JP2005517212A5 - - Google Patents

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Publication number
JP2005517212A5
JP2005517212A5 JP2003566785A JP2003566785A JP2005517212A5 JP 2005517212 A5 JP2005517212 A5 JP 2005517212A5 JP 2003566785 A JP2003566785 A JP 2003566785A JP 2003566785 A JP2003566785 A JP 2003566785A JP 2005517212 A5 JP2005517212 A5 JP 2005517212A5
Authority
JP
Japan
Prior art keywords
light
mirror surface
electronic circuit
vibration
maximum amplitude
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003566785A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005517212A (ja
Filing date
Publication date
Priority claimed from DE10205207A external-priority patent/DE10205207B4/de
Application filed filed Critical
Publication of JP2005517212A publication Critical patent/JP2005517212A/ja
Publication of JP2005517212A5 publication Critical patent/JP2005517212A5/ja
Pending legal-status Critical Current

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JP2003566785A 2002-02-08 2003-02-07 共振振動子の測定及びその制御のための装置と方法 Pending JP2005517212A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10205207A DE10205207B4 (de) 2002-02-08 2002-02-08 Anordnung und Verfahren zur Messung an einem resonanten Schwinger und zu seiner Steuerung
PCT/EP2003/001242 WO2003067509A1 (de) 2002-02-08 2003-02-07 Anordnung und verfahren zur messung an einem resonanten schwinger und seiner steuerung und einstellung einer pixelbreite

Publications (2)

Publication Number Publication Date
JP2005517212A JP2005517212A (ja) 2005-06-09
JP2005517212A5 true JP2005517212A5 (enExample) 2005-12-22

Family

ID=27634808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003566785A Pending JP2005517212A (ja) 2002-02-08 2003-02-07 共振振動子の測定及びその制御のための装置と方法

Country Status (5)

Country Link
EP (1) EP1472643B1 (enExample)
JP (1) JP2005517212A (enExample)
AU (1) AU2003208816A1 (enExample)
DE (1) DE10205207B4 (enExample)
WO (1) WO2003067509A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100682955B1 (ko) * 2006-01-06 2007-02-15 삼성전자주식회사 스캐너의 구동특성 평가장치 및 방법
JP4293251B2 (ja) * 2007-03-15 2009-07-08 ブラザー工業株式会社 光偏向デバイスの偏向角度測定装置及び偏向角度測定方法
DE102007025328B4 (de) * 2007-05-31 2021-03-04 Osram Gmbh Projektor und Verfahren zum Projizieren
TW200947164A (en) * 2008-05-09 2009-11-16 E Pin Optical Industry Co Ltd MEMS scan controller with inherence frequency and method of control thereof
DE102010003608B4 (de) 2010-03-19 2019-04-04 Robert Bosch Gmbh Vorrichtung und Verfahren zur Charakterisierung eines auslenkbaren Mikrospiegels
DE102010029818B4 (de) 2010-06-08 2022-08-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Positionssensor
DE102011004477A1 (de) 2011-02-21 2012-09-13 Carl Zeiss Ag Scanspiegelvorrichtung
JP6260019B2 (ja) 2012-11-09 2018-01-17 北陽電機株式会社 金属弾性部材、微小機械装置、微小機械装置の製造方法、揺動制御装置及び揺動制御方法
JP6754074B2 (ja) * 2015-03-31 2020-09-09 ミツミ電機株式会社 光走査制御装置
CN110426181B (zh) * 2019-08-29 2021-04-13 上海禾赛科技股份有限公司 扫描镜的扫描参数测量方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3609485A (en) * 1969-04-09 1971-09-28 Bulova Watch Co Inc Resonant torsional oscillators
US3642344A (en) * 1970-11-27 1972-02-15 Honeywell Inc Optical scanner having high-frequency torsional oscillator
US4044283A (en) * 1975-10-22 1977-08-23 Schiller Industries, Inc. Electromechanical resonator
DE2657723A1 (de) * 1976-12-20 1978-06-22 Laser Video Inc Mehrfach-strahlmodulator und lichtstrahl-bilddarstellungsverfahren
JPS6256921A (ja) * 1985-09-06 1987-03-12 Citizen Watch Co Ltd 光走査装置
US4686363A (en) * 1986-01-21 1987-08-11 Printware, Inc. Self-resonant scanner biasing system
DD255799A1 (de) * 1986-11-06 1988-04-13 Zeiss Jena Veb Carl Anordnung zum messen von richtungen bzw. winkeln abgelenkter strahlenbuendel
JP2584224B2 (ja) * 1987-03-30 1997-02-26 富士写真フイルム株式会社 光ビ−ム記録装置
US5121138A (en) * 1990-05-22 1992-06-09 General Scanning, Inc. Resonant scanner control system
JP3414416B2 (ja) * 1992-06-17 2003-06-09 富士写真光機株式会社 ミラー振動型光偏向器の制御回路
US5694237A (en) * 1996-09-25 1997-12-02 University Of Washington Position detection of mechanical resonant scanner mirror
DE19709913C2 (de) * 1997-03-11 1999-05-06 Cms Mikrosysteme Gmbh Chemnitz Anordnung zur Messung und Steuerung oder Regelung der Auslenkung von mikromechanischen Spiegelanordnungen
DE10002196A1 (de) * 2000-01-19 2001-07-26 Heidelberger Instr Mikrotechni Methode zur Positionsregelung von Drehspiegeln mittels einer optischen Spiegelpositionsbestimmung

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