JP2006080550A5 - - Google Patents

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Publication number
JP2006080550A5
JP2006080550A5 JP2005303795A JP2005303795A JP2006080550A5 JP 2006080550 A5 JP2006080550 A5 JP 2006080550A5 JP 2005303795 A JP2005303795 A JP 2005303795A JP 2005303795 A JP2005303795 A JP 2005303795A JP 2006080550 A5 JP2006080550 A5 JP 2006080550A5
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JP
Japan
Prior art keywords
processing chamber
vacuum processing
shower plate
region
gas supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005303795A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006080550A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005303795A priority Critical patent/JP2006080550A/ja
Priority claimed from JP2005303795A external-priority patent/JP2006080550A/ja
Publication of JP2006080550A publication Critical patent/JP2006080550A/ja
Publication of JP2006080550A5 publication Critical patent/JP2006080550A5/ja
Pending legal-status Critical Current

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JP2005303795A 2005-10-19 2005-10-19 プラズマ処理装置 Pending JP2006080550A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005303795A JP2006080550A (ja) 2005-10-19 2005-10-19 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005303795A JP2006080550A (ja) 2005-10-19 2005-10-19 プラズマ処理装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2001361897A Division JP3757159B2 (ja) 2001-11-28 2001-11-28 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JP2006080550A JP2006080550A (ja) 2006-03-23
JP2006080550A5 true JP2006080550A5 (enExample) 2006-06-15

Family

ID=36159697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005303795A Pending JP2006080550A (ja) 2005-10-19 2005-10-19 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JP2006080550A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7450475B2 (ja) * 2020-06-30 2024-03-15 東京エレクトロン株式会社 プラズマ処理装置

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