JP2000246524A - Processing device for very fine shape - Google Patents

Abstract

PROBLEM TO BE SOLVED: To apply high frequency vibration to a tool such as a drill and the like, facilitate the maintenance of a device, appropriately adjust both the amplitude of vibration and processing force to be applied to the tool, and prevent the tool from being damaged during processing. SOLUTION: In this device, a processing head 1 is connected with one end of an arm 43 movably supported around a pivot 46 so as to be freely rotated, and a ball screw nut 42 is connected with the other end, and the processing head 1 is advanced/retreated by rotating a screw shaft 41 with which the ball screw nut 42 is threadedly engaged. Meanwhile, a vibrator is interposed between the arm 43 and the ball screw nut 42, and high frequency vibration generated by the vibrator is so devised as to be transmitted to the processing head 1 through the arm 43.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fine shape processing apparatus for processing a fine shape on a brittle material such as fine ceramics, a super hard material, or an adhesive material while applying a high frequency vibration to a tool for processing a work. About.

[0002]

2. Description of the Related Art When processing minute recesses or fine holes in a work made of a brittle material, a super hard material, an adhesive material, or the like, it depends only on high-speed rotation or high-speed vertical movement of a tool such as a processing drill or a punching pin. When such processing is performed, these finely finished tools are easily broken or worn. In addition, since the processing shape is fine, the bite of the tool against the work and the discharge of cutting powder are also likely to be deteriorated,
The processing speed and processing accuracy of the work are also likely to be reduced. For this reason,
In order to solve these problems and improve the processing speed and processing accuracy when processing a fine shape on a workpiece, a processing method in which high frequency vibration is applied to a tool or a workpiece has been conventionally proposed.

[0003] JP-A-8-155799, JP-A-8-155799
Japanese Patent Application Laid-Open No. 0-71513 and Japanese Patent Application Laid-Open No. 10-249684 disclose a processing apparatus for applying high-frequency vibration to a tool to drill a fine hole in a work or for grinding an inner diameter of a previously drilled fine hole. Is disclosed. The processing apparatus described in these publications includes a processing drill that penetrates a workpiece to form a fine hole, a vibrator that applies high-frequency vibration to the processing drill, and a drill for processing at a predetermined rotation speed. A servomotor for rotating the workpiece is provided, and a fine hole can be formed in the workpiece by bringing the workpiece into contact with the processing drill at an appropriate processing pressure. Specifically, a slurry in which abrasive grains are dispersed is supplied to a contact position between a workpiece and a processing drill, and in this state, the vibrator is excited to apply high-frequency vibration to the processing drill, and the servomotor Is driven to give an appropriate rotation to the working drill, the work is crushed by the movement of the abrasive grains accompanying the rotation and vibration of the working drill, and fine holes are formed in the work. In addition, as a result of applying vibration to the processing drill, the supply of slurry to the tip of the drill that has sunk into the work and the discharge of grinding powder from the fine holes during processing are promoted, thereby increasing the processing efficiency of the fine holes in the work. You can do it.

[0004]

However, in this conventional processing apparatus, since the vibrator is built in the processing head, the bearing that supports the rotation of the processing drill is easily damaged by the vibration. Since the processing head must be disassembled for repair and replacement of the device, there has been a problem that a great deal of labor and time are required for the maintenance of the apparatus. In addition, the structure of the processing head becomes complicated, and the weight of the processing head itself increases, so that there is also a problem that a load on a feed drive system of the processing head increases.

On the other hand, there has been proposed a processing apparatus in which a vibrator is incorporated in a processing table to which such a work is attached in order to apply high-frequency vibration to the work instead of a tool (Japanese Patent Laid-Open No. Hei 5-116014). However, depending on the shape, weight, etc. of the work, machining tables of various sizes may be required, and incorporating a vibrator into the machining table has the disadvantage of increasing the cost of introducing the apparatus. Further, in order to adjust the amplitude of the processing table and the force for vibrating the processing table, it is necessary to replace the vibrator itself incorporated in the processing table, but it is necessary to disassemble the robust processing table each time. There is also a problem that the adjustment work takes time.

Further, in consideration of supply of slurry to the tip of the drill and discharge of grinding powder from fine holes during processing,
It can be said that it is desirable that the amplitude of the vibration applied to the drill or the table is large to some extent, but when trying to obtain a large amplitude only with the vibrator built in the processing head or the table, the vibrator becomes large, Along with this, there is a problem that the processing head and the table become large. Further, when processing a work while applying vibration to a drill or a table, the tip of the drill hits the work surface by the expansion and contraction force generated by the vibrator (hereinafter referred to as "processing force"). However, when the size of the vibrator is increased to obtain a large amplitude, the processing force generated by the vibrator also increases, and the drill with a small diameter is hit against the workpiece with excessive force. In some cases, it was lost.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object of the present invention is to provide a drilling machine which can use a general-purpose processing head which does not include a vibrator as a processing head for processing a workpiece. It is an object of the present invention to provide a fine shape processing apparatus which can apply a high frequency vibration to a tool such as the above and can easily perform maintenance of the apparatus.

Another object of the present invention is to make it possible to appropriately adjust both the amplitude of the vibration applied to the tool and the machining force, and to prevent the tool from being damaged during machining as much as possible. It is to provide a possible fine shape processing device.

[0009]

In order to achieve the above object, a fine shape processing apparatus according to the present invention comprises a processing head on which a tool for processing a work is mounted, and a vertical movement of the processing head with respect to an apparatus column. A head moving means for freely supporting, a screw shaft arranged in parallel with the elevating direction of the processing head with respect to the device column, a nut member screwed to the screw shaft, and a swinging motion about the support shaft While freely supported, one end is connected to the head moving means, the other end is connected to the nut member, and the arm is rotated. A head feed motor that moves forward and backward, and a vibrator that is interposed between the arm and the nut member and connects these to each other.

According to such technical means, of the arm and the nut member to which the vibrator is connected, the latter nut member is screwed and positioned on the screw shaft, so that the vibrator is operated. To generate high frequency vibration,
The vibration is transmitted to the swingably supported arm, and the arm continuously swings about the support shaft. As a result, the head moving means connected to the end of the arm opposite to the nut member vibrates up and down repeatedly with the swinging of the arm, and is vertically moved with respect to the processing head supported by the head moving means. Can be applied.

At this time, the vibration applied to the processing head depends on the frequency and amplitude of the vibration generated by the vibrator, and the vibration of the vibrator is transmitted to the processing head as the arm swings. Therefore, the amplitude of the vibrator is amplified and transmitted to the head moving means according to the length of the arm divided into two by the support shaft. In other words, when the length of the arm divided by the support shaft is shorter than the length of the support member on the nut member side than the length of the head moving means side, the amplitude of the vibrator is amplified and the vibration is applied to the machining head. As a result, even if the amplitude of the vibrator itself is small, a larger amplitude can be given to the processing head. Accordingly, it is possible to improve the processing speed while reducing the size of the vibrator and, consequently, the size of the entire processing apparatus.

When the length of the arm divided by the support shaft is shorter than that of the support shaft on the side of the nut member than on the side of the head moving means, the amplitude is amplified. Since the processing force generated by the vibrator is attenuated and transmitted to the processing head, the force with which the tool strikes the work due to vibration is reduced to a state less than the processing force generated by the vibrator, and the work is damaged during processing. Can be prevented as much as possible.

Therefore, from such a viewpoint, the engagement position of the support shaft with respect to the arm is such that the length of the arm on the nut member side is shorter than the length of the arm on the head moving means side from the support shaft. Is preferably set to.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a fine shape processing apparatus according to the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 schematically shows the configuration of a fine shape processing apparatus to which the present invention is applied. In FIG. 1, reference numeral 1 denotes a processing head on which a processing drill 10 is mounted, and reference numeral 2 denotes an apparatus column for supporting the processing head 1 so as to be able to move up and down with respect to a work mount 3. A head feed mechanism 4 that raises and lowers the processing head 1 by a predetermined feed amount, and a vibrator (see FIG. 4) that applies high-frequency (300 Hz or more) vertical vibration to the processing head 1 are built in.

First, the machining head 1 is a general-purpose machining head for making a hole in a work, and a tool fixing chuck 11 at the tip thereof has a drill for machining a fine hole having a diameter of about 0.1 to 3 mm. 10 are held. The machining drill 10 can be rotated at 100 to 100,000 rpm by a motor built in the machining head 1.

