CN100517965C - 声反射器、baw谐振器、栈式晶体滤波器、baw谐振滤波器和双工器 - Google Patents

声反射器、baw谐振器、栈式晶体滤波器、baw谐振滤波器和双工器 Download PDF

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Publication number
CN100517965C
CN100517965C CNB02824737XA CN02824737A CN100517965C CN 100517965 C CN100517965 C CN 100517965C CN B02824737X A CNB02824737X A CN B02824737XA CN 02824737 A CN02824737 A CN 02824737A CN 100517965 C CN100517965 C CN 100517965C
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China
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layer
filter
reflector
acoustic impedance
low
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Expired - Fee Related
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CNB02824737XA
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Chinese (zh)
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CN1602586A (zh
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R·施特默
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TDK Electronics AG
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Epcos AG
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/175—Acoustic mirrors
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02149—Means for compensation or elimination of undesirable effects of ageing changes of characteristics, e.g. electro-acousto-migration
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/583—Multiple crystal filters implemented with thin-film techniques comprising a plurality of piezoelectric layers acoustically coupled
    • H03H9/585—Stacked Crystal Filters [SCF]
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/589—Acoustic mirrors

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CNB02824737XA 2001-12-11 2002-12-06 声反射器、baw谐振器、栈式晶体滤波器、baw谐振滤波器和双工器 Expired - Fee Related CN100517965C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10160617A DE10160617A1 (de) 2001-12-11 2001-12-11 Akustischer Spiegel mit verbesserter Reflexion
DE10160617.6 2001-12-11

Publications (2)

Publication Number Publication Date
CN1602586A CN1602586A (zh) 2005-03-30
CN100517965C true CN100517965C (zh) 2009-07-22

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CNB02824737XA Expired - Fee Related CN100517965C (zh) 2001-12-11 2002-12-06 声反射器、baw谐振器、栈式晶体滤波器、baw谐振滤波器和双工器

Country Status (5)

Country Link
US (1) US7230509B2 (enExample)
JP (1) JP2005512442A (enExample)
CN (1) CN100517965C (enExample)
DE (1) DE10160617A1 (enExample)
WO (1) WO2003050950A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110391791A (zh) * 2018-04-19 2019-10-29 安华高科技股份有限公司 具有低原子量金属电极的体声波谐振器

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Cited By (2)

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Publication number Priority date Publication date Assignee Title
CN110391791A (zh) * 2018-04-19 2019-10-29 安华高科技股份有限公司 具有低原子量金属电极的体声波谐振器
CN110391791B (zh) * 2018-04-19 2022-05-17 安华高科技股份有限公司 具有低原子量金属电极的体声波谐振器

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Publication number Publication date
US20050068124A1 (en) 2005-03-31
CN1602586A (zh) 2005-03-30
WO2003050950A1 (de) 2003-06-19
US7230509B2 (en) 2007-06-12
DE10160617A1 (de) 2003-06-12
JP2005512442A (ja) 2005-04-28

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