JP2010205741A - Manufacturing device of plasma display device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a technology capable of improving a throughput in a manufacturing technology of a plasma display. <P>SOLUTION: A manufacturing device 1 of a plasma display device includes an alignment sealing room 6. The alignment sealing room 6 includes a positioning mechanism as well as a heating mechanism, in which a front panel and a rear panel are heated to be sealed after positioning is processed, and the positioning process and the sealing process can be carried out in one treatment chamber. Thus, the number of processes can be reduced compared with a conventional method in which a pair of panels after the positioning is processed are required to be temporarily jointed by a clip to convey to a sealing room. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

The present invention relates to a production equipment of a plasma display device, in particular, to align the front and rear panels, to the improvement of production equipment of the plasma display apparatus used in the step of sealing and sealing.

In recent years, plasma display devices capable of displaying a thin and large screen have been attracting attention.
Reference numeral 111 in FIG. 16A shows the structure of an AC type plasma display device. The plasma display device 111 has a front panel 120 and a rear panel 130.

  Electrodes 121 and 131 are provided on the surfaces of the front panel 120 and the rear panel 130, respectively. The front panel 120 and the rear panel 130 are arranged to face each other in parallel so that the electrodes 121 and 131 face each other and the electrodes 121 and 131 extend in the vertical direction. Of these, by selecting appropriate electrodes 121 and 131 and applying a voltage, a desired position on the plasma display device 111 can be made to emit light.

  In order to manufacture the plasma display device having such a configuration, the front panel and the rear panel each having predetermined members formed on the surface thereof are aligned and sealed, and then a discharge gas is sealed inside and sealed. Processing to stop is necessary.

  As a device for aligning and sealing the front panel and the rear panel in this way, a manufacturing device as indicated by reference numeral 101 in FIG. 17 has been proposed.

  The manufacturing apparatus 101 includes an MgO film forming chamber 102, a vapor deposition outlet chamber 103, a transfer chamber 104, a pre-bake chamber 105, an alignment sealing chamber 106, a sealing chamber 107, an exhaust chamber 108, and a sealing chamber. 109.

  A carry-in chamber (not shown) is arranged in the front stage of the MgO film forming chamber 102, and a vapor deposition outlet chamber 103 is arranged in the rear stage. The deposition outlet chamber 103 is disposed in the transfer chamber 104.

  In the transfer chamber 104, a pre-bake chamber 105, an alignment sealing chamber 106, and a sealing chamber 107 are arranged. An exhaust chamber 108 is disposed downstream of the sealing chamber 107, a sealing chamber 109 is disposed downstream of the exhaust chamber 108, and an unillustrated unloading chamber is disposed downstream of the sealing chamber 109. .

  In order to seal the front panel and the rear panel using the manufacturing apparatus 101 described above, first, a front panel on which a predetermined member such as a transparent electrode film is formed is carried into a loading chamber (not shown).

  Next, the carry-in chamber is evacuated, and when the carry-in chamber becomes a vacuum atmosphere, the carry-in chamber is connected to the MgO film forming chamber 102 that has been evacuated in advance, and the front panel is carried into the MgO film forming chamber 102. Next, the front panel is heated to a temperature of about 150 ° C. to 200 ° C., and an MgO protective film is formed on the front panel surface by vapor deposition.

  When the MgO protective film having a predetermined thickness is formed, the front panel is carried into the vapor deposition outlet chamber 103 and then cooled until the temperature of the front panel reaches room temperature. When the temperature of the front panel decreases to room temperature, the front panel is carried into the alignment sealing chamber 106 via the transfer chamber 104. The loaded front panel is held in the alignment sealing chamber 106 with the MgO protective film forming surface facing downward by a substrate holding mechanism (not shown). This substrate holding mechanism is composed of a vacuum suction device, and therefore the pressure in the alignment sealing chamber 106 is atmospheric pressure.

  On the other hand, a carry-in chamber (not shown) is provided in the preceding stage of the pre-bake chamber 105. After a rear panel having a predetermined member formed on the surface is carried into the carry-in chamber in advance, it is conveyed to the pre-bake chamber 105 by a conveyance mechanism (not shown). To do.

  Next, degassing is performed by heating the rear panel to a high temperature of about 500 ° C. in the pre-bake chamber 105 in an atmospheric pressure atmosphere. Thereafter, the rear panel is cooled, and when the temperature of the rear panel decreases to room temperature, the rear panel is carried into the alignment sealing chamber 106 via the transfer chamber 104. The loaded rear panel is held by a substrate holding mechanism (not shown) so that the front surface faces the front panel with the surface facing upward.

Next, relative alignment between the front panel and the rear panel is performed in the alignment sealing chamber 106 in an atmospheric pressure atmosphere. When the alignment is completed, the front panel and the rear panel are temporarily fastened with clips or the like so that the relative positions between the panels do not shift.
Next, the front panel and the rear panel are carried into the sealing chamber 107 whose internal pressure is atmospheric pressure through the transfer chamber 104.

