JP4663235B2 - 流体の搬送装置及びベースプレート - Google Patents
流体の搬送装置及びベースプレート Download PDFInfo
- Publication number
- JP4663235B2 JP4663235B2 JP2003556683A JP2003556683A JP4663235B2 JP 4663235 B2 JP4663235 B2 JP 4663235B2 JP 2003556683 A JP2003556683 A JP 2003556683A JP 2003556683 A JP2003556683 A JP 2003556683A JP 4663235 B2 JP4663235 B2 JP 4663235B2
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- fluid element
- base plate
- base
- conduit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0318—Processes
- Y10T137/0402—Cleaning, repairing, or assembling
- Y10T137/0441—Repairing, securing, replacing, or servicing pipe joint, valve, or tank
- Y10T137/0452—Detecting or repairing leak
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
- Y10T137/87885—Sectional block structure
Description
Claims (2)
- 半導体装置製造のために使用される流体を搬送するための第1流体素子及び第2流体素子と、前記第1流体素子及び第2流体素子に連結されるチャネルを有することによって前記流体を前記第1流体素子から第2流体素子に搬送するためのベースブロックと、前記第1流体素子及び第2流体素子が連結された前記ベースブロックはベースプレート上に載置することとを備える、流体を搬送するための流体搬送装置において、
前記ベースプレートは、リークテスト剤を搬送するための複数の導管を備え、第1の導管は前記第1流体素子と前記ベースブロックの間、及び第2の導管は前記第2流体素子と前記ベースブロックの間の接続領域に送出する排出口を有することによって、前記第1流体素子及び前記第2流体素子のいずれかの流体素子においてリークが生じた場合にリークの場所を特定する、流体搬送装置。 - 半導体装置製造のために使用される流体を複数のベースブロックを介して搬送するための複数の流体素子を載置するためのベースプレートであって、
前記ベースプレート上に直接前記ベースブロックを載置し、前記ベースプレートは、リークテスト剤を搬送するための複数の導管を備え、第1の導管は前記第1流体素子と前記ベースブロックの間、及び第2の導管は前記第2流体素子と前記ベースブロックの間の接続領域に送出する排出口を有することによって、前記第1流体素子及び前記第2流体素子のいずれかの流体素子において前記流体のリークが生じた場合にリークの場所を特定することを特徴とするベースプレート。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/027,545 US6634385B2 (en) | 2001-12-21 | 2001-12-21 | Apparatus for conveying fluids and base plate |
PCT/US2002/039700 WO2003056189A1 (en) | 2001-12-21 | 2002-12-12 | Apparatus for conveying fluids and base plate |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005514561A JP2005514561A (ja) | 2005-05-19 |
JP2005514561A5 JP2005514561A5 (ja) | 2006-02-09 |
JP4663235B2 true JP4663235B2 (ja) | 2011-04-06 |
Family
ID=21838340
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003556683A Expired - Fee Related JP4663235B2 (ja) | 2001-12-21 | 2002-12-12 | 流体の搬送装置及びベースプレート |
Country Status (6)
Country | Link |
---|---|
US (1) | US6634385B2 (ja) |
EP (1) | EP1458984B1 (ja) |
JP (1) | JP4663235B2 (ja) |
AU (1) | AU2002351364A1 (ja) |
DE (1) | DE60213001T2 (ja) |
WO (1) | WO2003056189A1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1543544A2 (en) * | 2002-08-27 | 2005-06-22 | Celerity Group, Inc. | Modular substrate gas panel having manifold connections in a common plane |
US7370674B2 (en) * | 2004-02-20 | 2008-05-13 | Michael Doyle | Modular fluid distribution system |
US20070023084A1 (en) * | 2005-07-28 | 2007-02-01 | Cimberio Valve Co. Inc. | Valve module for a fluid-distribution system |
JP2007152211A (ja) * | 2005-12-02 | 2007-06-21 | Asahi Organic Chem Ind Co Ltd | フラッシング装置 |
US7575616B2 (en) * | 2006-02-10 | 2009-08-18 | Entegris, Inc. | Low-profile surface mount filter |
US20080302426A1 (en) * | 2007-06-06 | 2008-12-11 | Greg Patrick Mulligan | System and method of securing removable components for distribution of fluids |
US7784496B2 (en) * | 2007-06-11 | 2010-08-31 | Lam Research Corporation | Triple valve inlet assembly |
US8307854B1 (en) | 2009-05-14 | 2012-11-13 | Vistadeltek, Inc. | Fluid delivery substrates for building removable standard fluid delivery sticks |
SG176152A1 (en) | 2009-06-10 | 2011-12-29 | Vistadeltek Llc | Extreme flow rate and/or high temperature fluid delivery substrates |
DE112009005091B8 (de) * | 2009-07-21 | 2015-09-17 | Toyota Jidosha Kabushiki Kaisha | Brennstoffsystem und Fahrzeug |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3871209A (en) * | 1971-03-25 | 1975-03-18 | Malvern M Hasha | Method of externally testing connections between tubular members |
JPH02261983A (ja) * | 1989-03-31 | 1990-10-24 | Ishikawajima Harima Heavy Ind Co Ltd | サイクル式分配弁 |
US5255559A (en) * | 1991-03-28 | 1993-10-26 | Weatherford/Lamb, Inc. | Apparatus for testing the gas-tightness of a joint between hollow members |
WO1998025058A1 (en) * | 1996-12-03 | 1998-06-11 | Insync Systems, Inc. | Building blocks for integrated gas panel |
JP2001521120A (ja) * | 1997-10-29 | 2001-11-06 | ユニット・インストゥルメンツ・インコーポレーテッド | ガスパネル |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH558514A (de) * | 1972-11-28 | 1975-01-31 | Sulzer Ag | Vorrichtung zum durchfuehren eines rohrbuendels durch eine behaelterwand. |
US3895831A (en) * | 1973-05-10 | 1975-07-22 | Conax Corp | Seal assembly providing dual seal zones |
US4817994A (en) * | 1987-10-14 | 1989-04-04 | Bronnert Herve X | Aseptic pipe joint |
JP3997337B2 (ja) * | 1996-11-20 | 2007-10-24 | 忠弘 大見 | 流体制御装置 |
US6068016A (en) * | 1997-09-25 | 2000-05-30 | Applied Materials, Inc | Modular fluid flow system with integrated pump-purge |
JP2002517698A (ja) * | 1998-06-12 | 2002-06-18 | ジェイ. グレゴリー ホーリングスヘッド, | モジュラー化学送達ブロック |
JP3626014B2 (ja) | 1998-07-09 | 2005-03-02 | シーケーディ株式会社 | プロセスガス供給ユニットにおけるガス漏れ検査装置及びガス漏れ検査方法 |
US6026843A (en) | 1998-11-24 | 2000-02-22 | The Boc Group, Inc. | Valve box manifold system and distribution method |
-
2001
- 2001-12-21 US US10/027,545 patent/US6634385B2/en not_active Expired - Fee Related
-
2002
- 2002-12-12 DE DE60213001T patent/DE60213001T2/de not_active Expired - Fee Related
- 2002-12-12 EP EP02787021A patent/EP1458984B1/en not_active Expired - Fee Related
- 2002-12-12 JP JP2003556683A patent/JP4663235B2/ja not_active Expired - Fee Related
- 2002-12-12 WO PCT/US2002/039700 patent/WO2003056189A1/en active IP Right Grant
- 2002-12-12 AU AU2002351364A patent/AU2002351364A1/en not_active Abandoned
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3871209A (en) * | 1971-03-25 | 1975-03-18 | Malvern M Hasha | Method of externally testing connections between tubular members |
JPH02261983A (ja) * | 1989-03-31 | 1990-10-24 | Ishikawajima Harima Heavy Ind Co Ltd | サイクル式分配弁 |
US5255559A (en) * | 1991-03-28 | 1993-10-26 | Weatherford/Lamb, Inc. | Apparatus for testing the gas-tightness of a joint between hollow members |
WO1998025058A1 (en) * | 1996-12-03 | 1998-06-11 | Insync Systems, Inc. | Building blocks for integrated gas panel |
JP2001521120A (ja) * | 1997-10-29 | 2001-11-06 | ユニット・インストゥルメンツ・インコーポレーテッド | ガスパネル |
Also Published As
Publication number | Publication date |
---|---|
DE60213001T2 (de) | 2006-11-23 |
EP1458984A1 (en) | 2004-09-22 |
WO2003056189A1 (en) | 2003-07-10 |
AU2002351364A1 (en) | 2003-07-15 |
EP1458984B1 (en) | 2006-07-05 |
US20030116207A1 (en) | 2003-06-26 |
US6634385B2 (en) | 2003-10-21 |
JP2005514561A (ja) | 2005-05-19 |
DE60213001D1 (de) | 2006-08-17 |
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