display unit.

  The power supply unit is a component that supplies power to the signal generation unit, the control unit, the amplification unit, and the display unit.

  Hereinafter, a method for using the scribing apparatus 1 according to the present embodiment will be described.

  First, a preload suitable for the work member to be processed is set and inputted to the pressure adjusting means 80, and the pressure adjusting means 80 prevents any further pressure from being applied to the work member. Next, the cutter 22 and the surface of the work member are brought into contact with each other by driving the vertical movement unit 70. Next, by applying a preload to the working member by driving the preload providing means 50, the control unit transmits a signal to the actuator 12 to generate vibration. Next, a crack is formed on the surface of the working member by the vibration of the cutter 22, and the scribing device 1 is moved in the horizontal direction by driving the horizontal moving unit. As a result, a scribe line is formed along the moving direction of the scribe device 1.

It is the side view which showed the structure of the scribing apparatus by one Embodiment of this invention. It is the perspective view which showed the structure of the up-and-down moving part by one Embodiment of this invention. It is sectional drawing which showed the structure of the cutter part by one Embodiment of this invention. It is sectional drawing which showed the structure of the ball plunger by one Embodiment of this invention. It is the side view which showed the structure of the vibration generation part by one Embodiment of this invention. It is the front view which showed the structure of the vibration generation part by one Embodiment of this invention. It is the side view which showed the structure of the foreign substance removal means by one Embodiment of this invention. It is the block diagram which showed the structure of the control part by one Embodiment of this invention. It is the block diagram which showed the structure of the signal generation part by one Embodiment of this invention. It is the block diagram which showed the structure of the amplification part by one Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Scribing device 10 Vibration generating part 12 Actuator 14 Actuator bracket 20 Cutter part 22 Cutter 24 Cutter holder 26 Ball plunger 30 Shaft 32 Chamfering groove 40 Height adjusting means 50 Preload providing means 60 Main plate 70 Vertical moving part 72 Side base 80 Pressure adjustment Means 90 Foreign substance removing means 92 Blower part 94 Suction part

Claims (32)

