US6581202B1 - System and method for monitoring and improving dimensional stability and registration accuracy of multi-layer PCB manufacture - Google Patents
System and method for monitoring and improving dimensional stability and registration accuracy of multi-layer PCB manufacture Download PDFInfo
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- US6581202B1 US6581202B1 US09/711,366 US71136600A US6581202B1 US 6581202 B1 US6581202 B1 US 6581202B1 US 71136600 A US71136600 A US 71136600A US 6581202 B1 US6581202 B1 US 6581202B1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0002—Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
- H05K3/4638—Aligning and fixing the circuit boards before lamination; Detecting or measuring the misalignment after lamination; Aligning external circuit patterns or via connections relative to internal circuits
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09818—Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
- H05K2201/09918—Optically detected marks used for aligning tool relative to the PCB, e.g. for mounting of components
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0548—Masks
- H05K2203/056—Using an artwork, i.e. a photomask for exposing photosensitive layers
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0005—Apparatus or processes for manufacturing printed circuits for designing circuits by computer
Definitions
- This present invention relates generally to the manufacture of printed circuit boards. More particularly this system relates to the measurement and analysis of printed circuit board distortions encountered during production and compensating for such distortions.
- PCBs printed circuit boards
- the manufacture of printed circuit boards involves a succession of processing steps, some of which convert a circuit design of multiple layers to images, patterns, or circuits that will be transposed to a base material for subsequent processing into electrical interconnections.
- the design may be directly imposed on a production medium or on a drawing or graphical representation medium. Most usually the design is converted to a digital data representation. Conversion to a digital data representation may be accomplished with commercially available Computer Aided Design (CAD) software.
- CAD Computer Aided Design
- the CAD program in concert with a computer aided manufacture (CAM) program, translates the design data to a “layout” of a series of items such as circuits, interconnection holes and solder masks to be placed on the base material panel.
- the layout is usually transposed to a medium called artwork although the layout may also be directly transposed via a laser.
- the items are referred to as features.
- sections of the panel will be combined to make a PCB which in many cases are multi-
- Features can be applied via a photographic process onto the base material panel using an artwork or directly imaged e.g. laser imaging.
- dimensional changes of the base material will cause a difference between the anticipated location of a feature and the actual location of that feature. Spacing of a feature is particularly important so as to not short out or interfere with adjacent circuits.
- the feature is an interconnection hole on a multi-layered circuit board, it is particularly important that these holes be aligned correctly with features in layers above or below.
- the location of the feature or hole relative to others is known as its “registration”. If there are misregistrations on the circuit board then subsequent processes such as drilling and further imaging operations may potentially result in misalignments with those further features. In instances of gross misregistration, the resulting product will be out of tolerance and scrapped.
- Often elements are placed on the panel with special marker information or easily recognizable design so as to easily measure movement that occur in the manufacturing process. These elements will be referred to as “targets”.
- U.S. Pat. No. 5,206,820 to Ammann, et al. was issued for a “Metrology System for Analyzing Panel Misregistration in a Panel Manufacturing Process and Providing Appropriate Information for Adjusting Panel Manufacturing Processes.”
- This patent describes the process of creating targets known as “fiducials” on a glass master. The targets are placed in the corner of the master and are subsequently measured. Errors are characterized for any particular phase of the manufacturing process and monitored so that the contribution of the various errors can be reduced as much as possible. Targets are not placed throughout the PCB panel and thus might miss certain types of distortion. Further, corrective action is not discussed.
- U.S. Pat. No. 5,960,185 was issued to Nguyen for a “Method and Apparatus for Wafer Disposition Based On Systematic Error Modelling.”
- This system relates to integrated circuits and for modelling the errors that are systematic and might be introduced during the course of integrated circuit manufacture.
- this system models various error sources that relate to the positioning of a mask and not to the migration of the material itself.
- this patent relates principally to mask alignment and errors based on a known library of errors that can occur with mask alignment. There are no targets involved in the process, nor is material migration dealt with in any fashion.
