DE10160617A1 - Akustischer Spiegel mit verbesserter Reflexion - Google Patents
Akustischer Spiegel mit verbesserter ReflexionInfo
- Publication number
- DE10160617A1 DE10160617A1 DE10160617A DE10160617A DE10160617A1 DE 10160617 A1 DE10160617 A1 DE 10160617A1 DE 10160617 A DE10160617 A DE 10160617A DE 10160617 A DE10160617 A DE 10160617A DE 10160617 A1 DE10160617 A1 DE 10160617A1
- Authority
- DE
- Germany
- Prior art keywords
- acoustic
- layer
- low
- layers
- acoustic mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000463 material Substances 0.000 claims abstract description 63
- 239000013078 crystal Substances 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims description 18
- 229910052721 tungsten Inorganic materials 0.000 claims description 16
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical group [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 13
- 239000010937 tungsten Substances 0.000 claims description 13
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 12
- 230000008878 coupling Effects 0.000 claims description 10
- 238000010168 coupling process Methods 0.000 claims description 10
- 238000005859 coupling reaction Methods 0.000 claims description 10
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 9
- 229910052750 molybdenum Inorganic materials 0.000 claims description 9
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 7
- 239000011733 molybdenum Substances 0.000 claims description 7
- -1 polyphenylene Polymers 0.000 claims description 7
- 229920000265 Polyparaphenylene Polymers 0.000 claims description 6
- 239000011787 zinc oxide Substances 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 239000007772 electrode material Substances 0.000 claims description 2
- 229910002601 GaN Inorganic materials 0.000 claims 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims 3
- 229910052802 copper Inorganic materials 0.000 claims 2
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 claims 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 claims 1
- 229920000412 polyarylene Polymers 0.000 claims 1
- 239000010410 layer Substances 0.000 description 167
- 230000005540 biological transmission Effects 0.000 description 15
- 229910004298 SiO 2 Inorganic materials 0.000 description 14
- 238000000034 method Methods 0.000 description 13
- 239000003989 dielectric material Substances 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 8
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- 238000003780 insertion Methods 0.000 description 6
- 230000037431 insertion Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 230000003746 surface roughness Effects 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 238000002310 reflectometry Methods 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 239000000178 monomer Substances 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 239000004964 aerogel Substances 0.000 description 2
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Chemical group C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000004630 atomic force microscopy Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- FQQOMPOPYZIROF-UHFFFAOYSA-N cyclopenta-2,4-dien-1-one Chemical group O=C1C=CC=C1 FQQOMPOPYZIROF-UHFFFAOYSA-N 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
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- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 2
- 230000009477 glass transition Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
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- 239000011368 organic material Substances 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000012876 topography Methods 0.000 description 2
- 229910017083 AlN Inorganic materials 0.000 description 1
- 239000004604 Blowing Agent Substances 0.000 description 1
- 238000004965 Hartree-Fock calculation Methods 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000002318 adhesion promoter Substances 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 238000005187 foaming Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000009548 growth disturbance Effects 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 229920005547 polycyclic aromatic hydrocarbon Polymers 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/175—Acoustic mirrors
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02149—Means for compensation or elimination of undesirable effects of ageing changes of characteristics, e.g. electro-acousto-migration
