DE10205207B4 - Anordnung und Verfahren zur Messung an einem resonanten Schwinger und zu seiner Steuerung - Google Patents

Anordnung und Verfahren zur Messung an einem resonanten Schwinger und zu seiner Steuerung Download PDF

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Publication number
DE10205207B4
DE10205207B4 DE10205207A DE10205207A DE10205207B4 DE 10205207 B4 DE10205207 B4 DE 10205207B4 DE 10205207 A DE10205207 A DE 10205207A DE 10205207 A DE10205207 A DE 10205207A DE 10205207 B4 DE10205207 B4 DE 10205207B4
Authority
DE
Germany
Prior art keywords
mirror surface
oscillation
mirror
measuring beam
amplitude
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE10205207A
Other languages
German (de)
English (en)
Other versions
DE10205207A1 (de
Inventor
Mike Wenzel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LDT Laser Display Technology GmbH
Original Assignee
Jenoptik LDT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik LDT GmbH filed Critical Jenoptik LDT GmbH
Priority to DE10205207A priority Critical patent/DE10205207B4/de
Priority to PCT/EP2003/001242 priority patent/WO2003067509A1/de
Priority to AU2003208816A priority patent/AU2003208816A1/en
Priority to EP03706457A priority patent/EP1472643B1/de
Priority to JP2003566785A priority patent/JP2005517212A/ja
Publication of DE10205207A1 publication Critical patent/DE10205207A1/de
Application granted granted Critical
Publication of DE10205207B4 publication Critical patent/DE10205207B4/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/047—Detection, control or error compensation of scanning velocity or position
    • H04N1/053—Detection, control or error compensation of scanning velocity or position in main scanning direction, e.g. synchronisation of line start or picture elements in a line
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/28—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication
    • G01D5/30—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication the beams of light being detected by photocells
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/113—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using oscillating or rotating mirrors
    • H04N1/1135—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using oscillating or rotating mirrors for the main-scan only
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/024—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof deleted
    • H04N2201/02406—Arrangements for positioning elements within a head
    • H04N2201/02439—Positioning method
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04701—Detection of scanning velocity or position
    • H04N2201/0471—Detection of scanning velocity or position using dedicated detectors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04701—Detection of scanning velocity or position
    • H04N2201/04732—Detecting at infrequent intervals, e.g. once or twice per line for main-scan control
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04701—Detection of scanning velocity or position
    • H04N2201/04744—Detection of scanning velocity or position by detecting the scanned beam or a reference beam
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04753—Control or error compensation of scanning position or velocity
    • H04N2201/04758—Control or error compensation of scanning position or velocity by controlling the position of the scanned image area
    • H04N2201/04767—Control or error compensation of scanning position or velocity by controlling the position of the scanned image area by controlling the timing of the signals, e.g. by controlling the frequency o phase of the pixel clock
    • H04N2201/04768—Controlling the frequency of the signals
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04753—Control or error compensation of scanning position or velocity
    • H04N2201/04794—Varying the control or compensation during the scan, e.g. using continuous feedback or from line to line

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
DE10205207A 2002-02-08 2002-02-08 Anordnung und Verfahren zur Messung an einem resonanten Schwinger und zu seiner Steuerung Expired - Fee Related DE10205207B4 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE10205207A DE10205207B4 (de) 2002-02-08 2002-02-08 Anordnung und Verfahren zur Messung an einem resonanten Schwinger und zu seiner Steuerung
PCT/EP2003/001242 WO2003067509A1 (de) 2002-02-08 2003-02-07 Anordnung und verfahren zur messung an einem resonanten schwinger und seiner steuerung und einstellung einer pixelbreite
AU2003208816A AU2003208816A1 (en) 2002-02-08 2003-02-07 Arrangement and method for measurement on a resonant oscillator, control thereof and setting of a pixel width
EP03706457A EP1472643B1 (de) 2002-02-08 2003-02-07 Anordnung und verfahren zur messung an einem resonanten schwinger und seiner steuerung und einstellung einer pixelbreite
JP2003566785A JP2005517212A (ja) 2002-02-08 2003-02-07 共振振動子の測定及びその制御のための装置と方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10205207A DE10205207B4 (de) 2002-02-08 2002-02-08 Anordnung und Verfahren zur Messung an einem resonanten Schwinger und zu seiner Steuerung

Publications (2)

Publication Number Publication Date
DE10205207A1 DE10205207A1 (de) 2003-08-28
DE10205207B4 true DE10205207B4 (de) 2004-07-01

Family

ID=27634808

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10205207A Expired - Fee Related DE10205207B4 (de) 2002-02-08 2002-02-08 Anordnung und Verfahren zur Messung an einem resonanten Schwinger und zu seiner Steuerung

Country Status (5)

Country Link
EP (1) EP1472643B1 (enExample)
JP (1) JP2005517212A (enExample)
AU (1) AU2003208816A1 (enExample)
DE (1) DE10205207B4 (enExample)
WO (1) WO2003067509A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8570502B2 (en) 2011-02-21 2013-10-29 Carl Zeiss Ag Scanning mirror device

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100682955B1 (ko) * 2006-01-06 2007-02-15 삼성전자주식회사 스캐너의 구동특성 평가장치 및 방법
JP4293251B2 (ja) * 2007-03-15 2009-07-08 ブラザー工業株式会社 光偏向デバイスの偏向角度測定装置及び偏向角度測定方法
DE102007025328B4 (de) 2007-05-31 2021-03-04 Osram Gmbh Projektor und Verfahren zum Projizieren
TW200947164A (en) * 2008-05-09 2009-11-16 E Pin Optical Industry Co Ltd MEMS scan controller with inherence frequency and method of control thereof
DE102010003608B4 (de) 2010-03-19 2019-04-04 Robert Bosch Gmbh Vorrichtung und Verfahren zur Charakterisierung eines auslenkbaren Mikrospiegels
DE102010029818B4 (de) 2010-06-08 2022-08-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Positionssensor
JP6260019B2 (ja) 2012-11-09 2018-01-17 北陽電機株式会社 金属弾性部材、微小機械装置、微小機械装置の製造方法、揺動制御装置及び揺動制御方法
JP6754074B2 (ja) * 2015-03-31 2020-09-09 ミツミ電機株式会社 光走査制御装置
CN110426181B (zh) * 2019-08-29 2021-04-13 上海禾赛科技股份有限公司 扫描镜的扫描参数测量方法

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3609485A (en) * 1969-04-09 1971-09-28 Bulova Watch Co Inc Resonant torsional oscillators
US3642344A (en) * 1970-11-27 1972-02-15 Honeywell Inc Optical scanner having high-frequency torsional oscillator
US4044283A (en) * 1975-10-22 1977-08-23 Schiller Industries, Inc. Electromechanical resonator
US4686363A (en) * 1986-01-21 1987-08-11 Printware, Inc. Self-resonant scanner biasing system
DE3726500A1 (de) * 1986-11-06 1988-05-19 Jenoptik Jena Gmbh Anordnung zum messen von richtungen bzw. winkeln abgelenkter strahlenbuendel
EP0285097A2 (en) * 1987-03-30 1988-10-05 Fuji Photo Film Co., Ltd. Apparatus for recording information with light beam
US5121138A (en) * 1990-05-22 1992-06-09 General Scanning, Inc. Resonant scanner control system
WO1998013719A1 (en) * 1996-09-25 1998-04-02 University Of Washington Position detection of mechanical resonant scanner mirror
DE19709913C2 (de) * 1997-03-11 1999-05-06 Cms Mikrosysteme Gmbh Chemnitz Anordnung zur Messung und Steuerung oder Regelung der Auslenkung von mikromechanischen Spiegelanordnungen
DE10002196A1 (de) * 2000-01-19 2001-07-26 Heidelberger Instr Mikrotechni Methode zur Positionsregelung von Drehspiegeln mittels einer optischen Spiegelpositionsbestimmung

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2657723A1 (de) * 1976-12-20 1978-06-22 Laser Video Inc Mehrfach-strahlmodulator und lichtstrahl-bilddarstellungsverfahren
JPS6256921A (ja) * 1985-09-06 1987-03-12 Citizen Watch Co Ltd 光走査装置
JP3414416B2 (ja) * 1992-06-17 2003-06-09 富士写真光機株式会社 ミラー振動型光偏向器の制御回路

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3609485A (en) * 1969-04-09 1971-09-28 Bulova Watch Co Inc Resonant torsional oscillators
US3642344A (en) * 1970-11-27 1972-02-15 Honeywell Inc Optical scanner having high-frequency torsional oscillator
US4044283A (en) * 1975-10-22 1977-08-23 Schiller Industries, Inc. Electromechanical resonator
US4686363A (en) * 1986-01-21 1987-08-11 Printware, Inc. Self-resonant scanner biasing system
DE3726500A1 (de) * 1986-11-06 1988-05-19 Jenoptik Jena Gmbh Anordnung zum messen von richtungen bzw. winkeln abgelenkter strahlenbuendel
EP0285097A2 (en) * 1987-03-30 1988-10-05 Fuji Photo Film Co., Ltd. Apparatus for recording information with light beam
US5121138A (en) * 1990-05-22 1992-06-09 General Scanning, Inc. Resonant scanner control system
WO1998013719A1 (en) * 1996-09-25 1998-04-02 University Of Washington Position detection of mechanical resonant scanner mirror
DE19709913C2 (de) * 1997-03-11 1999-05-06 Cms Mikrosysteme Gmbh Chemnitz Anordnung zur Messung und Steuerung oder Regelung der Auslenkung von mikromechanischen Spiegelanordnungen
DE10002196A1 (de) * 2000-01-19 2001-07-26 Heidelberger Instr Mikrotechni Methode zur Positionsregelung von Drehspiegeln mittels einer optischen Spiegelpositionsbestimmung

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Buser, Rudolf, A.: "Theoretical and Experimental Investigations on Silicon Single Crystal Resonant Strucutes" Dissertation University of Neuchatel 1989, S. 178 *
Reich, Stan: "The use of Elektro-Mechanical Mirror Scanning Devises" SPIE, Vol. 86, Laser Scanning Components & Techniques (1976) S. 47-58 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8570502B2 (en) 2011-02-21 2013-10-29 Carl Zeiss Ag Scanning mirror device

Also Published As

Publication number Publication date
DE10205207A1 (de) 2003-08-28
EP1472643B1 (de) 2011-09-21
AU2003208816A1 (en) 2003-09-02
EP1472643A1 (de) 2004-11-03
WO2003067509A1 (de) 2003-08-14
JP2005517212A (ja) 2005-06-09

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8127 New person/name/address of the applicant

Owner name: JENOPTIK LDT GMBH, 07548 GERA, DE

8364 No opposition during term of opposition
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee