JP2005502174A5 - - Google Patents

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Publication number
JP2005502174A5
JP2005502174A5 JP2003525879A JP2003525879A JP2005502174A5 JP 2005502174 A5 JP2005502174 A5 JP 2005502174A5 JP 2003525879 A JP2003525879 A JP 2003525879A JP 2003525879 A JP2003525879 A JP 2003525879A JP 2005502174 A5 JP2005502174 A5 JP 2005502174A5
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JP
Japan
Prior art keywords
target
parameter
value
beam current
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003525879A
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English (en)
Japanese (ja)
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JP2005502174A (ja
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Publication date
Priority claimed from US09/943,625 external-priority patent/US7282721B2/en
Application filed filed Critical
Publication of JP2005502174A publication Critical patent/JP2005502174A/ja
Publication of JP2005502174A5 publication Critical patent/JP2005502174A5/ja
Pending legal-status Critical Current

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JP2003525879A 2001-08-30 2002-07-10 イオン注入器を調整する方法および装置 Pending JP2005502174A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/943,625 US7282721B2 (en) 2001-08-30 2001-08-30 Method and apparatus for tuning ion implanters
PCT/US2002/021751 WO2003021630A1 (en) 2001-08-30 2002-07-10 Method and apparatus for tuning ion implanters

Publications (2)

Publication Number Publication Date
JP2005502174A JP2005502174A (ja) 2005-01-20
JP2005502174A5 true JP2005502174A5 (enExample) 2006-01-05

Family

ID=25479965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003525879A Pending JP2005502174A (ja) 2001-08-30 2002-07-10 イオン注入器を調整する方法および装置

Country Status (7)

Country Link
US (1) US7282721B2 (enExample)
EP (1) EP1421598A1 (enExample)
JP (1) JP2005502174A (enExample)
KR (1) KR20040029140A (enExample)
CN (1) CN100456416C (enExample)
TW (1) TW571351B (enExample)
WO (1) WO2003021630A1 (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6960774B2 (en) * 2003-11-03 2005-11-01 Advanced Micro Devices, Inc. Fault detection and control methodologies for ion implantation processes, and system for performing same
GB2432039B (en) * 2004-01-09 2009-03-11 Applied Materials Inc Improvements relating to ion implantation
US6903350B1 (en) * 2004-06-10 2005-06-07 Axcelis Technologies, Inc. Ion beam scanning systems and methods for improved ion implantation uniformity
US7442944B2 (en) * 2004-10-07 2008-10-28 Varian Semiconductor Equipment Associates, Inc. Ion beam implant current, spot width and position tuning
US6992311B1 (en) * 2005-01-18 2006-01-31 Axcelis Technologies, Inc. In-situ cleaning of beam defining apertures in an ion implanter
US7397047B2 (en) * 2005-05-06 2008-07-08 Varian Semiconductor Equipment Associates, Inc. Technique for tuning an ion implanter system
KR100755069B1 (ko) * 2006-04-28 2007-09-06 주식회사 하이닉스반도체 불균일한 이온주입에너지를 갖도록 하는 이온주입장치 및방법
GB2438893B (en) * 2006-06-09 2010-10-27 Applied Materials Inc Ion beams in an ion implanter
US7227160B1 (en) * 2006-09-13 2007-06-05 Axcelis Technologies, Inc. Systems and methods for beam angle adjustment in ion implanters
US20080245957A1 (en) * 2007-04-03 2008-10-09 Atul Gupta Tuning an ion implanter for optimal performance
CN102347193B (zh) * 2010-08-02 2015-09-30 北京中科信电子装备有限公司 一种大角度离子注入机快速调束的优化算法
US9234932B2 (en) * 2013-03-13 2016-01-12 Thermo Finnigan Llc Method and apparatus for monitoring ion lens connections
US9006692B2 (en) * 2013-05-03 2015-04-14 Varian Semiconductor Equipment Associates, Inc. Apparatus and techniques for controlling ion implantation uniformity
US9870896B2 (en) * 2013-12-06 2018-01-16 Taiwan Semiconductor Manufacturing Co., Ltd. System and method for controlling ion implanter
US9423635B1 (en) * 2014-01-31 2016-08-23 The University Of Toledo Integrated magneto-optic modulator/compensator system, methods of making, and methods of using the same
JP6588323B2 (ja) * 2015-12-10 2019-10-09 住友重機械イオンテクノロジー株式会社 イオン注入方法およびイオン注入装置
JP6644596B2 (ja) 2016-03-18 2020-02-12 住友重機械イオンテクノロジー株式会社 イオン注入方法およびイオン注入装置
US10515780B1 (en) * 2018-12-19 2019-12-24 Axcelis Technologies, Inc. System and method of arc detection using dynamic threshold
CN111175569B (zh) * 2020-02-20 2021-11-05 中国科学院上海应用物理研究所 一种基于宽带串行化的极窄束流信号峰值幅度提取方法
JP7548839B2 (ja) * 2021-02-09 2024-09-10 住友重機械イオンテクノロジー株式会社 イオン注入装置およびイオン注入方法
US12340967B2 (en) 2021-07-14 2025-06-24 Applied Materials, Inc. Methods, mediums, and systems for identifying tunable domains for ion beam shape matching
CN113571401B (zh) * 2021-07-19 2024-06-28 粤芯半导体技术股份有限公司 狭缝组件及离子注入机台

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4595837A (en) * 1983-09-16 1986-06-17 Rca Corporation Method for preventing arcing in a device during ion-implantation
US5653811A (en) * 1995-07-19 1997-08-05 Chan; Chung System for the plasma treatment of large area substrates
CN1155152A (zh) * 1995-12-11 1997-07-23 株式会社日立制作所 带电粒子束装置及其操作方法
JPH10134745A (ja) 1996-10-29 1998-05-22 Jeol Ltd 電子ビームの電流密度制御方法および装置
US5861632A (en) * 1997-08-05 1999-01-19 Advanced Micro Devices, Inc. Method for monitoring the performance of an ion implanter using reusable wafers
US6137112A (en) 1998-09-10 2000-10-24 Eaton Corporation Time of flight energy measurement apparatus for an ion beam implanter
BE1012358A5 (fr) * 1998-12-21 2000-10-03 Ion Beam Applic Sa Procede de variation de l'energie d'un faisceau de particules extraites d'un accelerateur et dispositif a cet effet.
US7309997B1 (en) 2000-09-15 2007-12-18 Varian Semiconductor Equipment Associates, Inc. Monitor system and method for semiconductor processes
US6774378B1 (en) * 2003-10-08 2004-08-10 Axcelis Technologies, Inc. Method of tuning electrostatic quadrupole electrodes of an ion beam implanter

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