JP2006088298A - Polishing device of printed circuit board - Google Patents

Polishing device of printed circuit board Download PDF

Info

Publication number
JP2006088298A
JP2006088298A JP2004279498A JP2004279498A JP2006088298A JP 2006088298 A JP2006088298 A JP 2006088298A JP 2004279498 A JP2004279498 A JP 2004279498A JP 2004279498 A JP2004279498 A JP 2004279498A JP 2006088298 A JP2006088298 A JP 2006088298A
Authority
JP
Japan
Prior art keywords
printed circuit
circuit board
polishing
belt
guide roll
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004279498A
Other languages
Japanese (ja)
Other versions
JP4307354B2 (en
Inventor
Sakito Oikawa
川 先 人 及
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Mektron KK
Original Assignee
Nippon Mektron KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Mektron KK filed Critical Nippon Mektron KK
Priority to JP2004279498A priority Critical patent/JP4307354B2/en
Publication of JP2006088298A publication Critical patent/JP2006088298A/en
Application granted granted Critical
Publication of JP4307354B2 publication Critical patent/JP4307354B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device capable of efficiently polishing a thin printed circuit board. <P>SOLUTION: This polishing device of the printed circuit board to polish the printed circuit board 4 formed of a flexible material while carrying it has mechanisms 5, 51, 52, 53, 54 to move belts 2, 21, 22 and is furnished with a carrier means to carry the printed circuit board along a predetermined route by adhering it with water on the belts, a first polishing means 11 arranged at an inlet side part in the predetermined route and to polish one surface of the printed circuit board, a first guide roll 51 to deliver the belts while bending the printed circuit board in a range free to carry the printed circuit board while maintaining a state where it is adhered on the belts through water, a second guide roll 52 to bend the belts so as to separate the printed circuit board passing the first guide roll from the belts and a second polishing means 12 to polish the other surface of the printed circuit board passing the second guide roll. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、フレキシブルプリント回路基板(以下プリント基板という)の表面処理を行なう装置に係わり、とくにプリント基板の両面を研磨する装置に関する。   The present invention relates to an apparatus for performing surface treatment of a flexible printed circuit board (hereinafter referred to as a printed board), and more particularly to an apparatus for polishing both surfaces of a printed board.

プリント基板の製造に際しては、穴加工時に発生したバリの除去とか、メッキ・パターン形成前の表面粗化のため、あるいはクリーニングなどのために研磨処理が広く行なわれている。このような処理を行なうことにより、回路の断線、ショートが防止され、延いては製品歩留まりを向上することができる。   In the production of a printed circuit board, polishing is widely performed for removing burrs generated during drilling, for roughening the surface before plating pattern formation, or for cleaning. By performing such processing, disconnection and short-circuiting of the circuit can be prevented, and the product yield can be improved.

ここで、処理対象であるプリント基板は、適用対象である電子機器の小型化に伴い、極薄化、フレキシブル化が望まれており、厚みが0.1mm以下の低スティフネスタイプのプリント基板が汎用されるようになっている。基材は、ポリイミドが汎用される。   Here, with the downsizing of electronic devices that are subject to application, printed circuit boards that are subject to processing are desired to be extremely thin and flexible, and low-stiffness type printed boards with a thickness of 0.1 mm or less are widely used. It has come to be. As the base material, polyimide is generally used.

従来、このような薄いプリント基板の研磨は、図3に示すような装置により行なわれている。すなわち研磨用バフ1が搬送ベルト2の中央部に設けられており、搬送ローラ3により送り込まれたプリント基板4は、バフ1に圧接されて研磨される。プリント基板4は、案内ロール5によりベルト2を移動させることに伴って搬送され、片面の研磨が行なわれる。   Conventionally, such a thin printed circuit board is polished by an apparatus as shown in FIG. That is, the polishing buff 1 is provided at the center of the conveyor belt 2, and the printed circuit board 4 fed by the conveyor roller 3 is pressed against the buff 1 and polished. The printed circuit board 4 is conveyed along with the movement of the belt 2 by the guide roll 5, and polishing of one side is performed.

