JP2005354042A - 印刷方式を利用したパターン形成方法 - Google Patents
印刷方式を利用したパターン形成方法 Download PDFInfo
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- JP2005354042A JP2005354042A JP2005131066A JP2005131066A JP2005354042A JP 2005354042 A JP2005354042 A JP 2005354042A JP 2005131066 A JP2005131066 A JP 2005131066A JP 2005131066 A JP2005131066 A JP 2005131066A JP 2005354042 A JP2005354042 A JP 2005354042A
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21F—PROTECTION AGAINST X-RADIATION, GAMMA RADIATION, CORPUSCULAR RADIATION OR PARTICLE BOMBARDMENT; TREATING RADIOACTIVELY CONTAMINATED MATERIAL; DECONTAMINATION ARRANGEMENTS THEREFOR
- G21F3/00—Shielding characterised by its physical form, e.g. granules, or shape of the material
- G21F3/04—Bricks; Shields made up therefrom
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21F—PROTECTION AGAINST X-RADIATION, GAMMA RADIATION, CORPUSCULAR RADIATION OR PARTICLE BOMBARDMENT; TREATING RADIOACTIVELY CONTAMINATED MATERIAL; DECONTAMINATION ARRANGEMENTS THEREFOR
- G21F1/00—Shielding characterised by the composition of the materials
- G21F1/02—Selection of uniform shielding materials
- G21F1/04—Concretes; Other hydraulic hardening materials
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/061—Etching masks
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
- G02F1/136295—Materials; Compositions; Manufacture processes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/01—Tools for processing; Objects used during processing
- H05K2203/0104—Tools for processing; Objects used during processing for patterning or coating
- H05K2203/0108—Male die used for patterning, punching or transferring
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0502—Patterning and lithography
- H05K2203/0522—Using an adhesive pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0502—Patterning and lithography
- H05K2203/0537—Transfer of pre-fabricated insulating pattern
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Nanotechnology (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mathematical Physics (AREA)
- High Energy & Nuclear Physics (AREA)
- Theoretical Computer Science (AREA)
- Computer Hardware Design (AREA)
- General Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Liquid Crystal (AREA)
- Printing Methods (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Thin Film Transistor (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
【解決手段】パターン形成方法は、複数の凸パターンが形成されたクリシェを用意する段階と、前記凸パターンの表面に接着力強化剤を塗布する段階と、基板上にエッチング対象層を形成した後、その上部にインクを塗布する段階と、前記接着力強化剤が塗布された凸パターンと前記エッチング対象層上に塗布されたインクとが接触するように、前記クリシェと前記基板とを貼り合わせる段階と、前記クリシェと前記基板とを分離させることにより、前記エッチング対象層上に残留するインクパターンを形成する段階とを含む。
【選択図】図2b
Description
本発明の他の目的は、パターンの厚さの均一性を向上させることができるパターン形成方法を提供することにある。
また、本発明は、印刷装備の簡素化及び印刷工程の単純化により、生産効率をより向上させることができる。
このようなグラビアオフセット印刷は、表示素子の各種パターン、例えば、液晶表示素子の場合、TFTだけでなく、前記TFTと接続されるゲートライン及びデータライン、画素電極、キャパシタ用金属パターンのパターニングにも用いることができる。
