JP2006019185A - Gas exchange device and lamp manufacturing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a gas exchange device capable of efficiently exchanging internal gas in a tube without causing a cost increase, and a lamp manufacturing device. <P>SOLUTION: A gas lead-in/-out device 7 is equipped with an upper turret 10 and a lower turret 11. An upper head 13 is provided on the upper turret 10, a lower head 14 is provided on the lower turret 11, the upper opening end of a glass tube 16 is mounted to the upper head 13 with its longitudinal direction made almost vertical, and its lower opening end is mounted to the lower head 14. In this glass tube 16, flushing gas is supplied from a first gas passage 17 connected to the upper head 13 while being heated by a heating furnace 26, and is sucked and exhausted from the exhaust passage 23 connected to the lower head 14. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention belongs to a technical field including a gas exchanging apparatus capable of exchanging an internal gas of a tube and a lamp manufacturing apparatus such as a cold cathode discharge lamp.

  For example, a cold cathode discharge lamp (CCFL) is used as a light source for a backlight of a liquid crystal display device or the like. The bulb portion of such a discharge lamp is generally manufactured as follows. First, a fluorescent film is formed on the inner wall surface of the glass tube. Next, the first electrode mount is sealed on one end side of the glass tube, and then the second electrode mount is temporarily fixed on the other end side, and a mercury alloy member is inserted. And the inside of a glass tube is once exhausted and an inert gas is introduce | transduced. While maintaining this state, mercury vapor is released into the glass tube by heating. Thereafter, the second electrode mount is sealed, and at the same time, the end portion side is separated from the second electrode mount position. Thereby, a valve part is formed.

In the gas exchange apparatus for exhausting the inside of the glass tube and supplying an inert gas, a head for exhaust and gas introduction is mounted on the open end side of the glass tube sealed at one end, A vacuum pump is used to evacuate from the opening end side or an inert gas is introduced (for example, refer to Patent Document 1).
JP 7-254364 A

  However, when the diameter of the glass tube is thin or the total length is very long, in the gas exchange device, the gas (oxygen) in the glass tube is less likely to be exhausted as it is farther from the opening end, and the exhaust time is significantly longer. There is a risk of becoming. In addition, a vacuum pump having a high suction capability may be required, and in this case, the equipment cost may increase. In addition, a getter material may be required to adsorb oxygen remaining in the glass tube. As a result, there is a concern that the manufacturing cost increases.

  This invention is made | formed in view of the said situation, The objective is to provide the gas exchange apparatus which can replace | exchange the internal gas of a pipe | tube efficiently, and the lamp manufacturing apparatus, without causing the increase in cost. is there.

  In the following, each means suitable for solving the above-mentioned purpose will be described in terms of items. In addition, the effect etc. peculiar to the means to respond | correspond as needed are added.

  Means 1. A gas exchange device capable of exchanging the internal gas of a pipe having both ends opened in the longitudinal direction, an upper head to which one open end of the pipe is attached, and a lower head to which the other open end of the pipe is attached And the two heads are configured so that the longitudinal direction of the tube is held substantially vertically, and the upper head is connected to an air supply passage for supplying a predetermined gas into the tube, A gas exchange device, wherein an exhaust passage for sucking the inside of the pipe is connected to the lower head.

  According to the above means 1, the longitudinal direction of the pipe is kept substantially vertical by attaching the open end of the pipe to the upper head and the lower head. An air supply channel is connected to the upper head, and a predetermined gas is supplied into the pipe from the upper opening end of the pipe held substantially vertically. On the other hand, since the exhaust flow path is connected to the lower head, the inside of the pipe is sucked from the lower opening end of the pipe. Therefore, by repeatedly supplying and exhausting the predetermined gas or exhausting the pipe while supplying the predetermined gas, the internal gas of the pipe that originally existed is introduced from the upper end of the pipe. The predetermined gas is exhausted from the lower end of the pipe. Therefore, the internal gas of the pipe can be exchanged for a predetermined gas smoothly and efficiently in a short time and more reliably. Further, since it is not necessary to use an expensive exhaust means having a very high suction capacity corresponding to the exhaust flow path or to use a Kedder material, it is possible to suppress an increase in cost.

  Further, when the inside of the tube is sucked, unnecessary deposits in the tube may be peeled off. Even in this case, since the longitudinal direction of the tube is supported substantially vertically, the peeled off deposit is easily dropped by its own weight and moved down the tube. In addition, since it is sucked from the lower end of the pipe, the deposits can be efficiently discharged to the outside of the pipe together with the gas in the pipe.

  Mean 2. A gas exchange device capable of exchanging the internal gas of a pipe having both ends opened in the longitudinal direction, wherein an upper head to which the upper open end of the pipe in a vertical state is attached, and a lower part to which the lower open end of the pipe is attached A head, and one end of an air supply passage is connected to the upper head, and the other end of the air supply passage is connected to an air supply means, and a predetermined gas is supplied from the air supply means to the air supply passage. And a predetermined gas can be supplied into the pipe via the upper head, and one end of an exhaust passage is connected to the lower head, and the other end of the exhaust passage is connected to an exhaust means. A gas exchange apparatus characterized in that the internal gas of the pipe can be sucked and exhausted through the lower head and the exhaust passage from the exhaust means.

  According to the means 2, basically the same effects as the means 1 can be obtained.

  Means 3. The gas exchange apparatus according to means 1 or 2, further comprising heating means capable of heating the pipe at a temperature equal to or lower than a softening point of the pipe.

  According to the above means 3, the discharge of gas or the like in the pipe can be further promoted by heating the pipe by the heating means.

  Means 4. The gas exchange apparatus according to any one of means 1 to 3, further comprising sealing heating means for heating and sealing the tube.

  As in the above means 4, the sealing heating means is provided, and the tube can be sealed with the gas in the tube being exchanged.

  Means 5. The upper head and the lower head are configured to be able to move in synchronization, and according to the position on the moving path of the pipe supported by the upper head and the lower head, The gas exchange device according to any one of means 1 to 4, wherein the open / close state is switchable.

  According to the means 5, the pipe is moved while maintaining the substantially vertical state by moving the upper head and the lower head in synchronization. And according to the position on the movement path | route of a pipe | tube, since predetermined | prescribed gas is supplied in a pipe | tube or the suction | inhalation of the gas in a pipe | tube is performed, working efficiency can be improved.

  Means 6. An upper turret and a lower turret supported rotatably, the upper head is provided in the upper turret, the lower head is provided in the lower turret, and the upper turret and the lower turret can be rotated synchronously. A gas exchange device in the means 5 characterized by comprising.

  According to the means 6, the upper head is provided in the upper turret and the lower head is provided in the lower turret, and the upper turret and the lower turret are rotated in synchronization to be supported by the upper head and the lower head. The pipe is moved along a predetermined annular path. For this reason, the work start position and the work end position for gas exchange or the like in the pipe in the gas exchange device can be arranged close to each other, and the work efficiency can be further improved. In addition, space can be saved.

  Mean 7 The gas exchange apparatus according to claim 6, wherein an exhaust means for suction exhaust is connected to the exhaust flow path, and the exhaust means is provided in a lower turret.

  According to the above means 7, since the exhaust means is installed in the lower turret, the flow path configuration of the exhaust flow path connected to the lower head as compared with the case where the exhaust means is installed outside the upper turret or the turret Can be simplified, and as a result, the apparatus can be made compact.

  Means 8. The upper head is further connected to a sealing gas flow path for supplying a predetermined sealing gas into the pipe, and the main component of the sealing gas and the predetermined gas is common, The gas exchange device according to any one of means 1 to 7, wherein a ratio of a main component contained in the gas is lower than a ratio of a main component contained in the sealing gas.