一方、両面研磨は、図4に示すように、一面(図示上面)研磨用バフ11と他面(図示下面)研磨用バフ12とが設けられた研磨装置により行なう。この場合、プリント基板が図示下側にあるバフ12の回転によって巻き込まれたり、撥ね上げられたりし、その結果、めくれ、折り曲げ、しわ、亀裂などの損傷が発生し易くなる。   On the other hand, as shown in FIG. 4, the double-side polishing is performed by a polishing apparatus provided with a polishing buff 11 for one surface (upper surface in the drawing) and a buff 12 for polishing the other surface (lower surface in the drawing). In this case, the printed circuit board is wound or repelled by the rotation of the buff 12 on the lower side of the drawing, and as a result, damage such as turning, bending, wrinkling, and cracking is likely to occur.

薄いプリント基板では、面で保持された状態でなければ、その可撓性によってバフの回転による作用を受け易く、図5に示すようにバフが反送り方向に回転していれば巻き込みを起こし、図6に示すように送り方向に回転していれば撥ね上げを起こす。
特開平5-218625号公報 特開平9-1456号公報 特開平9-1456号公報
In a thin printed circuit board, if it is not held by a surface, it is easily affected by the rotation of the buff due to its flexibility. As shown in FIG. 6, if it rotates in the feed direction, it will repel.
Japanese Patent Laid-Open No. 5-186625 Japanese Patent Laid-Open No. 9-1456 Japanese Patent Laid-Open No. 9-1456

このため、図3に示す装置でプリント基板の両面を処理するには、プリント基板を一旦取り出した上で、上下の向きを変えて再度投入するか、直列に並べられた2台の研磨装置の途中に、特許文献1に示された反転装置を組み込む必要がある。再度投入によると、工数が多くなり、また反転装置を組み込むには設置スペースが不足したりメンテナンスが煩雑になったりする問題がある。   For this reason, in order to process both sides of the printed circuit board with the apparatus shown in FIG. 3, after removing the printed circuit board once, changing the direction of the top and bottom again, or turning it on again, or two polishing apparatuses arranged in series It is necessary to incorporate the reversing device shown in Patent Document 1 on the way. If it is turned on again, the number of man-hours increases, and there is a problem that the installation of the reversing device becomes insufficient and the maintenance becomes complicated.

このような問題点を解消し得るものとして、図7(特許文献3)に示されるものがある。これは、多数の開孔のあるコンベアベルトを用い、バフの対向位置に吸引部を有し、下側バフ12の上部に別のコンベアベルト23が設けられ、吸引部7により穴明きのコンベアベルト23を介してプリント基板を吸引、保持する。これにより、両面研磨が可能となる。   As what can solve such a problem, there is one shown in FIG. 7 (Patent Document 3). This uses a conveyor belt having a large number of apertures, has a suction part at a position facing the buff, and is provided with another conveyor belt 23 on the upper side of the lower buff 12. The printed circuit board is sucked and held through the belt 23. Thereby, double-side polishing becomes possible.

しかし、研磨時に噴霧される水とか研磨粉により吸引部の目詰まりを起こすことがあり、研磨作業に支障を来たす。   However, water or abrasive powder sprayed during polishing may cause clogging of the suction part, which hinders the polishing operation.

本発明は上述の点を考慮してなされたもので、薄物プリント基板を能率よく研磨することができる装置を提供することを目的とする。   The present invention has been made in view of the above points, and an object thereof is to provide an apparatus capable of efficiently polishing a thin printed circuit board.

