JP2006041204A - Method for manufacturing ceramic molded object for electronic parts - Google Patents

Method for manufacturing ceramic molded object for electronic parts Download PDF

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JP2006041204A
JP2006041204A JP2004219510A JP2004219510A JP2006041204A JP 2006041204 A JP2006041204 A JP 2006041204A JP 2004219510 A JP2004219510 A JP 2004219510A JP 2004219510 A JP2004219510 A JP 2004219510A JP 2006041204 A JP2006041204 A JP 2006041204A
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ceramic
manufacturing
ceramic molded
electronic parts
layer
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Masayuki Yoshida
政幸 吉田
Shunji Aoki
俊二 青木
Junichi Sudo
純一 須藤
Genichi Watanabe
源一 渡辺
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TDK Corp
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TDK Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a ceramic molded object for electronic parts wherein freedom in designing without limited processing position and dimension or the like is great, and the processing for micro size or complicated shape is realized. <P>SOLUTION: In the same manner as the ceramic molded object for electronic parts is obtained from a lamination, a lamination that is formed by stacking a plurality of sheet members having at least an insulator material and a vanishing material is given vanishing treatment, so as to form a three dimensional shape. Thus, the ceramic molded object for electronic parts is manufactured. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、巻き線型電子部品、素材加工の方法に関し、プレス成形、研削加工によらないセラミックコア材等の電子部品用セラミック造形物の製造方法、加工方法を提供する。   The present invention relates to a wound electronic component and a material processing method, and provides a manufacturing method and a processing method of a ceramic shaped article for an electronic component such as a ceramic core material that does not depend on press molding or grinding.

従来から、セラミックコアの製造方法において、例えば巻き線型インダクター素子の巻芯となるセラミックコアの製造は、セラミックス粉を成型、焼成、必要に応じて研削加工工程を経て作られている(特許文献1、2)。   Conventionally, in a method for manufacturing a ceramic core, for example, the manufacture of a ceramic core that becomes the core of a wound inductor element has been made through molding, firing, and, if necessary, a grinding process (Patent Document 1). 2).

特許文献1は、可燃性シートに貫通孔を形成し、これにセラミックペースト又はセラミックシートを充填し、これらを積層、焼成してコアの焼結体を得ており、その実施例には、両端に□1mm、厚さ0.5mmの角鍔を持つ、全長2.0mmのドラムコアが開示されている。特許文献1は、可燃性シートを金型で加工した後、セラミックス材料を充填している点で、形成可能な完成品の立体形状には制限がある。   In Patent Document 1, a through-hole is formed in a combustible sheet, and this is filled with a ceramic paste or a ceramic sheet. These are laminated and fired to obtain a sintered body of a core. Discloses a drum core having a total length of 2.0 mm having a square ridge of 1 mm and a thickness of 0.5 mm. In Patent Document 1, there is a limitation on the three-dimensional shape of a finished product that can be formed in that a combustible sheet is processed with a mold and then filled with a ceramic material.

また、特許文献1ではシートを積層した後に積層体を切断したりパンチで打ち抜く例も示されているが、これらは変形、バリ、欠けの要因となりさらなる精度の悪化や歩留まりの低下を促進することになる。   In addition, Patent Document 1 also shows an example in which a laminated body is cut or punched with a punch after laminating sheets, but these cause deformation, burrs, and chipping, and promote further deterioration in accuracy and yield. become.

特許文献2は、フェライト磁性原材料をシート状に加工した後、所定の輪郭形状を型抜きし、これを焼成して厚さが1mm以下の薄型フェライト磁性コアを作製している。特許文献2はフェライトシートを金型で加工していることから、複雑な三次元形状の加工が困難であり、かつ完成品の精度も十分でない。金型加工は変形、バリ、欠けの要因となり精度の悪化や歩留まりの低下を促進する。   In Patent Document 2, after processing a ferrite magnetic raw material into a sheet shape, a predetermined contour shape is punched and fired to produce a thin ferrite magnetic core having a thickness of 1 mm or less. In Patent Document 2, since a ferrite sheet is processed with a mold, it is difficult to process a complicated three-dimensional shape, and the accuracy of a finished product is not sufficient. Mold processing causes deformation, burrs, and chipping, and promotes deterioration in accuracy and yield.

また、特許文献2ではグリーンシートが1層である場合の形成精度のレベルであり、層の厚さ方向での制御性に劣り、また均質な層の形成が困難である。
特開2003−249413号公報 特開2003−234227号公報
Further, in Patent Document 2, it is the level of formation accuracy when the green sheet is one layer, the controllability in the layer thickness direction is inferior, and the formation of a homogeneous layer is difficult.
JP 2003-249413 A JP 2003-234227 A

このように、従来のセラミックコアの製造方法には、以下の問題点がある:
成型のみで形状を決定する場合、成型金型に対する抜きテーパー角を無視した形状は不可能である。
成型後の研削加工方法によっては、加工位置、寸法等が制限される、即ち加工の制限によって設計の自由度が損なわれる。
素体の大きさと加工機の組合せによるが、微細でかつ複雑な形状加工には限界がある。
Thus, the conventional method for manufacturing a ceramic core has the following problems:
When the shape is determined only by molding, it is impossible to make a shape ignoring the taper angle with respect to the molding die.
Depending on the grinding method after molding, the processing position, dimensions, and the like are limited, that is, the degree of freedom in design is impaired due to processing limitations.
Depending on the combination of the size of the element and the processing machine, there is a limit to fine and complex shape processing.

本発明は、上記問題点に鑑みてなされたものであり、予め層に分割して各層に所定の加工を施し、素材以外の部分は焼成時に消失する材料が存在し、セラミックグリーンシートの積層時などの変形を防ぎ、型抜きが難しいボビン形状の加工が可能となる。さらに、加工設備による制約その他を考慮する必要がないので、目的とする製品の任意な形状加工が可能となる。また、フォトリソグラフィー加工技術を導入することにより、従来よりも複雑、微細、高精度な形状、寸法加工が可能となる。   The present invention has been made in view of the above-mentioned problems, and is divided into layers in advance and subjected to predetermined processing on each layer, and there is a material that disappears during firing in portions other than the material, and when the ceramic green sheets are laminated This makes it possible to prevent bobbin-shaped machining that is difficult to remove. Furthermore, since it is not necessary to consider restrictions or the like due to processing equipment, any shape processing of the target product can be performed. In addition, by introducing a photolithography processing technique, it becomes possible to perform more complicated, finer, and higher-precision shape and dimensional processing than before.

本発明の一実施態様は、電子部品用セラミック造形物が積層体から得られるように、少なくとも絶縁体材料および消失材料を有する複数のシート状部材を積層してなる積層体に消失処理を施すことにより、立体形状を形成することを特徴とする、電子部品用セラミック造形物の製造方法である。
本発明のさらなる一実施態様は、前記積層体に対して、前記消失処理を施すことにより、前記立体形状を形成すると同時に、複数個の造形物に分離することを特徴とする上記に記載の電子部品用セラミック造形物の製造方法である。
In one embodiment of the present invention, a disappearance treatment is performed on a laminate formed by laminating a plurality of sheet-like members having at least an insulator material and a disappearance material so that a ceramic shaped article for electronic parts can be obtained from the laminate. By this, it is a manufacturing method of the ceramic molded article for electronic components characterized by forming a three-dimensional shape.
According to a further embodiment of the present invention, the electronic material as described above is characterized in that the three-dimensional shape is formed at the same time as the three-dimensional shape is formed by performing the disappearance treatment on the laminate. It is a manufacturing method of the ceramic molded article for components.

本発明のさらなる一実施態様は、前記シート状部材が略平坦な層であることを特徴とする、上記に記載の電子部品用セラミック造形物の製造方法である。   A further embodiment of the present invention is the method for producing a ceramic shaped article for an electronic component as described above, wherein the sheet-like member is a substantially flat layer.

