JP2006019101A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2006019101A5 JP2006019101A5 JP2004194772A JP2004194772A JP2006019101A5 JP 2006019101 A5 JP2006019101 A5 JP 2006019101A5 JP 2004194772 A JP2004194772 A JP 2004194772A JP 2004194772 A JP2004194772 A JP 2004194772A JP 2006019101 A5 JP2006019101 A5 JP 2006019101A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004194772A JP4559137B2 (ja) | 2004-06-30 | 2004-06-30 | 真空機器の製造装置及び製造方法 |
| US11/155,633 US7341393B2 (en) | 2004-06-30 | 2005-06-20 | Mechanism for sealing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004194772A JP4559137B2 (ja) | 2004-06-30 | 2004-06-30 | 真空機器の製造装置及び製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006019101A JP2006019101A (ja) | 2006-01-19 |
| JP2006019101A5 true JP2006019101A5 (enExample) | 2007-08-16 |
| JP4559137B2 JP4559137B2 (ja) | 2010-10-06 |
Family
ID=35540342
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004194772A Expired - Fee Related JP4559137B2 (ja) | 2004-06-30 | 2004-06-30 | 真空機器の製造装置及び製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US7341393B2 (enExample) |
| JP (1) | JP4559137B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ATE512457T1 (de) * | 2006-06-07 | 2011-06-15 | Fei Co | Gleitlager zur verwendung mit einer eine vakuumkammer umfassenden vorrichtung |
| CN101461026B (zh) * | 2006-06-07 | 2012-01-18 | Fei公司 | 与包含真空室的装置一起使用的滑动轴承 |
| JP6863784B2 (ja) * | 2017-03-16 | 2021-04-21 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2481357A (en) * | 1945-10-31 | 1949-09-06 | Douglas Aircraft Co Inc | Seal |
| JPS6054325U (ja) * | 1983-09-21 | 1985-04-16 | 東芝機械株式会社 | 電子ビ−ム描画装置の試料カセット |
| JPS61288980A (ja) * | 1985-06-14 | 1986-12-19 | 株式会社 東洋空機製作所 | ねじ自動締結方法及び装置 |
| JPS6390435U (enExample) * | 1986-11-28 | 1988-06-11 | ||
| JPH022104A (ja) * | 1988-06-15 | 1990-01-08 | Canon Inc | マスク保持装置 |
| JPH052755A (ja) * | 1991-04-15 | 1993-01-08 | Mitsubishi Electric Corp | 光検知器固定機構 |
| US5852093A (en) * | 1994-11-30 | 1998-12-22 | Nippon Zeon Co., Ltd. | Vulcanizable rubber composition, seal used in dynamic state, and sealing material |
| US6281508B1 (en) | 1999-02-08 | 2001-08-28 | Etec Systems, Inc. | Precision alignment and assembly of microlenses and microcolumns |
| JP2001107161A (ja) * | 1999-10-08 | 2001-04-17 | Railway Technical Res Inst | 集電摺動用銅系耐摩焼結合金の製造法 |
| JP4947841B2 (ja) * | 2000-03-31 | 2012-06-06 | キヤノン株式会社 | 荷電粒子線露光装置 |
| JP3728217B2 (ja) * | 2000-04-27 | 2005-12-21 | キヤノン株式会社 | 荷電粒子線露光装置およびデバイス製造方法 |
| JP4765200B2 (ja) * | 2001-06-04 | 2011-09-07 | Ｎｏｋ株式会社 | ガスケット |
| JP2004029063A (ja) * | 2002-06-21 | 2004-01-29 | Adtec Engineeng Co Ltd | 密着型露光装置 |
| JP4477436B2 (ja) * | 2004-06-30 | 2010-06-09 | キヤノン株式会社 | 荷電粒子線露光装置 |
-
2004
- 2004-06-30 JP JP2004194772A patent/JP4559137B2/ja not_active Expired - Fee Related
-
2005
- 2005-06-20 US US11/155,633 patent/US7341393B2/en not_active Expired - Fee Related