図1a〜図1cは、印刷方式を用いて基板上にインクパターンを形成する方法を示す図である。印刷方式においては、まず、図1aに示すように、凹板またはクリシェ(clich 130の特定位置に溝132を形成した後、前記溝132の内部にインク134を充填する。前記クリシェ130に形成される溝132は、一般のフォトリソグラフィ工程により形成され、前記溝132の内部へのインク134の充填は、前記クリシェ130の上部にパターン形成用インク134を塗布した後、ドクターブレード(doctor blade)138を前記クリシェ130の表面に接触させた状態で押し付けて行う。従って、前記ドクターブレード138の進行により、前記溝132の内部にインク134が充填されると共に、前記クリシェ130の表面に残っていたインク134が除去される。
前記エッチング対象層140は、TFTのゲート電極やソース/ドレイン電極、ゲートライン、データライン、画素電極のような金属パターンを形成するための金属層でも良く、アクティブ層を形成するための半導体層でも良く、SiOxやSiNxのような絶縁層でも良い。
また、本発明の印刷方式によるパターン形成方法は、液晶表示素子のような表示素子の能動素子や回路だけでなく、半導体ウェハ上における素子の形成にも適用することができる。
Claims (13)
- 複数の凸パターンが形成されたクリシェを用意する段階と、
前記凸パターンの表面に接着力強化剤を塗布する段階と、
基板上にエッチング対象層を形成した後、その上部にインクを塗布する段階と、
前記接着力強化剤が塗布された凸パターンと前記エッチング対象層上に塗布されたインクとが接触するように、前記クリシェと前記基板とを貼り合わせる段階と、
前記クリシェと前記基板とを分離させることにより、前記エッチング対象層上に残留するインクパターンを形成する段階と、
を含むことを特徴とするパターン形成方法。 - 前記複数の凸パターンが形成されたクリシェを用意する段階が、
透明なガラス基板を用意する段階と、
前記ガラス基板上に金属膜を蒸着する段階と、
前記金属膜をパターニングして金属パターンを形成する段階と、
前記金属パターンをマスクにして前記ガラス基板をエッチングする段階と、
を含むことを特徴とする請求項1に記載のパターン形成方法。 - 前記接着力強化剤が、HMDSであることを特徴とする請求項1に記載のパターン形成方法。
- 前記クリシェと前記基板とを貼り合わせる段階が、前記クリシェを上部に配置し、前記基板を下部に配置した状態で行われることを特徴とする請求項1に記載のパターン形成方法。
- 前記クリシェと前記基板とを分離させる段階が、前記基板から前記クリシェを分離させることを特徴とする請求項4に記載のパターン形成方法。
- 前記クリシェと前記基板とを貼り合わせる段階が、前記クリシェを下部に配置し、前記基板を上部に配置した状態で行われることを特徴とする請求項1に記載のパターン形成方法。
- 前記クリシェと前記基板とを分離させる段階が、前記クリシェから前記基板を分離させることを特徴とする請求項4に記載のパターン形成方法。
- 前記クリシェと前記基板とを分離させることによって、前記クリシェの凸パターンと接触する領域のインクが前記凸パターンに付着して、前記エッチング対象層から除去されることを特徴とする請求項1に記載のパターン形成方法。
- 前記エッチング対象層に形成されたインクパターンが、前記クリシェの凸パターンと接触する領域以外の領域に形成されることを特徴とする請求項1に記載のパターン形成方法。
- 前記インクパターンを硬化させる段階をさらに含むことを特徴とする請求項1に記載のパターン形成方法。
- 前記インクパターンを硬化させる段階が、前記インクパターンに熱を加える段階を含むことを特徴とする請求項10に記載のパターン形成方法。
- 前記インクパターンを硬化させる段階が、前記インクパターンにUVを照射する段階を含むことを特徴とする請求項10に記載のパターン形成方法。
- 前記インクパターンをマスクにして前記エッチング対象層をエッチングする段階をさらに含むことを特徴とする請求項1に記載のパターン形成方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040030772A KR100631017B1 (ko) | 2004-04-30 | 2004-04-30 | 인쇄방식을 이용한 패턴 형성방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005354042A true JP2005354042A (ja) | 2005-12-22 |
JP4322226B2 JP4322226B2 (ja) | 2009-08-26 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005131066A Expired - Fee Related JP4322226B2 (ja) | 2004-04-30 | 2005-04-28 | 印刷方式を利用したパターン形成方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7276445B2 (ja) |
JP (1) | JP4322226B2 (ja) |
KR (1) | KR100631017B1 (ja) |
CN (1) | CN100363795C (ja) |
TW (1) | TWI252532B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8506747B2 (en) | 2008-09-26 | 2013-08-13 | Samsung Display Co., Ltd. | Liquid crystal display and manufacturing method of the same |
US8997649B2 (en) | 2012-02-23 | 2015-04-07 | Korea Institute Of Machinery & Materials | Cliché for electronic printing device, and electronic printing method and device using the same |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101192788B1 (ko) * | 2005-10-13 | 2012-10-18 | 엘지디스플레이 주식회사 | 인쇄 장치 시스템 및 그를 이용한 패턴 형성 방법 |
KR101212151B1 (ko) | 2005-12-29 | 2012-12-13 | 엘지디스플레이 주식회사 | 패턴 형성 방법을 이용한 액정표시소자 제조방법 |
US7755731B2 (en) * | 2005-12-30 | 2010-07-13 | Lg Display Co., Ltd. | Liquid crystal display device having organic alignment layer and fabrication method thereof |