上記目的達成のため、本発明では、
可撓性材料により形成されたプリント基板を搬送しつつ研磨する装置において、
ベルトを移動させる機構を有し、前記ベルト上に前記プリント基板を水により付着させて所定経路に沿い搬送する搬送手段と、
前記所定経路における入口側部分に配され、前記プリント基板の一方の面を研磨する第1研磨手段と、
前記プリント基板が前記ベルトに対し水を介して付着した状態を維持しつつ搬送し得る範囲で前記プリント基板を屈曲させつつ前記ベルトを送る第1案内ロールと、
前記第1案内ロールを経た前記プリント基板を前記ベルトから剥離させるように前記ベルトを屈曲させる第2案内ロールと、
前記第2案内ロールを経た前記プリント基板の他方の面を研磨する第2研磨手段と、
をそなえたことを特徴とするプリント基板の研磨装置、
を提供するものである。
In order to achieve the above object, in the present invention,
In an apparatus for polishing while conveying a printed circuit board formed of a flexible material,
A transport unit having a mechanism for moving the belt, and transporting the printed circuit board along the predetermined path by adhering the printed circuit board on the belt with water;
A first polishing means disposed on an inlet side portion of the predetermined path and polishing one surface of the printed circuit board;
A first guide roll that sends the belt while bending the printed circuit board in a range that can be conveyed while maintaining the state where the printed circuit board is attached to the belt via water;
A second guide roll that bends the belt so as to peel the printed circuit board from the belt through the first guide roll;
A second polishing means for polishing the other surface of the printed circuit board through the second guide roll;
A printed circuit board polishing apparatus characterized by comprising:
Is to provide.

本発明は上述のように、搬送用のベルトに沿って配された、プリント基板の各面を研磨する第1および第2の研磨手段の双互間に、第1および第2の案内ロールにより構成され、プリント基板の向きを変え且つ剥離する機構を設けたため、
薄物プリント基板であっても能率よく研磨することができる。
In the present invention, as described above, the first and second guide rolls are disposed between the first and second polishing means disposed along the conveying belt and polishing each surface of the printed circuit board. Because it is configured and provided with a mechanism to change the direction of the printed circuit board and peel it off,
Even a thin printed circuit board can be efficiently polished.

以下、図1および図2を参照して本発明の実施例を説明する。   Hereinafter, embodiments of the present invention will be described with reference to FIGS.

図1は、本発明の実施例1の構成を示す側面図である。この実施例では、研磨されるべきプリント基板は、図示左上部から供給されて両面研磨を行なった後、右下部に送り出すように構成されている。そして、図示上部に第1の研磨手段としてのバフ11が、また図示下部に第2の研磨手段としてのバフ12が配されている。このうち、バフ11前後のプリント基板搬送用にベルト21およびこのベルト21を駆動する案内ロール5,51,52が設けられている。また、バフ12前後のプリント基板搬送用にベルト22およびこのベルト22を駆動する案内ロール53,54が設けられている。   FIG. 1 is a side view showing the configuration of the first embodiment of the present invention. In this embodiment, the printed circuit board to be polished is supplied from the upper left part of the figure and double-side polished, and then sent out to the lower right part. A buff 11 as a first polishing means is arranged at the upper part of the figure, and a buff 12 as a second polishing means is arranged at the lower part of the figure. Among them, a belt 21 and guide rolls 5, 51, 52 for driving the belt 21 are provided for transporting printed circuit boards before and after the buff 11. Further, a belt 22 and guide rolls 53 and 54 for driving the belt 22 are provided for conveying printed circuit boards before and after the buff 12.

バフ11を駆動する案内ロールのうち、バフ11での研磨後に最初にプリント基板4を屈曲させる案内ロール51は比較的大径であり、次いでプリント基板4をベルト21から剥離させる案内ロール52は比較的小径である。   Among the guide rolls that drive the buff 11, the guide roll 51 that first bends the printed circuit board 4 after polishing with the buff 11 has a relatively large diameter, and the guide roll 52 that peels the printed circuit board 4 from the belt 21 is compared. Small diameter.

案内ロール51は、プリント基板4がベルト21に対し水を介して付着した状態を維持しつつ搬送し得る範囲でプリント基板4を屈曲させつつベルト21を送るものであり、そのためには大径である必要がある。   The guide roll 51 feeds the belt 21 while bending the printed circuit board 4 within a range in which the printed circuit board 4 can be conveyed while maintaining a state where the printed circuit board 4 is attached to the belt 21 through water. There must be.

一方、案内ロール52は、案内ロール51を経たプリント基板4をベルト21から剥離させるようにベルト21を屈曲させるものであり、小径である必要がある。   On the other hand, the guide roll 52 bends the belt 21 so that the printed circuit board 4 that has passed through the guide roll 51 is peeled off from the belt 21 and needs to have a small diameter.

これら2つの案内ロール51,52を含む案内ロールにより駆動させるベルト21によってプリント基板4が搬送されつつバフ11により研磨されたのち、案内ロール53,54により駆動されるベルト22に移されて搬送されつつバフ12により研磨される。このようにして投入口101から供給されたプリント基板4は、順次両面が研磨されて排出口102に送り出される。   The printed circuit board 4 is polished by the buff 11 while being conveyed by the belt 21 driven by the guide rolls including these two guide rolls 51 and 52, and then transferred to the belt 22 driven by the guide rolls 53 and 54. While being polished by the buff 12. The printed circuit board 4 supplied from the input port 101 in this way is sequentially polished on both sides and sent to the discharge port 102.

案内ロール51,52の間の、ベルト21の走行経路に沿ってガイドローラ列6が設けられている。このガイドローラ列6は、ベルト21に水を介して付着しているプリント基板4が剥落することを防止するものであり、プリント基板4を外側からベルト21に向けて押し付けている。   A guide roller row 6 is provided along the travel path of the belt 21 between the guide rolls 51 and 52. The guide roller row 6 prevents the printed circuit board 4 attached to the belt 21 through water from peeling off, and presses the printed circuit board 4 toward the belt 21 from the outside.

図2は、図1に示したガイドローラ列6の構造を図1の左側方から見た状態として示している。この図2に示すように、ガイドローラ列は、幾つかのローラ61が軸62に嵌装されたものを互い違いに配列してできるだけ多数のローラ61がプリント基板4に接触するように配列し、面接触に近付けた状態でプリント基板61を支持する。   FIG. 2 shows the structure of the guide roller row 6 shown in FIG. 1 as viewed from the left side of FIG. As shown in FIG. 2, the guide roller row is arranged so that as many rollers 61 as possible contact with the printed circuit board 4 by alternately arranging a plurality of rollers 61 fitted on the shaft 62. The printed circuit board 61 is supported in a state close to surface contact.

(変形例)
上記実施例では、研磨手段としてバフを例示したが、例えばはんだボールを清掃するのであれば、ブラシが有効である。
(Modification)
In the above embodiment, the buff is exemplified as the polishing means. However, for example, if the solder ball is cleaned, a brush is effective.

本発明の一実施例の構成を示す説明図。Explanatory drawing which shows the structure of one Example of this invention. 図1の実施例におけるローラ6の詳細構造を示す説明図。Explanatory drawing which shows the detailed structure of the roller 6 in the Example of FIG. 従来の片面研磨装置の構成を示す説明図。Explanatory drawing which shows the structure of the conventional single-side polish apparatus. 従来の両面研磨装置の一例を示す説明図。Explanatory drawing which shows an example of the conventional double-side polish apparatus. 図4の装置で発生する不具合例を示す説明図。Explanatory drawing which shows the example of a malfunction which generate | occur | produces with the apparatus of FIG. 図4の装置で発生する不具合例を示す説明図。Explanatory drawing which shows the example of a malfunction which generate | occur | produces with the apparatus of FIG. 従来の両面研磨装置のもう一つの例を示す説明図。Explanatory drawing which shows another example of the conventional double-side polish apparatus.

符号の説明Explanation of symbols

1,11,12 バフ、2,21,22 ベルト、4 プリント基板、5,51,52,53,54 案内ロール、6,61,62 ガイドローラ、101 投入口、102 。   1, 11, 12 buff, 2, 21, 22 belt, 4 printed circuit board, 5, 51, 52, 53, 54 guide roll, 6, 61, 62 guide roller, 101 slot, 102.

Claims (4)