  According to the means 8, the sealing gas is supplied into the pipe via the sealing gas channel connected to the upper head. As a result, two types of gases having different ratios of the main components, that is, a predetermined gas and a sealed gas can be supplied into the pipe. In general, the higher the purity of the gas, the higher the cost, and the sealing gas has a higher cost than the predetermined gas. For this reason, if a predetermined gas is supplied to discharge the internal gas of the pipe existing before the gas exchange, and finally the sealing gas is supplied for sealing, the gas is replaced with a high-purity gas. In addition, it is possible to suppress an increase in the cost of supply gas that is likely to be discharged and wasted.

  Means 9. 9. The gas exchange device according to any one of means 1 to 8, wherein the tube is a glass tube for a lamp.

  Means 10. 10. The gas exchange apparatus according to any one of means 1 to 9, wherein the tube is a glass tube for a cold cathode discharge lamp having a fluorescent film on an inner wall surface.

  Means 11. A lamp manufacturing apparatus comprising the gas exchange device according to any one of means 1 to 10.

  As in the means 11, the lamp manufacturing apparatus includes the gas exchange device, whereby the internal gas of the tube can be efficiently exchanged, and the manufacturing cost of the lamp can be suppressed.

  Hereinafter, an embodiment will be described with reference to the drawings.

  As shown in FIG. 2, the cold cathode discharge lamp 1 constituting the lamp in the present embodiment includes a bulb portion 2 made of a glass tube, and electrode mounts 3 and 4 provided in a sealed state at both ends of the bulb portion 2. It has. A fluorescent film 5 is provided on the inner wall surface of the bulb portion 2, and an inert gas and mercury vapor are sealed inside the bulb portion 2. In the figure, for the sake of convenience, the length of the valve portion 2 is shown to be relatively short, but in actuality it is quite long. For example, the valve portion 2 in the present embodiment is configured to have an outer diameter of about 2 mm to 6 mm, a wall thickness of about 0.2 mm to about 0.5 mm, and a length of about several tens of mm to several hundreds of mm. Yes. Of course, it may deviate from the above numerical range.

  The cold cathode discharge lamp 1 is manufactured as follows by using a predetermined manufacturing apparatus. That is, first, the fluorescent film 5 is formed on a predetermined portion of the inner wall surface of the glass tube. Reduced diameter portions are formed at two locations along the longitudinal direction on one end side of the glass tube on which the fluorescent film 5 is formed. Next, the first electrode mount 3 is inserted into the other end of the glass tube and temporarily fixed. Subsequently, the second electrode mount 4 is inserted from the one end portion, and the second electrode mount 4 is temporarily fixed to the one reduced diameter portion. Further, the mercury alloy member is inserted closer to the end portion than the other reduced diameter portion (the reduced diameter portion located on the one end side). Thereafter, deaeration in the glass tube and introduction of an inert gas are performed. In this state, the sealing is once performed on the end side of the first electrode mount 3 and on the end side of the inserted mercury alloy member. Furthermore, mercury vapor is released into the glass tube by heating. Then, the temporarily fixed first electrode mount 3 and second electrode mount 4 are sealed, respectively, and the end side is separated from both electrode mounts 3 and 4. Thereby, the valve part 2 is formed. Thus, the said cold cathode discharge lamp 1 is obtained through a series of processes.

  Now, an illustration composed of various devices for the above various processes (for example, a coating layer forming device, a reduced diameter portion forming device, an insertion / temporary fixing device, a degassing / gas introducing device, a heating device, a sealing device, etc.) When the cold cathode discharge lamp 1 is obtained using a manufacturing apparatus that does not, a deaeration / gas introduction device 7 as a gas exchange device unique to the present embodiment is used in the deaeration / gas introduction step.