  A cross-sectional view of the rear panel is indicated by reference numeral 130 in FIG. A heat-meltable sealing material 158 is formed around the surface of the rear panel 130. When the sealing material 158 is brought into contact with the front panel surface and heated to about 400 ° C., the sealing material 158 is melted by heat. In close contact with the front panel. When the panel is cooled from this state and the sealing material is solidified, the front panel and the rear panel are sealed.

  A through hole (not shown) is provided in advance in a part of the rear panel, and a tip tube having an opening communicating with the through hole is attached in advance. For this reason, in the sealed state, the space between the front panel and the rear panel communicates with the outside through the through hole and the tip tube.

  Thereafter, the pair of sealed panels are carried into the exhaust chamber 108, and the exhaust chamber 108 is evacuated. Then, a pair of panels are also evacuated from the through holes and the tip tube.

  Next, the inside of the exhaust chamber 108 is connected to the inside of the sealed chamber 109 that has been evacuated, and a pair of front panel and rear panel are carried into the sealed chamber 109. Thereafter, when the discharge gas is introduced into the sealing chamber 109 to a predetermined pressure, the discharge gas is also introduced from the tip tube and the through hole between a pair of panels in a vacuum state. When the pressure between the pair of panels reaches a predetermined pressure, the chip tube is crushed to close the through hole, and the pair of panels are hermetically sealed to obtain a plasma display device.

  The plasma display device manufactured in this manner is carried into a carry-out chamber (not shown), and the space between the sealing chamber 109 and the atmosphere is introduced into the carry-out chamber, and then the plasma display device can be taken out.

  In the manufacturing apparatus 101 described above, after aligning the front panel and the rear panel in the alignment sealing chamber 106 as described above, the front panel and the rear panel are temporarily fixed with clips or the like in the alignment sealing chamber 106. It was conveyed to the sealing chamber 107 after preventing the displacement. In this way, it is difficult to temporarily fix the front panel and the rear panel with clips so that the positional deviation does not occur. In addition, since the clip and the transport mechanism may come into contact with each other when transported to the sealing chamber 107 after temporarily securing with the clip, the transport mechanism is configured not to contact the clip. It was necessary to use a special transport mechanism.

  Further, conventionally, after heating the front panel and the rear panel during MgO film formation or degassing, respectively, each panel is cooled to the room temperature and aligned, and then the front panel and the rear panel are heated again. It was sealed. Since the time required to cool the panel once heated to room temperature is extremely long, the time required for production becomes long, resulting in a problem that throughput is lowered.

JP 11-329246 A Japanese Patent Laid-Open No. 11-133501

  The present invention was created to solve the above-described disadvantages of the prior art, and an object of the present invention is to provide a technique that makes it possible to prevent the manufacturing process from becoming complicated and to improve the throughput. .

In order to solve the above-mentioned problems, a first aspect of the present invention provides a film forming chamber for forming a protective film on the surface of the front panel of a plasma display device comprising a front panel and a rear panel, and degassing by heating the rear panel. A pre-bake chamber for processing, a transfer chamber connected to both the film formation chamber and the pre-bake chamber, and having a transfer mechanism for transferring the front panel and the rear panel; and the transfer chamber An apparatus for manufacturing a plasma display apparatus having an alignment sealing chamber for aligning and sealing the front panel and the rear panel carried in via the alignment panel, wherein the alignment sealing chamber includes the front panel and The rear panel is held horizontally with the front panel and the surface of the rear panel facing each other, and the front panel And a panel holding mechanism configured to be able to relatively align the rear panel, the panel holding mechanism having an upper panel holding table and a lower panel holding table, and each panel holding table Are provided with a heating mechanism and an electrostatic adsorption device, respectively, and the front panel and the rear panel can be heated by heat conduction while being in close contact with the panel holding base. It is characterized by.
According to a second aspect of the present invention, there is provided the plasma display device manufacturing apparatus according to the first aspect, wherein the alignment sealing chamber is provided with a contact mechanism configured so that a tip tube can be placed on the rear panel surface. It is characterized by that.
According to a third aspect of the present invention, there is provided the plasma display device manufacturing apparatus according to the first or second aspect, wherein a driving mechanism disposed outside the alignment sealing chamber and a vacuum state in the alignment sealing chamber are maintained. And a transmission mechanism for transmitting the driving force generated by the driving mechanism to the panel holding mechanism.
Invention of Claim 4 is a manufacturing apparatus of the plasma display apparatus of any one of Claim 1 thru | or 3, Comprising: The said front panel sealed by the said alignment sealing chamber in the said transfer chamber, A sealing chamber for sealing the rear panel is connected.

For the vacuum processing chamber for use in the present invention, maintenance around the one panel surface, when the heat-fusible sealing material is provided in advance, the relative position of the two panels which alignment has been completed However, the panel surface on the side where the sealing material is not provided is brought into contact with the sealing material, and the two panels are heated by the heating mechanism to thermally melt the sealing material, and then the sealing material is cooled. Then, the two panels can be sealed with a sealing material.

  In this way, not only the relative alignment of the two panels in one vacuum processing chamber, but also the two panels can be sealed, while maintaining the correct positional relationship after alignment, Since the two panels can be sealed immediately, there is no need for a process of fastening a set of panels with clips and transporting them to the sealing chamber as in the prior art, and the number of processes can be reduced. In addition, no special transport mechanism that does not contact the clip is required.