- U.S. Pat. No. 6,030,154 was issued to Whitcomb, et al. for a “Minimum Error Algorithm/Program.”
- This patent relates to multi-layer printed circuit boards and for minimizing the error associated with drilling holes to connect the circuits of one layer with another.
- the system involves taking x-rays of the various layers and determining the optimum location for drilling between layers. While this process does involve trying to compensate for errors in material movement, there is no attempt to measure the material movement in any systematic way for the purpose of minimizing the errors during subsequent manufacture.
- each process requiring registration of an image to the product must apply compensations to the image positioning of the features to allow for the material movement. Compensations are determined by historical data of compensations required for similar product or by producing a small run of boards to determine the compensations required. To monitor and control the manufacturing processes, measurements are taken of feature and target positions during production. These measurements are compared with the specifications.
- Material movement occurs due to changes of temperature, humidity, relaxation of stresses within the materials and stress introduction due to process interactions. The extent of movement varies according to the materials used and the design of the circuitry being manufactured. Printed circuit board manufacture requires numerous processes that will cause changes in temperature and humidity such as thermal curing or chemical treatment. Material movement also occurs when the product is subjected to a mechanical process such as bonding or brushing.
- image compensation is applied to offset dimensional changes that occur. This is done in the form of a stretch or shrink to the data that is used to generate artworks used for inner and outer layer manufacturing.
- the initial drill program may be also compensated.
- Photo tools used for imaging processes are key to maintaining the registration, that is, the relationship of one layer of a multi-layer PCB to another layer. For this reason the pitch between targets is measured on artwork or other image transfer medium to ensure the correct compensations have been applied before the PCB is placed into production.
- PCBs are inspected at key points during manufacture to check that the compensations have worked and in cases of prototyping to determine the compensations to apply for volume manufacture.
- the problem with this system is that it does not take into account non-linear distortion.
- the measurement of targets in the corners may indicate the panel/artwork to be dimensionally correct, but in fact a non-linear distortion may have caused features between the corners, that is within the panel, to have moved significantly.
- Different materials will behave in different ways when put through the same processes and alternative processes will affect the same material in different ways.
- targets are added to the CAD/CAM data of each layer of the PCB features on the manufacturing panel.
- the CAD/CAM, or equivalent tool inserts easily recognizable targets in the layout of each layer that will produce the PCB manufacturing panel. Targets placement can be around the periphery, across the entire PCB manufacturing panel or both.
- the targets are inspected using non-contact, non-intrusive video or x-ray co-ordinate measuring machines at any required stage of manufacture to determine the actual position in two dimensions from a predetermined location (a nominated center of origin). Selection of a universal center of origin is arbitrary and may, for example, be the midpoint of two targets.
- the actual positions and nominal positions are used to calculate the deviations.
- a regression analysis is applied to the deviation values to produce, for this embodiment, two polynomial equations determined by best fitting the deviations from nominal of any location upon any of the layers.
- Linear compensation values are calculated for a best fit of all points to nominal.
- a graphical representation of the effects of applying these compensations is generated using the calculated polynomial equation.
- a model is also generated showing the areas of the panel capable of achieving the required positional registration tolerances with and without application of the calculated compensations.
- This method gives both a graphical and numeric interpretation of material movement allowing comparison of different materials. It also allows an understanding of the effects of a manufacturing process upon the PCB material being used. Thus the system and method of the present invention permits new processes to be characterized. Further, the method of the present invention provides real time dimensional analysis to allow re-scaling of tooling to fit product and prevent out of tolerance or scrap product at the earliest possible stage of manufacture. Use of the method described and claimed herein, to modify feature positioning so as to compensate for the modelled non-linear distortions and checking the production results for out of tolerance conditions, ensures that misregistration and scrap are minimized.
- FIG. 1 illustrates a schematic of non-linear distortion
- FIG. 2 illustrates is a schematic of rhombic distortion.
- FIG. 3 illustrates a schematic of measurement targets located around the periphery of the panel in accordance with one embodiment.
