JP2005508570A5 - - Google Patents

Download PDF

Info

Publication number
JP2005508570A5
JP2005508570A5 JP2003525891A JP2003525891A JP2005508570A5 JP 2005508570 A5 JP2005508570 A5 JP 2005508570A5 JP 2003525891 A JP2003525891 A JP 2003525891A JP 2003525891 A JP2003525891 A JP 2003525891A JP 2005508570 A5 JP2005508570 A5 JP 2005508570A5
Authority
JP
Japan
Prior art keywords
vertical strut
container
port door
mounting surface
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003525891A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005508570A (ja
JP4309264B2 (ja
Filing date
Publication date
Priority claimed from US10/087,092 external-priority patent/US7217076B2/en
Application filed filed Critical
Publication of JP2005508570A publication Critical patent/JP2005508570A/ja
Publication of JP2005508570A5 publication Critical patent/JP2005508570A5/ja
Application granted granted Critical
Publication of JP4309264B2 publication Critical patent/JP4309264B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2003525891A 2001-08-31 2002-08-30 半導体材料取扱い装置 Expired - Lifetime JP4309264B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US31672201P 2001-08-31 2001-08-31
US10/087,092 US7217076B2 (en) 2001-08-31 2002-03-01 Semiconductor material handling system
PCT/US2002/027769 WO2003021643A2 (en) 2001-08-31 2002-08-30 Semiconductor material handling system

Publications (3)

Publication Number Publication Date
JP2005508570A JP2005508570A (ja) 2005-03-31
JP2005508570A5 true JP2005508570A5 (https=) 2006-02-09
JP4309264B2 JP4309264B2 (ja) 2009-08-05

Family

ID=26776585

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003525891A Expired - Lifetime JP4309264B2 (ja) 2001-08-31 2002-08-30 半導体材料取扱い装置

Country Status (6)

Country Link
US (1) US7217076B2 (https=)
JP (1) JP4309264B2 (https=)
KR (1) KR100800612B1 (https=)
CN (1) CN1327477C (https=)
DE (1) DE10297169T5 (https=)
WO (1) WO2003021643A2 (https=)

Families Citing this family (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7293571B2 (en) * 2002-09-30 2007-11-13 Lam Research Corporation Substrate proximity processing housing and insert for generating a fluid meniscus
US7145643B2 (en) * 2003-08-07 2006-12-05 Asml Netherlands B.V. Interface unit, lithographic projection apparatus comprising such an interface unit and a device manufacturing method
US7607879B2 (en) * 2004-06-15 2009-10-27 Brooks Automation, Inc. Substrate processing apparatus with removable component module
GB2415291B (en) * 2004-06-15 2008-08-13 Nanobeam Ltd Charged particle beam system
DE102004057057A1 (de) * 2004-11-25 2006-06-01 Leica Microsystems Cms Gmbh Substrat-Arbeitsstation und Zusatzmodul für eine Substrat-Arbeitsstation
US7819079B2 (en) 2004-12-22 2010-10-26 Applied Materials, Inc. Cartesian cluster tool configuration for lithography type processes
US7651306B2 (en) 2004-12-22 2010-01-26 Applied Materials, Inc. Cartesian robot cluster tool architecture
US7396412B2 (en) 2004-12-22 2008-07-08 Sokudo Co., Ltd. Coat/develop module with shared dispense
US7798764B2 (en) 2005-12-22 2010-09-21 Applied Materials, Inc. Substrate processing sequence in a cartesian robot cluster tool
WO2006095569A1 (ja) * 2005-03-08 2006-09-14 Kabushiki Kaisha Yaskawa Denki ロードポートおよびロードポートの制御方法
US7357256B2 (en) * 2005-03-31 2008-04-15 Taiwan Semiconductor Manufacturing Co., Ltd. Wafer pod with working sheet holder
US9457442B2 (en) * 2005-06-18 2016-10-04 Futrfab, Inc. Method and apparatus to support process tool modules in a cleanspace fabricator
US7762755B2 (en) * 2005-07-11 2010-07-27 Brooks Automation, Inc. Equipment storage for substrate processing apparatus
US8821099B2 (en) 2005-07-11 2014-09-02 Brooks Automation, Inc. Load port module
ITBO20060245A1 (it) * 2006-04-05 2007-10-06 Ima Spa Apparato per trasferire e movimentare elementi di una macchina operatrice.
ITBO20060244A1 (it) * 2006-04-05 2007-10-06 Ima Spa Sistema e metodo per trasferire e movimentare elementi di una macchina automatica confezionatrice.
KR100818044B1 (ko) * 2006-05-04 2008-03-31 위순임 기판 지지대와 기판 반송 장치 및 이를 이용한 기판 처리시스템
JP4606388B2 (ja) * 2006-06-12 2011-01-05 川崎重工業株式会社 基板移載装置の搬送系ユニット
DE102006029003A1 (de) * 2006-06-24 2008-01-03 Vistec Semiconductor Systems Gmbh Waferhandhabungsvorrichtung
JP2008032335A (ja) * 2006-07-31 2008-02-14 Hitachi High-Technologies Corp ミニエンバイロメント装置、検査装置、製造装置、及び空間の清浄化方法
US9117859B2 (en) 2006-08-31 2015-08-25 Brooks Automation, Inc. Compact processing apparatus
US8920097B2 (en) * 2006-11-02 2014-12-30 Globalfoundries Singapore Pte. Ltd. Wafer handling system for a loadlock
KR100847888B1 (ko) * 2006-12-12 2008-07-23 세메스 주식회사 반도체 소자 제조 장치
US8500382B2 (en) * 2007-05-22 2013-08-06 Axcelis Technologies Inc. Airflow management for particle abatement in semiconductor manufacturing equipment
WO2009014647A1 (en) * 2007-07-20 2009-01-29 Applied Materials, Inc. Dual-mode robot systems and methods for electronic device manufacturing
US8757026B2 (en) 2008-04-15 2014-06-24 Dynamic Micro Systems, Semiconductor Equipment Gmbh Clean transfer robot
JP5168329B2 (ja) * 2010-08-31 2013-03-21 Ｔｄｋ株式会社 ロードポート装置
DE102010048909A1 (de) * 2010-10-11 2012-04-12 Ekra Automatisierungssysteme Gmbh Prozessmaschine, insbesondere zum Bearbeiten und/oder Inspizieren von Substraten
US9184078B2 (en) * 2011-05-07 2015-11-10 Brooks Automation, Inc. Narrow width loadport mechanism for cleanroom material transfer systems
JP5364769B2 (ja) * 2011-09-26 2013-12-11 株式会社安川電機 搬送ロボットおよび基板処理装置
US8944739B2 (en) * 2012-06-01 2015-02-03 Taiwan Semiconductor Manufacturing Co., Ltd. Loadport bridge for semiconductor fabrication tools
KR102143966B1 (ko) * 2012-12-03 2020-08-13 에이에스엠 아이피 홀딩 비.브이. 모듈식 수직 노 처리 시스템
CN104375293B (zh) * 2014-11-20 2017-05-17 武汉精测电子技术股份有限公司 基于机器视觉的lcd屏自动检测机台
CN105668143B (zh) * 2016-03-23 2017-08-25 北京轩宇智能科技有限公司 一种密封操作系统及其磁耦合式密封输料装置
JP7177333B2 (ja) * 2018-07-04 2022-11-24 シンフォニアテクノロジー株式会社 ロードポート、および、ｅｆｅｍ
US11031265B2 (en) * 2018-11-28 2021-06-08 Brooks Automation, Inc. Load port module
US10916464B1 (en) * 2019-07-26 2021-02-09 Applied Materials, Inc. Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency
US11591194B2 (en) * 2020-07-14 2023-02-28 Intrinsic Innovation Llc Method and system for robotic pick-and-place comprising a container floor mounted to a transformable end of a lift mechanism and a set of container walls to define a container working volume with a working depth extends beyond a picking workspace of a robotic arm
US11545379B2 (en) * 2020-07-31 2023-01-03 Nanya Technology Corporation System and method for controlling semiconductor manufacturing equipment
US11735455B2 (en) 2021-03-12 2023-08-22 Taiwan Semiconductor Manufacturing Company, Ltd. Systems, devices, and methods for air flow optimization including adjacent a FOUP
US12076854B2 (en) * 2021-03-18 2024-09-03 Applied Materials, Inc. Increased number of load ports on factory interface with robot that moves on track
JP7660006B2 (ja) * 2021-03-24 2025-04-10 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、教示情報生成方法および教示セット
JP2024078532A (ja) * 2022-11-30 2024-06-11 株式会社安川電機 基板搬送ロボットシステムおよび基板搬送ロボットの教示方法
US20250069926A1 (en) * 2023-08-22 2025-02-27 Applied Materials, Inc. Integrated substrate processing system with advanced substrate handling robot
CN117116817B (zh) * 2023-09-22 2024-10-29 上海广川科技有限公司 一种尺寸兼容的晶圆缓存装置
CN117612986A (zh) * 2023-11-27 2024-02-27 上海诺银机电科技有限公司 一种晶圆传片机
CN119275144B (zh) * 2024-12-10 2025-02-25 北京和崎精密科技有限公司 晶片存储器