可撓性材料により形成されたプリント基板を搬送しつつ研磨する装置において、
ベルトを移動させる機構を有し、前記ベルト上に前記プリント基板を水により付着させて所定経路に沿い搬送する搬送手段と、
前記所定経路における入口側部分に配され、前記プリント基板の一方の面を研磨する第1研磨手段と、
前記プリント基板が前記ベルトに対し水を介して付着した状態を維持しつつ搬送し得る範囲で前記プリント基板を屈曲させつつ前記ベルトを送る第1案内ロールと、
前記第1案内ロールを経た前記プリント基板を前記ベルトから剥離させるように前記ベルトを屈曲させる第2案内ロールと、
前記第2案内ロールを経た前記プリント基板の他方の面を研磨する第2研磨手段と、
をそなえたことを特徴とするプリント基板の研磨装置。
In an apparatus for polishing while conveying a printed circuit board formed of a flexible material,
A transport unit having a mechanism for moving the belt, and transporting the printed circuit board along the predetermined path by adhering the printed circuit board on the belt with water;
A first polishing means disposed on an inlet side portion of the predetermined path and polishing one surface of the printed circuit board;
A first guide roll that sends the belt while bending the printed circuit board in a range that can be conveyed while maintaining the state where the printed circuit board is attached to the belt via water;
A second guide roll that bends the belt so as to peel the printed circuit board from the belt through the first guide roll;
A second polishing means for polishing the other surface of the printed circuit board through the second guide roll;
An apparatus for polishing a printed circuit board, comprising:
請求項1記載のプリント基板の研磨装置において、
前記第1の案内ロールは、前記第2の案内ロールに比べて大きな径を有するものであるプリント基板の研磨装置。
In the printed circuit board polishing apparatus according to claim 1,
The printed circuit board polishing apparatus, wherein the first guide roll has a larger diameter than the second guide roll.
請求項1記載のプリント基板の研磨装置において、
前記第1案内ロールと前記第2案内ロールとの間の搬送経路に沿って前記プリント基板を前記ベルトに対して保持するガイドローラ列をそなえたことを特徴とするプリント基板の研磨装置。
In the printed circuit board polishing apparatus according to claim 1,
An apparatus for polishing a printed circuit board, comprising: a guide roller row that holds the printed circuit board against the belt along a conveyance path between the first guide roll and the second guide roll.
請求項2記載のプリント基板の研磨装置において、
前記ガイドローラ列は、前記プリント基板の全面を保持するように分散配置されたローラにより構成されたことを特徴とするプリント基板の研磨装置。
In the printed circuit board polishing apparatus according to claim 2,
The printed circuit board polishing apparatus according to claim 1, wherein the guide roller row is configured by rollers arranged in a distributed manner so as to hold the entire surface of the printed circuit board.
JP2004279498A 2004-09-27 2004-09-27 Printed circuit board polishing equipment Expired - Fee Related JP4307354B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004279498A JP4307354B2 (en) 2004-09-27 2004-09-27 Printed circuit board polishing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004279498A JP4307354B2 (en) 2004-09-27 2004-09-27 Printed circuit board polishing equipment

Publications (2)

Publication Number Publication Date
JP2006088298A true JP2006088298A (en) 2006-04-06
JP4307354B2 JP4307354B2 (en) 2009-08-05

Family

ID=36229750

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004279498A Expired - Fee Related JP4307354B2 (en) 2004-09-27 2004-09-27 Printed circuit board polishing equipment

Country Status (1)

Country Link
JP (1) JP4307354B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009147895A1 (en) * 2008-06-06 2009-12-10 株式会社石井表記 Polishing apparatus and polishing method
JP2011067919A (en) * 2009-09-28 2011-04-07 Fuji Heavy Ind Ltd Deburring device
CN102658512A (en) * 2012-05-17 2012-09-12 株洲南车时代电气股份有限公司 Half-automatic edge brushing machine for board edge of thin board of PCB (Printed Circuit Board)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5924951A (en) * 1982-08-03 1984-02-08 Nec Corp Plate polishing device
JPS60217053A (en) * 1984-02-29 1985-10-30 Yoshinori Gotou Both-surface polishing machine for flexible sheet
JPS6164640A (en) * 1984-09-04 1986-04-03 Konishiroku Photo Ind Co Ltd Automatic original feeder
JPH063960U (en) * 1992-06-22 1994-01-18 株式会社リコー Sheet winding device
JPH09165126A (en) * 1995-12-19 1997-06-24 Fuji Xerox Co Ltd Roll paper feeding device
JPH09288061A (en) * 1996-04-19 1997-11-04 Ikegami Tsushinki Co Ltd Method and apparatus for inspecting external appearance of small article
JPH11196772A (en) * 1998-01-14 1999-07-27 Kameda Seika Co Ltd Seasoning brush and rice snack producer using the same
JP2003155113A (en) * 2001-11-21 2003-05-27 Matsushita Electric Works Ltd Article inverting and conveying device
JP2004195607A (en) * 2002-12-19 2004-07-15 Mitsubishi Paper Mills Ltd Polishing method of plate-like member