WO2007117672A2 (en) | 2006-04-07 | 2007-10-18 | Qd Vision, Inc. | Methods of depositing nanomaterial & methods of making a device |
WO2008111947A1 (en) | 2006-06-24 | 2008-09-18 | Qd Vision, Inc. | Methods and articles including nanomaterial |
US20080233280A1 (en) * | 2007-03-22 | 2008-09-25 | Graciela Beatriz Blanchet | Method to form a pattern of functional material on a substrate by treating a surface of a stamp |
KR100957703B1 (ko) * | 2007-04-13 | 2010-05-12 | 주식회사 엘지화학 | 미세패턴 형성 방법 |
US8101519B2 (en) | 2008-08-14 | 2012-01-24 | Samsung Electronics Co., Ltd. | Mold, manufacturing method of mold, method for forming patterns using mold, and display substrate and display device manufactured by using method for forming patterns |
CN102300802A (zh) * | 2008-12-17 | 2011-12-28 | 3M创新有限公司 | 柔性基底上导电纳米结构的制造 |
CN102629077A (zh) * | 2011-06-29 | 2012-08-08 | 北京京东方光电科技有限公司 | 树脂介电层及其材料的制备方法、液晶面板及显示器件 |
CN104681743B (zh) * | 2013-11-29 | 2017-02-15 | 清华大学 | 有机发光二极管的制备方法 |
US10849234B2 (en) * | 2016-04-15 | 2020-11-24 | 3M Innovative Properties Company | Preparation of electrical circuits by adhesive transfer |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100257811B1 (ko) * | 1997-10-24 | 2000-06-01 | 구본준 | 액정표시장치의 기판의 제조방법 |
KR100425856B1 (ko) * | 1998-03-26 | 2004-06-18 | 엘지.필립스 엘시디 주식회사 | 피식각막식각방법 |
EP1003078A3 (en) * | 1998-11-17 | 2001-11-07 | Corning Incorporated | Replicating a nanoscale pattern |
CN2349218Y (zh) * | 1998-11-18 | 1999-11-17 | 中国科学院长春光学精密机械研究所 | 一种用于准分子激光刻蚀的附着式掩膜组件 |
JP2002280711A (ja) | 2001-03-21 | 2002-09-27 | Fuji Photo Film Co Ltd | 金属像形成方法及び基板 |
JP2003082469A (ja) | 2001-09-13 | 2003-03-19 | Tdk Corp | 金属膜パターンの形成方法 |
KR100606441B1 (ko) * | 2004-04-30 | 2006-08-01 | 엘지.필립스 엘시디 주식회사 | 클리체 제조방법 및 이를 이용한 패턴 형성방법 |
-
2004
- 2004-04-30 KR KR1020040030772A patent/KR100631017B1/ko active IP Right Grant
-
2005
- 2005-04-26 US US11/114,095 patent/US7276445B2/en active Active
- 2005-04-27 TW TW094113544A patent/TWI252532B/zh not_active IP Right Cessation
- 2005-04-28 JP JP2005131066A patent/JP4322226B2/ja not_active Expired - Fee Related
- 2005-04-28 CN CNB2005100700029A patent/CN100363795C/zh not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8506747B2 (en) | 2008-09-26 | 2013-08-13 | Samsung Display Co., Ltd. | Liquid crystal display and manufacturing method of the same |
US8997649B2 (en) | 2012-02-23 | 2015-04-07 | Korea Institute Of Machinery & Materials | Cliché for electronic printing device, and electronic printing method and device using the same |
Also Published As
Publication number | Publication date |
---|---|
TW200536006A (en) | 2005-11-01 |
CN1693955A (zh) | 2005-11-09 |
KR100631017B1 (ko) | 2006-10-04 |
KR20050105048A (ko) | 2005-11-03 |
TWI252532B (en) | 2006-04-01 |
US7276445B2 (en) | 2007-10-02 |
JP4322226B2 (ja) | 2009-08-26 |
US20050245085A1 (en) | 2005-11-03 |
CN100363795C (zh) | 2008-01-23 |
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