JP2005512442A - 反射性の改善された音響鏡 - Google Patents

反射性の改善された音響鏡 Download PDF

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Publication number
JP2005512442A
JP2005512442A JP2003551898A JP2003551898A JP2005512442A JP 2005512442 A JP2005512442 A JP 2005512442A JP 2003551898 A JP2003551898 A JP 2003551898A JP 2003551898 A JP2003551898 A JP 2003551898A JP 2005512442 A JP2005512442 A JP 2005512442A
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Japan
Prior art keywords
layer
low
acoustic
dielectric
acoustic mirror
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Pending
Application number
JP2003551898A
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English (en)
Japanese (ja)
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JP2005512442A5 (enExample
Inventor
シュテマー ラルフ
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TDK Electronics AG
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Epcos AG
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Application filed by Epcos AG filed Critical Epcos AG
Publication of JP2005512442A publication Critical patent/JP2005512442A/ja
Publication of JP2005512442A5 publication Critical patent/JP2005512442A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/175—Acoustic mirrors
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02149—Means for compensation or elimination of undesirable effects of ageing changes of characteristics, e.g. electro-acousto-migration
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/583—Multiple crystal filters implemented with thin-film techniques comprising a plurality of piezoelectric layers acoustically coupled
    • H03H9/585—Stacked Crystal Filters [SCF]
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/589—Acoustic mirrors

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2003551898A 2001-12-11 2002-12-06 反射性の改善された音響鏡 Pending JP2005512442A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10160617A DE10160617A1 (de) 2001-12-11 2001-12-11 Akustischer Spiegel mit verbesserter Reflexion
PCT/DE2002/004498 WO2003050950A1 (de) 2001-12-11 2002-12-06 Akustischer spiegel mit verbesserter reflexion

Publications (2)

Publication Number Publication Date
JP2005512442A true JP2005512442A (ja) 2005-04-28
JP2005512442A5 JP2005512442A5 (enExample) 2005-12-22

Family

ID=7708679

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003551898A Pending JP2005512442A (ja) 2001-12-11 2002-12-06 反射性の改善された音響鏡

Country Status (5)

Country Link
US (1) US7230509B2 (enExample)
JP (1) JP2005512442A (enExample)
CN (1) CN100517965C (enExample)
DE (1) DE10160617A1 (enExample)
WO (1) WO2003050950A1 (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005136991A (ja) * 2003-10-30 2005-05-26 Agilent Technol Inc 逆方向のｃ軸圧電材料を備えた音響結合変成器
JP2007510383A (ja) * 2003-10-30 2007-04-19 アバゴ・テクノロジーズ・ジェネラル・アイピー（シンガポール）プライベート・リミテッド 制御可能な通過帯域幅を有する減結合スタック型バルク音響共振器の帯域フィルタ
JP2007510382A (ja) * 2003-10-30 2007-04-19 アバゴ・テクノロジーズ・ジェネラル・アイピー（シンガポール）プライベート・リミテッド パッケージを単純化した圧電薄膜共振器（ｆｂａｒ）デバイス
JP2008172711A (ja) * 2007-01-15 2008-07-24 Hitachi Media Electoronics Co Ltd 薄膜バルク弾性波共振器およびフィルタおよびそれを用いた高周波モジュール
JP2011142613A (ja) * 2009-12-08 2011-07-21 Murata Mfg Co Ltd 積層型圧電薄膜フィルタの製造方法
JP2017509246A (ja) * 2014-03-11 2017-03-30 エプコス アクチエンゲゼルシャフトＥｐｃｏｓ Ａｇ 温度補償部を備えたｂａｗ共振器
JP2022548865A (ja) * 2019-09-23 2022-11-22 ティコナ・エルエルシー ５ｇ周波数で使用するためのｒｆフィルター

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US7242270B2 (en) 2003-10-30 2007-07-10 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Decoupled stacked bulk acoustic resonator-based band-pass filter
US7019605B2 (en) 2003-10-30 2006-03-28 Larson Iii John D Stacked bulk acoustic resonator band-pass filter with controllable pass bandwidth
EP1528677B1 (en) * 2003-10-30 2006-05-10 Agilent Technologies, Inc. Film acoustically-coupled transformer with two reverse c-axis piezoelectric elements
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US7615833B2 (en) 2004-07-13 2009-11-10 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator package and method of fabricating same
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US8981876B2 (en) 2004-11-15 2015-03-17 Avago Technologies General Ip (Singapore) Pte. Ltd. Piezoelectric resonator structures and electrical filters having frame elements
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US7423503B2 (en) 2005-10-18 2008-09-09 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating film acoustically-coupled transformer
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US8258894B2 (en) * 2007-05-31 2012-09-04 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Coupled resonator filter with a filter section
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US7791435B2 (en) 2007-09-28 2010-09-07 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Single stack coupled resonators having differential output
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US8291559B2 (en) * 2009-02-24 2012-10-23 Epcos Ag Process for adapting resonance frequency of a BAW resonator
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US8248185B2 (en) 2009-06-24 2012-08-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator structure comprising a bridge
FR2951024B1 (fr) * 2009-10-01 2012-03-23 St Microelectronics Sa Procede de fabrication de resonateur baw a facteur de qualite eleve
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US8796904B2 (en) 2011-10-31 2014-08-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer
US9243316B2 (en) 2010-01-22 2016-01-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating piezoelectric material with selected c-axis orientation
US8587391B2 (en) * 2010-02-23 2013-11-19 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic coupling layer for coupled resonator filters and method of fabricating acoustic coupling layer
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US8962443B2 (en) 2011-01-31 2015-02-24 Avago Technologies General Ip (Singapore) Pte. Ltd. Semiconductor device having an airbridge and method of fabricating the same
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Cited By (8)

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JP2005136991A (ja) * 2003-10-30 2005-05-26 Agilent Technol Inc 逆方向のｃ軸圧電材料を備えた音響結合変成器
JP2007510383A (ja) * 2003-10-30 2007-04-19 アバゴ・テクノロジーズ・ジェネラル・アイピー（シンガポール）プライベート・リミテッド 制御可能な通過帯域幅を有する減結合スタック型バルク音響共振器の帯域フィルタ
JP2007510382A (ja) * 2003-10-30 2007-04-19 アバゴ・テクノロジーズ・ジェネラル・アイピー（シンガポール）プライベート・リミテッド パッケージを単純化した圧電薄膜共振器（ｆｂａｒ）デバイス
JP2007511134A (ja) * 2003-10-30 2007-04-26 アバゴ・テクノロジーズ・ジェネラル・アイピー（シンガポール）プライベート・リミテッド 減結合スタック型バルク音響共振器デバイスにおける通過帯域幅の制御
JP2008172711A (ja) * 2007-01-15 2008-07-24 Hitachi Media Electoronics Co Ltd 薄膜バルク弾性波共振器およびフィルタおよびそれを用いた高周波モジュール
JP2011142613A (ja) * 2009-12-08 2011-07-21 Murata Mfg Co Ltd 積層型圧電薄膜フィルタの製造方法
JP2017509246A (ja) * 2014-03-11 2017-03-30 エプコス アクチエンゲゼルシャフトＥｐｃｏｓ Ａｇ 温度補償部を備えたｂａｗ共振器
JP2022548865A (ja) * 2019-09-23 2022-11-22 ティコナ・エルエルシー ５ｇ周波数で使用するためのｒｆフィルター

Also Published As

Publication number Publication date
US20050068124A1 (en) 2005-03-31
CN1602586A (zh) 2005-03-30
WO2003050950A1 (de) 2003-06-19
US7230509B2 (en) 2007-06-12
DE10160617A1 (de) 2003-06-12
CN100517965C (zh) 2009-07-22

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