JP2006073951A - 液浸光学装置及び洗浄方法 - Google Patents
液浸光学装置及び洗浄方法 Download PDFInfo
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- JP2006073951A JP2006073951A JP2004258676A JP2004258676A JP2006073951A JP 2006073951 A JP2006073951 A JP 2006073951A JP 2004258676 A JP2004258676 A JP 2004258676A JP 2004258676 A JP2004258676 A JP 2004258676A JP 2006073951 A JP2006073951 A JP 2006073951A
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- liquid
- cleaning
- immersion
- optical apparatus
- lens system
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0006—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70925—Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning
Abstract
【解決手段】 照明光学系20と、光学レンズ系33と、半導体基板10を搭載する試料台37を移動させるためのステージ34と、光学レンズ系33と半導体基板10との間に液体の層を形成するための水注入・回収器36と、液体が接触する部位の洗浄を洗浄液によって行う洗浄機38とを具備してなる。
【選択図】 図1
Description
国際公開第99/49504号パンフレット
図1は、本発明の第1の実施形態に係わる露光装置の概略構成を示す図である。照明光学系(光源)20の下方にレチクルステージ31が配置されている。レチクルステージ31上にフォトマスクであるレチクル32が設置されている。レチクルステージ31は平行移動可能である。レチクルステージ31の下方に投影レンズ系(光学レンズ系)33が配置されている。投影レンズ系33の下方に試料台37が配置されている。試料台37上に前述した処理が行われた半導体基板10が設置されている。半導体基板10の周囲の試料台37の表面の位置と、半導体基板10の表面との位置がほぼ同じである。試料台37は、ステージ34並びに半導体基板10と共に平行・垂直移動する。また、ステージ34は、水平面に対して傾く機能を有する。
本実施形態では、図1に示した液浸露光装置と異なる例を示す。図5、6は、本発明の第2の実施形態に係わる液浸露光装置を示す図である。
Claims (16)
- 光源と、光学レンズ系と、試料を搭載する試料台を移動させるためのステージと、前記光学レンズ系と前記試料との間に液体の層を形成するための液体注入器及び液体回収器を備えたヘッド部と、前記液体が接触する部位の洗浄を洗浄液によって行う洗浄機と
を具備してなることを特徴とする液浸光学装置。 - 前記液体が接触する部位とは、前記光学レンズ系、前記ヘッド部、前記液体注入器及び前記液体回収器を含むグループから一つ以上選択されることを特徴とする請求項1に記載の液浸光学装置。
- 前記洗浄機は、前記洗浄液中にキャビティを発生させることを特徴とする請求項1または2に記載の液浸光学装置。
- 前記キャビティの径の平均が1μm以下であることを特徴とする請求項3に記載の液浸光学装置。
- 前記洗浄液中にキャビティを発生させる方式は、キャビテーションジェット、ベンチュリー管、ピトー管、超音波発生器のいずれかを用いることを特徴とする請求項3または4に記載の液浸光学装置。
- 前記洗浄機は、前記液体注入器に接続されていることを特徴とする請求項1〜5の何れかに記載の液浸光学装置。
- 前記洗浄機は、前記ステージに搭載されていることを特徴とする請求項1〜5の何れかに記載の液浸光学装置。
- 前記洗浄機は、脱着可能であることを特徴とする、請求項1〜5の何れかに記載の液浸光学装置。
- 前記洗浄液は、オゾン水、イオン水、炭酸水、及び水素水のグループから一つ以上選ばれた溶液からなる機能水であることを特徴とする請求項1〜8の何れかに記載の液浸光学装置。
- 光学レンズ系を透過する光の強度を計測する計測機構を更に具備することを特徴とする請求項1〜9の何れかに記載の液浸光学装置。
- 前記計測機構によって測定された光強度情報から光強度低下量を演算処理する演算機構と、光強度低下量から洗浄時期を算出する算出機構とを更に具備することを特徴とする請求項10に記載の液浸光学装置。
- 前記光学レンズ系を用いて前記試料に所定のパターンを転写することを特徴とする請求項1〜11の何れかに記載の液浸光学装置。
- 前記所定のパターンは、半導体素子のパターンであることを特徴とする請求項12に記載の液浸光学装置。
- 前記光学レンズ系を用いて、前記試料の表面を観察する、若しくは該表面の測定を行なうことを特徴とする請求項1〜11の何れかに記載の液浸光学装置。
- 請求項1〜14の何れかに記載された液浸光学装置における洗浄方法であって、
任意に与えられた時間で、前記洗浄機によって前記液体が接触する部位の洗浄を実施することを特徴とする洗浄方法。 - 前記洗浄液による洗浄を行なった後に、キャビティが存在しないリンス液によりリンスを行うことを特徴とする請求項15に記載の洗浄方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004258676A JP4772306B2 (ja) | 2004-09-06 | 2004-09-06 | 液浸光学装置及び洗浄方法 |
US11/217,464 US20060050351A1 (en) | 2004-09-06 | 2005-09-02 | Liquid immersion optical tool, method for cleaning liquid immersion optical tool, and method for manufacturing semiconductor device |
US11/504,053 US20070039637A1 (en) | 2004-09-06 | 2006-08-15 | Liquid immersion optical tool, method for cleaning liquid immersion optical tool, liquid immersion exposure method and method for manufacturing semiconductor device |
US12/510,009 US8174669B2 (en) | 2004-09-06 | 2009-07-27 | Liquid immersion optical tool, method for cleaning liquid immersion optical tool, liquid immersion exposure method and method for manufacturing semiconductor device |
Applications Claiming Priority (1)
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JP2004258676A JP4772306B2 (ja) | 2004-09-06 | 2004-09-06 | 液浸光学装置及び洗浄方法 |
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JP2006073951A true JP2006073951A (ja) | 2006-03-16 |
JP4772306B2 JP4772306B2 (ja) | 2011-09-14 |
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JP2004258676A Expired - Fee Related JP4772306B2 (ja) | 2004-09-06 | 2004-09-06 | 液浸光学装置及び洗浄方法 |
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US (3) | US20060050351A1 (ja) |
JP (1) | JP4772306B2 (ja) |
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US20070039637A1 (en) | 2007-02-22 |
US8174669B2 (en) | 2012-05-08 |
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US20090284718A1 (en) | 2009-11-19 |
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