本発明の別の一実施態様は、前記消失材料および前記絶縁体材料の少なくとも一方は感光性を有し、前記消失材料と前記絶縁体材料の厚さの調整を、露光現像処理により行うことを特徴とする、上記に記載の電子部品用セラミック造形物の製造方法である。   Another embodiment of the present invention is that at least one of the disappearing material and the insulator material has photosensitivity, and the thickness of the disappearing material and the insulator material is adjusted by exposure and development processing. It is the manufacturing method of the ceramic molded article for electronic components as described above, which is characterized.

本発明のさらに別の一実施態様は、前記消失材料が溶媒に溶解可能な材料であり、前記消失処理は溶解であることを特徴とする、上記に記載の電子部品用セラミック造形物の製造方法である。   Still another embodiment of the present invention is the method for producing a ceramic shaped article for electronic parts as described above, wherein the disappearing material is a material that can be dissolved in a solvent, and the disappearing treatment is dissolution. It is.

本発明のもう一つの別の実施態様は、前記消失処理は加熱あるいは焼成であることを特徴とする、上記に記載の電子部品用セラミック造形物の製造方法である。   Another embodiment of the present invention is the method for producing a ceramic shaped article for electronic parts as described above, wherein the disappearance treatment is heating or firing.

本発明のさらにもう一つの別の実施態様は、前記電子部品用セラミック造形物を形成する各層を作製する工程において、必要に応じて層を適宜設計し、電極等を必要とする層および部位に、好ましくは電着技術により電極材料を形成することを特徴とする、上記に記載の電子部品用セラミック造形物の製造方法である。   Yet another embodiment of the present invention is that, in the step of producing each layer for forming the ceramic molded article for electronic parts, the layer is appropriately designed as necessary, and a layer and a part that require an electrode or the like are provided. The method for producing a ceramic shaped article for electronic parts as described above, wherein the electrode material is preferably formed by an electrodeposition technique.

本発明のさらにもう一つの別の実施態様は、絶縁体材料パターンが、電着法により形成される、上記に記載の電子部品用セラミック造形物の製造方法である。   Yet another embodiment of the present invention is the above-described method for manufacturing a ceramic shaped article for an electronic component, wherein the insulator material pattern is formed by an electrodeposition method.

なお、ここで言う立体形状とは、立方体や直方体或いは円柱形などの単純な形状のみならず、コア等に用いられるツバ付ドラム形、電子部品等で用いられるL形貫通穴を持つセラミックブロック、らせん状の溝が切られた円柱形など、いわゆる加工成形が困難で、複雑な形状をした造形物のことを言う。   The three-dimensional shape referred to here is not only a simple shape such as a cube, a rectangular parallelepiped or a cylinder, but also a drum block with a flange used for a core, a ceramic block having an L-shaped through hole used for an electronic component, It refers to a shaped object that is difficult to process and mold and has a complicated shape, such as a cylindrical shape with a spiral groove cut.

本発明は上記した構成を採用することで極めて顕著な効果を奏する。即ち、感光性シートを使用することにより従来の金型加工を上回る精度にセラミックコア等を加工することができる。また金型を全く使用しないことから、金型加工におけるチッピング、バリ、変形、脱落がなく精度の悪化や歩留まりの低下が抑制される。   The present invention has an extremely remarkable effect by adopting the above-described configuration. That is, by using a photosensitive sheet, a ceramic core or the like can be processed with higher accuracy than conventional mold processing. In addition, since no mold is used, there is no chipping, burrs, deformation, or dropout during mold processing, and accuracy deterioration and yield reduction are suppressed.

さらに、セラミックグリーンシート作製時に、消失材料と絶縁体材料との厚さの調整を行い、例えば略平坦化した層を用いることにより、焼結体の寸法精度のさらなる向上が可能となる。この効果は、電着による略平坦化、或いは制御性良く充填形成した層を使用することによっても得られる。すなわち、この略平坦化したセラミックグリーンシートを使用することにより、積層時のシートズレが生じにくく、それにより積層体形成時の目的とするセラミック造形物の変形等が極めて顕著に抑制され、正確な外形形状を形成することができ、それにより、焼成後の変形等も顕著に抑制できる。   Furthermore, the dimensional accuracy of the sintered body can be further improved by adjusting the thicknesses of the disappearing material and the insulator material during the production of the ceramic green sheet and using, for example, a substantially flattened layer. This effect can also be obtained by using a layer that is substantially flattened by electrodeposition or filled and formed with good controllability. In other words, by using this substantially flattened ceramic green sheet, sheet misalignment is unlikely to occur at the time of stacking, and thereby the deformation of the target ceramic shaped object at the time of forming the laminate is extremely remarkably suppressed, and an accurate outer shape is achieved. A shape can be formed, and thereby deformation after firing can be remarkably suppressed.

また端子電極を有する電子部品用セラミック造形物を作製する場合、煩雑な端子電極の後付け工程を必要とせず、製造工程を簡略化することができる。さらには、各種セラミックグリーンシートを作製、積層、プレスして積層体を形成した後、その積層体の焼成と同時に端子電極が形成されることから、端子電極の剥離などが抑制される。   Moreover, when producing the ceramic molded article for electronic components which has a terminal electrode, a complicated retrofit process of a terminal electrode is not required and a manufacturing process can be simplified. Furthermore, since various ceramic green sheets are produced, laminated, and pressed to form a laminated body, and then the terminal electrode is formed simultaneously with the firing of the laminated body, peeling of the terminal electrode is suppressed.

本発明にかかる電子部品用セラミック造形物は、電子部品用セラミック造形物が積層体から得られるように、少なくとも絶縁体材料および消失材料並びに任意に導電体材料からなる複数のシート状部材を積層してなる積層体に消失処理を施すことにより、立体形状を形成することにより製造される。特に、絶縁体材料と消失材料との厚さの微調整をフォトリソグラフィー或いは電着法により、略平坦なシート状部材とすることで、目的とするセラミック造形物の外形形状の寸法精度を高めることができる。   The ceramic shaped article for an electronic component according to the present invention is formed by laminating a plurality of sheet-like members made of at least an insulator material and a disappearing material and optionally a conductive material so that the ceramic shaped article for an electronic component is obtained from the laminate. It is manufactured by forming a three-dimensional shape by subjecting the laminated body to a disappearance treatment. In particular, by making fine adjustment of the thickness of the insulator material and the disappearance material into a substantially flat sheet-like member by photolithography or electrodeposition method, the dimensional accuracy of the outer shape of the target ceramic shaped object is improved. Can do.

なお、本発明で使用する消失材料は、特定の処理を行うことによって消失し、且つ当該処理によってセラミックグリーンシート積層体を構成する材料に悪影響を与えないことが望ましい。この消失材料と処理方法の具体的な例としては、消失材料が水溶性アクリル樹脂、水溶性ワックス等である場合は、水洗による除去方法、消失材料がパラフィン、グリース等である場合は、高温処理による除去方法、消失材料がポジレジスト等である場合は、露光現像による除去方法、消失材料がネガレジストや各種樹脂である場合は、焼成処理による除去などが挙げられ、またこれらに限定されるものではない。   In addition, it is desirable that the disappearing material used in the present invention disappears by performing a specific treatment and that the treatment does not adversely affect the material constituting the ceramic green sheet laminate. As specific examples of the disappearing material and the processing method, when the disappearing material is a water-soluble acrylic resin, water-soluble wax, or the like, a removal method by washing with water, and when the disappearing material is paraffin, grease or the like, a high-temperature treatment is performed. If the disappearing material is a positive resist or the like, the removal method by exposure and development, and if the disappearing material is a negative resist or various resins, include removal by baking treatment, etc. is not.

以下、本発明を図面を参照して詳細に説明する。図1乃至図5は、本発明にかかる電子部品用セラミック造形物の製造方法における主要部の工程を示すフローチャートである。なお、図1乃至図5は、基体、シート等の要部についての断面を示している。   Hereinafter, the present invention will be described in detail with reference to the drawings. FIG. 1 to FIG. 5 are flowcharts showing the steps of the main part in the method for manufacturing a ceramic molded article for electronic parts according to the present invention. FIGS. 1 to 5 show cross sections of main parts such as a base and a sheet.