- FIG. 4 illustrates a schematic of measurement targets distributed across the whole panel in accordance with one embodiment.
- FIG. 5 illustrates a flow diagram of the measurement procedure of the present invention.
- FIG. 6 illustrates a flow diagram of the analysis method of the present invention.
- FIG. 7 illustrates a schematic showing the compensation for axial distortion factors.
- FIG. 8 illustrates a schematic showing the compensation for rhombic distortion factors.
- FIG. 1 illustrates a typical non-linear distortion of PCB substrate that may occur during the manufacturing process.
- the nominal and desired location of the PCB material is represented by grid 10 .
- This grid represents the desired location of the PCB material and associated interconnection features pre-production.
- interconnection features such as holes on the PCB at locations 14 , 16 , 18 , 20 , 22 , 24 , 26 , and 28 may all be within the desired positional specification relative to the design layout for the production of a PCB with low tolerance for errors.
- the same features located at PCB location 30 , 32 , 34 , 36 , 38 , and 40 would be out of tolerance relative to the design layout (image) and thus the PCB would be scrapped resulting in low production yields.
- FIG. 2 another type of distortion is illustrated.
- rhombic distortion is illustrated.
- grid 10 illustrates the desired location of the finished PCB material and associated circuitry.
- shrinkage and distortion of the PCB material during manufacture results in some locations being within spec such as those at location 42 , 44 , 46 , 48 , and 50 .
- the majority of the PCBs would be out of spec. Again resulting a large amount of scrap and low yield for the process.
- grid 52 represents the PCB material post-production. If measurements for distortion were only made at the location 44 , and 46 , no distortion would be detected when in fact most of the PCB material would be out of spec.
- fiducials is used to designate targets that are added outside of the actual circuit design features desired. Circuit design features may also serve as targets for the analysis of the present invention such features need only be distinct (for precision of measurement) and have known pre-production location to serve as measurement points in much the same manner as fiducials.
- FIGS. 3 and 4 show how targets can be added to the part being measured. As noted above, features may serve as targets and fiducials may also serve as targets. For example, targets in FIG. 4 that are within the bounds of the panel may well be features that were in the original circuit design. Whereas the perimeter targets or fiducials would not serve any function other than to facilitate distortion measurements. Thus, for purposes of this description, “target” is meant to include either a design feature or a fiducial.
- This optimum number of targets may initially be determined experimentally. Initially, a large number of targets in the analysis can be used. Then, experimentally, targets are removed one at a time, from the analyses until the accuracy deteriorates. Reducing the number of targets improves analysis time.
- Characterization of the material movement of the PCB panel material and the features requires measurement of the deviation of the targets from their nominal position.
- the deviation of the targets from their nominal to their actual position on the PCB panel is input for a regression analysis.
- This preferred embodiment uses curve fitting for best fit to derive two polynomial equations.
- artwork 54 comprises a series of targets 56 , 58 , 60 , and 62 are placed around the periphery of the artwork from which PCBs will be made.
- targets 56 , 58 , 60 , and 62 are placed around the periphery of the artwork from which PCBs will be made.
- FIG. 4 alternative placement of targets throughout the PCB.
- For artworks and external circuit features measurements are taken using a video based non-contact co-ordinate measuring machine.
- FIG. 5 illustrates a flow diagram of the measurement procedure for one embodiment of the present invention.
- a CAM file is first generated which contains the targets and or target features 70 .
- the CAM files is then translated to the measurement program 72 .
- the panel and or artwork is then loaded into a measuring machine for determining target locations 74 .
- Two targets are selected and measured 76 and a point of origin (center of origin) is generated, for instance, at the midpoint between two targets.
- the axis system is aligned to this for the measurements 78 .
- the point of origin is designated 80 .
- Each target is given an x and y co-ordinate relating its nominal location to the center of origin.
- the nominal and actual position of the targets is then exported to a data file 84 .
- the actual locations of the targets from the origin position are measured and the results are stored in a data file, along with the nominal co-ordinates.
