JP2005534171A - 加熱チャンバの熱絶縁装置及び方法 - Google Patents
加熱チャンバの熱絶縁装置及び方法 Download PDFInfo
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- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
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- H01J37/32743—Means for moving the material to be treated for introducing the material into processing chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67167—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers surrounding a central transfer chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
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Abstract
Description
図1Aは、基板を処理する代表的なモジュール構造10を例示する。構造10は中央チャンバ12を備え、このチャンバには基板をシステム10の中に搬送するロードロック/冷却チャンバ14A、14B、加熱チャンバ102及び処理チャンバ40、42、44、46が連結されている。中央搬送チャンバ12、ロードロック/冷却チャンバ14A、14B、加熱チャンバ102及び処理チャンバ40、42、44、46は、このシステムが標準大気圧よりもかなり低い内部圧力で動作可能な密閉環境のために一体に封止されている。例えば、代表的な圧力は約10−3Torrである。ロードロック/冷却チャンバ14A、14Bは、それらの外壁に、基板をシステム10中に搬送するための装填ドア16A、16Bをそれぞれに備える密閉可能な開口部を有する。
太陽電池、テレビ及びコンピュータ用モニタで使用するプレートのようなデバイスの製造では、ガラス基板が利用される。多くの場合、薄膜トランジスタがガラス基板上にエッチングされる。このようなデバイスの製造は、半導体デバイスを製造するために使用されるものと同じプロセス及びチャンバの多くを使用するシステムで行われる。例えば、ターナー(Turner)らの米国特許第5512320号は、ガラス基板を処理するための代表的なシステムを開示する。ロー(Law)らの米国特許第5441768号、ロー(Law)らの同第5861107号及びロー(Law)らの同第5928732号は、ガラスのような基板上へのプラズマ強化化学気相成長法を開示する。ターナー(Turner)らの米国特許第5607009号は、昇降機アセンブリを備えるガラス基板加熱用の加熱チャンバを開示する。
しかし、このような添付の図面は、本発明の典型的な実施の形態を例示するものに過ぎず、従って、本発明は他の均等に効果的な実施の形態が許容可能であるので、本発明の範囲を限定するものと考えるべきではないと理解すべきである。
本図面の幾つかの図を通して同じ参照符号が対応する部分を指す。
Claims (21)
- 第1のチャンバと第2のチャンバとの間で基板が搬送される装置であって、前記第1のチャンバは、前記第2のチャンバ内部で維持されている温度に比べて高い温度に維持され、前記第2チャンバはポートを含み、
前記装置は、
前記基板を受け入れるための通路と、
前記第1のチャンバから前記第2のチャンバへの伝熱を減少させる熱絶縁境界面とを備え、前記熱絶縁境界面は、前記装置と前記第2チャンバとの間で前記基板の搬送を可能にし、前記熱絶縁境界面は、面を有しかつ前記面上には境界が配置されており、前記境界は、前記熱絶縁境界面を介して前記基板の搬送が可能であるような寸法を有する穴部を前記熱絶縁境界面の中に画定する装置。 - 前記第1のチャンバは加熱チャンバ又は高温処理チャンバであり、さらに前記第2のチャンバは搬送チャンバである請求項1記載の装置。
- 前記熱絶縁境界面は、アルミニウムの熱伝導率よりも小さい熱伝導率を有する材料から形成される請求項1記載の装置。
- 前記熱絶縁境界面は、1536Btuインチ/(h)(ft2)(°F)よりも小さい熱伝導率を有する材料から成る請求項3記載の装置。
- 前記熱絶縁境界面はステンレス鋼から作製される請求項4記載の装置。
- 前記熱絶縁境界面は、約106Btuインチ/(h)(ft2)(°F)の熱伝導率を有するステンレス鋼から成る請求項4記載の装置。
- 前記面は凹部を含み、前記面が前記ポートに当接するとき、前記凹部の内部に熱絶縁容積が画定されるようになっている請求項1記載の装置。
- 前記熱絶縁容積は、1200Btuインチ/(h)(ft2)(°F)よりも小さい熱伝導率を有する組成物によって占有される請求項7記載の装置。
- 前記組成物が空気又は絶縁材料である請求項8記載の装置。
- 前記凹部に傾斜が付けられている請求項7記載の装置。
- 前記凹部の断面が、鋸歯パターン、反復パターン、曲線及び多項方程式からなる群から選択される形状によって画定される請求項7記載の装置。
- 前記高い温度は約250℃から約625℃までの間の範囲にある請求項1記載の装置。
- 前記通路は、前記装置を前記高い温度に近い温度に維持するための加熱要素をさらに備える請求項1記載の装置。
- 前記加熱要素は金属成形の加熱器を備える請求項13記載の装置。
- 前記加熱要素はセラミック基体の周囲に巻き付けたコイルである請求項13記載の装置。
- 前記通路は、前記加熱要素によって生成された熱を分散するための熱分散機構をさらに備える請求項13記載の装置。
- 前記熱分散機構は反射表面である請求項13記載の装置。
- 前記熱分散機構は放物面鏡である請求項17記載の装置。
- 前記基板は半導体基板又はガラス基板である請求項1記載の装置。
- 第1のチャンバと第2のチャンバとの間で基板が搬送される装置であって、前記第1のチャンバは、前記第2のチャンバ内で維持されている温度に比べて高い温度に維持され、前記第2チャンバはポートを含み、
前記装置は、
前記基板を受け入れるための通路と、
前記第1のチャンバから前記第2のチャンバへの伝熱を減少させるステンレス鋼の境界面とを備え、前記ステンレス鋼の境界面は、前記装置と前記第2チャンバとの間で前記基板の搬送を可能にし、前記ステンレス鋼の境界面は、面を有しかつ前記面上には境界が配置されており、前記境界は、前記ステンレス鋼の境界面を介して前記基板の搬送が可能であるような寸法を有する穴部を前記ステンレス鋼の境界面の中に画定する装置。 - 第1のチャンバと第2のチャンバとの間で基板が搬送される装置であって、前記第1のチャンバは、前記第2のチャンバの周辺温度に比べて高い温度に維持され、前記第2チャンバはポートを含み、
前記装置は、
前記基板を受け入れるための通路であって、前記装置を前記高い温度に近い温度に維持するための加熱要素を含む通路と、
前記第1のチャンバから前記第2のチャンバへの伝熱を減少させる境界面とを備え、前記境界面は、前記装置と前記第2チャンバとの間で前記基板の搬送を可能にし、前記境界面は、面を有しかつ前記面上には境界が配置されており、前記境界は、前記境界面を介して前記基板の搬送が可能であるような寸法を有する穴部を前記境界面の中に画定する装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2002/023799 WO2004010480A1 (en) | 2002-07-24 | 2002-07-24 | Apparatus and method for thermally isolating a heat chamber |
Publications (2)
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JP2005534171A true JP2005534171A (ja) | 2005-11-10 |
JP4510623B2 JP4510623B2 (ja) | 2010-07-28 |
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JP2004522930A Expired - Fee Related JP4510623B2 (ja) | 2002-07-24 | 2002-07-24 | 加熱チャンバの熱絶縁装置及び方法 |
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JP (1) | JP4510623B2 (ja) |
CN (1) | CN100428400C (ja) |
WO (1) | WO2004010480A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100454482C (zh) * | 2005-12-06 | 2009-01-21 | 东京毅力科创株式会社 | 加热处理装置和加热处理方法 |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
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US7354845B2 (en) * | 2004-08-24 | 2008-04-08 | Otb Group B.V. | In-line process for making thin film electronic devices |
CA2552327C (en) | 2006-07-13 | 2014-04-15 | Mackenzie Millar | Method for selective extraction of natural gas liquids from "rich" natural gas |
ITMI20070350A1 (it) * | 2007-02-23 | 2008-08-24 | Univ Milano Bicocca | Metodo di lavorazine a plasma atmosferico per il trattamento dei materiali |
EP2293321A1 (en) * | 2009-09-08 | 2011-03-09 | Applied Materials, Inc. | Mechanical modularity chambers |
CA2763081C (en) | 2011-12-20 | 2019-08-13 | Jose Lourenco | Method to produce liquefied natural gas (lng) at midstream natural gas liquids (ngls) recovery plants. |
CA2772479C (en) | 2012-03-21 | 2020-01-07 | Mackenzie Millar | Temperature controlled method to liquefy gas and a production plant using the method. |
CA2790961C (en) | 2012-05-11 | 2019-09-03 | Jose Lourenco | A method to recover lpg and condensates from refineries fuel gas streams. |
CA2787746C (en) | 2012-08-27 | 2019-08-13 | Mackenzie Millar | Method of producing and distributing liquid natural gas |
CA2798057C (en) | 2012-12-04 | 2019-11-26 | Mackenzie Millar | A method to produce lng at gas pressure letdown stations in natural gas transmission pipeline systems |
CA2813260C (en) | 2013-04-15 | 2021-07-06 | Mackenzie Millar | A method to produce lng |
WO2016023098A1 (en) | 2014-08-15 | 2016-02-18 | 1304338 Alberta Ltd. | A method of removing carbon dioxide during liquid natural gas production from natural gas at gas pressure letdown stations |
CA2997628C (en) | 2015-09-16 | 2022-10-25 | 1304342 Alberta Ltd. | A method of preparing natural gas at a gas pressure reduction stations to produce liquid natural gas (lng) |
CN107316824B (zh) * | 2016-04-22 | 2020-10-16 | 北京北方华创微电子装备有限公司 | 半导体集成加工设备和半导体加工方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03224223A (ja) * | 1989-04-21 | 1991-10-03 | Nippon Telegr & Teleph Corp <Ntt> | 選択cvd法 |
JPH07201753A (ja) * | 1993-12-29 | 1995-08-04 | Nippon Steel Corp | 薄膜製造方法およびその装置 |
JPH11260881A (ja) * | 1998-03-06 | 1999-09-24 | Tokyo Electron Ltd | 処理装置 |
US6284006B1 (en) * | 1999-11-15 | 2001-09-04 | Fsi International, Inc. | Processing apparatus for microelectronic devices in which polymeric bellows are used to help accomplish substrate transport inside of the apparatus |
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US3866926A (en) * | 1973-03-19 | 1975-02-18 | Mccord Corp | Carburetor gasket |
NL8900544A (nl) * | 1989-03-06 | 1990-10-01 | Asm Europ | Behandelingsstelsel, behandelingsvat en werkwijze voor het behandelen van een substraat. |
KR960002534A (ko) * | 1994-06-07 | 1996-01-26 | 이노우에 아키라 | 감압·상압 처리장치 |
JP3011366B2 (ja) * | 1995-10-26 | 2000-02-21 | 株式会社ノリタケカンパニーリミテド | 膜形成素材を含む基板の焼成方法および装置 |
-
2002
- 2002-07-24 WO PCT/US2002/023799 patent/WO2004010480A1/en active Application Filing
- 2002-07-24 JP JP2004522930A patent/JP4510623B2/ja not_active Expired - Fee Related
- 2002-07-24 CN CNB028293614A patent/CN100428400C/zh not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03224223A (ja) * | 1989-04-21 | 1991-10-03 | Nippon Telegr & Teleph Corp <Ntt> | 選択cvd法 |
JPH07201753A (ja) * | 1993-12-29 | 1995-08-04 | Nippon Steel Corp | 薄膜製造方法およびその装置 |
JPH11260881A (ja) * | 1998-03-06 | 1999-09-24 | Tokyo Electron Ltd | 処理装置 |
US6284006B1 (en) * | 1999-11-15 | 2001-09-04 | Fsi International, Inc. | Processing apparatus for microelectronic devices in which polymeric bellows are used to help accomplish substrate transport inside of the apparatus |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100454482C (zh) * | 2005-12-06 | 2009-01-21 | 东京毅力科创株式会社 | 加热处理装置和加热处理方法 |
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JP4510623B2 (ja) | 2010-07-28 |
CN1639838A (zh) | 2005-07-13 |
CN100428400C (zh) | 2008-10-22 |
WO2004010480A1 (en) | 2004-01-29 |
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