JP2005515441A - 電気的測定用プローブとその製造方法 - Google Patents

電気的測定用プローブとその製造方法 Download PDF

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Publication number
JP2005515441A
JP2005515441A JP2003560573A JP2003560573A JP2005515441A JP 2005515441 A JP2005515441 A JP 2005515441A JP 2003560573 A JP2003560573 A JP 2003560573A JP 2003560573 A JP2003560573 A JP 2003560573A JP 2005515441 A JP2005515441 A JP 2005515441A
Authority
JP
Japan
Prior art keywords
probe
probe according
flexible
substrate
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003560573A
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English (en)
Japanese (ja)
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JP2005515441A5 (enExample
Inventor
ベール、ルートヴィッヒ
ハインリッヒ、ヴェルナー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of JP2005515441A publication Critical patent/JP2005515441A/ja
Publication of JP2005515441A5 publication Critical patent/JP2005515441A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/82—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
    • G01N27/90—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents
    • G01N27/9013—Arrangements for scanning
    • G01N27/902—Arrangements for scanning by moving the sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
  • Measuring Leads Or Probes (AREA)
JP2003560573A 2002-01-17 2002-12-23 電気的測定用プローブとその製造方法 Pending JP2005515441A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP02001268A EP1329730A1 (de) 2002-01-17 2002-01-17 Wirbelstromsonde auf einem flexiblen Substrat
PCT/EP2002/014738 WO2003060530A1 (de) 2002-01-17 2002-12-23 Sonde für elektrische messverfahren und verwendung einer flexiblen sonde zur herstellung einer unflexiblen sonde

Publications (2)

Publication Number Publication Date
JP2005515441A true JP2005515441A (ja) 2005-05-26
JP2005515441A5 JP2005515441A5 (enExample) 2005-12-22

Family

ID=8185297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003560573A Pending JP2005515441A (ja) 2002-01-17 2002-12-23 電気的測定用プローブとその製造方法

Country Status (5)

Country Link
US (1) US7688067B2 (enExample)
EP (2) EP1329730A1 (enExample)
JP (1) JP2005515441A (enExample)
DE (1) DE50211376D1 (enExample)
WO (1) WO2003060530A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1496355A1 (de) * 2003-07-09 2005-01-12 Siemens Aktiengesellschaft Sonde für elektrische Messverfahren, insbesondere für Wirbelstrommessungen
US7888932B2 (en) * 2007-11-05 2011-02-15 General Electric Company Surface flaw detection system to facilitate nondestructive inspection of a component and methods of assembling the same
US7688089B2 (en) * 2008-01-25 2010-03-30 International Business Machines Corporation Compliant membrane thin film interposer probe for intergrated circuit device testing
US8269489B2 (en) * 2008-11-25 2012-09-18 General Electric Company System and method for eddy current inspection of parts with complex geometries

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58153157A (ja) 1982-03-05 1983-09-12 Shimadzu Corp 磁気探傷装置の磁気検出器
GB8513006D0 (en) * 1985-05-22 1985-06-26 Raychem Gmbh Encapsulating electrical components
EP0228177A3 (en) * 1985-11-19 1988-11-02 Electric Power Research Institute, Inc Flexible eddy-current coil and coil array for nondestructive testing
US5389876A (en) 1991-05-06 1995-02-14 General Electric Company Flexible eddy current surface measurement array for detecting near surface flaws in a conductive part
JP3208158B2 (ja) 1991-09-06 2001-09-10 株式会社東立エンジニアリング 溶接棒位置決め装置
DE4204643C1 (enExample) * 1992-02-15 1993-05-19 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De
US5315234A (en) 1992-04-03 1994-05-24 General Electric Company Eddy current device for inspecting a component having a flexible support with a plural sensor array
JPH0738956A (ja) 1993-07-14 1995-02-07 Toshiba Corp 移動無線通信装置
US5510709A (en) * 1993-09-27 1996-04-23 General Electric Company Eddy current surface inspection probe for aircraft fastener inspection, and inspection method
US5467775A (en) 1995-03-17 1995-11-21 University Research Engineers & Associates Modular auscultation sensor and telemetry system
JPH0983104A (ja) * 1995-09-12 1997-03-28 Murata Mfg Co Ltd コイル内蔵回路基板
US6002251A (en) 1995-12-15 1999-12-14 Sun; Yu-Shi Electromagnetic-field-focusing remote-field eddy-current probe system and method for inspecting anomalies in conducting plates
JPH10197492A (ja) 1997-01-08 1998-07-31 Toshiba Corp 電磁誘導薄膜プローブ
JP2001522046A (ja) * 1997-11-04 2001-11-13 シーメンス アクチエンゲゼルシヤフト 渦電流検査ヘッド、渦電流検査ヘッドの製造方法および渦電流検査方法
DE19748556A1 (de) 1997-11-04 1999-05-20 Siemens Ag Magnetfluß-Meßsystem zur Wirbelstromprüfung und Verfahren zur Wirbelstromprüfung
US6198280B1 (en) * 1998-04-27 2001-03-06 Siemens Westinghouse Power Corporation Eddy current flexible field probe deployed through a loading platform
US6838890B2 (en) * 2000-02-25 2005-01-04 Cascade Microtech, Inc. Membrane probing system
EP1496355A1 (de) * 2003-07-09 2005-01-12 Siemens Aktiengesellschaft Sonde für elektrische Messverfahren, insbesondere für Wirbelstrommessungen
JP3812559B2 (ja) * 2003-09-18 2006-08-23 Ｔｄｋ株式会社 渦電流プローブ

Also Published As

Publication number Publication date
US20050140366A1 (en) 2005-06-30
EP1466181B1 (de) 2007-12-12
US7688067B2 (en) 2010-03-30
EP1329730A1 (de) 2003-07-23
DE50211376D1 (de) 2008-01-24
WO2003060530A1 (de) 2003-07-24
EP1466181A1 (de) 2004-10-13

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