JP2006054441A5 - - Google Patents

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Publication number
JP2006054441A5
JP2006054441A5 JP2005203715A JP2005203715A JP2006054441A5 JP 2006054441 A5 JP2006054441 A5 JP 2006054441A5 JP 2005203715 A JP2005203715 A JP 2005203715A JP 2005203715 A JP2005203715 A JP 2005203715A JP 2006054441 A5 JP2006054441 A5 JP 2006054441A5
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JP
Japan
Prior art keywords
moving
image
variable shape
shape according
focusing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005203715A
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English (en)
Japanese (ja)
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JP4981272B2 (ja
JP2006054441A (ja
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Application filed filed Critical
Publication of JP2006054441A publication Critical patent/JP2006054441A/ja
Publication of JP2006054441A5 publication Critical patent/JP2006054441A5/ja
Application granted granted Critical
Publication of JP4981272B2 publication Critical patent/JP4981272B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2005203715A 2004-07-12 2005-07-12 動的な焦点合わせ方法および装置 Expired - Lifetime JP4981272B2 (ja)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US58721604P 2004-07-12 2004-07-12
US58730204P 2004-07-12 2004-07-12
US58757004P 2004-07-12 2004-07-12
US60/587,302 2004-07-12
US60/587,570 2004-07-12
US60/587,216 2004-07-12

Publications (3)

Publication Number Publication Date
JP2006054441A JP2006054441A (ja) 2006-02-23
JP2006054441A5 true JP2006054441A5 (cg-RX-API-DMAC7.html) 2008-08-21
JP4981272B2 JP4981272B2 (ja) 2012-07-18

Family

ID=36031676

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005203715A Expired - Lifetime JP4981272B2 (ja) 2004-07-12 2005-07-12 動的な焦点合わせ方法および装置

Country Status (1)

Country Link
JP (1) JP4981272B2 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6598737B2 (ja) * 2016-06-21 2019-10-30 三菱電機株式会社 ウエハ検査装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0587544A (ja) * 1991-09-27 1993-04-06 Toshiba Corp 欠陥検査装置
JPH0675164A (ja) * 1992-05-01 1994-03-18 Copal Co Ltd 撮像装置
JPH07140083A (ja) * 1993-11-16 1995-06-02 Hitachi Electron Eng Co Ltd 異物検出光学系のフォーカス制御方法
JPH10325705A (ja) * 1997-05-26 1998-12-08 Dainippon Screen Mfg Co Ltd 測長方法及びこれを用いたテーブル型測長装置
JP4255997B2 (ja) * 1998-06-27 2009-04-22 株式会社安川電機 半導体ウエハの外観検査装置
US6581202B1 (en) * 2000-11-10 2003-06-17 Viasystems Group, Inc. System and method for monitoring and improving dimensional stability and registration accuracy of multi-layer PCB manufacture
JP2003075115A (ja) * 2001-09-03 2003-03-12 Shibaura Mechatronics Corp 基板検査装置および基板検査方法
JP2004165250A (ja) * 2002-11-11 2004-06-10 Nikon Corp マスク検査方法、マスク検査装置、露光方法、及び露光装置

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