The vacuum processing chamber for use in the present invention, the panel holding mechanism may be configured such electrostatic chuck is provided. In this case, the panel can be adsorbed and held in a vacuum atmosphere.

Further, the vacuum processing chamber for use in the present invention, the panel holding mechanism may be constructed such that a vacuum suction device is provided. In this case, the panel can be adsorbed and held under atmospheric pressure conditions.

Further, the vacuum processing chamber for use in the present invention has a contact mechanism capable of contacting the tip tube on the panel surface.
When a through hole is provided in one panel, the tip tube tip provided with a heat-meltable adhesive is brought into contact with the panel surface by a contact mechanism so as to communicate with the above-described through hole. When the two panels are heated with a heating mechanism when sealing, the adhesive at the tip of the tip tube is melted by heat, and then cooled and solidified, so that the tip tube is connected to the through-hole in a state of communicating with the through-hole. Can be adhered to.

Further, the vacuum processing chamber for use in the present invention, a drive mechanism in a state of being isolated from the vacuum chamber may be configured to have a transmission mechanism for transmitting the driving force to the panel holding mechanism. If the drive mechanism cannot withstand the atmosphere in the vacuum chamber, for example, processing in the vacuum chamber is performed at a high temperature, and if the drive mechanism is exposed to high temperature conditions, the operation will be hindered. If this is not possible, the panel holding mechanism can be driven without exposing the driving mechanism to the atmosphere in the vacuum chamber by transmitting only the driving force to the panel holding mechanism with the transmission mechanism.

Further, according to the manufacturing apparatus of the plasma display device of the present invention has a film forming chamber, and the degassing chamber, a transfer chamber, the vacuum processing chamber.
Manufacturing apparatus having such a configuration can be sealed by positioning the two panels with one vacuum processing chamber. For this reason, unlike the conventional case, a process of fastening a set of panels with clips, transporting them to the sealing chamber, and sealing them becomes unnecessary, and the number of processes can be reduced.

Moreover, according to the apparatus for manufacturing a plasma display device of the present invention, a sealing chamber may be connected to the transfer chamber.
Thus configured, when performing the sealing step in a vacuum atmosphere it is to carry a set of panels that sealing step is completed by the vacuum process chamber, the sealing chamber immediately via the transfer chamber Can do.

Further, according to the manufacturing apparatus of the plasma display device of the present invention, the temperature of the rear panel in alignment step is adapted to decrease by a predetermined temperature than the rear panel of the temperature in the heating step for degassing.

Conventionally, each panel is cooled to room temperature during the alignment step, but the manufacturing apparatus of the present invention does not require cooling to room temperature during alignment. Therefore, the time required for cooling can be shortened, and the time required for production can be shortened as compared with the conventional case.

In the plasma display device manufacturing apparatus of the present invention, both the alignment process and the sealing process may be performed in the same processing chamber.
Further, in the apparatus for manufacturing a plasma display device of the present invention, the rear panel of the heating step, positioning step and sealing step are both carried out in a vacuum atmosphere.

  In such a configuration, after the sealing process is completed, the space between the pair of sealed panels is in a vacuum state. Therefore, immediately after the sealing is completed, a discharge gas is inserted between the panels. And can be sealed. Therefore, since the alignment process and the sealing process were performed under atmospheric pressure conditions, unlike the conventional case where it was necessary to evacuate between a pair of panels after the sealing process was completed, the time required for evacuation is unnecessary. The time required for manufacturing can be shortened as compared with the prior art.

Further, in the apparatus for manufacturing a plasma display device of the present invention, in the positioning step and the sealing step, the front panel and the rear panel may be configured to be electrostatically attracted to the panel holder.

Further, in the apparatus for manufacturing a plasma display device of the present invention, the positioning step and the sealing step is carried out at atmospheric pressure conditions, in alignment step and sealing step, the front panel and rear panel, the panel holder to the vacuum suction You may comprise.

In the plasma display device manufacturing apparatus of the present invention, the temperature of the front panel may be controlled to be the same as the temperature of the rear panel in the alignment step before the alignment step.
With this configuration, alignment can be performed in a state where the temperatures of the front panel and the rear panel are both equal.

Further, in the plasma display device manufacturing apparatus of the present invention, the tip tube provided with a heat-meltable adhesive is brought into contact with either the front panel or the rear panel in advance, and sealing is performed in the sealing step. The material may be heat-melted and solidified, and the adhesive material may be heat-melted and solidified.

  When the through hole is provided in one or both of the panels, the tip end of the tip tube is brought into contact with the surface of the panel so as to communicate with the through hole. The tip tube can be bonded to the panel surface in a state where the opening communicates with the through-hole by cooling and solidifying after the adhesive at the tip is thermally melted.

The alignment process and the sealing process of the two panels can be performed in one processing chamber.
In addition, the alignment and sealing process is performed in a vacuum atmosphere, and after sealing, the process can be shifted to the sealing process without evacuating the panels, reducing the time required for manufacturing and improving the throughput. can do.

The figure explaining the structure of the manufacturing apparatus of one Embodiment of this invention The figure explaining the connection relation of the processing chamber around a conveyance chamber of the manufacturing apparatus of one Embodiment of this invention. Side sectional view explaining the structure of the alignment sealing chamber of one Embodiment of this invention The figure explaining the process of carrying in a front panel in the alignment sealing chamber of one Embodiment of this invention. Diagram explaining the subsequent steps Diagram explaining the subsequent steps Diagram explaining the subsequent steps Diagram explaining the subsequent steps Diagram explaining the subsequent steps The figure explaining the process of carrying in a rear panel in the alignment sealing chamber of one Embodiment of this invention. Diagram explaining the subsequent steps The figure explaining the mechanism regarding alignment of the alignment sealing chamber of one Embodiment of this invention The figure explaining the sealing process in an alignment sealing chamber Diagram explaining the subsequent steps The figure explaining the alignment sealing chamber of other embodiment of this invention. (a): Diagram for explaining a general plasma display device (b): Cross-sectional view for explaining a general rear panel The figure explaining the structure of the conventional manufacturing apparatus

Embodiments of the present invention will be described below with reference to the drawings.
Reference numeral 1 in FIG. 1 shows a manufacturing apparatus of the present invention used for manufacturing a plasma display apparatus.
The manufacturing apparatus 1 includes an MgO film forming chamber 2, a vapor deposition outlet chamber 3, a transfer chamber 4, a prebake chamber 5, an alignment sealing chamber 6, and a sealing chamber 9.

A carry-in chamber (not shown) is disposed in the front stage of the MgO film forming chamber 2, and the vapor deposition outlet chamber 3 and the transfer chamber 4 are sequentially disposed in the subsequent stage.
In the transfer chamber 4, a pre-bake chamber 5, an alignment sealing chamber 6, and a sealing chamber 9 are arranged. Among these, an unillustrated unloading chamber is arranged at the subsequent stage of the sealing chamber 9.

  A process for manufacturing a plasma display device by using the above-described manufacturing apparatus 1 and sealing and sealing a front panel having a predetermined member formed on the surface in advance and a rear panel will be described below.

In the initial state, the MgO film forming chamber 2, the vapor deposition outlet chamber 3, the transfer chamber 4, the pre-baking chamber 5, the alignment sealing chamber 6, and the sealing chamber 9 are all evacuated in advance. To do.
First, a front panel on which a predetermined member such as a transparent electrode film is formed in advance is carried into a carry-in chamber in front of the MgO film forming chamber.

  Next, the carry-in chamber is evacuated, and when the vacuum state is reached, it is connected to the inside of the MgO film forming chamber 2 and the front panel is carried into the MgO film forming chamber 2. A heater (not shown) is provided in the MgO film forming chamber 2, and the front panel is heated by the heater and maintained at a temperature of 150 ° C. to 200 ° C. Thereafter, an MgO protective film is formed on the surface of the front panel by vapor deposition.

  When the MgO protective film having a predetermined thickness is formed, the front panel is carried into the vapor deposition outlet chamber 3 by a transport mechanism (not shown). As shown in FIG. 2, a position adjustment mechanism 11 is provided in the vapor deposition outlet chamber 3, and the loaded front panel is arranged at a predetermined position in the vapor deposition outlet chamber 3 by the position adjustment mechanism 11.

  When the front panel is disposed at a predetermined position, the transfer robot 12 holds the front panel in the vapor deposition outlet chamber 3, carries it out of the vapor deposition outlet chamber 3, and carries it into the alignment sealing chamber 6 through the transfer chamber 4.

  A detailed configuration of the alignment sealing chamber 6 is shown in a sectional view of FIG. The alignment sealing chamber 6 includes an upper elevating shaft 31, an upper holding base 32, an upper suction device 33, a support plate 34, a support bar 35, a substrate suction pad 36, a bellows 37, and a lower support shaft 41. A lower holding table 42, a lower suction device 43, a substrate lifting shaft 44, a substrate lifting support plate 45, a substrate lifting pin 46, a bellows 47, a bellows 48, an alignment mechanism 50, and a chip tube. And an attachment shaft 59.

  A plate-like upper suction device 33 is disposed above the alignment sealing chamber 6. The upper suction device 33 constitutes the upper panel holding portion of the present invention together with the plate-like upper holding stand 32 disposed above, and is fixed to the lower surface of the upper holding stand 32, and the upper portion of the upper holding stand 32. Is attached to the lower end of the upper elevating shaft 31 provided above.

  The upper end of the upper elevating shaft 31 is connected to a drive mechanism (not shown) via a bellows 37. When the drive mechanism is operated, the upper elevating shaft 31 moves up and down to move the upper suction device 33 in the vertical direction. It is configured to be able to.

  A through hole is provided in the upper suction device 33 and the upper holding base 32, and a support bar 35 is disposed so as to be inserted through the through hole. An upper end of the support bar 35 is attached to the support plate 34, and a rubber substrate suction pad 36 is attached downward to the lower end of the support bar 35. The support plate 34 is fixed in the alignment sealing chamber 6 by a fixing mechanism (not shown) so that the support bar 35 and the substrate suction pad 36 cannot move.

  A plate-like lower suction device 43 is disposed below the alignment sealing chamber 6. The lower suction device 43 constitutes the lower panel holding portion of the present invention together with the plate-like lower holding table 42 disposed below, and is fixed on the lower holding table 42 to hold the lower side. The lower surface of the base 42 is attached to the upper end of the lower support shaft 41 provided therebelow. The lower end of the lower support shaft 41 is fixed to the alignment table 55 via a bellows 47. A driving mechanism 50 is connected to the alignment table 55, and the lower holding base 42 can be moved in a horizontal plane when the driving mechanism 50 is operated.

  The lower suction device 43 and the lower holding table 42 are provided with a plurality of through holes, and substrate lifting pins 46 are arranged so as to be inserted through the through holes. The lower end of the substrate elevating pin 46 is attached to the substrate elevating support plate 45, and the substrate elevating support plate 45 is attached to the upper end of the substrate elevating shaft 44 disposed therebelow. The lower end of the substrate elevating shaft 44 is connected to an elevating mechanism via a bellows 48. When the elevating mechanism is operated, the substrate elevating shaft 44 is operated so that the substrate elevating pin 46 can be moved up and down. ing.

  The lower suction device 43 and the lower holding base 42 are provided with one through hole in addition to a plurality of through holes through which the substrate lifting pins 46 are inserted, and will be described later so as to be inserted through the through holes. A tip tube mounting shaft 59 is disposed. The lower end of the tip tube mounting shaft 59 is connected to a drive mechanism via a bellows 58, and the tip tube mounting shaft 59 can be moved up and down when the drive mechanism is operated.

  FIG. 4 shows a state of the alignment sealing chamber 6 before the front panel is carried in. From this state, as shown in FIG. 5, the arm 20 of the transfer robot 12 enters the alignment sealing chamber 6 from the horizontal direction. A front panel 71 is placed on the arm 20 with the MgO protective film forming surface facing vertically downward (face-down). The arm 20 has an upper adsorption device 33 and a lower adsorption device. It stops in a state where it is located between 43.

Next, the substrate lifting pins 46 are raised. When the substrate lifting pins 46 are raised, the tips of the substrate lifting pins 46 come into contact with the lower surface of the front panel 71 as shown in FIG.
Thereafter, when the substrate lifting pins 46 are further raised, the front panel 71 is transferred from the arm 20 onto the substrate lifting pins 46, and the front panel 71 is raised as the substrate lifting pins 46 are raised. When the upper surface of the front panel 71 contacts the substrate suction pad 36 as shown in FIG. 7, the substrate lifting pins 46 are stopped.

  Next, the arm 20 is discharged out of the alignment sealing chamber 6 and the upper suction device 33 is lowered. When the upper suction device 33 descends and comes into contact with the upper surface of the front panel 71, the upper suction device 33 is stopped as shown in FIG. When the electrostatic adsorption device in the upper adsorption device 33 is operated in this state, the front panel 71 is electrostatically adsorbed on the surface of the upper adsorption device 33.

  When the front panel 71 is adsorbed on the surface of the upper adsorbing device 33, the substrate elevating pin 46 is lowered and accommodated in the through holes of the lower adsorbing device 43 and the lower holding table 42 as shown in FIG.

  A resistance heating type heater (not shown) is provided in the upper holding table 32. When the front panel 71 is adsorbed on the surface of the upper adsorption device 33, the heater is activated and heated while adsorbing the front panel 71. The temperature of the front panel 71 is raised to 370 ° C. After the temperature is raised to 370 ° C., the heater operates to keep the temperature of the front panel 71 at 370 ° C.

  Thus, the front panel 71 is carried into the alignment sealing chamber 6 and held by the upper suction device 33, while the rear panel is carried into a loading chamber (not shown). When the rear panel is loaded into the loading chamber, the loading chamber is evacuated to a vacuum state. Next, the carry-in chamber is connected to the pre-bake chamber 5 while maintaining the vacuum state, and the rear panel 72 is carried into the pre-bake chamber 5 by the arm 13 shown in FIG.

  The pre-baking chamber 5 has a two-stage structure of a heating position and a cooling position, and the rear panel 72 that is carried in is first placed in the heating position and heated in the heating position. The rear panel 72 is degassed by being placed at a high temperature of about 500 ° C. for a predetermined time.

When the degassing process is completed, the rear panel 72 is moved to the cooling position and cooled, and the temperature of the rear panel 72 is lowered to about 370 ° C.
Thereafter, the rear panel 72 is disposed at a predetermined position of the cooling position. Then, the arm 20 of the transfer robot enters the cooling position, the rear panel 72 is transferred to the arm 20 with the surface facing upward (face up), and is transferred to the alignment sealing chamber 6 via the transfer chamber 4. .

  The arm 20 on which the rear panel 72 is placed face-up enters the alignment sealing chamber 6 from the horizontal direction into the alignment sealing chamber 6 where the front panel 71 has already been attracted to the upper suction device 33. The arm 20 is stationary with the rear panel 72 positioned between the upper suction device 33 and the lower suction device 43. Thereafter, the substrate raising / lowering pins 46 rise and come into contact with the lower surface of the rear panel 72 as shown in FIG. When the substrate lifting pins 46 are further raised and the rear panel 72 is transferred from the arms 20 to the substrate lifting pins 46, the arms 20 are ejected from the alignment sealing chamber 6 and the substrate lifting pins 46 are lowered. As shown in FIG. 11, the rear panel 72 is placed on the upper surface of the lower suction device 43. When the electrostatic adsorption device in the lower adsorption device 43 is operated in this state, the rear panel 72 is electrostatically adsorbed on the surface of the lower adsorption device 43. A resistance heating type heater (not shown) is provided in the lower holding table 42. When the rear panel 72 is electrostatically adsorbed on the surface of the lower adsorption device 43, the heater is activated to heat the rear panel 72. The temperature of 72 is set to 370 ° C. which is the same as the temperature of the front panel 71.

  Thus, when the pair of front panel 71 and rear panel 72 is carried into the alignment sealing chamber 6, the front panel 71 and the rear panel 72 are arranged vertically with the surfaces facing each other in the alignment sealing chamber 6.

Thereafter, the front panel 71 and the rear panel 72 carried in are aligned in the alignment sealing chamber 6.
FIG. 12 shows an alignment mechanism in the alignment sealing chamber 6. As shown in FIG. 12, lamps 61 ₁ and 61 ₂ that are not shown in FIGS. 3 to 11 are arranged above the alignment sealing chamber 6, and light can be irradiated downward. Has been. Below the lamps 61 ₁ and 61 ₂ , CCD (Charge-coupled device) cameras 62 ₁ and 62 ₂ are arranged so as to face the lamps 61 ₁ and 61 ₂ .

  The front panel 71 and the rear panel 72 are previously formed with alignment marks (not shown), and the relative positional deviation between the front panel 71 and the rear panel 72 can be determined by reading the relative positions of the two alignment marks. Be able to detect.

In order to relatively align the front panel 71 and the rear panel 72 in the alignment sealing chamber 6 provided with such an alignment mechanism, first, the lamps 61 ₁ and 61 ₂ are caused to emit light. Then, the light of the lamps 61 ₁ and 61 ₂ is irradiated to the lower front panel 71 and rear panel 72, respectively. The alignment marks formed on the front panel 71 and the rear panel 72 are positioned in advance between the lamps 61 ₁ and 61 ₂ and the CCD cameras 62 ₁ and 62 ₂ , and the front panel 71 and the rear panel 72 are irradiated. The emitted light is applied to the alignment marks on the front panel 71 and the rear panel 72, and the CCD cameras 62 ₁ and 62 ₂ photograph each alignment mark.

Images of two alignment marks photographed by the CCD cameras 62 ₁ and 62 ₂ are transferred to a control system (not shown). The control system analyzes the captured image and determines whether the relative positions of the front panel 71 and the rear panel 72 are in the correct positions. If it is in the correct position, the alignment is completed while maintaining the state as it is, but if it is not in the correct position, the drive mechanisms 50 and 51 are driven based on the relative displacement amount obtained from the analysis result. Then, the lower holding table 42 is moved in the horizontal plane by a predetermined amount. Then again taking CCD camera 62 _1, 62 ₂ is two alignment marks, to detect the relative positional deviation amount again to move the lower holder 42 in a horizontal plane on the basis of the positional deviation amount, the front The relative positions of the panel 71 and the rear panel 72 are set to the correct positional relationship.
As described above, the alignment has been described using the example in which the two sets of lamps, the CCD camera, and the two alignment marks are provided, but three or more may be provided.

  Thus, when the front panel 71 and the rear panel 72 are in the correct positional relationship, the front panel 71 and the rear panel 72 are subsequently sealed in the alignment sealing chamber 6.

  This sealing process will be described below. When the alignment is completed, the upper suction device 33 is lowered. A heat-meltable sealing material is provided on the periphery of the surface of the rear panel 72, and when the front panel 71 and the sealing material come into contact with each other, the upper suction device 33 is stopped.

  The rear panel 72 is provided with a through hole 73, and the tip tube mounting shaft 59 described above is disposed below the through hole 73. The tip tube mounting shaft 59 starts to rise when the upper suction device 33 is stationary. The tip tube 60 is attached to the tip of the tip tube mounting shaft 59. When the tip tube mounting shaft 59 is raised and the tip of the tip tube 60 comes into contact with the lower surface of the rear panel 72, the tip tube is shown in FIG. The mounting shaft 59 is stationary. At this time, the opening of the tip tube 60 communicates with a through hole 73 provided in the rear panel 72.

  As described above, the temperature of the front panel 71 and the rear panel 72 in alignment is about 370 ° C. When the upper suction device 33 is stationary, the heaters provided in the upper holding table 32 and the lower holding table 42, respectively. Then, the front panel 71 and the rear panel 72 are heated so that the temperature of both is about 400 ° C. Then, the sealing material is melted by heat. Therefore, the upper suction device 33 is further lowered and pressed until a predetermined gap is formed between the front panel 71 and the rear panel 72.

In addition, a heat-melting adhesive is provided at the tip of the tip tube 60, and the above-described sealing material is thermally melted, and this adhesive is also heat-melted.
When the operation of the heater is stopped in this state and the sealing material and the adhesive are cooled and solidified, the front panel 71 is fixed on the surface of the rear panel 72 by the sealing material, and the tip tube 60 is attached to the rear surface of the rear panel 72. It is fixed and the sealing process is completed.

  When the sealing step is completed, the upper suction device 33 is raised as shown in FIG. 14 and the tip tube mounting shaft 59 is lowered and stored in the through hole 73. Next, the board raising / lowering pins 46 are raised again, and the pair of sealed panels 71 and 72 are positioned at a predetermined height.

  Next, after the arm 20 of the transfer robot is introduced into the alignment sealing chamber 6 and positioned below the pair of panels 71 and 72, the substrate lifting pins 46 are lowered to move the pair of panels 71 and 72 to the arm 20. Then, the arm 20 is discharged, carried out from the alignment sealing chamber 6, and carried into the sealing chamber 9 through the transfer chamber 4.

  Conventionally, since the sealing process is performed under atmospheric pressure conditions, gas is confined in a space between a pair of panels. After exhausting the gas by evacuating the exhaust chamber, Although it was necessary to enclose and seal the gas, in the manufacturing process of this embodiment, the sealing process is performed in a vacuum atmosphere, so the space between the pair of panels is in a vacuum state, and again There is no need to evacuate.

  Therefore, when the sealing process is completed, the panel can be immediately carried into the sealing chamber 9 and the sealing process can be performed without evacuation as in the prior art, so that the manufacturing time can be shortened. it can. In addition, since the exhaust chamber which is conventionally required is not required, the scale of the manufacturing apparatus can be reduced accordingly.

  Thereafter, a discharge gas such as neon / xenon gas is introduced into the sealing chamber 9 to a predetermined pressure. Then, the discharge gas is introduced between the pair of panels 71 and 72 from the tip tube 60 and the through hole 73. When the space between the pair of panels 71 and 72 is filled with the discharge gas and reaches a predetermined pressure, the tip tube 60 is crushed by a mechanism (not shown) to close the through hole 73 and the space between the pair of panels 71 and 72 is hermetically sealed. Seal. As described above, a plasma display device can be obtained.

  The plasma display device manufactured in this way is carried into a carry-out chamber (not shown), cut off from the sealing chamber 9, and then introduced into the carry-out chamber, whereby the plasma display device can be taken out.

  Thereafter, a new front panel is carried into the MgO film forming chamber 2 to form an MgO protective film on the surface, and then transferred to the alignment sealing chamber 6, while a new rear panel is carried into the prebaking chamber 5 and degassed. After the processing, it is transferred to the alignment sealing chamber 6, and new front panels and rear panels are aligned and sealed in the alignment sealing chamber 6, and carried into the sealing chamber 9. Thereafter, a plurality of plasma display devices can be manufactured by repeating the above-described operation.

  In the present embodiment described above, since the heater is provided in the alignment sealing chamber 6, when the pair of panels 71 and 72 are aligned, the substrate is immediately sealed while maintaining the correct positional relationship. It can be heated to a temperature (400 ° C.) and sealed. Therefore, unlike the prior art, the process of fastening a set of panels with clips and transporting them to the sealing chamber can be omitted, and there is no need to use a special transport mechanism to avoid the clips.

  Further, since the alignment is performed at a high temperature of 370 ° C., it is not necessary to cool each panel to room temperature. Accordingly, the time required for cooling the panel can be greatly reduced as compared with the conventional case where the alignment is performed at room temperature, the processing time can be shortened, and the throughput can be improved.

  Furthermore, although the case where the upper suction device and the lower suction device provided in the alignment sealing chamber 6 have the electrostatic suction device has been described so far, the present invention is not limited to this, for example, FIG. As shown in the drawing, suction grooves 83 and 84 are formed on the respective surfaces, and an upper suction device 81 and a lower suction device 82 configured by a vacuum suction device may be used.

  In such an alignment sealing chamber 6, since the chamber cannot be made into a vacuum atmosphere, gas remains between a pair of panels after sealing in an inert gas atmosphere. Therefore, after the sealing process is completed, a pair of panels must be evacuated before the sealing process. However, in this case, both alignment and sealing are performed in the alignment sealing chamber 6. There is an advantage that temporary fastening with a clip is unnecessary.

DESCRIPTION OF SYMBOLS 1 ... Manufacturing apparatus 2 ... MgO film-forming chamber (film-forming chamber) 4 ... Transfer chamber 5 ... Pre-baking chamber (degas chamber) 6 ... Alignment sealing chamber (vacuum processing chamber) 9 ... Sealing chamber 71 …… Front panel 72 …… Rear panel

Claims (18)

A vacuum chamber;
A panel holding mechanism disposed in the vacuum chamber,
The panel holding mechanism is configured such that two panels constituting the plasma display device are horizontally arranged with the surfaces of the panels facing each other, and the panels can be relatively aligned. A vacuum processing chamber having a mechanism,
The panel holding mechanism has an upper panel holding table and a lower panel holding table, and each panel holding table is configured so that each panel can hold the panel closely,
The panel holding table is provided with a heating mechanism,
The vacuum processing chamber is configured such that the heating mechanism can heat the panel by heat conduction in a state where the panel is closely held.   The vacuum processing chamber according to claim 1, wherein the panel holding table is provided with an electrostatic adsorption device. The vacuum chamber is provided with a gas introduction mechanism,
The vacuum processing chamber according to claim 1, wherein the panel holding table is provided with a vacuum suction device. A vacuum processing chamber according to any one of claims 1 to 3,
A vacuum processing chamber further comprising an abutment mechanism configured to abut a tip tube against the panel surface. A drive mechanism disposed outside the vacuum chamber;
5. The transmission mechanism according to claim 1, further comprising: a transmission mechanism configured to transmit the driving force generated by the driving mechanism to the panel holding mechanism in a state where a vacuum state in the vacuum chamber is maintained. The vacuum processing chamber described. A plasma display device is manufactured from the front panel and rear panel.
A film forming chamber for forming a protective film on the front panel surface;
A pre-bake chamber in which the rear panel is heated and degassed;
An apparatus for manufacturing a plasma display device, which is connected to both the film formation chamber and the pre-bake chamber, and has a transfer chamber provided with a transfer mechanism for the front panel and the rear panel,
An apparatus for manufacturing a plasma display device, comprising the vacuum processing chamber according to claim 1, which is connected to the transfer chamber. An apparatus for manufacturing a plasma display device according to claim 6,
An apparatus for manufacturing a plasma display device, wherein a sealing chamber for sealing the front panel and the rear panel is connected to the transfer chamber. A heating step of heating the rear panel and degassing,
The rear panel and the front panel having a protective film formed on the surface thereof are each adsorbed to a panel holding stand, and the rear panel and the front panel are aligned with the panel surfaces facing each other. Process,
The sealing material formed on the periphery of the surface of the rear panel is brought into contact with the front panel, and then the sealing material is heated and melted until a predetermined gap is formed between the rear panel and the front panel. After pressing, by cooling and solidifying the sealing material, a method of manufacturing a plasma display having a sealing step of sealing the rear panel and the front panel,
The method of manufacturing a plasma display device, wherein the temperature of the rear panel in the alignment step is lowered by a predetermined temperature from the temperature of the rear panel in the heating step.   9. The method of manufacturing a plasma display device according to claim 8, wherein both the alignment step and the sealing step are performed in the same processing chamber.   10. The method for manufacturing a plasma display device according to claim 8, wherein the heating step, the alignment step, and the sealing step are all performed in a vacuum atmosphere.   11. The method of manufacturing a plasma display device according to claim 10, wherein in the alignment step and the sealing step, the front panel and the rear panel are electrostatically attracted to the panel holding base. The positioning step and the sealing step are performed under atmospheric pressure conditions,
The method for manufacturing a plasma display device according to claim 8 or 9, wherein, in the alignment step and the sealing step, the front panel and the rear panel are vacuum-sucked by the panel holding base. A method of manufacturing a plasma display device according to any one of claims 8 to 12,
The method of manufacturing a plasma display device, further comprising a step of controlling the temperature of the front panel so that the temperature is the same as the temperature of the rear panel in the alignment step before the alignment step. A method for manufacturing a plasma display device according to any one of claims 8 to 13,
Prior to the sealing step, the method further comprises a step of abutting a tip tube provided with a heat-meltable adhesive material on one or both of the front panel and the rear panel,
In the sealing step, by heating the sealing material and heating and melting the adhesive, and cooling and solidifying the adhesive, the tip tube is attached to the front panel or the rear panel by the adhesive. A method of manufacturing a plasma display device, wherein the method is fixed to either or both. A film forming chamber for forming a protective film on the front panel surface of the plasma display device comprising a front panel and a rear panel;
A pre-bake chamber for degassing by heating the rear panel;
Connected to both the film formation chamber and the pre-bake chamber, a transfer chamber having a transfer mechanism for transferring the front panel and the rear panel, the front panel carried in via the transfer chamber, and the An apparatus for manufacturing a plasma display device having an alignment sealing chamber for aligning and sealing a rear panel,
The alignment sealing chamber holds the loaded front panel and the rear panel horizontally with the surfaces of the panels facing each other.
A panel holding mechanism configured to allow relative alignment of the panels;
The panel holding mechanism has an upper panel holding table and a lower panel holding table,
Each panel holding base is provided with a heating mechanism and an electrostatic adsorption device, respectively, so that the front panel and the rear panel can be heated by heat conduction while being in close contact with the panel holding base. An apparatus for manufacturing a plasma display device, comprising: 16. The apparatus for manufacturing a plasma display device according to claim 15, wherein the alignment sealing chamber is provided with an abutment mechanism configured to allow a tip tube to abut against the panel surface . Wherein the alignment sealing chamber outside the arranged driving mechanism, while keeping the vacuum state in the alignment sealing chamber, and a transmission mechanism for transmitting the driving force of the drive mechanism has generated the panel holding mechanism 17. The apparatus for manufacturing a plasma display apparatus according to claim 15, wherein the apparatus is a plasma display apparatus . Before SL transfer chamber apparatus for manufacturing a plasma display apparatus according to claim 16, wherein the connecting a sealing chamber for sealing the rear panel and the front panels sealed with the alignment sealing chamber.

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