The machining head 1 is fixed to a slide head 20 and is supported by the apparatus column 2 via a slide bearing 21. That is, the slide head 20 and the slide bearing 21 constitute the head moving means of the present invention. The slide bearing 21 includes a fixed rail 21a fixed to the apparatus column 2 along the vertical direction of the machining head 1 and a slider 21b freely movable along the fixed rail 21a. The slide head 20 is fixed to 21b. In addition, a linear ball bearing or an air slide bearing can be used as the slide bearing.

On the other hand, a head feed mechanism 4 built in the apparatus column 2 is screwed to a screw shaft 41 of a ball screw device provided in a direction parallel to the vertical direction of the processing head. The ball screw nut 42, an arm 43 oscillated about a support shaft 46, and a head feed motor 45 connected to the screw shaft via a coupling 44, and the arm One end of 43 is connected to the slider 21 b of the slide bearing 21, while the other end is connected to the ball screw nut 42.

Therefore, in the head feed mechanism 4, when the head feed motor 45 is rotated to give a predetermined rotation direction and rotation amount to the screw shaft 41, the screw shaft 41
The ball screw nut 42 screwed up and down on the screw shaft 41 by a predetermined distance moves up and down, and an arm 43 having one end connected to the ball screw nut 42 swings about the support shaft 46 as a fulcrum. Since the slider 21b is connected to the other end of the arm 43, in the processing apparatus of this embodiment, when the head feeding motor 45 is rotated, the slider 21b moves up or down on the apparatus column 2 together with the processing head 1. Then, the processing head 1 is
Will move forward and backward.

At this time, since the feed amount of the processing head 1 to the work mount 3 is proportional to the movement amount of the ball screw nut 42, in this embodiment, the rotation direction and the rotation amount of the head feed motor 44 are adjusted. By doing so, the processing head 1 can be moved forward and backward by an arbitrary feed amount.

FIGS. 2 and 3 show the details of the head feed mechanism 4. FIG. Since the arm 43 swings about the support shaft 46, both ends of the arm 43 move in an arc, while the ball screw screwed to the slider 21 b to which the slide head 20 is fixed and the screw shaft 41. Since the nut 42 moves up and down linearly, the arm 4
If the slider 21b and the ball screw nut are directly connected to both ends of the arm 3, the arm 43 cannot move smoothly. For this reason, in the present embodiment, the arm 43
Slide bearings 70, 71 are interposed between one end of the arm 3 and the slider 21b, and between the other end of the arm 3 and the ball screw nut 42, respectively, and the slide bearings 70, 71 displace both ends of the arm 43 in the horizontal direction. To absorb the arm 43
The smooth movement is ensured.

More specifically, a track rail 70a of the slide bearing 70 is fixed via a bracket 72 to a slider 21b of the slide bearing 21 to which the slide head 20 is fixed, and the track rail 7
One end of an arm 43 is rotatably supported via a bracket 73 on a slider 70b which can move freely along the line 0a. Here, the track rail 70a is disposed so that its longitudinal direction coincides with the direction perpendicular to the vertical direction of the slide head 20.

On the other hand, a fixed rail 74a of a slide bearing 74 is provided in the apparatus column 2 in parallel with the screw shaft 41, and a slider 74b moving on the fixed rail is connected to the slide bearing 71 via a bracket 75. Track rails 71a, 71a are fixed. Here, the track rails 71a, 71a are arranged so that the longitudinal direction thereof coincides with the direction orthogonal to the elevating direction of the ball screw nut 42, and sandwich the ball screw nut 42. The ball screw nut 42 is fixed to the slider 74b via a vibrator described later.
When the ball screw nut 42 moves up and down with the rotation of the screw shaft 41, the slider 74b and the track rails 71a, 71a fixed to the slider 74b move up and down together with the ball screw nut 42.

Further, as shown in FIG. 3, a forked connecting member 76 is fixed to the end of the arm 43 located on the ball screw nut 42 side. 77 is rotatably supported by a pair of brackets 78, 78, and each bracket 78 is fixed to a slider 71b which can move freely along the track rail 71a.

Accordingly, when the arm 43 swings about the support shaft 46 in response to the elevation of the ball screw nut 42, the sliders 70b, 71b of the slide bearings 70, 71 respectively move along the track rail 70a in accordance with the swing of the arm 43. , 71 a, and moves only the vertical movement of both ends of the arm 43 from the ball screw nut 42 to the arm 43 while absorbing the horizontal displacement of both ends of the arm 43.
And from the arm 43 to the slide head 20. As a result, a smooth swinging motion of the arm 43 and a smooth lifting and lowering motion of the slide head 20 and the ball screw nut 42 are ensured.

FIG. 4 shows a vibrator for applying high-frequency vibration to the processing head 1. The vibrator 5 in this embodiment is a piezoelectric actuator that repeatedly expands and contracts according to the magnitude and polarity of the applied voltage.
And a plurality of piezoelectric elements 51 stacked with the same polarity in the case 50, a rod 52 arranged to suppress the piezoelectric elements 51 and protruding outside the case 50, and the rod 52 And a preload panel 53 for applying a predetermined amount of pressure in the direction in which the piezoelectric element 51 is pressed. Since the piezoelectric element 51 expands and contracts in accordance with the polarity and direction of application of the voltage, when an AC voltage is applied to the stacked piezoelectric elements 51, a vibration having a frequency corresponding to the frequency of the AC voltage is obtained from the rod 52. The amplitude of the vibration differs depending on the magnitude of the voltage applied to the piezoelectric element 51.

The case 50 of the vibrator 5 is fixed to a ball screw nut via a mounting plate 54, while the tip of a rod 52 protruding from the case 50 is
The ball screw nut 42 is screwed to a bracket 75 fixed to the slider 4b, and as a result, the ball screw nut 42 is connected to the slider 74b and thus one end of the arm 43 via the vibrator 5.

Therefore, when a voltage is applied to the vibrator 5, the rod 52 vibrates up and down with the corresponding amplitude and frequency, and the vibration is transmitted through the slide bearing 71, the bracket 78 and the connecting member 76 to the arm 43. Transmitted to one end. As a result, the slide head 20 connected to the other end of the arm 43 also vibrates up and down while being guided by the slide bearing 21, and generates a vibration having a frequency and an amplitude corresponding to the vibration generated by the vibrator 5. Can be applied. Here, the frequency of the vibration generated by the vibrator 5 can be appropriately adjusted by changing the voltage applied to the vibrator 5, and when the piezoelectric actuator is the vibrator 5, a frequency of about 100 to 1000 Hz is used. Can be obtained. Also, the amplitude can be appropriately adjusted by changing the thickness of the piezoelectric element 51, the number of laminated layers, and the like, and an amplitude of about 10 to 100 μm can be obtained.

In addition, in this machining apparatus, the vibration generated by the vibrator 5 is transmitted to the machining head 1 by the arm 43 swinging about the support shaft 46, so that the arm 43 divided by the support shaft 46 Depending on the length ratio, the amplitude and the like of the vibrator 5 can be transmitted to the processing head 1 while being attenuated or increased. That is, as shown in FIG. 5, when the length of the arm 43 from the support shaft 46 to the ball screw nut 42 is 1 and the length of the arm 43 from the support shaft 46 to the machining head 1 is 2, And the amplitude generated by the vibrator 5 is 2
It is transmitted to the processing head 1 after being doubled. In order to efficiently discharge cutting chips generated by the processing and enhance the processing efficiency, it is considered preferable that the amplitude of the high-frequency vibration applied to the drill 10 is large. If the engagement position of the support shaft 46 with the arm 43 is determined, a large amplitude can be given to the processing head 1 while using the vibrator 5 having a small amplitude, and the head feed mechanism 4 can be downsized. It is advantageous in the point.

On the other hand, the force (working force) generated when the piezoelectric element 51 of the vibrator 5 expands and contracts is as large as several tens of kilograms.
Such a drill hits the work with a force of several tens of kilograms, and troubles such as bending of the drill itself during processing are expected. However, as described above, if the length of the arm 43 from the support shaft 46 to the ball screw nut 42 is 1 and the length of the arm 43 from the support shaft 46 to the processing head 1 is 2, vibration occurs. Since the machining force generated by the drill is transmitted to the machining head in a state of being attenuated by half, the burden on the machining drill when applying vibration is reduced, and troubles such as bending of the machining drill can be prevented beforehand.