- the analytical software will access this data file. If a sample of panels is being measured then the process is repeated for each panel and the results are appended to the data file.
- FIG. 6 illustrates a flow chart of the analysis method of one embodiment of the present invention.
- the results from the data file i.e. the nominal target coordinates 86 and the actual target coordinates 88 ) are imported by analysis software.
- the deviations in the x and y axes are calculated for each measured point 90 .
- a non-linear regression analysis is performed on these results 92 to determine two polynomial equations, one for x deviation and one for y deviation, according to each point's location on the panel.
- a linear regression is performed to generate linear compensation factors in each axis, offset from the origin and for panel rotation.
- a distortion model of the post manufacture locations, using the polynomial equations, is made 96 assuming the linear regression compensations were applied to the pre-manufacture layout.
- the best achievable registration is determined 100 from a model that assumes a linear regression compensation has been made and from a model where there have been no compensations applied. Areas of the panel capable of achieving required registration tolerances is derived from the model 102 .
- a graphical presentation in the form of wire frame diagram of the panel is generated using the polynomial equations derived from the non-linear regression.
- a second wire frame diagram is generated using the non-linear analysis results to display the effects of applying the calculated linear compensations. The user can adjust this diagram to remove the effects of measured offsets and rotation.
- FIG. 7 illustrates such wire frame diagram.
- FIG. 7 illustrates a schematic showing the requirement for calculation of axial distortion factors. Compare FIG. 7 with FIG. 1 .
- the solid wire frame 104 is ‘best fitted’ to the theoretically perfect dotted wire frame 106 . Note that the fit in FIG. 7, which uses a non-linear regression model to effect compensation, is a superior to the fit in FIG. 1 .
- FIG. 8 illustrates a schematic showing the requirement for calculation of rhombic distortion factors.
- a graphic representation of the panel shows the areas of the measured panel that a user entered where minimum registration tolerance can be achieved based upon the x and y co-ordinates about the origin where the deviation calculated by the non-linear polynomials is less than the required tolerance.
- the areas capable of achieving the tolerance L 1 and L 2 further have zones 108 , 110 , and 112 where tolerances can be met. Other areas would be out of tolerance.
- a second diagram graphically portraying in and out of tolerance conditions may be generated where effects of offset and rotation are ignored.
- One embodiment uses color coding to highlight achieving tolerance (green) and being out of tolerance (red). Use of green and red are not meant to be limiting. Other acceptable and unacceptable color combinations may be used.
- this system and method can be used during production.
- the targets would be monitored and the target locations would be charted.
- the production locations then could be compared to the regression model's predicted location. As the actual locations deviate from the expected locations beyond certain bounds, the regression analysis would be recalculated. Compensations would be modified thus modifying the fabrication tooling so as to adjust for the change from expected material movement.
- the apparatus of the present invention comprises an assembly of hardware and software. For example, generating computer aided manufacturing (CAM) fields may be accomplished using the Genesis® CAM software product available from Frontline, Inc. CAD CAM software from Router solutions may be used to translate CAM files to the measurement function of the present invention.
- Sources for measurement equipment used for the present invention includes Videomic, Optek, Inc, Innervision, Optek, Inc., and Smartscope, Optical Gauging Products, Inc.
