JP2006072460A - 流体制御装置 - Google Patents
流体制御装置 Download PDFInfo
- Publication number
- JP2006072460A JP2006072460A JP2004252092A JP2004252092A JP2006072460A JP 2006072460 A JP2006072460 A JP 2006072460A JP 2004252092 A JP2004252092 A JP 2004252092A JP 2004252092 A JP2004252092 A JP 2004252092A JP 2006072460 A JP2006072460 A JP 2006072460A
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- valve
- flow meter
- gap
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 167
- 230000007246 mechanism Effects 0.000 claims description 24
- 230000000630 rising effect Effects 0.000 claims description 17
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 230000005540 biological transmission Effects 0.000 claims description 7
- 230000008859 change Effects 0.000 claims description 6
- 238000007599 discharging Methods 0.000 claims description 5
- 230000029058 respiratory gaseous exchange Effects 0.000 claims description 3
- 230000007797 corrosion Effects 0.000 abstract description 15
- 238000005260 corrosion Methods 0.000 abstract description 15
- 238000004519 manufacturing process Methods 0.000 abstract description 12
- 239000004065 semiconductor Substances 0.000 abstract description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 18
- 239000007789 gas Substances 0.000 description 15
- 239000011261 inert gas Substances 0.000 description 11
- 239000002033 PVDF binder Substances 0.000 description 9
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 9
- 238000011144 upstream manufacturing Methods 0.000 description 9
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 8
- 239000004810 polytetrafluoroethylene Substances 0.000 description 8
- 239000012466 permeate Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- -1 polypropylene Polymers 0.000 description 4
- 230000000644 propagated effect Effects 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229920006026 co-polymeric resin Polymers 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000009429 electrical wiring Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 230000010349 pulsation Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Fluid-Driven Valves (AREA)
- Flow Control (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004252092A JP2006072460A (ja) | 2004-08-31 | 2004-08-31 | 流体制御装置 |
| US11/661,388 US20080029174A1 (en) | 2004-08-31 | 2005-08-29 | Fluid Control Device |
| KR1020077004685A KR101124447B1 (ko) | 2004-08-31 | 2005-08-29 | 유체제어장치 |
| PCT/JP2005/016168 WO2006025550A1 (ja) | 2004-08-31 | 2005-08-29 | 流体制御装置 |
| TW094129656A TW200611095A (en) | 2004-08-31 | 2005-08-30 | A fluid control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004252092A JP2006072460A (ja) | 2004-08-31 | 2004-08-31 | 流体制御装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006072460A true JP2006072460A (ja) | 2006-03-16 |
| JP2006072460A5 JP2006072460A5 (enExample) | 2007-09-20 |
Family
ID=36153063
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004252092A Pending JP2006072460A (ja) | 2004-08-31 | 2004-08-31 | 流体制御装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2006072460A (enExample) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101269881B1 (ko) | 2011-02-02 | 2013-06-07 | 가부시끼가이샤 다쓰노 | 유량계 |
| TWI413880B (zh) * | 2006-07-05 | 2013-11-01 | Hitachi Metals Ltd | 用於利用多模式控制演算法來控制流體之流量的方法及設備 |
| KR20170092456A (ko) * | 2016-02-03 | 2017-08-11 | 사파스고교 가부시키가이샤 | 유량 조정장치 |
| CN110470359A (zh) * | 2019-09-20 | 2019-11-19 | 山东力创科技股份有限公司 | 分体式多用户超声水表 |
| CN112262298A (zh) * | 2018-06-08 | 2021-01-22 | 松下知识产权经营株式会社 | 燃气安全装置 |
| US11536385B2 (en) | 2018-07-09 | 2022-12-27 | Fujikin Incorporated | Fluid control device |
-
2004
- 2004-08-31 JP JP2004252092A patent/JP2006072460A/ja active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI413880B (zh) * | 2006-07-05 | 2013-11-01 | Hitachi Metals Ltd | 用於利用多模式控制演算法來控制流體之流量的方法及設備 |
| KR101269881B1 (ko) | 2011-02-02 | 2013-06-07 | 가부시끼가이샤 다쓰노 | 유량계 |
| KR20170092456A (ko) * | 2016-02-03 | 2017-08-11 | 사파스고교 가부시키가이샤 | 유량 조정장치 |
| KR102692207B1 (ko) * | 2016-02-03 | 2024-08-05 | 사파스고교 가부시키가이샤 | 유량 조정장치 |
| CN112262298A (zh) * | 2018-06-08 | 2021-01-22 | 松下知识产权经营株式会社 | 燃气安全装置 |
| US11536385B2 (en) | 2018-07-09 | 2022-12-27 | Fujikin Incorporated | Fluid control device |
| CN110470359A (zh) * | 2019-09-20 | 2019-11-19 | 山东力创科技股份有限公司 | 分体式多用户超声水表 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4461329B2 (ja) | 流体制御装置 | |
| JP5041847B2 (ja) | 流体制御装置 | |
| WO2007023972A1 (ja) | 流体制御装置 | |
| US20110044125A1 (en) | Fluid mixing system | |
| KR101124447B1 (ko) | 유체제어장치 | |
| WO2007023970A1 (ja) | 流体制御装置 | |
| KR20070090078A (ko) | 유체혼합장치 | |
| US20110030815A1 (en) | Fluid mixing system | |
| JP2006072460A (ja) | 流体制御装置 | |
| JP2007058343A (ja) | 流体制御装置 | |
| JP6037845B2 (ja) | 流体制御装置 | |
| JP4549136B2 (ja) | 流体制御装置 | |
| JP2006134100A (ja) | 流体制御装置 | |
| JP2006072515A (ja) | 流体制御装置 | |
| JP4854330B2 (ja) | 流体混合装置 | |
| JP2007058336A (ja) | 流体制御装置 | |
| JP2007057270A (ja) | 流体モニタ装置 | |
| JP4854348B2 (ja) | 流体混合装置 | |
| JP2007058348A (ja) | 流体制御装置 | |
| JP4854349B2 (ja) | 流体混合装置 | |
| JP4854350B2 (ja) | 流体混合装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Effective date: 20070807 Free format text: JAPANESE INTERMEDIATE CODE: A523 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070807 |
|
| A131 | Notification of reasons for refusal |
Effective date: 20090721 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
|
| A521 | Written amendment |
Effective date: 20090903 Free format text: JAPANESE INTERMEDIATE CODE: A523 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20091006 |
|
| A02 | Decision of refusal |
Effective date: 20100216 Free format text: JAPANESE INTERMEDIATE CODE: A02 |