JP2005501400A - ガス放電レーザ用の改良されたファン - Google Patents

ガス放電レーザ用の改良されたファン Download PDF

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Publication number
JP2005501400A
JP2005501400A JP2002590466A JP2002590466A JP2005501400A JP 2005501400 A JP2005501400 A JP 2005501400A JP 2002590466 A JP2002590466 A JP 2002590466A JP 2002590466 A JP2002590466 A JP 2002590466A JP 2005501400 A JP2005501400 A JP 2005501400A
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Japan
Prior art keywords
blade
discharge
fan
radius
tangential flow
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JP2002590466A
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Japanese (ja)
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JP2005501400A5 (enExample
Inventor
パートロ　ウィリアム　エヌ
カーティス エル レッティグ
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Cymer Inc
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Cymer Inc
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Priority claimed from US09/854,097 external-priority patent/US6757316B2/en
Application filed by Cymer Inc filed Critical Cymer Inc
Publication of JP2005501400A publication Critical patent/JP2005501400A/ja
Publication of JP2005501400A5 publication Critical patent/JP2005501400A5/ja
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70025—Production of exposure light, i.e. light sources by lasers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/28—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps
    • F04D29/281—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps for fans or blowers
    • F04D29/282—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps for fans or blowers the leading edge of each vane being substantially parallel to the rotation axis
    • F04D29/283—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps for fans or blowers the leading edge of each vane being substantially parallel to the rotation axis rotors of the squirrel-cage type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/666—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps by means of rotor construction or layout, e.g. unequal distribution of blades or vanes
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    • H01S3/2258—F2, i.e. molecular fluoride is comprised for lasing around 157 nm

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
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  • Atmospheric Sciences (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Lasers (AREA)
JP2002590466A 2001-05-11 2002-04-18 ガス放電レーザ用の改良されたファン Pending JP2005501400A (ja)

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US09/854,097 US6757316B2 (en) 1999-12-27 2001-05-11 Four KHz gas discharge laser
US10/029,319 US6765946B2 (en) 2000-01-25 2001-10-17 Fan for gas discharge laser
PCT/US2002/012417 WO2002093703A1 (en) 2001-05-11 2002-04-18 Improved fan for gas discharge laser

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JP2005501400A true JP2005501400A (ja) 2005-01-13
JP2005501400A5 JP2005501400A5 (enExample) 2006-01-05

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JP2008535260A (ja) * 2005-03-31 2008-08-28 サイマー インコーポレイテッド ガス放電レーザ出力光のビームパラメータ制御
US7746365B2 (en) 2004-04-22 2010-06-29 Nec Viewtechnology, Ltd. Image display device for rotating an image displayed on a display screen
JP2020023972A (ja) * 2017-09-27 2020-02-13 ダイキン工業株式会社 空気調和機
US11384765B2 (en) 2017-09-27 2022-07-12 Daikin Industries, Ltd. Air conditioner
JP2022136087A (ja) * 2019-10-30 2022-09-15 ダイキン工業株式会社 空気調和機

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US8814522B2 (en) * 2007-06-15 2014-08-26 Cymer, Llc Cross-flow fan impeller for a transversley excited, pulsed, gas discharge laser
CN102777416B (zh) * 2011-10-20 2014-10-22 中国科学院光电研究院 一种准分子激光器用贯流风机叶轮
RU2541417C1 (ru) * 2013-11-05 2015-02-10 Федеральное государственное бюджетное учреждение науки Физический институт им. П.Н. Лебедева Российской академии наук(ФИАН) Фоконный полупроводниковый электроразрядный лазер
CN104747493B (zh) * 2013-12-26 2018-01-02 珠海格力电器股份有限公司 空调器及其贯流风叶
US20240039228A1 (en) 2020-12-22 2024-02-01 Cymer, Llc Reducing energy consumption of a gas discharge chamber blower
JP2025534199A (ja) 2022-09-29 2025-10-15 サイマー リミテッド ライアビリティ カンパニー ガス放電チャンバブロワのエネルギー消費量の低減
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US7746365B2 (en) 2004-04-22 2010-06-29 Nec Viewtechnology, Ltd. Image display device for rotating an image displayed on a display screen
JP2008535260A (ja) * 2005-03-31 2008-08-28 サイマー インコーポレイテッド ガス放電レーザ出力光のビームパラメータ制御
JP2007221053A (ja) * 2006-02-20 2007-08-30 Komatsu Ltd レーザ装置
JP2020023972A (ja) * 2017-09-27 2020-02-13 ダイキン工業株式会社 空気調和機
US11384765B2 (en) 2017-09-27 2022-07-12 Daikin Industries, Ltd. Air conditioner
JP2022136087A (ja) * 2019-10-30 2022-09-15 ダイキン工業株式会社 空気調和機

Also Published As

Publication number Publication date
US20020094005A1 (en) 2002-07-18
WO2002093703A1 (en) 2002-11-21
EP1386378A4 (en) 2005-12-07
US6765946B2 (en) 2004-07-20
EP1386378A1 (en) 2004-02-04

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