JP2005501400A5 - - Google Patents

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Publication number
JP2005501400A5
JP2005501400A5 JP2002590466A JP2002590466A JP2005501400A5 JP 2005501400 A5 JP2005501400 A5 JP 2005501400A5 JP 2002590466 A JP2002590466 A JP 2002590466A JP 2002590466 A JP2002590466 A JP 2002590466A JP 2005501400 A5 JP2005501400 A5 JP 2005501400A5
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JP
Japan
Prior art keywords
blade
fan
discharge
members
radius
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002590466A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005501400A (ja
Filing date
Publication date
Priority claimed from US09/854,097 external-priority patent/US6757316B2/en
Priority claimed from US10/029,319 external-priority patent/US6765946B2/en
Application filed filed Critical
Publication of JP2005501400A publication Critical patent/JP2005501400A/ja
Publication of JP2005501400A5 publication Critical patent/JP2005501400A5/ja
Pending legal-status Critical Current

Links

JP2002590466A 2001-05-11 2002-04-18 ガス放電レーザ用の改良されたファン Pending JP2005501400A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/854,097 US6757316B2 (en) 1999-12-27 2001-05-11 Four KHz gas discharge laser
US10/029,319 US6765946B2 (en) 2000-01-25 2001-10-17 Fan for gas discharge laser
PCT/US2002/012417 WO2002093703A1 (en) 2001-05-11 2002-04-18 Improved fan for gas discharge laser

Publications (2)

Publication Number Publication Date
JP2005501400A JP2005501400A (ja) 2005-01-13
JP2005501400A5 true JP2005501400A5 (enExample) 2006-01-05

Family

ID=26704821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002590466A Pending JP2005501400A (ja) 2001-05-11 2002-04-18 ガス放電レーザ用の改良されたファン

Country Status (4)

Country Link
US (1) US6765946B2 (enExample)
EP (1) EP1386378A4 (enExample)
JP (1) JP2005501400A (enExample)
WO (1) WO2002093703A1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NO321337B1 (no) * 2003-07-31 2006-05-02 Roto Internat As Anordning for a oppna sirkulasjon av et fluid, fremgangsmate for a montere anordningen og anvendelse av denne.
JP4266878B2 (ja) 2004-04-22 2009-05-20 Ｎｅｃディスプレイソリューションズ株式会社 映像表示装置
US7471708B2 (en) * 2005-03-31 2008-12-30 Cymer, Inc. Gas discharge laser output light beam parameter control
JP4899026B2 (ja) * 2006-02-20 2012-03-21 株式会社小松製作所 レーザ装置
US8814522B2 (en) * 2007-06-15 2014-08-26 Cymer, Llc Cross-flow fan impeller for a transversley excited, pulsed, gas discharge laser
CN102777416B (zh) * 2011-10-20 2014-10-22 中国科学院光电研究院 一种准分子激光器用贯流风机叶轮
RU2541417C1 (ru) * 2013-11-05 2015-02-10 Федеральное государственное бюджетное учреждение науки Физический институт им. П.Н. Лебедева Российской академии наук(ФИАН) Фоконный полупроводниковый электроразрядный лазер
CN104747493B (zh) * 2013-12-26 2018-01-02 珠海格力电器股份有限公司 空调器及其贯流风叶
JP6843721B2 (ja) 2017-09-27 2021-03-17 ダイキン工業株式会社 空気調和機
JP7370220B2 (ja) * 2017-09-27 2023-10-27 ダイキン工業株式会社 空気調和機
JP2022136087A (ja) * 2019-10-30 2022-09-15 ダイキン工業株式会社 空気調和機
US20240039228A1 (en) 2020-12-22 2024-02-01 Cymer, Llc Reducing energy consumption of a gas discharge chamber blower
JP2025534199A (ja) 2022-09-29 2025-10-15 サイマー リミテッド ライアビリティ カンパニー ガス放電チャンバブロワのエネルギー消費量の低減
WO2025093992A1 (en) 2023-11-01 2025-05-08 Cymer, Llc Gas discharge chamber blower fan with a textured surface

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4686680A (en) * 1985-06-25 1987-08-11 Laser Corporation Of America Gas laser having improved crossflow blower arrangement
US4923364A (en) 1987-03-20 1990-05-08 Prc Corporation Gas laser apparatus, method and turbine compressor therefor
US4975925A (en) 1989-11-01 1990-12-04 The Spectranetics Corporation Unlubricated bearings for gas lasers
JP3107711B2 (ja) * 1994-08-09 2000-11-13 株式会社東芝 横流ファン
JPH0972297A (ja) * 1995-06-30 1997-03-18 Daikin Ind Ltd クロスフローファン及び空気調和装置
CA2190697C (en) * 1996-01-31 2000-07-25 Donald Glenn Larson Blower motor with adjustable timing
JP3653144B2 (ja) * 1996-06-28 2005-05-25 東芝キヤリア株式会社 横流ファン、ファンコマ成形型及びファンコマ成形型製造方法
US5848089A (en) * 1997-07-11 1998-12-08 Cymer, Inc. Excimer laser with magnetic bearings supporting fan
US5870420A (en) * 1997-08-18 1999-02-09 Cymer, Inc. Cross-flow blower with braces
US6034984A (en) * 1998-08-28 2000-03-07 Cymer, Inc. Tangential fan with cutoff assembly and vibration control for electric discharge laser
US6026103A (en) * 1999-04-13 2000-02-15 Cymer, Inc. Gas discharge laser with roller bearings and stable magnetic axial positioning
JP3106130B1 (ja) * 1999-07-23 2000-11-06 株式会社東芝 タービンノズルの製造方法

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