A scribing device for forming a scribe line on a work member,
A vibration generating section that generates vibration;
A cutter unit that receives a vibration generated from the vibration generating unit and forms a scribe line on the work member;
A shaft interposed between the vibration generating unit and the cutter unit and transmitting the vibration of the vibration generating unit to the cutter unit;
A height adjusting means provided on an upper side of the vibration generating unit and configured to adjust a height of the cutter unit by bending the working member;
A preload providing means provided on the upper side of the height adjusting means for providing a preload to the cutter portion;
A main plate that is provided in combination with the cutter unit, the vibration generating unit, and the preload providing unit, and is fixed so that the centers of the cutter unit, the vibration generating unit, the height adjusting unit, and the preload providing unit are sequentially positioned on a straight line. When;
A vertical movement unit that is coupled to the main plate and drives the main plate in the vertical direction;
The vibration generating unit, the cutter unit, the shaft, the height adjusting unit, and the preload providing unit are scribe devices arranged to have the same center line. The up-and-down moving unit is
A motor that provides power used to move the main plate up and down;
A ball screw provided coupled to the motor and having a thread formed on the outer periphery;
The scribing apparatus according to claim 1, further comprising: a moving block that is connected to the main plate and has a female screw hole that is connected to the ball screw. In the vertical movement part,
A linear block provided in combination with the main plate for inducing a linear motion of the main plate;
The scribing apparatus according to claim 2, further comprising: a linear guide that is coupled to the linear block and guides a moving direction of the linear block. The motor is
The scribing device according to claim 2, wherein the scribing device is a servo motor. The cutter part is
A cutter that is in contact with the working member to form a scribe line on the working member;
2. A cutter holder in which a coupling groove into which a cylindrical end of the shaft is rotatably inserted is coupled, and a cutter holder is coupled to the lower end of the coupling groove. Scribing device. The cutter is
The scribing device according to claim 5, wherein the scribing device is decentered by being separated from a center line of the cutter holder.   The scribing device according to claim 5, wherein a ball plunger for correcting straightness of the cutter is further provided at a contact portion between the cutter holder and the shaft. In the cutter holder,
The scribing apparatus according to claim 5, further comprising a cutter cover for fixing the cutter so that the cutter is not detached from the cutter holder. A through hole is formed in a predetermined portion of the side wall of the cutter holder, and a chamfer groove is formed in a portion corresponding to the through hole in the terminal side surface of the shaft,
The scribing apparatus according to claim 5, wherein a wedge for preventing the cutter holder from rotating more than a predetermined angle is inserted into the through hole. The vibration generator is
An actuator providing vibration force;
An actuator bracket that couples the actuator and the shaft so that the shaft moves linearly by vibration of the actuator when the shaft and the main plate are coupled;
An upper actuator plate coupled to the upper end of the actuator and the actuator bracket so that the actuator is detachable;
The scribing apparatus according to claim 1, further comprising: a lower actuator plate coupled to a lower end of the actuator and the shaft so that the actuator is attached and detached. The actuator is
The scribing device according to claim 10, wherein the scribing device is a parallel pre-stressed actuator.   The scribing apparatus according to claim 10, wherein a bushing for guiding linear movement of the shaft is further provided at a contact portion between the actuator bracket and the shaft. The bushing is
The scribing device according to claim 12, wherein the scribing device is a linear metal bushing.   The scribing apparatus according to claim 12, further comprising a bushing cover for preventing the bushing from being detached at a lower end of the actuator bracket. On the side of the actuator,
The scribing apparatus according to claim 10, further comprising an actuator cooling bracket that cools the actuator in a driving process of the actuator. The actuator cooling bracket is
16. The scribing device according to claim 15, wherein the scribing device is disposed only on an electrode installation portion provided to supply power to the actuator among the side portions of the actuator. The actuator cooling bracket includes
16. The scribing apparatus according to claim 15, further comprising pressure adjusting means for adjusting the pressure of the refrigerant supplied to the actuator cooling bracket. The height adjusting means is
The scriber according to claim 1, wherein the load cell is expanded when the applied load is equal to or less than a predetermined value input in advance, and is contracted when the applied load is equal to or greater than a predetermined value input in advance. apparatus. The preload providing means includes
The scribing device according to claim 1, wherein the scribing device is an air cylinder that provides pressure by air pressure. The air cylinder is
The scribing device according to claim 19, wherein the scribing device is a micro speed cylinder.   Pressure adjusting means is further provided to be interposed between the height adjusting means and the preload providing means, and adjust the pressure provided from the preload providing means so as to be equal to or less than a predetermined size. The scribing apparatus according to claim 1, wherein the scribing apparatus is provided. The pressure adjusting means is
The scribing device according to claim 21, wherein the scribing device is an electropneumatic regulator. Between the main plate and the preload providing means,
The scribing device according to claim 1, further comprising a spacing member for fixing the preload providing means to the main plate so that a center axis of the cutter portion and a center axis of the preload providing means coincide with each other. .   2. The scribing apparatus according to claim 1, further comprising foreign substance removing means for removing foreign substances generated in the process of forming a scribe line on the working member. The foreign substance removing means includes
A blower unit that is disposed on one side of the cutter unit, moves with the cutter unit, and blows off the generated foreign substance in the opposite direction by injecting gas to a contact point between the cutter unit and the working member;
An inhalation part that is arranged on the opposite side of the blower part with the cutter part as a center, moves together with the cutter part, and sucks and removes foreign substances blown away by the blower part. 25. A scribing device according to claim 24. In the blower section,
The scribing apparatus according to claim 25, further comprising: a nozzle for injecting gas; and an injection angle adjusting means for adjusting an angle of the nozzle.   The scribing apparatus according to claim 1, further comprising a horizontal movement unit that moves the main plate and the vertical movement unit in a horizontal direction.   The scribing apparatus according to claim 1, further comprising a control unit that controls the vibration generation unit and controls vibrations generated from the vibration generation unit. The controller is
A signal generator for generating a signal for controlling the vibration generator;
A control unit for changing a frequency of a signal generated from the vibration generating unit;
An amplifying unit for amplifying the voltage of the signal transmitted from the control unit;
A display unit for displaying a frequency value and a voltage value transmitted from the control unit and the amplification unit;
29. The scribing apparatus according to claim 28, further comprising: a power supply unit that supplies power to the signal generation unit, the control unit, the amplification unit, and the display unit. The control unit
ADC (Analog to Digital Converter) that switches analog signals to digital signals;
An MCU (Micro Control Unit) for controlling the frequency of the signal;
30. The scribing apparatus according to claim 29, further comprising: a digital to analog converter (DAC) that switches a digital signal to an analog signal. The amplification unit is
A preamplifier for preamplifying the signal;
A main amplification section for amplifying the signal amplified by the preliminary amplification section;
30. The scribing apparatus according to claim 29, further comprising: a booster that is connected to the main amplification unit and stabilizes the main amplification unit. In the amplification unit,
32. A buffer provided between the main amplifying unit and the vibration generating unit is further provided to remove an influence transmitted from the vibration generating unit to the main amplifying unit. The scribing device described.

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