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5924951A (en) * 1982-08-03 1984-02-08 Nec Corp Plate polishing device
JPS60217053A (en) * 1984-02-29 1985-10-30 Yoshinori Gotou Both-surface polishing machine for flexible sheet
JPS6164640A (en) * 1984-09-04 1986-04-03 Konishiroku Photo Ind Co Ltd Automatic original feeder
JPH063960U (en) * 1992-06-22 1994-01-18 株式会社リコー Sheet winding device
JPH09165126A (en) * 1995-12-19 1997-06-24 Fuji Xerox Co Ltd Roll paper feeding device
JPH09288061A (en) * 1996-04-19 1997-11-04 Ikegami Tsushinki Co Ltd Method and apparatus for inspecting external appearance of small article
JPH11196772A (en) * 1998-01-14 1999-07-27 Kameda Seika Co Ltd Seasoning brush and rice snack producer using the same
JP2003155113A (en) * 2001-11-21 2003-05-27 Matsushita Electric Works Ltd Article inverting and conveying device
JP2004195607A (en) * 2002-12-19 2004-07-15 Mitsubishi Paper Mills Ltd Polishing method of plate-like member

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009147895A1 (en) * 2008-06-06 2009-12-10 株式会社石井表記 Polishing apparatus and polishing method
JP2009291906A (en) * 2008-06-06 2009-12-17 Ishii Hyoki Corp Polishing apparatus and polishing method
TWI492812B (en) * 2008-06-06 2015-07-21 Ishii Hyoki Kk Grinding equipment and grinding method
JP2011067919A (en) * 2009-09-28 2011-04-07 Fuji Heavy Ind Ltd Deburring device
CN102658512A (en) * 2012-05-17 2012-09-12 株洲南车时代电气股份有限公司 Half-automatic edge brushing machine for board edge of thin board of PCB (Printed Circuit Board)

Also Published As

Publication number Publication date
JP4307354B2 (en) 2009-08-05

Similar Documents

Publication Publication Date Title
TWI505393B (en) Substrate processing device
JP2006321623A (en) Substrate carrying device
JP5031673B2 (en) Polishing apparatus and polishing method
JP2006247768A (en) Manufacturing method and device for glass substrate
JP4644726B2 (en) Coating device
JP3175908B2 (en) Substrate transfer device for liquid processing equipment
JP4307354B2 (en) Printed circuit board polishing equipment
JP2003086654A (en) Substrate processing equipment
JP2002252200A (en) System and method for processing substrate
JP2006222117A (en) Conveying apparatus of substrate material
JP2002299403A (en) Apparatus and method of transporting thin board
TW200422142A (en) Apparatus and method for polishing a plate-like workpiece
JP2004203668A (en) Acid treatment equipment for plate
JP2006312515A (en) Carrying device of thin base board material
JP2006273461A (en) Conveyance mechanism for wiring board
JP2004152988A (en) Method and system for spray processing printed wiring board
JP7213602B2 (en) Semiconductor device manufacturing equipment and substrate cleaning method
JP2002179245A (en) Conveying type substrate treating device
JP2017197777A (en) Apparatus for treating surface of wiring board panel
KR200295028Y1 (en) Apparatus for transferring a panel
JP2005317731A (en) Conveyor for conveying and processing apparatus for printed wiring board and copper clad laminate board
JP2005159010A (en) Chemical fluid processing device for intermediate product of printed circuit board
JP5165354B2 (en) Spray processing conveyor
JP2005150157A (en) Printed wiring board and its intermediate product, chemical treatment method for intermediate product of printed wiring board, and chemical treatment apparatus used for its method
JPH04216700A (en) Conveying equipment of thin printed board

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070202

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20090304

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090310

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090317

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20090407

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20090428

R150 Certificate of patent or registration of utility model

Ref document number: 4307354

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120515

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120515

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130515

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140515

Year of fee payment: 5

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees