JP2005340416A - Method for manufacturing board - Google Patents

Method for manufacturing board Download PDF

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JP2005340416A
JP2005340416A JP2004155674A JP2004155674A JP2005340416A JP 2005340416 A JP2005340416 A JP 2005340416A JP 2004155674 A JP2004155674 A JP 2004155674A JP 2004155674 A JP2004155674 A JP 2004155674A JP 2005340416 A JP2005340416 A JP 2005340416A
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slit
region
insulating layer
processing
substrate
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Masashi Miyazaki
雅志 宮崎
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Sony Corp
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Sony Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a printed circuit board by which generation of dust at the time of processing the outer shape of the printed circuit board can be suppressed. <P>SOLUTION: Inner layer copper foil 2 having an inner layer circuit pattern is formed on a core material 1 obtained by impregnating resin in glass cloth, a slit 8 is formed on a boundary area between a product area 5 and a peripheral area 6, an insulating layer 3 is formed around the inner layer copper foil by molding press, the slit 8 is filled with the insulating layer, and after forming outer layer copper foil 4 having an outer layer circuit pattern on the insulating layer 3, the product area 5 and the peripheral area 6 are divided from the boundary area so that the insulating layer 3 filled in the slit is left in the product area 5 and the peripheral area 6. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は基板の製造方法に関する。詳しくは、製品領域と周辺領域の境界領域に形成したスリットに絶縁層を充填し、製品領域の外周にスリット内に充填した絶縁層が残存する様に分割することによって、ダストの発生を抑制しようとした基板の製造方法に係るものである。   The present invention relates to a method for manufacturing a substrate. Specifically, fill the slit formed in the boundary area between the product area and the peripheral area with an insulating layer, and divide the product area so that the insulating layer filled in the slit remains on the outer periphery of the product area. This relates to a method for manufacturing a substrate.

近年、携帯電話やモバイルコンピュータは小型化の一途をたどっており、これらの機器に使用するプリント配線基板の配線密度が上がってきている。ここで、プリント配線基板の配線密度を上げるためには、配線ピッチやビアホールピッチ、ビア径の狭小化が必要であるが、物理的に限界があり、さらに、実装部品の小型化も頭打ちとなっている。そのため、例えば、表面がフラット化されたプリント配線基板上にウエハプロセスを用いて薄膜層を形成し、この薄膜層に抵抗体やキャパシタ、インダクタ等の受動素子を内蔵する基板も開発されつつある(例えば、特許文献1参照。)。   In recent years, mobile phones and mobile computers have been miniaturized, and the wiring density of printed wiring boards used in these devices has increased. Here, in order to increase the wiring density of the printed wiring board, it is necessary to narrow the wiring pitch, via hole pitch, and via diameter, but there are physical limitations, and further downsizing of mounting parts has reached the limit. ing. Therefore, for example, a substrate in which a thin film layer is formed on a printed wiring board having a flat surface using a wafer process and a passive element such as a resistor, a capacitor, or an inductor is built in the thin film layer is being developed ( For example, see Patent Document 1.)

しかし、ウエハプロセスでは、クリーンルーム内のダストが薄膜層の素子や配線歩留りを大きく低下させるため、ダストの発生源である人、設備、基板を含む材料からのダストの発生を抑える必要がある。   However, in the wafer process, the dust in the clean room greatly reduces the elements and wiring yield of the thin film layer, so it is necessary to suppress the generation of dust from materials including people, equipment, and substrates that are dust sources.

以下、従来の一般的なプリント配線基板の製造方法について4層ビルドアップ基板の製造方法の例を挙げて説明する。   Hereinafter, a conventional general printed wiring board manufacturing method will be described with reference to an example of a manufacturing method of a four-layer buildup board.

従来のプリント配線基板の製造方法では、先ず、図4(a)で示す様に、ガラスクロスに樹脂を含浸させたコア材101上に内層銅箔102を形成した後、図4(b)で示す様に、汎用のエッチング技術によって内層銅箔の所定の範囲に内層回路を形成する。
なお、内層回路の形成方法は、例えば、サブトラクティブ法やセミアディティブ法、フルアディティブ法など、いかなる方法であっても良い。
In the conventional method of manufacturing a printed wiring board, first, as shown in FIG. 4A, after forming an inner layer copper foil 102 on a core material 101 in which a glass cloth is impregnated with a resin, in FIG. As shown, an inner layer circuit is formed in a predetermined range of the inner layer copper foil by a general-purpose etching technique.
The inner layer circuit may be formed by any method such as a subtractive method, a semi-additive method, or a full additive method.

次に、図4(c)で示す様に、内層銅箔上にプリプレグ(ガラスクロスに樹脂を含浸させた樹脂シート)と銅箔、またはRCC(Resin Coated Copper:樹脂つき銅箔)等の成形プレスを行い、内層銅箔上に絶縁層103及び外層銅箔104を形成する。   Next, as shown in FIG. 4 (c), molding of prepreg (resin sheet in which glass cloth is impregnated with resin) and copper foil or RCC (Resin Coated Copper) is formed on the inner layer copper foil. The insulating layer 103 and the outer layer copper foil 104 are formed on the inner layer copper foil by pressing.

続いて、図5(d)で示す様に、外層銅箔に汎用のエッチング技術によって外層銅箔の所定の範囲に外層回路を形成する。
なお、外層回路の形成方法は、例えば、サブトラクティブ法やセミアディティブ法、フルアディティブ法など、いかなる方法であっても良い。
Subsequently, as shown in FIG. 5D, an outer layer circuit is formed on the outer layer copper foil in a predetermined range of the outer layer copper foil by a general-purpose etching technique.
Note that the outer layer circuit may be formed by any method such as a subtractive method, a semi-additive method, or a full additive method.

その後、図5(e)で示す様に、製品領域105と、製品領域の外側領域である周辺領域106との境界領域から外形加工を行うことによって、図5(f)で示す様なプリント配線基板を得ることができる。   Thereafter, as shown in FIG. 5 (e), by performing outline processing from the boundary region between the product region 105 and the peripheral region 106 which is the outer region of the product region, printed wiring as shown in FIG. 5 (f) is obtained. A substrate can be obtained.

なお、プリント配線基板の外形加工は主に、プレス金型加工、NCルータ加工、レーザビーム加工等により行われている。ここで、プレス金型加工は、プリント配線基板をプレス機に取り付けられた上下一対の金型の間に挟んで加圧することにより、金型に形成されたせん断パターンに沿って打ち抜いてプリント配線基板を所定の形状に加工したり、穿孔やスリット加工を可能とする方法であり、NCルータ加工は、NCルータ機に取り付けられたルータビットを高速回転させ、NC制御によりプリント配線基板を所定の形状に加工したり、穿孔やスリット加工を可能とする方法であり、レーザビーム加工は、高出力のレーザをNC制御でプリント配線基板に照射することにより、所定の形状に加工するものである。   Note that external processing of the printed wiring board is mainly performed by press die processing, NC router processing, laser beam processing, and the like. Here, the press mold processing is performed by punching along the shear pattern formed on the mold by pressing the printed wiring board between a pair of upper and lower molds attached to the press machine. NC router processing is a method that enables drilling and slit processing, and NC router processing rotates a router bit attached to the NC router machine at a high speed, and the printed wiring board is formed into a predetermined shape by NC control. The laser beam processing is a method of processing a predetermined shape by irradiating a printed wiring board with a high-power laser under NC control.

特開2002−368428号公報JP 2002-368428 A

ところで、一般的なプリント配線基板のほとんどにガラスクロスまたはガラス不織布が使われているため、上記した外形加工を行った場合に、せん断応力または摩擦力によるガラスクロスやガラス不織布のバリやケバが発生してしまう。なお、プリント配線基板からのダストは、主にプリント配線基板外周の外形加工面から発生する。   By the way, since glass cloth or glass nonwoven fabric is used for most general printed circuit boards, burrs and scuffing of glass cloth and glass nonwoven fabric are generated due to shear stress or friction force when the above-mentioned outline processing is performed. Resulting in. Note that dust from the printed wiring board is mainly generated from the outer shape processing surface on the outer periphery of the printed wiring board.

この様にして発生したバリやケバは、例えば上記した特許文献1の様に、外形加工されたプリント配線基板上にウエハプロセスを用いて薄膜層を形成し、そこに抵抗体やインダクタなどの受動素子を内蔵する基板を製造する際に、基板側面から脱落してダストとなり、薄膜形成歩留りを大きく低下させる原因となる。更に、外形加工面が荒れるために、基板外形寸法精度向上にも限界があった。   The burrs and markings generated in this way are formed by forming a thin film layer on a printed wiring board that has been subjected to external processing using a wafer process as described in Patent Document 1, for example, and passives such as resistors and inductors are formed there. When manufacturing a substrate with a built-in element, it drops off from the side surface of the substrate and becomes dust, which causes a significant decrease in thin film formation yield. Furthermore, since the processed surface of the outer shape is rough, there is a limit to improving the accuracy of the outer dimensions of the substrate.

本発明は以上の点に鑑みて創案されたものであって、基板の外形加工時のダストを抑制することができる基板の製造方法を提供することを目的とするものである。   The present invention has been devised in view of the above points, and an object of the present invention is to provide a method for manufacturing a substrate capable of suppressing dust during processing of the outer shape of the substrate.

上記の目的を達成するために、本発明の基板の製造方法は、ガラス繊維を含む基板本体に第1の回路パターンを有する第1の配線層を形成する工程と、前記基板本体の製品領域と製品領域外の周辺領域との中間部である境界領域の少なくとも一部にスリットを形成する工程と、成形プレスによって前記第1の配線層に絶縁層を形成すると共に、同絶縁層を前記スリット内に充填する工程と、前記絶縁層に第2の回路パターンを有する第2の配線層を形成する工程と、これらの工程の後に、前記製品領域の外周の少なくとも一部に前記スリット内に充填した絶縁層が残存する様に、前記境界領域から分割する工程を備える。   In order to achieve the above object, a method of manufacturing a substrate according to the present invention includes a step of forming a first wiring layer having a first circuit pattern on a substrate body including glass fibers, a product region of the substrate body, Forming a slit in at least a part of a boundary region which is an intermediate portion with a peripheral region outside the product region, forming an insulating layer on the first wiring layer by a molding press, and forming the insulating layer in the slit Filling the slit, filling the slit into at least a part of the outer periphery of the product region after these steps, forming the second wiring layer having the second circuit pattern on the insulating layer, and after these steps There is a step of dividing the boundary region so that the insulating layer remains.

ここで、基板本体の製品領域と製品領域の外側領域である周辺領域の境界領域の少なくとも一部にスリットを形成し、スリット内に絶縁層を充填し、製品領域の外周の少なくとも一部にスリット内に充填した絶縁層が残存する様に境界領域から分割することによって、外形加工を行って得られる製品領域の端面からガラス繊維が露出する領域を低減することができ、バリやケバの発生を抑制することができる。なお、成形プレスによって第1の配線層に絶縁層を形成する際に、スリット内に絶縁層を充填しているために、スリット内に絶縁層を充填するにあたって特に工数の増加等が無い。   Here, a slit is formed in at least a part of the boundary region between the product region of the substrate body and the peripheral region which is the outer region of the product region, an insulating layer is filled in the slit, and the slit is formed in at least a part of the outer periphery of the product region. By dividing from the boundary area so that the insulating layer filled inside remains, the area where the glass fiber is exposed from the end face of the product area obtained by external processing can be reduced, and the occurrence of burrs and scratches can be reduced. Can be suppressed. Note that when the insulating layer is formed on the first wiring layer by the molding press, the slit is filled with the insulating layer, and therefore, there is no particular increase in man-hours when filling the insulating layer in the slit.

また、周辺領域の外周の少なくとも一部にスリット内に充填した絶縁層が残存する様に、境界領域から分割することによって、外形加工を行う際に、周辺領域の端面からガラス繊維が露出する領域を低減することができ、バリやケバの発生を抑制することができる。   Further, when the outer shape processing is performed by dividing from the boundary region so that the insulating layer filled in the slit remains on at least a part of the outer periphery of the peripheral region, the region where the glass fiber is exposed from the end surface of the peripheral region Can be reduced, and the occurrence of burrs and cracks can be suppressed.

なお、スリットを基板本体の製品領域と周辺領域の境界領域の全領域に形成することによって、製品領域の端面若しくは製品領域及び周辺領域の端面からガラス繊維が露出することが無く、より一層バリやケバの発生を抑制することができる。   In addition, by forming the slit in the entire region of the boundary region between the product region and the peripheral region of the substrate body, the glass fiber is not exposed from the end surface of the product region or the end surface of the product region and the peripheral region. It is possible to suppress the generation of injuries.

上記した本発明の基板の製造方法は、基板の外形加工時に発生するバリやケバ等のダストを抑えることができるため、そのダストが原因となっていた薄膜層付きプリント基板等の歩留りを向上させることができ、また、実装時の異物巻き込み、異物付着をも抑えることができる。   The above-described method for manufacturing a substrate of the present invention can suppress dust such as burrs and burrs that are generated during the outer shape processing of the substrate, thereby improving the yield of a printed circuit board with a thin film layer and the like caused by the dust. In addition, it is possible to suppress foreign matter entrainment and foreign matter adhesion during mounting.

以下、本発明の実施の形態について図面を参照しながら説明し、本発明の理解に供する。
なお、本実施例では、4層ビルドアップ基板の製造方法の例を挙げて説明を行うが、本発明はこれに限らず、あらゆる層構成のプリント配線基板に適用することができる。例えば、8層ビルドアップ基板であれば、後述するスリット加工前の6層ビルドアップ基板を一般的なビルドアッププロセスで製造し、その後にスリット加工を行えば良い。
Hereinafter, embodiments of the present invention will be described with reference to the drawings to facilitate understanding of the present invention.
In this embodiment, an example of a method for manufacturing a four-layer build-up board will be described. However, the present invention is not limited to this, and can be applied to printed wiring boards having any layer structure. For example, in the case of an 8-layer buildup substrate, a 6-layer buildup substrate before slit processing, which will be described later, may be manufactured by a general buildup process, and then slit processing may be performed.

本発明を適用したプリント配線基板の製造方法では、先ず、図1(a)で示す様に、ガラスクロスに樹脂を含浸させたコア材1上に内層銅箔2を形成した後、図1(b)で示す様に、汎用のエッチング技術によって内層銅箔の所定の範囲に内層回路を形成する。
なお、内層回路の形成方法は、例えば、サブトラクティブ法やセミアディティブ法、フルアディティブ法など、いかなる方法であっても良い。
In the method for manufacturing a printed wiring board to which the present invention is applied, first, as shown in FIG. 1A, after forming an inner layer copper foil 2 on a core material 1 in which a glass cloth is impregnated with a resin, FIG. As shown in b), an inner layer circuit is formed in a predetermined range of the inner layer copper foil by a general-purpose etching technique.
The inner layer circuit may be formed by any method such as a subtractive method, a semi-additive method, or a full additive method.

次に、図1(c)で示す様に、製品領域5と、製品領域の外側領域である周辺領域6との境界領域の全領域にスリット加工を施しスリット8を形成する。なお、スリット加工はプリント配線基板の外形加工方法、例えば金型加工やルータ加工、レーザ加工等により行うことができる。また、穴あけ加工機を用いて連続的に穿孔することでスリットを形成しても良い。   Next, as shown in FIG. 1C, slit processing is performed on the entire boundary region between the product region 5 and the peripheral region 6 which is the outer region of the product region, thereby forming slits 8. The slit processing can be performed by a method for processing the outer shape of the printed wiring board, for example, die processing, router processing, laser processing, or the like. Moreover, you may form a slit by drilling continuously using a drilling machine.

