JP2006045663A - Method for depositing vapor-deposited film on substrate and transport tray - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for depositing a vapor-deposited film on a substrate by which a plurality of panels are prepared from one glass substrate under conserved energy with simple constitution without inducing the cracking of the glass substrate, or the like, caused by a thermal load, and to provide a transport tray for performing the method. <P>SOLUTION: The transport tray is composed of a square frame body and thin body-shaped members constructed in such a manner that, between the confronted frame sides in the frame body, both ends of the above members are connected via each frame side and elastic members to thereby apply tension thereto. The plurality of thin body-shaped members are functioned as holding members for forming the state where the substrate is placed on the transport tray, and are also functioned as mask members for demarcating two or more vapor-deposited film forming regions in the substrate. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a method for forming a vapor-deposited film on a substrate, which is applied to a step of forming an MgO film on a glass substrate when manufacturing a plasma display panel, and a transport tray for carrying out the method.

  Conventionally known methods for forming a vapor-deposited film on this type of substrate and a transfer tray include those described in Patent Document 1, for example. In Patent Document 1, a rectangular frame body, and an inner peripheral portion and an inner peripheral portion facing each other of the frame body, both ends thereof are connected to each inner peripheral portion of the frame body via an elastic member, thereby providing tension. A method of forming a vapor deposition film such as an MgO film on a glass substrate using a transport tray composed of a thin-shaped member constructed with the addition of is described (for example, see FIG. 2).

The method described in Patent Document 1 can be temporarily evaluated as a method for forming a vapor deposition film on a substrate. However, in this method, as described in paragraph 0012 of the detailed description of the invention, the glass substrate is held by being placed on the window frame-shaped substrate receiver provided on the inner periphery of the rectangular frame. I have to. Therefore, for example, when a vapor deposition film is formed by heating a large glass substrate, the frame itself must be heated, so that the energy consumption is enormous and the frame is subject to thermal distortion. Had. In addition, there is a problem that mechanical stress generated in the initial stage cannot be relaxed by setting the glass substrate on the transfer tray. Furthermore, if thermal stress exceeding the allowable range occurs on the glass substrate, it cannot be alleviated, and the substrate holder cannot sufficiently absorb the bending due to the high heat of the glass substrate, so it should be ignored by heat spread. There is a problem that mechanical stress that cannot be generated occurs. As a result, there has been a problem that the glass substrate may be cracked by a thermal load.
JP 2000-199046 A

  Therefore, the present invention provides a substrate having a simple configuration and capable of preparing a plurality of panels from a single glass substrate with energy saving without inducing a crack of the glass substrate due to a thermal load. An object of the present invention is to provide a method for forming a vapor-deposited film and a transport tray for carrying out the method.

  As a result of various studies in view of the above points, the present inventor has determined that a transport tray used for forming a vapor-deposited film on a glass substrate has a rectangular frame body, a frame side and a frame opposite to each other. Between the sides, each end of the frame is connected to each frame side via an elastic member, and a thin member is provided with tension applied thereto, and a plurality of thin members are made of glass. The above object is achieved by functioning as a holding member for forming a state in which the substrate is placed on the transfer tray and as a mask member for demarcating two or more vapor deposition film forming regions in the glass substrate. It was found that can be achieved.

The method of forming a vapor deposition film on the substrate of the present invention based on the above knowledge is as described in claim 1, wherein the substrate is horizontally maintained and conveyed to a vapor deposition chamber of a vacuum vapor deposition apparatus, and the vapor deposition film is applied to the substrate. By connecting the both ends of each of the conveyance trays used for forming a rectangular frame between the frame sides of the frame body and the frame sides through elastic members. The thin member is constructed with a tension applied, and three or more thin members are arranged in parallel between the opposite frame sides and the other frame side. Two or more frames are installed between the frame sides in parallel with one of the frame sides, and each thin member is used as a holding member for forming a state in which the substrate is placed on the transport tray. As a mask member for functioning and defining two or more vapor deposition film formation regions in a substrate It is ability, and forming a vapor deposited film from below the substrate.
The transport tray of the present invention is a transport tray used for forming a deposited film on the substrate by keeping the substrate horizontal and transporting it to the deposition chamber of the vacuum deposition apparatus, as described in claim 2. A rectangular frame, and a thin frame that is constructed with tension applied by connecting both ends of the frame to the opposite sides of the frame via elastic members. The thin member is composed of three or more parallel to the other frame side between one opposing frame side and one of the other thin frame members between the other opposing frame side and the frame side. Two or more pieces are installed in parallel to the frame side, and each thin member functions as a holding member for forming a state where the substrate is placed on the transport tray, and two or more members on the substrate are provided. It is made to function as a mask member for demarcating a deposited film formation region To.

  According to the present invention, it is possible to prepare a plurality of panels from a single glass substrate with energy saving without inducing a crack of the glass substrate due to a thermal load with a simple configuration. A method for forming a vapor-deposited film on the substrate and a transport tray for carrying out the method are provided.

  Hereinafter, a method for forming a vapor deposition film on a substrate of the present invention will be described with reference to the drawings, taking as an example the case of forming an MgO film on a glass substrate when manufacturing a plasma display panel.

  FIG. 1 is a schematic plan view of an embodiment of a transport tray for carrying out the method for forming a vapor deposition film on a substrate of the present invention. The transport tray A shown in FIG. 1 includes a rectangular frame 1 made of stainless steel, titanium, or the like, and between the opposite frame sides of the frame 1, and both ends of each frame side of the frame 1. It is composed of a thin-shaped member 2 that is constructed with a tension applied by connecting via a spring 3 as an elastic member. The thin member 2 has three horizontal sides opposite to each other in the horizontal direction in FIG. 1 in parallel to the vertical frame sides and a horizontal direction between the vertical side frames and the frame sides. Four are installed in parallel to the frame side.

  FIG. 2 is a schematic plan view showing a state where the glass substrate X is placed on the transport tray A shown in FIG. In the present invention, each thin member 2 functions as a holding member for forming a state in which the glass substrate X is placed on the transport tray A, and six vapor-deposited film forming regions in the glass substrate X are used. It is made to function as a mask member for demarcating (the Y portion shown by oblique lines). Thereby, even when a large glass substrate is heated to form an MgO film in each vapor deposition film forming region, it is not necessary to heat the frame body, so that energy saving can be achieved. In addition, the thermal distortion of the frame can be suppressed. Moreover, the thin-shaped member which added tension to both ends relieves the mechanical stress which generate | occur | produces initially by setting a glass substrate to a conveyance tray. Further, since the heat capacity is small due to the thin body shape, the temperature difference with the glass substrate is reduced, so that the thermal stress generated in the glass substrate is reduced and the thermal stress generated in the glass substrate is reduced. Furthermore, the mechanical stress due to heat spread is alleviated by evenly absorbing the bending of the glass substrate due to high heat. Therefore, as in the method described in Patent Document 1, in addition to a mode in which the glass substrate is placed on a window frame-shaped substrate receiver provided on the inner peripheral portion of the frame, the thin member is a holding member for the glass substrate. Even if it is made to function as, the both ends are fixed to each frame side of the frame without an elastic member, or only one end is connected to the frame side of the frame via an elastic member. It is possible to suppress the breakage of the glass substrate due to a thermal load that may occur in an aspect in which tension is applied and the other end is fixed without interposing the frame side of the frame without an elastic member.

  By making the thermal expansion coefficient of the thin body member ± 20% of the thermal expansion coefficient of the glass substrate, the thermal stress and mechanical stress generated in the glass substrate are more effective when the glass substrate is heated to form the MgO film. Can be relaxed. Therefore, the crack of the glass substrate by a heat load, etc. can be suppressed more effectively. For example, when borosilicate glass is used as the glass substrate, the thin member is preferably made of a nickel-iron alloy whose thermal expansion coefficient approximates that of borosilicate glass.

  The thickness of the thin member is preferably 0.1 mm to 0.8 mm. If the thickness is less than 0.1 mm, the function as a glass substrate holding member may not be sufficient. On the other hand, if the thickness exceeds 0.8 mm, a gap is generated around the intersection of the thin member and the thin member. If the MgO component wraps around the mask portion (so-called “film sagging phenomenon”), there is a possibility that an accurate MgO film cannot be formed on the deposited film forming region of the glass substrate.

  The vacuum vapor deposition apparatus used for carrying out the method for forming a vapor deposition film on the substrate of the present invention is not described with reference to the drawings, but may be a publicly known apparatus, other than the apparatus described in Patent Document 1. A structure capable of forming an MgO film by vapor-depositing the MgO component evaporated from the evaporation source on the glass substrate X which has been transported to the deposition chamber while being maintained horizontally by the transport tray A from below. Any device may be used as long as it has a device.

  The transport tray A shown in FIG. 1 is for preparing six panels from one glass substrate X by forming MgO coatings on the six vapor deposition coating formation regions Y on the glass substrate X. However, if the thin member 2 is detachable from the frame body 1 together with the spring 3, and an arbitrary number of them can be installed at arbitrary positions on the frame side of the frame body 1, the glass substrate X An MgO film can be formed by demarcating two or more arbitrary numbers and arbitrary sizes of vapor-deposited film forming regions Y, so that two or more arbitrary numbers and arbitrary numbers can be formed from one glass substrate X. Panels of size can be prepared.

  The present invention has a simple configuration and allows a plurality of panels to be prepared from a single glass substrate with energy saving without inducing a crack of the glass substrate due to a thermal load. The present invention has industrial applicability in that it can provide a method for forming a vapor deposition film and a transport tray for carrying out the method.

It is a schematic plan view of one Embodiment of the conveyance tray for enforcing the formation method of the vapor deposition film to the board | substrate of this invention. It is a schematic plan view which shows the state which mounted the glass substrate X in the conveyance tray A shown in FIG.

Explanation of symbols

A Transport tray 1 Frame 2 Thin body member 3 Spring X Glass substrate Y Deposition film formation area

Claims (2)

  Maintaining the substrate horizontally and transporting it to the vapor deposition chamber of the vacuum vapor deposition apparatus, the transport tray used to form the vapor deposition film on the substrate is divided into a rectangular frame, the opposing frame sides of the frame and the frame sides In between, the two ends are connected to each frame side of the frame body via an elastic member to form a thin body member that is installed with tension applied thereto, and the thin body member is connected to one opposing frame. 3 or more parallel to the other frame side between the side and the frame side, and 2 or more parallel to the one frame side between the other opposing frame side and the frame side to form individual thin bodies The member functions as a holding member for forming a state in which the substrate is placed on the transport tray, and also functions as a mask member for defining two or more vapor deposition film forming regions on the substrate. A method for forming a deposited film on a substrate, comprising forming a deposited film from the substrate.   A transport tray used for maintaining a substrate horizontally and transporting it to a deposition chamber of a vacuum deposition apparatus and forming a deposition film on the substrate, comprising a rectangular frame, opposing frame sides and a frame It is composed of a thin member that is constructed with a tension applied by connecting both ends of the frame to each frame side of the frame via an elastic member. Three or more parallel to the other frame side between the frame sides and two or more parallel to one frame side between the other opposing frame sides and the frame sides. The body member functions as a holding member for forming a state in which the substrate is placed on the transport tray, and also functions as a mask member for defining two or more vapor deposition film forming regions on the substrate. A transport tray characterized by that.

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