  As shown in FIGS. 1A and 1B, the degassing / gas introducing device 7 includes a base portion 8, a support column 9 extending in a substantially vertical direction from the base portion 8, and upper and lower portions of the support column 9. An upper turret 10 and a lower turret 11 that are rotatably provided are provided. The upper turret 10 and the lower turret 11 are configured to be able to rotate in synchronization with each other by a predetermined angle (for example, 60 degrees in this embodiment) around the axis of the support column 9 by a rotation mechanism (not shown). The upper turret 10 includes an upper head 13 for each predetermined angle. The lower turret 11 includes a lower head 14 provided at the predetermined angle so as to face the upper head 13, and a vertical moving means 15 for moving the lower head 14 in the vertical direction. By the upper head 13 and the lower head 14, the glass tube 16 is supported at both ends in the longitudinal direction with the tube axis directed in a substantially vertical direction. Further, by rotating the upper turret 10 and the lower turret 11, the glass tube 16 supported by the upper head 13 and the lower head 14 can be sequentially moved through the first to sixth work positions P1 to P6. ing.

  Each upper head 13 includes a first gas passage 17 as an air supply passage for introducing a flushing gas, a second gas passage 18 for introducing a sealing gas, and a glass tube 16. A pressure sensor 19 for measuring pressure is connected. The other end side of the first gas flow path 17 is connected to a flushing gas cylinder (not shown) as an air supply means, and a first opening and closing for opening and closing the flow path is in the middle of the first gas flow path 17. A valve 20 is provided. Similarly, the other end side of the second gas flow path 18 is connected to a sealing gas cylinder (not shown), and a second on-off valve for opening and closing the flow path is provided in the middle of the second gas flow path 18. 21 is provided. In the present embodiment, argon gas is supplied from both the flushing gas cylinder and the sealing gas cylinder. However, the argon gas in the sealing gas cylinder has a higher purity than the argon gas in the flushing gas cylinder.

  Each lower head 14 is connected to an exhaust passage 23 for sucking and exhausting air in the glass tube 16. The other end of each exhaust passage 23 is connected to a plurality of vacuum pumps 24 as exhaust means installed on the lower turret 11, and the passage is opened and closed in the middle of the exhaust passage 23. A vacuum electromagnetic valve 25 is provided for this purpose.

  A heating furnace 26 as a heating means is installed and fixed between the upper turret 10 and the lower turret 11 in a predetermined range along the movement path of the glass tube 16. In the present embodiment, the predetermined range corresponds to the second to fourth work positions P2 to P4.

  Further, at the fifth working position P5, a pair of lower sealing burners 28 constituting a sealing heating means for sealing the glass tube 16 corresponding to the lower portion of the glass tube 16, and an upper portion of the glass tube 16 are provided. And a pair of upper preheating burners 29 for preheating the glass tube. Further, at the sixth work position P6, a pair of upper sealing burners 30 constituting a sealing heating means for sealing the preheating position corresponding to the upper part of the glass tube 16, and the longitudinal direction of the glass tube 16 A chuck (not shown) for gripping the vicinity of the center is provided. The chuck is configured to be movable toward and away from the glass tube 16 and up and down by a driving means (not shown). Each of the burners 28, 29, and 30 is configured to be movable toward and away from the glass tube 16 by a moving means (not shown).

  Next, the procedure of degassing and introducing gas in the glass tube 16 in the degassing / gas introducing device 7 and the effects achieved at that time will be described. In the deaeration / gas introduction device 7 in the present embodiment, a glass tube 16 as shown in FIG. That is, both ends of the glass tube 16 are open, and the fluorescent film 5 is formed on the inner wall surface. Further, the first electrode mount 3 is locked to one end side in the longitudinal direction of the glass tube 16, and the second electrode mount 4 is locked to the other end side, and is higher than the second electrode mount 4. A mercury alloy member 32 is inserted corresponding to the constricted portion. In addition, a sufficient gap is formed in the engaging portion of the first electrode mount 3 and the second electrode mount 4 in the glass tube 16 so that air, argon gas, or the like can pass through.