本実施例では、スリット加工により製品領域と周辺領域との境界領域の全領域にスリットを形成しているが、境界領域の一部領域にスリットを形成したとしても充分にダストの発生を抑制することができる場合には、必ずしも境界領域の全領域にスリットを形成する必要は無い。但し、境界領域の全領域にスリットを形成し、後述する外形加工によって得られる製品領域(基板)の端面からガラスクロスが一切露出しない構成とした方が、よりダストの発生を抑制することができる。   In this embodiment, slits are formed in the entire region of the boundary region between the product region and the peripheral region by slit processing, but even if a slit is formed in a partial region of the boundary region, dust generation is sufficiently suppressed. If possible, it is not always necessary to form slits in the entire boundary region. However, it is possible to further suppress the generation of dust by forming slits in the entire boundary region and adopting a configuration in which the glass cloth is not exposed at all from the end surface of the product region (substrate) obtained by the outer shape processing described later. .

ここで、スリット加工により製品領域と周辺領域との境界領域の全領域にスリットを形成した場合には、後述する成形プレス時に位置ズレを生じてしまう可能性がある。そこで、位置ズレが発生する懸念がある場合には、図3で示す様に、境界領域の一部領域のスリット加工を行わずに製品領域支え部9を残しても良い。但し、製品領域支え部を残した場合には、最終的に行われる外形加工時に製品領域支え部のガラスクロスが基板端面から露出する構造となってしまい、ダスト低減効果が小さくなってしまうために、製品領域支え部を用いるよりも適切な冶具を用いて位置ズレを抑制することが好ましい。   Here, when slits are formed in the entire region of the boundary region between the product region and the peripheral region by slit processing, there is a possibility that positional displacement occurs during the molding press described later. In view of this, when there is a concern that the positional deviation occurs, as shown in FIG. 3, the product region support portion 9 may be left without performing slit processing of a partial region of the boundary region. However, if the product area support part is left, the glass cloth of the product area support part will be exposed from the end face of the substrate during the final outline processing, and the dust reduction effect will be reduced. In addition, it is preferable to suppress misalignment using an appropriate jig, rather than using a product region support.

次に、図1(d)で示す様に、内層銅箔上にプリプレグと銅箔、またはRCC等の成形プレスを行い、内層銅箔上に絶縁層3及び外層銅箔4を形成する。このとき、スリット加工により形成したスリット内には、成形プレスにて溶融された絶縁層樹脂が充填され硬化する。   Next, as shown in FIG.1 (d), shaping | molding presses, such as a prepreg and copper foil, or RCC, are performed on an inner layer copper foil, and the insulating layer 3 and the outer layer copper foil 4 are formed on an inner layer copper foil. At this time, the insulating layer resin melted by the molding press is filled in the slit formed by the slit processing and cured.

続いて、図2(e)で示す様に、外層銅箔に汎用のエッチング技術によって外層銅箔の所定の範囲に外層回路を形成する。
なお、外層回路の形成方法は、例えば、サブトラクティブ法やセミアディティブ法、フルアディティブ法など、いかなる方法であっても良い。
Subsequently, as shown in FIG. 2E, an outer layer circuit is formed on the outer layer copper foil in a predetermined range of the outer layer copper foil by a general-purpose etching technique.
Note that the outer layer circuit may be formed by any method such as a subtractive method, a semi-additive method, or a full additive method.

その後、図2(f)で示す様に、上記したスリットの中心線が外形加工線となる様に外形加工を行い、図2(g)で示す様なプリント配線基板を得ることができる。   Thereafter, as shown in FIG. 2F, the outer shape is processed so that the center line of the slit becomes the outer shape processing line, and a printed wiring board as shown in FIG. 2G can be obtained.

ここで、スリットの中心線が外形加工線となる様な外形加工を行うことによって、製品領域及び周辺領域の両者共にガラスクロスが端面から露出しないために、基板の外形加工時に発生するバリやケバ等のダストを抑制することができる。
なお、外形加工を行った後にはプリント配線基板の洗浄を行い、プリント配線基板表面に付着したダスト等を除去することを考慮すると、製品領域の端面からガラスクロスが露出せず、プリント配線基板の取り扱い時にプリント配線基板の端面からダストが発生しない様にすることができれば充分であり、必ずしも周辺領域の端面からガラスクロスが露出しない様にする必要は無い。但し、外形加工後にプリント配線基板の洗浄を行い、プリント配線基板表面に付着したダストを除去するとしても、外形加工時に発生するダストを少しでも抑えることは重要であり、製品領域の端面のみならず周辺領域の端面からもガラスクロスが露出しない様に、例えば、スリットの中心線が外形加工線となる様な外形加工等を行う方が好ましい。
Here, by performing external processing so that the center line of the slit becomes the external processing line, the glass cloth is not exposed from the end face in both the product region and the peripheral region. Etc. can be suppressed.
In addition, after performing the outer shape processing, cleaning the printed wiring board and considering removing dust adhered to the surface of the printed wiring board, the glass cloth is not exposed from the end face of the product area, and the printed wiring board It is sufficient that dust can be prevented from being generated from the end face of the printed wiring board during handling, and it is not always necessary to prevent the glass cloth from being exposed from the end face of the peripheral region. However, even if the printed wiring board is cleaned after outline processing to remove the dust adhering to the surface of the printed wiring board, it is important to suppress the dust generated during outline processing as much as possible, not only the end face of the product area. In order to prevent the glass cloth from being exposed even from the end face of the peripheral region, it is preferable to perform, for example, outer shape processing such that the center line of the slit becomes the outer shape processing line.

本発明を適用したプリント配線基板の製造方法では、プリント配線基板の外形加工時に発生するガラスクロスのバリやケバ等のダストを抑えることができ、ダストが原因となっていた薄膜層付きプリント配線基板の歩留りを向上させることができ、実装時の異物巻き込み、異物付着をも抑えることができる。   In the method for manufacturing a printed wiring board to which the present invention is applied, dust such as burrs and burrs on a glass cloth generated during external processing of the printed wiring board can be suppressed, and the printed wiring board with a thin film layer caused by the dust Yield can be improved, and foreign matter entrainment and foreign matter adhesion during mounting can be suppressed.

また、プリント配線基板側面が硬化した樹脂で覆われているため、プリント配線基板の外形寸法精度の向上を図ることができると共に、外形加工を行う領域はガラスクロスの無い樹脂部分であるために、例えばルータ加工や金型加工の場合には切削工具の寿命向上、レーザ加工の場合はそのレーザ出力を抑えた安定した加工が可能となる。   In addition, since the printed wiring board side surface is covered with a cured resin, it is possible to improve the external dimension accuracy of the printed wiring board, and the area to be processed outside is a resin part without a glass cloth. For example, in the case of router processing or die processing, the life of the cutting tool can be improved, and in the case of laser processing, stable processing can be performed while suppressing the laser output.

本発明を適用したプリント配線基板の製造方法を説明するための模式図(1)である。It is a schematic diagram (1) for demonstrating the manufacturing method of the printed wiring board to which this invention is applied. 本発明を適用したプリント配線基板の製造方法を説明するための模式図(2)である。It is a schematic diagram (2) for demonstrating the manufacturing method of the printed wiring board to which this invention is applied. スリット加工の変形例を説明するための模式的な平面図である。It is a typical top view for explaining the modification of slit processing. 従来のプリント配線基板の製造方法を説明するための模式図(1)であるIt is a schematic diagram (1) for demonstrating the manufacturing method of the conventional printed wiring board. 従来のプリント配線基板の製造方法を説明するための模式図(2)である。It is a schematic diagram (2) for demonstrating the manufacturing method of the conventional printed wiring board.

符号の説明Explanation of symbols

1 コア材
2 内層銅箔
3 絶縁層
4 外層銅箔
5 製品領域
6 周辺領域
8 スリット
9 製品領域支え部
DESCRIPTION OF SYMBOLS 1 Core material 2 Inner layer copper foil 3 Insulating layer 4 Outer layer copper foil 5 Product area 6 Peripheral area 8 Slit 9 Product area support part

Claims (4)

ガラス繊維を含む基板本体に第1の回路パターンを有する第1の配線層を形成する工程と、
前記基板本体の製品領域と製品領域外の周辺領域との中間部である境界領域の少なくとも一部にスリットを形成する工程と、
成形プレスによって前記第1の配線層に絶縁層を形成すると共に、同絶縁層を前記スリット内に充填する工程と、
前記絶縁層に第2の回路パターンを有する第2の配線層を形成する工程と、
これらの工程の後に、前記製品領域の外周の少なくとも一部に前記スリット内に充填した絶縁層が残存する様に、前記境界領域から分割する工程を備える
ことを特徴とする基板の製造方法。
Forming a first wiring layer having a first circuit pattern on a substrate body containing glass fibers;
Forming a slit in at least a part of a boundary region that is an intermediate portion between a product region of the substrate body and a peripheral region outside the product region;
Forming an insulating layer on the first wiring layer by a molding press and filling the insulating layer in the slit;
Forming a second wiring layer having a second circuit pattern on the insulating layer;
After these steps, the substrate is divided from the boundary region so that the insulating layer filled in the slit remains on at least a part of the outer periphery of the product region.
前記周辺領域の外周の少なくとも一部に前記スリット内に充填した絶縁層が残存する様に、前記境界領域から分割する
ことを特徴とする請求項1に記載の基板の製造方法。
The substrate manufacturing method according to claim 1, wherein the substrate is divided from the boundary region so that an insulating layer filled in the slit remains on at least a part of the outer periphery of the peripheral region.
前記スリットは、前記境界領域の全領域に形成する
ことを特徴とする請求項1に記載の基板の製造方法。
The said slit is formed in the whole area | region of the said boundary area. The manufacturing method of the board | substrate of Claim 1 characterized by the above-mentioned.
前記スリットは、前記境界領域の全領域に形成する
ことを特徴とする請求項2に記載の基板の製造方法。
The said slit is formed in the whole area | region of the said boundary area. The manufacturing method of the board | substrate of Claim 2 characterized by the above-mentioned.
JP2004155674A 2004-05-26 2004-05-26 Method for manufacturing board Pending JP2005340416A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Publications (1)

Publication Number Publication Date
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009152300A (en) * 2007-12-19 2009-07-09 Shinko Electric Ind Co Ltd Wiring substrate and its manufacturing method
WO2011010498A1 (en) * 2009-07-24 2011-01-27 イビデン株式会社 Wiring board and method for manufacturing same
JP2015095654A (en) * 2013-11-11 2015-05-18 サムソン エレクトロ−メカニックス カンパニーリミテッド. Printed circuit board and method of manufacturing the same
JP2016157982A (en) * 2016-05-23 2016-09-01 新光電気工業株式会社 Wiring board and method for manufacturing the same

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009152300A (en) * 2007-12-19 2009-07-09 Shinko Electric Ind Co Ltd Wiring substrate and its manufacturing method
KR101452515B1 (en) 2007-12-19 2014-10-21 신코 덴키 코교 가부시키가이샤 Wiring substrate and method of manufacturing the same
WO2011010498A1 (en) * 2009-07-24 2011-01-27 イビデン株式会社 Wiring board and method for manufacturing same
JP4684368B2 (en) * 2009-07-24 2011-05-18 イビデン株式会社 Wiring board and manufacturing method thereof
US8400782B2 (en) 2009-07-24 2013-03-19 Ibiden Co., Ltd. Wiring board and method for manufacturing the same
US8687380B2 (en) 2009-07-24 2014-04-01 Ibiden Co., Ltd. Wiring board and method for manufacturing the same
US8934262B2 (en) 2009-07-24 2015-01-13 Ibiden Co., Ltd. Wiring board and method for manufacturing the same
JP2015095654A (en) * 2013-11-11 2015-05-18 サムソン エレクトロ−メカニックス カンパニーリミテッド. Printed circuit board and method of manufacturing the same
JP2016157982A (en) * 2016-05-23 2016-09-01 新光電気工業株式会社 Wiring board and method for manufacturing the same

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