JP2005504337A5 - - Google Patents

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Publication number
JP2005504337A5
JP2005504337A5 JP2003531236A JP2003531236A JP2005504337A5 JP 2005504337 A5 JP2005504337 A5 JP 2005504337A5 JP 2003531236 A JP2003531236 A JP 2003531236A JP 2003531236 A JP2003531236 A JP 2003531236A JP 2005504337 A5 JP2005504337 A5 JP 2005504337A5
Authority
JP
Japan
Prior art keywords
projection lens
beam splitter
lens according
object plane
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003531236A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005504337A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/EP2002/010281 external-priority patent/WO2003027747A1/en
Publication of JP2005504337A publication Critical patent/JP2005504337A/ja
Publication of JP2005504337A5 publication Critical patent/JP2005504337A5/ja
Pending legal-status Critical Current

Links

JP2003531236A 2001-09-20 2002-09-13 反射屈折縮小レンズ Pending JP2005504337A (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US32333001P 2001-09-20 2001-09-20
US33127601P 2001-11-13 2001-11-13
US33125001P 2001-11-13 2001-11-13
PCT/EP2002/010281 WO2003027747A1 (en) 2001-09-20 2002-09-13 Catadioptric reduction lens

Publications (2)

Publication Number Publication Date
JP2005504337A JP2005504337A (ja) 2005-02-10
JP2005504337A5 true JP2005504337A5 (de) 2005-10-27

Family

ID=27406266

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003531236A Pending JP2005504337A (ja) 2001-09-20 2002-09-13 反射屈折縮小レンズ

Country Status (4)

Country Link
EP (1) EP1430346A1 (de)
JP (1) JP2005504337A (de)
TW (1) TWI226453B (de)
WO (1) WO2003027747A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10127227A1 (de) 2001-05-22 2002-12-05 Zeiss Carl Katadioptrisches Reduktionsobjektiv
AU2003254550A1 (en) * 2002-09-09 2004-04-30 Carl Zeiss Smt Ag Catadioptric projection lens and method for compensating the intrinsic birefringence in a lens of this type
JP2006147809A (ja) * 2004-11-18 2006-06-08 Canon Inc 露光装置の投影光学系、露光装置およびデバイスの製造方法
KR101629160B1 (ko) * 2005-06-02 2016-06-09 칼 짜이스 에스엠티 게엠베하 마이크로리소그래피 투영 대물 렌즈
EP1746463A2 (de) * 2005-07-01 2007-01-24 Carl Zeiss SMT AG Verfahren zum Korrigieren eines lithographischen Projektionsobjektivs und derartiges Projektionsobjektiv
DE102010021539B4 (de) * 2010-05-19 2014-10-09 Carl Zeiss Smt Gmbh Projektionsobjektiv mit Blenden
US8830590B2 (en) * 2012-05-30 2014-09-09 Ultratech, Inc. Unit magnification large-format catadioptric lens for microlithography

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2698521B2 (ja) * 1992-12-14 1998-01-19 キヤノン株式会社 反射屈折型光学系及び該光学系を備える投影露光装置
DE4417489A1 (de) * 1994-05-19 1995-11-23 Zeiss Carl Fa Höchstaperturiges katadioptrisches Reduktionsobjektiv für die Miktrolithographie
JP3812051B2 (ja) * 1997-04-30 2006-08-23 株式会社ニコン 反射屈折投影光学系
JPH1184248A (ja) * 1997-09-12 1999-03-26 Nikon Corp 反射屈折縮小光学系
JPH11326767A (ja) * 1998-05-07 1999-11-26 Nikon Corp 反射屈折縮小光学系
EP1102100A3 (de) * 1999-11-12 2003-12-10 Carl Zeiss Katadioptrisches Objektiv mit physikalischem Strahlteiler

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