  First, as shown in FIG. 3 (b), the second electrode mount 4 of the glass tube 16 with the lower head 14 lowered downward at the first working position P1 of the degassing / gas introduction device 7. The side end is inserted into the upper head 13. Then, the lower head 14 is raised by operating the vertical movement means 15. Then, the end of the glass tube 16 on the first electrode mount 3 side is inserted into the lower head 14. Further, by operating the rotation mechanism, the upper turret 10 and the lower turret 11 are rotated, and the glass tube 16 is moved to the second working position P2.

  Between the second work position P2 and the fourth work position P4, as shown in FIG. 3C, the glass tube 16 is heated by the heating furnace 26 to about 300 ° C. to 400 ° C. Flushing is performed. The heating promotes the discharge of moisture, air, and the like in the glass tube 16. At the same time, the inside of the glass tube 16 is depressurized by flushing, and the atmosphere in the glass tube 16 is replaced with flushing gas.

  Here, the flushing will be described. First, the vacuum electromagnetic valve 25 is opened, and the inside of the glass tube 16 is evacuated and decompressed by being sucked from the lower end of the glass tube 16 by the vacuum pump 24 through the exhaust passage 23. Next, when the vacuum electromagnetic valve 25 is closed and the second on-off valve 21 is opened, the flushing gas is introduced from the flushing gas cylinder through the second gas flow path 18 into the glass tube 16 from the upper end. By repeating the exhaust and the introduction of the flushing gas (see FIG. 4), the pressure in the glass tube 16 is gradually reduced, and the atmosphere in the glass tube 16 is replaced with the flushing gas.

  Since the pressure in the glass tube 16 is measured by the pressure sensor 19 after the second work position P2, a pressure abnormality such as a leak due to a crack in the glass tube 16 is detected by checking the pressure change. be able to.

  After completion of the flushing, the exhaust passage 23 and the second gas passage 18 are closed, and the glass tube 16 is moved to the fifth working position P5. At the fifth work position P5, the lower sealing burner 28 is moved closer to the glass tube 16 by the moving means. Then, as shown in FIG.3 (d), the lower end side is sealed rather than the 1st electrode mount 3 position of the glass tube 16. FIG. Further, the first on-off valve 20 is opened, and the sealing gas is introduced into the glass tube 16 from the sealing gas cylinder via the first gas flow path 17. Thereby, the purity of the argon gas in the glass tube 16 can be increased. At this time, by moving the upper preheating burner 29 closer to the glass tube 16 by the moving means, the upper end side of the glass tube 16 from the mercury alloy member insertion position is preheated.

  Furthermore, the glass tube 16 is moved to the sixth work position P6. In the sixth work position P6, first, the lower head 14 is lowered by operating the vertical movement means 15. Thereby, the lower head 14 is removed from the lower end of the glass tube 16. Then, the vicinity of the center in the longitudinal direction of the glass tube 16 is held by the chuck. Next, the upper sealing burner 30 is moved closer to the glass tube 16 by moving means. Then, the preheating position of the glass tube 16 is further heat-softened and sealed. Further, by lowering the chuck at this time, the glass tube 16 is cut off at the sealing position as shown in FIG.

  Thus, the glass tube 16 passes through the first work position P1 to the sixth work position P6 in order, whereby the atmosphere in the glass tube 16 is exhausted, and the sealing gas is introduced into the glass tube 16, and The vicinity of both ends in the longitudinal direction is sealed.

  As described above in detail, the exhaust passage 23 is connected to the lower end side of the glass tube 16 held substantially vertically, and the second gas passage 17 is connected to the upper end side. For this reason, during the flushing, the glass tube 16 is sucked from the lower end, and the flushing gas is introduced from the upper end. Therefore, the atmosphere in the glass tube 16 is exhausted by being pushed out from the lower end of the glass tube 16 by the flushing gas introduced from the upper end of the glass tube 16. As a result, the air in the glass tube 16 can be exchanged with the flushing gas more smoothly and efficiently in a short time and more reliably.

