JP2006073895A5 - - Google Patents

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Publication number
JP2006073895A5
JP2006073895A5 JP2004257551A JP2004257551A JP2006073895A5 JP 2006073895 A5 JP2006073895 A5 JP 2006073895A5 JP 2004257551 A JP2004257551 A JP 2004257551A JP 2004257551 A JP2004257551 A JP 2004257551A JP 2006073895 A5 JP2006073895 A5 JP 2006073895A5
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JP
Japan
Prior art keywords
cooling device
cooling
optical element
concave mirror
radiation member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2004257551A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006073895A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004257551A priority Critical patent/JP2006073895A/ja
Priority claimed from JP2004257551A external-priority patent/JP2006073895A/ja
Priority to US11/214,444 priority patent/US7360366B2/en
Publication of JP2006073895A publication Critical patent/JP2006073895A/ja
Publication of JP2006073895A5 publication Critical patent/JP2006073895A5/ja
Withdrawn legal-status Critical Current

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JP2004257551A 2004-09-03 2004-09-03 冷却装置、露光装置及びデバイス製造方法 Withdrawn JP2006073895A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2004257551A JP2006073895A (ja) 2004-09-03 2004-09-03 冷却装置、露光装置及びデバイス製造方法
US11/214,444 US7360366B2 (en) 2004-09-03 2005-08-29 Cooling apparatus, exposure apparatus, and device fabrication method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004257551A JP2006073895A (ja) 2004-09-03 2004-09-03 冷却装置、露光装置及びデバイス製造方法

Publications (2)

Publication Number Publication Date
JP2006073895A JP2006073895A (ja) 2006-03-16
JP2006073895A5 true JP2006073895A5 (https=) 2007-10-18

Family

ID=35995274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004257551A Withdrawn JP2006073895A (ja) 2004-09-03 2004-09-03 冷却装置、露光装置及びデバイス製造方法

Country Status (2)

Country Link
US (1) US7360366B2 (https=)
JP (1) JP2006073895A (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4533344B2 (ja) * 2006-05-19 2010-09-01 キヤノン株式会社 真空装置、露光装置、及びデバイス製造方法
US20100043865A1 (en) * 2008-08-25 2010-02-25 Mordechai Nisenson System and Method of Utilizing Energetic Radiation in an Enclosed Space
DE102009014701A1 (de) * 2009-03-27 2010-09-30 Carl Zeiss Smt Ag Optische Baugruppe
US8351022B2 (en) * 2009-06-15 2013-01-08 Asml Netherlands B.V. Radiation beam modification apparatus and method
US8872142B2 (en) * 2010-03-18 2014-10-28 Gigaphoton Inc. Extreme ultraviolet light generation apparatus
JP5730521B2 (ja) * 2010-09-08 2015-06-10 株式会社日立ハイテクノロジーズ 熱処理装置
WO2013062010A1 (ja) * 2011-10-25 2013-05-02 三菱電機株式会社 照明ユニット及びそれを用いた画像読取装置
US10930478B2 (en) * 2018-05-24 2021-02-23 Lam Research Corporation Apparatus with optical cavity for determining process rate

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW315493B (en) * 1996-02-28 1997-09-11 Tokyo Electron Co Ltd Heating apparatus and heat treatment apparatus
US6126744A (en) * 1996-11-18 2000-10-03 Asm America, Inc. Method and system for adjusting semiconductor processing equipment
US6259072B1 (en) * 1999-11-09 2001-07-10 Axcelis Technologies, Inc. Zone controlled radiant heating system utilizing focused reflector
JP2003297719A (ja) 2002-03-29 2003-10-17 Nikon Corp 熱遮断部材及びこの熱遮断部材を備える電子ビーム露光装置
JP2004029314A (ja) 2002-06-25 2004-01-29 Nikon Corp 光学素子冷却装置、光学素子冷却方法及び露光装置
JP2004080025A (ja) 2002-07-31 2004-03-11 Canon Inc 冷却装置及び方法、当該冷却装置を有する露光装置
EP1387054B1 (en) * 2002-07-31 2012-07-25 Canon Kabushiki Kaisha Cooling apparatus for an optical element, exposure apparatus comprising said cooling apparatus, and device fabrication method
US6992306B2 (en) * 2003-04-15 2006-01-31 Canon Kabushiki Kaisha Temperature adjustment apparatus, exposure apparatus having the same, and device fabricating method

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