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Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
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US09/711,366 US6581202B1 (en) | 2000-11-10 | 2000-11-10 | System and method for monitoring and improving dimensional stability and registration accuracy of multi-layer PCB manufacture |
EP01989872A EP1337943A1 (en) | 2000-11-10 | 2001-10-25 | System and method for monitoring and improving dimensional stability and registration accuracy of multi-layer pcb manufacture |
CNA018207987A CN1481535A (en) | 2000-11-10 | 2001-10-25 | System and method for monitoring and improving dimensional stability and registration accuracy of multi-layer PCB manufacture |
KR10-2003-7006390A KR20030066655A (en) | 2000-11-10 | 2001-10-25 | System And Method for Monitoring and Improving dimensional Stability And Registration Accuracy of Multi-Layer PCB Manufacture |
PCT/US2001/046183 WO2002039326A1 (en) | 2000-11-10 | 2001-10-25 | System and method for monitoring and improving dimensional stability and registration accuracy of multi-layer pcb manufacture |
AU2002228757A AU2002228757A1 (en) | 2000-11-10 | 2001-10-25 | System and method for monitoring and improving dimensional stability and registration accuracy of multi-layer PCB manufacture |
JP2002541578A JP2004513459A (en) | 2000-11-10 | 2001-10-25 | System and method for monitoring and improving dimensional stability and positioning accuracy in multilayer PCB (printed circuit board) manufacturing |
US10/429,575 US20030208740A1 (en) | 2000-11-10 | 2003-05-05 | System and method for monitoring and improving dimensional stability and registration accuracy of multi-layer PCB manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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US09/711,366 US6581202B1 (en) | 2000-11-10 | 2000-11-10 | System and method for monitoring and improving dimensional stability and registration accuracy of multi-layer PCB manufacture |
Related Child Applications (1)
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US10/429,575 Continuation US20030208740A1 (en) | 2000-11-10 | 2003-05-05 | System and method for monitoring and improving dimensional stability and registration accuracy of multi-layer PCB manufacture |
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US6581202B1 true US6581202B1 (en) | 2003-06-17 |
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US09/711,366 Expired - Lifetime US6581202B1 (en) | 2000-11-10 | 2000-11-10 | System and method for monitoring and improving dimensional stability and registration accuracy of multi-layer PCB manufacture |
US10/429,575 Abandoned US20030208740A1 (en) | 2000-11-10 | 2003-05-05 | System and method for monitoring and improving dimensional stability and registration accuracy of multi-layer PCB manufacture |
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US10/429,575 Abandoned US20030208740A1 (en) | 2000-11-10 | 2003-05-05 | System and method for monitoring and improving dimensional stability and registration accuracy of multi-layer PCB manufacture |
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US (2) | US6581202B1 (en) |
EP (1) | EP1337943A1 (en) |
JP (1) | JP2004513459A (en) |
KR (1) | KR20030066655A (en) |
CN (1) | CN1481535A (en) |
AU (1) | AU2002228757A1 (en) |
WO (1) | WO2002039326A1 (en) |
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US20090241069A1 (en) * | 2008-03-20 | 2009-09-24 | Fuller Iii David W | User defined wire appearance indicating communication functionality in a graphical programming environment |
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US20120131527A1 (en) * | 2010-08-24 | 2012-05-24 | Synopsys, Inc. | Targeted production control using multivariate analysis of design marginalities |
US8549445B2 (en) * | 2010-08-24 | 2013-10-01 | Synopsys, Inc. | Targeted production control using multivariate analysis of design marginalities |
CN102036511A (en) * | 2010-12-01 | 2011-04-27 | 株洲南车时代电气股份有限公司 | Method for classifying and compensating nonlinear variation of core boards for manufacturing multilayer circuit boards |
CN102036511B (en) * | 2010-12-01 | 2012-12-12 | 株洲南车时代电气股份有限公司 | Method for classifying and compensating nonlinear variation of core boards for manufacturing multilayer circuit boards |
CN116933719A (en) * | 2023-09-15 | 2023-10-24 | 北京燧原智能科技有限公司 | Adaptive package substrate preshrinking method and device, electronic equipment and storage medium |
CN116933719B (en) * | 2023-09-15 | 2023-12-22 | 北京燧原智能科技有限公司 | Adaptive package substrate preshrinking method and device, electronic equipment and storage medium |
Also Published As
Publication number | Publication date |
---|---|
JP2004513459A (en) | 2004-04-30 |
AU2002228757A1 (en) | 2002-05-21 |
KR20030066655A (en) | 2003-08-09 |
CN1481535A (en) | 2004-03-10 |
EP1337943A1 (en) | 2003-08-27 |
WO2002039326A1 (en) | 2002-05-16 |
US20030208740A1 (en) | 2003-11-06 |
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