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/582—Multiple crystal filters implemented with thin-film techniques
- H03H9/583—Multiple crystal filters implemented with thin-film techniques comprising a plurality of piezoelectric layers acoustically coupled
- H03H9/585—Stacked Crystal Filters [SCF]
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/582—Multiple crystal filters implemented with thin-film techniques
- H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/589—Acoustic mirrors
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10160617A DE10160617A1 (de) | 2001-12-11 | 2001-12-11 | Akustischer Spiegel mit verbesserter Reflexion |
| JP2003551898A JP2005512442A (ja) | 2001-12-11 | 2002-12-06 | 反射性の改善された音響鏡 |
| PCT/DE2002/004498 WO2003050950A1 (de) | 2001-12-11 | 2002-12-06 | Akustischer spiegel mit verbesserter reflexion |
| US10/498,203 US7230509B2 (en) | 2001-12-11 | 2002-12-06 | Acoustic mirror |
| CNB02824737XA CN100517965C (zh) | 2001-12-11 | 2002-12-06 | 声反射器、baw谐振器、栈式晶体滤波器、baw谐振滤波器和双工器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10160617A DE10160617A1 (de) | 2001-12-11 | 2001-12-11 | Akustischer Spiegel mit verbesserter Reflexion |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE10160617A1 true DE10160617A1 (de) | 2003-06-12 |
Family
ID=7708679
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE10160617A Withdrawn DE10160617A1 (de) | 2001-12-11 | 2001-12-11 | Akustischer Spiegel mit verbesserter Reflexion |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7230509B2 (enExample) |
| JP (1) | JP2005512442A (enExample) |
| CN (1) | CN100517965C (enExample) |
| DE (1) | DE10160617A1 (enExample) |
| WO (1) | WO2003050950A1 (enExample) |
Cited By (48)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005043754A1 (en) * | 2003-10-30 | 2005-05-12 | Agilent Technologies, Inc. | Film bulk acoustic resonator (fbar) devices with simplified packaging |
| WO2005043755A1 (en) * | 2003-10-30 | 2005-05-12 | Agilent Technologies, Inc. | Decoupled stacked bulk acoustic resonator band-pass filter with controllable pass bandwith |
| US7242270B2 (en) | 2003-10-30 | 2007-07-10 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Decoupled stacked bulk acoustic resonator-based band-pass filter |
| US7367095B2 (en) | 2003-10-30 | 2008-05-06 | Avago Technologies General Ip Pte Ltd | Method of making an acoustically coupled transformer |
| US7369013B2 (en) | 2005-04-06 | 2008-05-06 | Avago Technologies Wireless Ip Pte Ltd | Acoustic resonator performance enhancement using filled recessed region |
| US7388454B2 (en) | 2004-10-01 | 2008-06-17 | Avago Technologies Wireless Ip Pte Ltd | Acoustic resonator performance enhancement using alternating frame structure |
| US7388455B2 (en) | 2003-10-30 | 2008-06-17 | Avago Technologies Wireless Ip Pte Ltd | Film acoustically-coupled transformer with increased common mode rejection |
| US7391286B2 (en) | 2005-10-06 | 2008-06-24 | Avago Wireless Ip Pte Ltd | Impedance matching and parasitic capacitor resonance of FBAR resonators and coupled filters |
| US7423503B2 (en) | 2005-10-18 | 2008-09-09 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating film acoustically-coupled transformer |
| US7425787B2 (en) | 2005-10-18 | 2008-09-16 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating single insulated decoupled stacked bulk acoustic resonator with acoustically-resonant electrical insulator |
| US7424772B2 (en) | 2003-10-30 | 2008-09-16 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Stacked bulk acoustic resonator band-pass filter with controllable pass bandwidth |
| US7427819B2 (en) | 2005-03-04 | 2008-09-23 | Avago Wireless Ip Pte Ltd | Film-bulk acoustic wave resonator with motion plate and method |
| US7436269B2 (en) | 2005-04-18 | 2008-10-14 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustically coupled resonators and method of making the same |
| US7443269B2 (en) | 2005-07-27 | 2008-10-28 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Method and apparatus for selectively blocking radio frequency (RF) signals in a radio frequency (RF) switching circuit |
| US7463499B2 (en) | 2005-10-31 | 2008-12-09 | Avago Technologies General Ip (Singapore) Pte Ltd. | AC-DC power converter |
| US7479685B2 (en) | 2006-03-10 | 2009-01-20 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Electronic device on substrate with cavity and mitigated parasitic leakage path |
| US7508286B2 (en) | 2006-09-28 | 2009-03-24 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | HBAR oscillator and method of manufacture |
| US7525398B2 (en) | 2005-10-18 | 2009-04-28 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustically communicating data signals across an electrical isolation barrier |
| US7561009B2 (en) | 2005-11-30 | 2009-07-14 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Film bulk acoustic resonator (FBAR) devices with temperature compensation |
| US7615833B2 (en) | 2004-07-13 | 2009-11-10 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Film bulk acoustic resonator package and method of fabricating same |
| US7629865B2 (en) | 2006-05-31 | 2009-12-08 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Piezoelectric resonator structures and electrical filters |
| US7675390B2 (en) | 2005-10-18 | 2010-03-09 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating single decoupled stacked bulk acoustic resonator |
| US7732977B2 (en) | 2008-04-30 | 2010-06-08 | Avago Technologies Wireless Ip (Singapore) | Transceiver circuit for film bulk acoustic resonator (FBAR) transducers |
| US7737807B2 (en) | 2005-10-18 | 2010-06-15 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating series-connected decoupled stacked bulk acoustic resonators |
| US7746677B2 (en) | 2006-03-09 | 2010-06-29 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | AC-DC converter circuit and power supply |
| US7791435B2 (en) | 2007-09-28 | 2010-09-07 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Single stack coupled resonators having differential output |
| US7791434B2 (en) | 2004-12-22 | 2010-09-07 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric |
| US7802349B2 (en) | 2003-03-07 | 2010-09-28 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Manufacturing process for thin film bulk acoustic resonator (FBAR) filters |
| US7855618B2 (en) | 2008-04-30 | 2010-12-21 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Bulk acoustic resonator electrical impedance transformers |
| US7868522B2 (en) | 2005-09-09 | 2011-01-11 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Adjusted frequency temperature coefficient resonator |
| US8143082B2 (en) | 2004-12-15 | 2012-03-27 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Wafer bonding of micro-electro mechanical systems to active circuitry |
| US8193877B2 (en) | 2009-11-30 | 2012-06-05 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Duplexer with negative phase shifting circuit |
| US8248185B2 (en) | 2009-06-24 | 2012-08-21 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic resonator structure comprising a bridge |
| US8350445B1 (en) | 2011-06-16 | 2013-01-08 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Bulk acoustic resonator comprising non-piezoelectric layer and bridge |
| US8575820B2 (en) | 2011-03-29 | 2013-11-05 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Stacked bulk acoustic resonator |
| US8796904B2 (en) | 2011-10-31 | 2014-08-05 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer |
| US8902023B2 (en) | 2009-06-24 | 2014-12-02 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator structure having an electrode with a cantilevered portion |
| US8922302B2 (en) | 2011-08-24 | 2014-12-30 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator formed on a pedestal |
| US8962443B2 (en) | 2011-01-31 | 2015-02-24 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Semiconductor device having an airbridge and method of fabricating the same |
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| WO2007004435A1 (ja) * | 2005-06-30 | 2007-01-11 | Matsushita Electric Industrial Co., Ltd. | 音響共振器及びフィルタ |
| US7612636B2 (en) * | 2006-01-30 | 2009-11-03 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Impedance transforming bulk acoustic wave baluns |
| US20070210724A1 (en) * | 2006-03-09 | 2007-09-13 | Mark Unkrich | Power adapter and DC-DC converter having acoustic transformer |
| US7760049B2 (en) * | 2006-05-30 | 2010-07-20 | Panasonic Corporation | Film bulk acoustic resonator, filter, and fabrication method thereof |
| FR2901708A1 (fr) * | 2006-06-02 | 2007-12-07 | Ela Medical Soc Par Actions Si | Dispositif medical actif tel qu'implant actif ou programmateur pour un tel implant, comprenant des moyens de telemetrie rf |
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| JP2008172711A (ja) * | 2007-01-15 | 2008-07-24 | Hitachi Media Electoronics Co Ltd | 薄膜バルク弾性波共振器およびフィルタおよびそれを用いた高周波モジュール |
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| FR2951024B1 (fr) * | 2009-10-01 | 2012-03-23 | St Microelectronics Sa | Procede de fabrication de resonateur baw a facteur de qualite eleve |
| FR2951026B1 (fr) | 2009-10-01 | 2011-12-02 | St Microelectronics Sa | Procede de fabrication de resonateurs baw sur une tranche semiconductrice |
| JP5617523B2 (ja) * | 2009-12-08 | 2014-11-05 | 株式会社村田製作所 | 積層型圧電薄膜フィルタの製造方法 |
| US9243316B2 (en) | 2010-01-22 | 2016-01-26 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Method of fabricating piezoelectric material with selected c-axis orientation |
| US8587391B2 (en) * | 2010-02-23 | 2013-11-19 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic coupling layer for coupled resonator filters and method of fabricating acoustic coupling layer |
| US8390397B2 (en) * | 2010-03-29 | 2013-03-05 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Bulk acoustic resonator structure comprising hybrid electrodes |
| US9099983B2 (en) | 2011-02-28 | 2015-08-04 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Bulk acoustic wave resonator device comprising a bridge in an acoustic reflector |
| US9490418B2 (en) | 2011-03-29 | 2016-11-08 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator comprising collar and acoustic reflector with temperature compensating layer |
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| US9401692B2 (en) | 2012-10-29 | 2016-07-26 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator having collar structure |
| CN102291095A (zh) * | 2011-04-27 | 2011-12-21 | 庞慰 | 复合体声波谐振器 |
| US8872604B2 (en) * | 2011-05-05 | 2014-10-28 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Double film bulk acoustic resonators with electrode layer and piezo-electric layer thicknesses providing improved quality factor |
| DE112012001935T5 (de) | 2012-06-26 | 2014-07-10 | Honda Electronics Co. Ltd. | Elektromechanische Umformungsvorrichtung und Verfahren zum Herstellen derselben |
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| DE102014103229B3 (de) * | 2014-03-11 | 2015-07-23 | Epcos Ag | BAW-Resonator mit Temperaturkompensation |
| GB201618508D0 (en) * | 2016-11-02 | 2016-12-14 | Imp Innovations Ltd | Implantable device |
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Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5873154A (en) | 1996-10-17 | 1999-02-23 | Nokia Mobile Phones Limited | Method for fabricating a resonator having an acoustic mirror |
| US5910756A (en) * | 1997-05-21 | 1999-06-08 | Nokia Mobile Phones Limited | Filters and duplexers utilizing thin film stacked crystal filter structures and thin film bulk acoustic wave resonators |
| FI106894B (fi) * | 1998-06-02 | 2001-04-30 | Nokia Mobile Phones Ltd | Resonaattorirakenteita |
| DE19931297A1 (de) * | 1999-07-07 | 2001-01-11 | Philips Corp Intellectual Pty | Volumenwellen-Filter |
| CN1383610B (zh) * | 2000-04-06 | 2010-05-26 | Nxp股份有限公司 | 包括谐振器的可调谐滤波器装置 |
| US6603241B1 (en) * | 2000-05-23 | 2003-08-05 | Agere Systems, Inc. | Acoustic mirror materials for acoustic devices |
| US6542055B1 (en) * | 2000-10-31 | 2003-04-01 | Agilent Technologies, Inc. | Integrated filter balun |
| FI113111B (fi) * | 2000-11-24 | 2004-02-27 | Nokia Corp | Pietsosähköisiä resonaattoreita käsittävä suodinrakenne ja järjestely |
| US6407649B1 (en) * | 2001-01-05 | 2002-06-18 | Nokia Corporation | Monolithic FBAR duplexer and method of making the same |
| US6472954B1 (en) * | 2001-04-23 | 2002-10-29 | Agilent Technologies, Inc. | Controlled effective coupling coefficients for film bulk acoustic resonators |
| TW519750B (en) * | 2001-06-27 | 2003-02-01 | Asia Pacific Microsystems Inc | Manufacturing method of steady-type film bulk acoustic wave device |
| JP2004247605A (ja) * | 2003-02-14 | 2004-09-02 | Toshiba Corp | Ｃｍｐ用スラリーおよび半導体装置の製造方法 |
| EP1586614B1 (en) * | 2004-04-12 | 2010-09-15 | JSR Corporation | Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method |
-
2001
- 2001-12-11 DE DE10160617A patent/DE10160617A1/de not_active Withdrawn
-
2002
- 2002-12-06 WO PCT/DE2002/004498 patent/WO2003050950A1/de not_active Ceased
- 2002-12-06 JP JP2003551898A patent/JP2005512442A/ja active Pending
- 2002-12-06 CN CNB02824737XA patent/CN100517965C/zh not_active Expired - Fee Related
- 2002-12-06 US US10/498,203 patent/US7230509B2/en not_active Expired - Fee Related
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Also Published As
| Publication number | Publication date |
|---|---|
| US20050068124A1 (en) | 2005-03-31 |
| CN1602586A (zh) | 2005-03-30 |
| WO2003050950A1 (de) | 2003-06-19 |
| US7230509B2 (en) | 2007-06-12 |
| JP2005512442A (ja) | 2005-04-28 |
| CN100517965C (zh) | 2009-07-22 |
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