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2867194B2 (ja) 1992-02-05 1999-03-08 東京エレクトロン株式会社 処理装置及び処理方法
JP3030160B2 (ja) 1992-04-28 2000-04-10 東京エレクトロン株式会社 真空処理装置
KR940006241A (ko) 1992-06-05 1994-03-23 이노우에 아키라 기판이재장치 및 이재방법
US6091498A (en) 1996-07-15 2000-07-18 Semitool, Inc. Semiconductor processing apparatus having lift and tilt mechanism
US6053983A (en) * 1997-05-08 2000-04-25 Tokyo Electron, Ltd. Wafer for carrying semiconductor wafers and method detecting wafers on carrier
US6138721A (en) 1997-09-03 2000-10-31 Asyst Technologies, Inc. Tilt and go load port interface alignment system
WO1999028952A2 (en) 1997-11-28 1999-06-10 Fortrend Engineering Corporation Wafer-mapping load port interface
JPH11220001A (ja) 1998-01-30 1999-08-10 Hitachi Ltd 半導体基板処理装置におけるロードポート及びロードポート搬送台車
US6155768A (en) 1998-01-30 2000-12-05 Kensington Laboratories, Inc. Multiple link robot arm system implemented with offset end effectors to provide extended reach and enhanced throughput
FR2778496B1 (fr) 1998-05-05 2002-04-19 Recif Sa Procede et dispositif de changement de position d'une plaque de semi-conducteur
US6142722A (en) 1998-06-17 2000-11-07 Genmark Automation, Inc. Automated opening and closing of ultra clean storage containers
US6281516B1 (en) * 1998-07-13 2001-08-28 Newport Corporation FIMS transport box load interface
US6220808B1 (en) 1998-07-13 2001-04-24 Asyst Technologies, Inc. Ergonomic, variable size, bottom opening system compatible with a vertical interface
US6261044B1 (en) 1998-08-06 2001-07-17 Asyst Technologies, Inc. Pod to port door retention and evacuation system
US6188323B1 (en) 1998-10-15 2001-02-13 Asyst Technologies, Inc. Wafer mapping system
US6135698A (en) * 1999-04-30 2000-10-24 Asyst Technologies, Inc. Universal tool interface and/or workpiece transfer apparatus for SMIF and open pod applications
JP2001031211A (ja) 1999-07-26 2001-02-06 Murata Mach Ltd 搬送システム
AU6763000A (en) 1999-08-11 2001-03-05 Multilevel Metals, Inc. Load lock system for foups
US6305500B1 (en) * 1999-08-25 2001-10-23 Maxtor Corporation Material delivery system for clean room-like environments
US6520727B1 (en) * 2000-04-12 2003-02-18 Asyt Technologies, Inc. Modular sorter

Similar Documents

Publication Publication Date Title
JP2005508570A5 (https=)
CN209256486U (zh) 一种机械切割设备防飞溅机构
JP2005275374A5 (https=)
US11981113B2 (en) Film-sticking box and film-sticking assembly
KR101851006B1 (ko) 용기 자동배출 구조를 갖는 휴대용기 밀폐 포장장치
KR100911663B1 (ko) 실험실습기기 및 컴퓨터용 모니터가 자동 승하강되는 다목적 실험대
CN109664250B (zh) 一种工程造价专用工具箱
CN219619158U (zh) 一种水稻秧苗转运装置
JP2011163067A (ja) 間仕切り用移動家具
CN108742865B (zh) 一种多功能医疗器械盒
CN207283998U (zh) 一种户外安装的电气设备箱
CN216731478U (zh) 一种光罩存放盒固定、开启装置及其构成的放置架
KR200496680Y1 (ko) 매립형 휴지걸이
CN113208741B (zh) 一种烧伤科用便携式医疗物资携带箱
WO2009073935A3 (en) Device for fixing the toilet bowl of a suspended toilet
CN215433604U (zh) 一种空气环境检测用工具箱
CN222330361U (zh) 一种电力检修器械存放箱
CN208028538U (zh) 一种计算机网络接线盒
CN217964000U (zh) 一种全自动通风柜用变风量调节阀及全自动通风柜
CN214748654U (zh) 一种便携式电子产品密封性检测装置
CN219295899U (zh) 一种多功能环保的月饼礼盒
CN220369372U (zh) 一种便捷式干细胞暂存装置
CN222023861U (zh) 一种电梯嵌入式应急装置
JP3274242B2 (ja) 吊り戸装置
CN211160632U (zh) 降噪式砂石筛分装置