Therefore, while amplifying the amplitude of the vibrator 5,
From the viewpoint of attenuating the processing force and transmitting it to the processing head 1, as shown in FIG. 5, the length of the processing head from the support shaft 46 is smaller than the length of the arm 43 on the ball screw nut 42 side from the support shaft 46. It can be said that the longer arm 43 on one side is preferable.

Then, in the fine shape processing apparatus of the present embodiment configured as described above, the head feeding motor 4
5, the processing head 1 is lowered toward the work mounting table 3, and the processing drill 10 is rotated at a high speed by a motor built in the processing head, and is fixed to the work mounting table 3 while supplying slurry. When the processing drill 10 is brought into contact with a work (not shown) at an appropriate processing pressure, the work is crushed with the rotation of the processing drill 10, and the processing drill 10 is brought into contact with the work with the feed of the processing head 1. When the workpiece is sunk, a fine hole is formed in the workpiece.

At this time, in the processing apparatus of this embodiment, the vibrator 5 is excited together with the feed of the processing head 1 by the head feed motor 45, so that the processing head 1 itself can operate at a high frequency at which the vibrator is generated. Since the vibration vibrates up and down and the vibration is propagated to the processing drill 10, the grinding powder generated by the processing is smoothly discharged from the fine holes, and the supply of the slurry to the fine holes is smoothly performed. The processing speed can be improved.

Further, since the vibrator 5 is not built in the machining head 1 but is mounted in the feed mechanism 4 of the machining head 1, the machining head 1 itself can be used for ordinary drilling or the like. A general-purpose processing head used for the apparatus can be used, and the labor and time required for maintenance of the apparatus can be saved correspondingly.

Although a piezoelectric actuator is used as the vibrator 5 in the above embodiment, any piezoelectric actuator that can be interposed between the ball screw nut 42 and the arm 43 to apply vibration to the arm 43 can be used. For example, a bolted Langevin type vibrator having an extremely high vibration frequency can be used.

[0035]

As described above, according to the fine shape processing apparatus of the present invention, the high frequency vibration generated by the vibrator propagates to the processing head via the arm that moves the processing head up and down. It is not necessary to mount a vibrator on the processing head, and a general-purpose processing head without a vibrator can be used as it is, so that the manufacturing cost of the apparatus can be reduced and The labor and cost required for maintenance can also be reduced.

Further, since the high frequency vibration generated by the vibrator is transmitted to the processing head via the oscillating arm, the ratio of the length of the arm divided by the support shaft is adjusted to apply the high frequency vibration to the processing head. It is possible to appropriately adjust both the amplitude of the vibration to be performed and the processing force, and it is possible to prevent the breakage of the tool during the processing as much as possible.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a configuration of an embodiment of a fine shape processing apparatus to which the present invention is applied.

FIG. 2 is a front view illustrating details of a head feed mechanism according to the embodiment.

FIG. 3 is a plan view illustrating details of a head feed mechanism according to the embodiment.

FIG. 4 is a front view showing the vibrator according to the embodiment and its periphery.

FIG. 5 is a schematic diagram illustrating a relationship between an arm length ratio, an amplitude, and a processing force according to the example.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Processing head, 2 ... Device column, 4 ... Head feed mechanism, 5 ... Vibrator, 10 ... Processing drill, 21 ... Head moving means, 41 ... Screw shaft, 42 ... Ball screw nut, 43 ...
Arm, 45 ... Head feeding motor

Claims (2)

[Claims] 1. A processing head on which a tool for processing a work is mounted, a head moving means for supporting the processing head so as to be able to move up and down with respect to an apparatus column, and a direction in which the processing head is moved up and down with respect to the apparatus column. And a nut member screwed to the screw shaft, supported pivotally about a support shaft, one end of the head moving means, and the other end of the nut Arms respectively connected to the members, a head feed motor for rotating the screw shaft to appropriately raise and lower the nut member, advance and retreat the processing head with respect to the work, and an intervening member between the arm and the nut member. And a vibrator connecting these components to each other. 2. The micro-shape processing apparatus according to claim 1, wherein an engagement position of the support shaft with respect to the arm is such that the length of the arm on the nut member side is shorter than the length of the arm on the head moving means side from the support shaft. A fine shape processing apparatus characterized in that it is set to be short.