JP2005514561A5 - - Google Patents

Download PDF

Info

Publication number
JP2005514561A5
JP2005514561A5 JP2003556683A JP2003556683A JP2005514561A5 JP 2005514561 A5 JP2005514561 A5 JP 2005514561A5 JP 2003556683 A JP2003556683 A JP 2003556683A JP 2003556683 A JP2003556683 A JP 2003556683A JP 2005514561 A5 JP2005514561 A5 JP 2005514561A5
Authority
JP
Japan
Prior art keywords
fluid
fluid element
base plate
conduits
connection region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003556683A
Other languages
English (en)
Other versions
JP2005514561A (ja
JP4663235B2 (ja
Filing date
Publication date
Priority claimed from US10/027,545 external-priority patent/US6634385B2/en
Application filed filed Critical
Publication of JP2005514561A publication Critical patent/JP2005514561A/ja
Publication of JP2005514561A5 publication Critical patent/JP2005514561A5/ja
Application granted granted Critical
Publication of JP4663235B2 publication Critical patent/JP4663235B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Claims (2)

  1. 流体を搬送すべく互いに接続された、少なくとも第１流体素子及び第２流体素子と、前記第１流体素子及び前記第２流体素子を搭載するベースプレートとを備える、少なくとも一つの流体を搬送するための装置において、
    前記ベースプレートは、複数の導管を備え、これらの導管の各々はリークテスト剤を隣接する流体素子の間の接続領域に送出する排出口を有し、前記導管の各々は一の注入口を有し、及び、複数の前記注入口が前記ベースプレートの境界に配置される装置。
  2. 流体を搬送する互いに接続可能な少なくとも第１流体素子及び第２流体素子を搭載するベースプレートであって、
    前記ベースプレートは、リークテスト剤を前記第１流体素子及び前記第２流体素子の接続領域に送出する第１排出口を少なくとも備えることを特徴とするベースプレート。
JP2003556683A 2001-12-21 2002-12-12 流体の搬送装置及びベースプレート Expired - Fee Related JP4663235B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/027,545 US6634385B2 (en) 2001-12-21 2001-12-21 Apparatus for conveying fluids and base plate
PCT/US2002/039700 WO2003056189A1 (en) 2001-12-21 2002-12-12 Apparatus for conveying fluids and base plate

Publications (3)

Publication Number Publication Date
JP2005514561A JP2005514561A (ja) 2005-05-19
JP2005514561A5 true JP2005514561A5 (ja) 2006-02-09
JP4663235B2 JP4663235B2 (ja) 2011-04-06

Family

ID=21838340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003556683A Expired - Fee Related JP4663235B2 (ja) 2001-12-21 2002-12-12 流体の搬送装置及びベースプレート

Country Status (6)

Country Link
US (1) US6634385B2 (ja)
EP (1) EP1458984B1 (ja)
JP (1) JP4663235B2 (ja)
AU (1) AU2002351364A1 (ja)
DE (1) DE60213001T2 (ja)
WO (1) WO2003056189A1 (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005539375A (ja) * 2002-08-27 2005-12-22 セレリティ・インコーポレイテッド 共通の平面にマニホルド接続を有するモジュール式基板ガスパネル
US7370674B2 (en) * 2004-02-20 2008-05-13 Michael Doyle Modular fluid distribution system
US20070023084A1 (en) * 2005-07-28 2007-02-01 Cimberio Valve Co. Inc. Valve module for a fluid-distribution system
JP2007152211A (ja) * 2005-12-02 2007-06-21 Asahi Organic Chem Ind Co Ltd フラッシング装置
US7575616B2 (en) * 2006-02-10 2009-08-18 Entegris, Inc. Low-profile surface mount filter
US20080302426A1 (en) * 2007-06-06 2008-12-11 Greg Patrick Mulligan System and method of securing removable components for distribution of fluids
US7784496B2 (en) * 2007-06-11 2010-08-31 Lam Research Corporation Triple valve inlet assembly
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
US8496029B2 (en) 2009-06-10 2013-07-30 Vistadeltek, Llc Extreme flow rate and/or high temperature fluid delivery substrates
JP5041066B2 (ja) * 2009-07-21 2012-10-03 トヨタ自動車株式会社 燃料システム及び車両

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3871209A (en) 1971-03-25 1975-03-18 Malvern M Hasha Method of externally testing connections between tubular members
CH558514A (de) * 1972-11-28 1975-01-31 Sulzer Ag Vorrichtung zum durchfuehren eines rohrbuendels durch eine behaelterwand.
US3895831A (en) * 1973-05-10 1975-07-22 Conax Corp Seal assembly providing dual seal zones
US4817994A (en) * 1987-10-14 1989-04-04 Bronnert Herve X Aseptic pipe joint
JPH02261983A (ja) * 1989-03-31 1990-10-24 Ishikawajima Harima Heavy Ind Co Ltd サイクル式分配弁
DE4134489A1 (de) 1991-03-28 1992-10-01 Weatherford Prod & Equip Einrichtung zum pruefen der gasdichtigkeit von loesbaren hohlkoerperverbindungen
US6293310B1 (en) * 1996-10-30 2001-09-25 Unit Instruments, Inc. Gas panel
JP3997337B2 (ja) * 1996-11-20 2007-10-24 忠弘 大見 流体制御装置
US6302141B1 (en) * 1996-12-03 2001-10-16 Insync Systems, Inc. Building blocks for integrated gas panel
US6068016A (en) * 1997-09-25 2000-05-30 Applied Materials, Inc Modular fluid flow system with integrated pump-purge
JP2002517698A (ja) * 1998-06-12 2002-06-18 ジェイ． グレゴリー ホーリングスヘッド， モジュラー化学送達ブロック
JP3626014B2 (ja) 1998-07-09 2005-03-02 シーケーディ株式会社 プロセスガス供給ユニットにおけるガス漏れ検査装置及びガス漏れ検査方法
US6026843A (en) 1998-11-24 2000-02-22 The Boc Group, Inc. Valve box manifold system and distribution method

Similar Documents

Publication Publication Date Title
JP2005514561A5 (ja)
JP2004255374A5 (ja)
TW200504800A (en) Showerhead assembly and apparatus for manufacturing semiconductor device having the same
EP1715279A4 (en) HEAT EXCHANGER, METHOD FOR ITS MANUFACTURE AND ARTIFICIAL HEART-LUNG MACHINE
BRPI0409094B1 (pt) método e aparelho para misturar continuamente dois fluxos.
DE50012414D1 (de) Modulares mikroreaktionssystem
SE9202057D0 (sv) Plattvaermevaexlare foer vaetskor med olika floeden
DE50307283D1 (de) Plattenwärmeübertrager
DE60232731D1 (de) Mikroelektronisches system mit integriertem kryostatischem kühler
DE602007010463D1 (de) Betriebsvorrichtung
CA2412132A1 (en) Method and apparatus for treating fluids
ATE310230T1 (de) Ultraschalldurchflussmesser
WO2004022462A3 (en) Flow homogeniser
GB0605554D0 (en) Gas supply apparatus
ITBO20020339A0 (it) Dispositivo ripartitore di flusso per collettori aria atto a realizzare flussi turbolenti in camera di scoppio
ATE472100T1 (de) Vorrichtung mit komprimierbarer matrix und homogenem strömungsprofil
JP4663235B2 (ja) 流体の搬送装置及びベースプレート
ATE438459T1 (de) Wirbelschichtvorrichtungsmodul und verfahren zum austauschen eines ersten moduls gegen ein zweites modul in wirbelschichtvorrichtungen
JP2003286941A5 (ja)
EP1600720A3 (en) Combustion apparatus
ATE357639T1 (de) Wärmetauscher
SE0202415D0 (sv) Dockable processing module
WO2005049186A3 (de) Statische mischvorrichtung, austragvorrichtung und vorratsbehältnis mit einer solchen mischvorrichtung, verwendung einer solchen mischvorrichtung sowie verfahren zum austragen
ATE382410T1 (de) Einlassvorrichtung für fluide
SE9701489D0 (sv) Anordning vid en värmeväxlare