図1に示すように、複数個取りを前提としたサイズの基材1およびセラミックスラリー2からなるシートに、後にコア等となる立体が層状に分割された外形形状が複数個並ぶ様に任意の方法で貫通溝3の加工を施す。シートに感光性が付与されている場合は、フォトリソグラフィーの技術により貫通溝形成が可能である。この貫通溝部に後に消失(焼失)可能なアクリル樹脂等からなる消失材料4を充填する。このようにしてコア等の立体を形成する各層を同様に作製する。これらの複数のシートを積層、プレスして積層体を形成(積層体5)後、これを焼成することにより、焼成過程で個々の立体(コア)に同時に分離しつつ、焼成が終了した立体(セラミックコア6)が得られる。   As shown in FIG. 1, an arbitrary shape is formed so that a plurality of outer shapes obtained by dividing a solid, which becomes a core or the like into layers, are arranged on a sheet made of a base material 1 and a ceramic slurry 2 having a size on the premise of taking a plurality of pieces. The through groove 3 is processed by the method. When photosensitivity is imparted to the sheet, the through groove can be formed by a photolithography technique. This through-groove portion is filled with a disappearing material 4 made of an acrylic resin or the like that can disappear (burn out) later. In this way, each layer forming a solid such as a core is similarly produced. A plurality of these sheets are laminated and pressed to form a laminate (laminate 5), and then fired to separate the individual solids (cores) simultaneously in the firing process, and the solids that have been fired ( A ceramic core 6) is obtained.

図2に示すように、複数個取りを前提としたサイズの基材1および感光性が付与されたセラミックスラリー2からなるシートに、後にコア等となる立体が層状に分割された外形形状が複数個並ぶ様にフォトリソグラフィーの技術(不図示)により貫通溝3の加工を施す。この露光条件によるシートの厚さ方向での感光性能を利用して、露光現像処理により貫通溝の形成と厚さを微調整することも可能である。この貫通溝部に後に消失(焼失)可能なフォトレジスト等の感光性材料からなる消失材料4を充填する。この消失材料も同様に厚さ方向での感光性能を上手く利用して、露光現像処理により先に形成したシートの厚さと略一致させる事が可能である。このようにしてコア等の立体を形成する略平坦な各層を同様に作製する。これらの複数のシートを積層、プレスして積層体を形成(積層体5)後、これを焼成することにより、焼成過程で個々の立体(コア)に同時に分離しつつ、焼成が終了した立体(セラミックコア6)が得られる。   As shown in FIG. 2, there are a plurality of outer shapes in which a solid body, which is a core or the like, is divided into layers on a sheet made of a base material 1 having a size on the premise of taking a plurality of pieces and a ceramic slurry 2 imparted with photosensitivity. The through-grooves 3 are processed by a photolithography technique (not shown) so that they are lined up. By using the photosensitive performance in the thickness direction of the sheet under the exposure conditions, it is possible to finely adjust the formation and thickness of the through groove by exposure and development processing. The through groove portion is filled with a disappearing material 4 made of a photosensitive material such as a photoresist that can disappear (burn out) later. Similarly, this disappearing material can also be made to substantially match the thickness of the sheet previously formed by exposure and development processing by making good use of the photosensitive performance in the thickness direction. In this way, substantially flat layers forming a solid such as a core are similarly produced. A plurality of these sheets are laminated and pressed to form a laminate (laminate 5), and then fired to separate the individual solids (cores) simultaneously in the firing process, and the solids that have been fired ( A ceramic core 6) is obtained.