  Therefore, it is not necessary to use an expensive pump having a very high suction capability as the vacuum pump 24, and it is not necessary to use a Kedder material for adsorbing oxygen in the atmosphere. Therefore, an increase in gas replacement cost can be suppressed, and consequently an increase in manufacturing cost of the discharge lamp 1 can be suppressed.

  Moreover, when the air | atmosphere etc. in the glass tube 16 are attracted | sucked, a part of fluorescent coating 5 formed in the glass tube 16 may become powdery, and may fall off. In such a case, since the longitudinal direction of the glass tube 16 is supported substantially vertically, the peeled off powder is easily dropped by its own weight and moved downward of the glass tube 16. In addition, since the powder is sucked from the lower end of the glass tube 16, the peeled off powder can be efficiently discharged to the outside of the glass tube 16 together with the atmosphere and the like.

  Further, when the longitudinal direction of the glass tube 16 is supported in a substantially horizontal direction when being heated by the heating furnace 26, there is a possibility that the glass tube 16 may be warped due to the heating and warped. In this respect, in this embodiment, since the longitudinal direction of the glass tube 16 is supported in a substantially vertical direction, the occurrence of warpage can be suppressed.

  In addition, the upper turret 10 and the lower turret 11 are rotated synchronously so that the glass tube 16 can be moved in order from the first work position P1 to the sixth work position P6. The work efficiency can be improved by switching predetermined exhaust and gas introduction for each work position P1 to P6. Further, the first work position P1 that is the work start position and the sixth work position P6 that is the work end position are adjacent to each other. For this reason, the glass tube 16 can be taken in and taken out from the deaeration / gas introduction device 7 at a close position, and the working efficiency can be further improved.

  In addition, a plurality of vacuum pumps 24 are installed on the lower turret 11 corresponding to the respective lower heads 14. For this reason, rather than installing the vacuum pump 24 on the upper turret 10 or outside the turrets 10, 11, the connection configuration of the exhaust passage 23 connected to the lower head 14 to the vacuum pump 24 is simplified. And a compact device.

  Note that the deaeration / gas introduction device 7 of the present embodiment, unlike the so-called center valve system, has the advantage that the configuration of the device can be suppressed and the maintenance can be facilitated.

  In addition, although the amount of gas introduced during flushing is exhausted and is wasted, in this embodiment, argon gas having a lower purity than the sealing gas is employed as the flushing gas. In general, the higher the purity of the gas, the higher the cost. However, in this embodiment, the relatively low-cost gas is used as the flushing gas with a large amount of use, so the increase in cost is suppressed. it can.

  In the embodiment described above, for example, a part of the configuration can be appropriately changed as follows. Of course, other modifications not exemplified below are also possible.

  (A) In the above embodiment, after exhausting first, the flushing gas is introduced next, and then exhausting and introduction of the flushing gas are alternately repeated, but this is not necessarily the order. Also good. For example, a flushing gas may be introduced first. Further, exhaust may be performed while introducing a flushing gas.

  (B) An encapsulating gas may be used instead of the flushing gas. Further, the sealing gas may be omitted.

  (C) The exhaust / gas introduction device 7 is a turret type using the upper turret 10 and the lower turret 11, but is also a line type device configured such that the glass tube 16 can be moved on a predetermined substantially straight line. Can be applied.

  (D) The exhaust / gas introduction device 7 may be provided with a cooling means for cooling the glass tube 16 heated by the heating furnace 26 or the burners 28, 29, 30.

It is a figure for demonstrating the deaeration and gas introduction apparatus in one Embodiment, Comprising: (a) is a schematic block diagram, (b) is a plane schematic diagram of (a) which shows a working position. It is a fragmentary sectional view which shows the structure of a cold cathode discharge lamp. It is a figure for demonstrating the operation | work in a deaeration and a gas introduction apparatus, Comprising: (a) is a fragmentary sectional view of the glass tube to be used, (b) attached the glass tube to the upper head in the 1st operation position. It is a fragmentary sectional view which shows a state, (c) is a fragmentary sectional view which shows the state which has introduce | transduced exhaust gas and flushing gas, heating a glass tube from a 2nd operation position to a 4th operation position, (d ) Is a partial cross-sectional view showing a state in which the lower part of the glass tube is sealed and the gas for introduction is introduced in the fifth working position, and (e) is a state in which the upper part of the glass tube is sealed in the sixth working position. FIG. It is a figure which shows the time-dependent pressure change in the glass tube in flushing.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 7 ... Deaeration and gas introduction apparatus as a gas exchange apparatus, 10 ... Upper turret, 11 ... Lower turret, 13 ... Upper head, 14 ... Lower head, 16 ... Glass tube, 17 ... 1st gas flow as an air supply flow path 18, a second gas flow path as an enclosing gas flow path, 23 an exhaust flow path, 24 a vacuum pump as an exhaust means, 26 a heating furnace as a heating means, and 28 a sealing heating means. Lower sealing burner, 30... Upper sealing burner constituting sealing heating means.

Claims (9)

A gas exchange device capable of exchanging the internal gas of a pipe having both longitudinal ends open,
An upper head to which one open end of the tube is mounted;
A lower head to which the other open end of the tube is mounted, and configured so that the longitudinal direction of the tube is held substantially vertically by these two heads.
An air supply passage for supplying a predetermined gas into the pipe is connected to the upper head,
A gas exchange device, wherein an exhaust passage for sucking the inside of the pipe is connected to the lower head. A gas exchange device capable of exchanging the internal gas of a pipe having both longitudinal ends open,
An upper head to which the upper open end of the pipe in a vertical state is mounted;
A lower head to which a lower open end of the tube is attached;
The upper head is connected to one end of an air supply flow path and the other end of the air supply flow path is connected to an air supply means, and a predetermined gas is supplied from the air supply means via the air supply flow path and the upper head. Configured to supply a predetermined gas into the pipe,
One end of an exhaust passage is connected to the lower head, and the other end of the exhaust passage is connected to exhaust means, and the internal gas of the pipe is passed from the exhaust means through the lower head and the exhaust passage. The gas exchange device is configured to be capable of suction and exhaust.   The gas exchange device according to claim 1, further comprising a heating unit capable of heating the tube at a temperature equal to or lower than a softening point of the tube.   The gas exchange device according to any one of claims 1 to 3, further comprising sealing heating means for heating and sealing the tube. The upper head and the lower head are configured to be movable synchronously,
The open / close state of the air supply flow path and the exhaust flow path can be switched according to the position on the moving path of the pipe supported by the upper head and the lower head. 4 is a gas exchange device. An upper turret and a lower turret supported rotatably,
The upper head is provided on the upper turret,
While providing the lower head on the lower turret,
6. The gas exchange device according to claim 5, wherein the upper turret and the lower turret are configured to be rotatable in synchronization with each other. An exhaust means for suction exhaust is connected to the exhaust flow path,
The gas exchange apparatus according to claim 6, wherein the exhaust means is provided in a lower turret. The upper head is further connected to a sealing gas flow path for supplying a predetermined sealing gas into the pipe,
The main component of the sealing gas and the predetermined gas are common, and the ratio of the main component included in the predetermined gas is configured to be lower than the ratio of the main component included in the sealing gas. The gas exchange device according to any one of claims 1 to 7.   The lamp manufacturing apparatus provided with the gas exchange apparatus in any one of Claims 1 thru | or 8.

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