図3に示すように、レジスト材料等の感光性能を持つ消失材料4からなる層を基材1上に形成し、後にコア等となる立体が層状に分割された外形形状部を露光現像処理により(不図示)除去する。この外形形状部に対応する空間にセラミックスラリー2を充填する。この場合において、基材1が光透過性の材料からなり、セラミックスラリーが感光性が付与された物であれば、乾燥固化後に露光条件によるシートの厚さ方向での感光性能を利用して、露光現像処理にて溝の形成と厚さの微調整も可能となる。このようにしてコア等の立体を形成する各層を同様に作製する。これらの複数のシートを積層、プレスして積層体を形成(積層体5)後、これを焼成することにより、焼成過程で個々の立体(コア)に同時に分離しつつ、焼成が終了した立体(セラミックコア6)が得られる。   As shown in FIG. 3, a layer made of a disappearing material 4 having a photosensitive performance such as a resist material is formed on a base material 1, and an outer shape portion obtained by dividing a solid to be a core or the like into layers is exposed and developed. Remove (not shown). A space corresponding to the outer shape portion is filled with the ceramic slurry 2. In this case, if the base material 1 is made of a light-transmitting material and the ceramic slurry has a photosensitivity, using the photosensitive performance in the thickness direction of the sheet according to the exposure conditions after drying and solidification, Grooves can be formed and the thickness can be finely adjusted by exposure and development. In this way, each layer forming a solid such as a core is similarly produced. A plurality of these sheets are laminated and pressed to form a laminate (laminate 5), and then fired to separate the individual solids (cores) simultaneously in the firing process, and the solids that have been fired ( A ceramic core 6) is obtained.

図4に示すように、レジスト材料等の感光性能を持つ消失材料4からなる層を導電性を有する基材1上に形成し、後にコア等となる立体が層状に分割された外形形状部を露光現像処理(不図示)により除去する。この外形形状部に対応する空間に電着により誘電体粉、磁性体粉等の絶縁体材料9を充填する。基材が導電処理を施された光透過性の材料からなり、絶縁体粉と感光性樹脂材料を共析させて層を形成し、形成した層が所望の光透過性を有する場合には、最初にこの層を形成し、乾燥固化後に露光条件によるシートの厚さ方向での感光性能を利用して、露光現像処理にて溝の形成と厚さの微調整も可能である。この溝に電着等により、消失材料4を形成することとしても良い。このようにしてコア等の立体を形成する各層を同様に作製する。これらの複数のシートを積層、プレスして積層体を形成(積層体5)後、これを焼成することにより、焼成過程で個々の立体(コア)に同時に分離しつつ、焼成が終了した立体(セラミックコア6)が得られる。   As shown in FIG. 4, a layer made of a disappearing material 4 having a photosensitive performance such as a resist material is formed on a conductive base material 1, and an outer shape portion in which a solid that becomes a core or the like is divided into layers is formed. It is removed by exposure development processing (not shown). A space corresponding to the outer shape portion is filled with an insulating material 9 such as dielectric powder or magnetic powder by electrodeposition. When the base material is made of a light-transmitting material that has been subjected to a conductive treatment, and a layer is formed by co-depositing the insulator powder and the photosensitive resin material, and the formed layer has a desired light transmittance, This layer is formed first, and after drying and solidification, it is possible to form a groove and finely adjust the thickness by exposure and development processing using the photosensitive performance in the thickness direction of the sheet according to the exposure conditions. The disappearing material 4 may be formed in this groove by electrodeposition or the like. In this way, each layer forming a solid such as a core is similarly produced. A plurality of these sheets are laminated and pressed to form a laminate (laminate 5), and then fired to separate the individual solids (cores) simultaneously in the firing process, and the solids that have been fired ( A ceramic core 6) is obtained.

図5に示すように、レジスト材料等からなる感光性能を持つ消失材料4からなる層を導電性を有する基材1上に形成し、後にコア等となる立体が層状に分割された外形形状部を露光現像処理により(不図示)除去する。外形形状部に対応する空間に電着により誘電体粉、磁性体粉等の絶縁体材料9を充填する。基材が導電処理を施された光透過性の材料からなり、絶縁体粉と感光性樹脂材料を共析させて層を形成し、形成した層が所望の光透過性を有する場合には、乾燥固化後に露光条件によるシートの厚さ方向での感光性能を利用して、露光現像処理にて溝の形成と厚さの微調整も可能である。このようにしてコア等の立体を形成する各層を同様に作製する。必要に応じて層を適宜設計し、電極を必要とする層および部位には、任意の方法で貫通溝3の加工を施し、好ましくは電着技術により電極材料7を形成する。これらの各シートを積層、プレスして積層体を形成(積層体5)後、これを焼成することにより、焼成過程で個々の立体(コア)に同時に分離しつつ、焼成が終了した立体(電極付きセラミックコア6)が得られる。   As shown in FIG. 5, an outer shape portion in which a layer made of a disappearance material 4 made of a resist material or the like and having a photosensitive property is formed on a conductive base material 1, and a solid that becomes a core or the like later is divided into layers. Are removed by exposure and development (not shown). A space corresponding to the outer shape portion is filled with an insulating material 9 such as dielectric powder or magnetic powder by electrodeposition. When the base material is made of a light-transmitting material that has been subjected to a conductive treatment, and a layer is formed by co-depositing the insulator powder and the photosensitive resin material, and the formed layer has a desired light transmittance, By using the photosensitive performance in the thickness direction of the sheet according to the exposure conditions after drying and solidification, it is possible to form grooves and finely adjust the thickness by exposure and development processing. In this way, each layer forming a solid such as a core is similarly produced. The layer is appropriately designed as necessary, and the through-groove 3 is processed by an arbitrary method in the layer and the portion requiring the electrode, and the electrode material 7 is preferably formed by an electrodeposition technique. Each of these sheets is laminated and pressed to form a laminate (laminate 5), and then fired to separate the individual solids (cores) simultaneously in the firing process, and the solids (electrodes) that have been fired The attached ceramic core 6) is obtained.

上記実施例は、本発明の好ましい実施態様としての、複数の電子部品用セラミック造形物を同時に製造する場合を例示したが、1個のみの電子部品用セラミック造形物も同様に得られることは、当業者であれば当然に理解されよう。例えば、最終製品の試作の過程で、種類の異なる製品を別個独立に製造して、効果を確認して製品の方向性を決定する場合には、複数個の同種製品を製造するのではなく、1個のみの製品を製造する場合がある。かかる場合、従来法では、各種類に合わせた金型をそれぞれ作製して、異なる製品を製造することを要するが、本発明の方法では、図6に示すように、セラミックグリーンシート8a、8bの厚さ、或いは枚数を変更させるだけで、異なる種類の積層型製品を製造することができる。図6では、誘電体フィルタコアの、切り欠き(溝)長さの異なる例を示している。   Although the said Example illustrated the case where the several ceramic modeling thing for electronic components as a preferable embodiment of this invention was manufactured simultaneously, only one ceramic modeling thing for electronic components is obtained similarly, It will be understood by those skilled in the art. For example, in the process of prototyping the final product, when different types of products are manufactured separately and the effect is confirmed to determine the direction of the product, rather than manufacturing a plurality of similar products, Only one product may be manufactured. In such a case, in the conventional method, it is necessary to manufacture dies for each type and manufacture different products. However, in the method of the present invention, as shown in FIG. 6, the ceramic green sheets 8a and 8b Different types of stacked products can be manufactured simply by changing the thickness or the number of sheets. FIG. 6 shows an example in which the notch (groove) length of the dielectric filter core is different.

本発明のセラミックコアの製造方法の一例を示す工程図である。It is process drawing which shows an example of the manufacturing method of the ceramic core of this invention. 本発明のセラミックコアの製造方法のもう一つの例を示す工程図である。It is process drawing which shows another example of the manufacturing method of the ceramic core of this invention. 本発明のセラミックコアの製造方法の他の一例を示す工程図である。It is process drawing which shows another example of the manufacturing method of the ceramic core of this invention. 本発明のセラミックコアの製造方法のさらなる他の一例を示す工程図である。It is process drawing which shows another example of the manufacturing method of the ceramic core of this invention. 本発明のセラミックコアの製造方法のさらなる他の一例を示す工程図である。It is process drawing which shows another example of the manufacturing method of the ceramic core of this invention. 切り欠き(溝)長さの異なる誘電体フィルタコアの一製造例を示す工程図である。It is process drawing which shows one example of manufacture of the dielectric filter core from which notch (groove) length differs.

符号の説明Explanation of symbols

1:基材
2:セラミックスラリー
3:貫通溝
4:消失材料
5:積層体
6:セラミックコア
7:電極材料
8a、8b:セラミックグリーンシート
9:絶縁体材料
1: Substrate 2: Ceramic slurry 3: Through groove 4: Disappearing material 5: Laminate 6: Ceramic core 7: Electrode material 8a, 8b: Ceramic green sheet 9: Insulator material

Claims (8)

電子部品用セラミック造形物が積層体から得られるように、
少なくとも絶縁体材料および消失材料を有する複数のシート状部材を積層してなる積層体に消失処理を施すことにより、
立体形状を形成することを特徴とする、
電子部品用セラミック造形物の製造方法。
So that the ceramic molding for electronic parts can be obtained from the laminate,
By applying a disappearance treatment to a laminate formed by laminating a plurality of sheet-like members having at least an insulator material and a disappearing material,
It is characterized by forming a three-dimensional shape,
Manufacturing method of ceramic molded article for electronic parts.
前記積層体に対して、前記消失処理を施すことにより、前記立体形状を形成すると同時に、複数個の造形物に分離することを特徴とする請求項1に記載の電子部品用セラミック造形物の製造方法。   The manufacturing of the ceramic shaped article for an electronic component according to claim 1, wherein the three-dimensional shape is formed at the same time as the three-dimensional shape is formed by performing the disappearance process on the laminated body. Method. 前記シート状部材が略平坦な層であることを特徴とする、請求項1または2項に記載の電子部品用セラミック造形物の製造方法。   The method for producing a ceramic shaped article for an electronic component according to claim 1, wherein the sheet-like member is a substantially flat layer. 前記消失材料および前記絶縁体材料の少なくとも一方は感光性を有し、前記消失材料と前記絶縁体材料の厚さの調整を、露光現像処理により行うことを特徴とする、請求項1、2或いは3項のうち何れか1項に記載の電子部品用セラミック造形物の製造方法。   The at least one of the disappearance material and the insulator material has photosensitivity, and adjustment of the thickness of the disappearance material and the insulator material is performed by exposure and development processing. The manufacturing method of the ceramic molded article for electronic components of any one of 3 items | terms. 前記消失材料が溶媒に溶解可能な材料であり、前記消失処理は溶解であることを特徴とする、請求項1、2、3或いは4項のうち何れか1項に記載の電子部品用セラミック造形物の製造方法。   5. The ceramic molding for electronic parts according to claim 1, wherein the disappearing material is a material that can be dissolved in a solvent, and the disappearing treatment is dissolution. 6. Manufacturing method. 前記消失処理は加熱あるいは焼成であることを特徴とする、請求項1、2、3或いは4項のうち何れか1項に記載の電子部品用セラミック造形物の製造方法。   The method for producing a ceramic shaped article for an electronic component according to any one of claims 1, 2, 3, or 4, wherein the disappearance treatment is heating or firing. 前記電子部品用セラミック造形物を形成する各層を作製する工程において、
必要に応じて層を適宜設計し、電極等を必要とする層および部位に、好ましくは電着技術により電極材料を形成することを特徴とする、請求項1、2、3、4、5或いは6項のうち何れか1項に記載の電子部品用セラミック造形物の製造方法。
In the step of forming each layer forming the ceramic molded article for electronic parts,
The layer is appropriately designed as necessary, and an electrode material is preferably formed on the layer and the portion requiring the electrode, etc., preferably by an electrodeposition technique. The manufacturing method of the ceramic molded article for electronic components of any one of 6 items.
絶縁体材料パターンが、電着法により形成される、請求項7に記載の電子部品用セラミック造形物の製造方法。
The manufacturing method of the ceramic molded article for electronic components of Claim 7 with which an insulator material pattern is formed by the electrodeposition method.
JP2004219510A 2004-07-28 2004-07-28 Method for manufacturing ceramic molded object for electronic parts Pending JP2006041204A (en)

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Country Link
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008270269A (en) * 2007-04-16 2008-11-06 Murata Mfg Co Ltd Core for winding-type electronic component, its production process and winding-type electronic component

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008270269A (en) * 2007-04-16 2008-11-06 Murata Mfg Co Ltd Core for winding-type electronic component, its production process and winding-type electronic component

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